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GB/T20510—XXXX
ICS77.150.60
CCSH62
NationalStandardofthePeople’sRepublicofChina
GB/T20510-XXX
ReplacingGB/T20510-2017
IndiumTinOxideTargets
(Pre-reviewDraft)
Issuedby××××-××
Implementedby××
StandardizationAdministration
StateAdministrationforMarketRegulation
Issue
GB/TXXXX—XXXX
PAGE\*Arabic
11
GB/TXXXX—XXXX
PAGE\*Arabic
2
Preface
ThisdocumentisdraftedasperGB/T1.1-2020Directivesforstandardization—Part1:Rulesforthestructureanddraftingofstandardizingdocuments.
GB/T20510-2017IndiumTinOxideTargetsisreplacedbythisDocument.ComparedwithGB/T20510-2017,mainchangestechnicallyareasfollows.
ApplicationscopeischangedfromItisfortheindiumtinoxidetargets,consistingofIn2O3andSnO2=90:10wt.%toItisfortheindiumtinoxidetargetsconsistingofIn2O3andSnO2undercertainratio.
ThetermofKelvinBridgeisdeleted.(SeeChapter1inVersion2017).
ReferredStandardizedDocumentsisadded.(See5.2whileChapter2inVersion2017)
Contentofdensityisadded.(See3.2while3.2inVersion2017)
ClassificationmethodischangedfromasperdensitytoaspertheratioandnumbersofIndiumoxideandtinoxide.(See5.1.1while4.21.inVersion2017)
Requirementsformainchemicalcomponentarechanged.(See4.1inVersion2017)
Requirementsforphysicalpropertiesarechanged.(See5.3,while4.4inVersion2017)
Contentsofphysicalspecificationischanged.(See5.3while4.4inVersion2017)
SurfaceQualityischangedtoAppearanceQuality.(See5.4while4.5inVersion2017)
InternalQualityisadded.(See5.5)
Analyticalmethodsforchemicalcomponentsarechanged.(See6.1while5.1inVersion2017)
Inspectionitemsarechanged.(See6.3while5.3inVersion2017)
SomecontentsofthisDocumentmayberelatedtopatents.TheauthoritythatissuesthisDocumentshallnottakeonresponsibilityofpatents.
ItisproposedbytheChinaNon-FerrousMetalsIndustryAssociation.
ItisfiledbytheNationalNon-FerrousMetalsStandardizationTechnicalCommittees(SAC/TC243).
ItisdraftedmainlybyVitalThinFilmMaterials(Guangdong)LimitedCompany,ZhuzhouSmelterGroupCo.Ltd.,GuangxiCrystalUnionPhotoelectricMaterialsCo.,Ltd.,ShenzhenNonfemetCompany,ZhuzhouTorchAntaiNewMaterialsCo.,Ltd.,WuhuYingriTechnologyLimitedCompany,CNBM(Chengdu)OptoelectronicMaterialsCo.,LTD.,OMATAdvancedMaterialsCompany,HebeiHengboNewMaterialsTechnologyCo.Ltd.,FujianAcetronNewMaterialsCo.,Ltd,ZhongshanZLAdvancedMaterialsTechnology,ShanghaiUniversity,VitalMaterials.
Draftersareasfollows:
Historyrecordsofthisdocumentandthereplacedversionareasfollows:
Thefirstversionwasissuedin2006asGB/T20510-2006IndiumTinOxideTargets
Thefirstrevisedversionwasissuedin2017.
Thisisthesecondrevisedversion.
IndiumTinOxideTargets
1Scope
Thisdocumentstipulatesthetechnicalrequirements,testingmethods,rulesofinspection,logoandtags,packaging,transportation,storage,attachments,andorders.
Itisfortheindiumtinoxidetargets(abbreviatedtoITOhereinafter)consistingofIn2O3andSnO2undercertainratio,whichareappliedfortransparentconductivethinfilmasacorematerial.
2ReferredStandardizedDocuments
ThecontentsofthefollowingdocumentsconstitutethenecessaryprovisionsofthisDocumentbystandardizedquotations,wherethequoteddocumentswithdatesareapplicableforthisDocumentwhilethelatestversionsofthosewithoutdates,includingalltherevisedlists,areapplicableforthisDocument.
GB/T1551Testmethodformeasuringresistivityofmonocrystallinesilicon-In-linefour-pointprobeanddirectcurrenttwo-pointprobemethod
GB/T5163Sinteredmetalmaterials,excludinghardmetals-Permeablesinteredmetalmaterials-Determinationofdensity,oilcontent,andopenporosity
GB/T13298InspectionMethodofMicrostructureforMetals
GB/T16535Fineceramics(advancedceramics,advancedtechnicalceramics).Testmethodforlinearthermalexpansionofmonolithicceramicsbypush-rodtechnique
GB/T6569Fineceramics(advancedceramics,advancedtechnicalceramics)-Testmethodforflexuralstrengthofmonolithicceramicsatroomtemperature
SL499Standardtestmethodfordeterminingresidualstressesbythehole-drillingstraingagemethod
GB/T8170Rulesofroundingofffornumericalvalues&expressionandjudgementoflimitingvalues
3Terms&Definitions
ThetermsandtheirdefinitionsasfollowsareappliedinthisDocument.
3.1Bulkdensity
Materials’weightpervolume.
3.2Relativedensity
Theratioofthebulkdensityandtheoreticaldensity
Table1Theoreticaldensityofallnumbers
Number
Theoreticaldensity
ITO90
7.155
ITO93
7.163
ITO95
7.167
ITO97
7.172
ITO98
7.174
ITO99
7.177
4Types
ITOtargetshavetwotypes,namelyplanertargetsandrotatabletargets.TherearesixnumbersaspertheratioofIn2O3andSnO2,namelyITO90,ITO93,ITO95,ITO97,ITO98,ITO99.
5TechnicalRequirements
5.1ChemicalComponent
5.1.1ThemainchemicalcomponentshouldbeinlinewithTable2
Table2Themainchemicalcomponent
Number
(In2O3:SnO2)wt.%
ToleranceofTinoxide(%)
ITO90
90:10
±0.5
ITO93
93:7
±0.4
ITO95
95:5
±0.3
ITO97
97:3
±0.3
ITO98
98:2
±0.2
ITO99
99:1
±0.1
5.1.2Impurities
ITO’simpuritiesshouldbeuptothefollowingspecification.
Table3ITO’sImpurities
ContentofImpurities≤(×10-4)%
Fe
Al
Si
Cu
Pb
Cd
Ni
Cr
Tl
Fe
15
10
15
5
5
5
5
5
5
15
Thereisnorequirementforpurity,soherethereisnorulesfortotalimpurities.
5.1.3Others
BoththesupplierandthecustomershallnegotiateanddecideitwitheachotherwhenthereareotherspecialrequirementsforITO’sweightpercentageorimpurities..
5.2PhysicalProperties
5.2.1ITO’sphysicalpropertiesshouldbeinlinewithTable4
Table4ITO’sphysicalproperties
Number
Relativedensity(%)
(≥)
Resistivity(×10-4Ω·cm)(≤)
Linearexpansion(℃-1)(≤)
Flexurestrength(MPa)(≥)
Residualstress(MPa)(<)
Averagegrainsize(μm)(≤)
ITO90
99.6
1.6
9
150
10
10
ITO93
98.7
1.7
9
100
10
10
ITO95
98.6
1.8
9
80
20
20
ITO97
98.6
1.9
9
100
30
30
ITO98
98.0
3.0
9
80
30
30
ITO99
98.0
16
9
80
30
40
5.2.2BoththesupplierandthecustomershallnegotiateanddecideitwhenthereareotherrequirementsforITO‘sphysicalproperties.
5.3Physicalspecification
ITOhastwotypes,namelyplanertargetsandrotatabletargets.Boththesupplierandthecustomershallnegotiateanddecidethespecificationandtolerance.
5.4AppearanceQuality
5.4.1SurfaceroughnessofITO≤1.0μm.
5.4.2ITOshouldbegreyish-greenorashblackwithuniformcolor.
5.4.3ITOshouldbeflat,cleanandsmoothonthesurfacewithoutchipping,fingerprints,foreignmattersorcontamination.
5.4.4Porosity’sdiameterofITOisnomorethan0.3mmandnumberofporositypervolume≤5∕cm2.
5.5Product’sInternalQuality
Thereshouldbenocracksinternally.
6TestingMethods
6.1ChemicalComponentAnalysis
Itiscarriedoutbasedonthedecisionthatthesupplierandthecustomernegotiateitandmake.
6.2PhysicalProperties
6.2.1Relativedensity
ThebulkdensityiscarriedoutviaGB/T5163,andthentherelativedensityiscalculatedaccordingtothebulkdensityandtheoreticaldensity.
6.2.2Testingmethodsforresistivity
ItiscarriedoutviaGB/T1551.
6.2.3Linerexpansibility
ItiscarriedoutviaGB/T16535.
6.2.4Testingmethodsforflexuralstrength
ItiscarriedoutviaAGB/T6569.
6.2.5Testingmethodsforresidualstresses
ItiscarriedoutviaSL499.
6.2.6AverageGrainSize
ItiscarriedoutviaGB/T13298.
6.3PhysicalSpecification
ThephysicalspecificationofITOisdeterminedbycorrespondingprecisionmeasuringdevices.
6.4AppearanceQuality
Itisinspectedvisuallyorbyaroughnesstester.
6.5Product’sInternalQuality
Itistestedwithultrasonicequipmenttocheckoutdamages.
7InspectionRules
7.1Inspection&Acceptance
7.1.1ITOshouldbeinspectedbythesupplier’squalityantechnicalsupervisiondepartmenttoguaranteetheproductsareinlinewiththeDocumentororders.
7.1.2ThecostumershouldcheckouttheproductsreceivedaccordingtotheDocument.Thecostumershouldinformthesupplierin30daysuponthereceivingdateiftheinspectionresultisnotinlinewiththeDocumentortheorders(contracts).Boththetwopartiesshallnegotiateitwitheachotherandsolveit.Boththetwopartiesshalltakesamplestogetherwheneverthereisadisputeagainsttheinspectionresultsandthethirdauthoritypartyisinvolved.
7.2Batching
ITOinspectionsshouldbesentinbatcheswhichareconsistedofthesamemanufacturingprocessandthesamebatchofITOpowder.
7.3InspectionItems
InspectionitemsandsamplingshouldbeinlinewiththeregulationsonTable5.
Table5Inspectionitems,frequencyofsamplingandmethodsofsampling
Inspectionitem
Frequencyofsampling
methodsofsampling
Itemrequired
Itemofinspectionmethods
Chemicalcomponent
Eachbatch
NegotiatedanddecidedbythebothParties
5.1
6.1
Relativedensity
Eachbatch
Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,take3-4samplesof20mm*20mmwithalinearcuttingmachine,cuttingsamplesisometrically;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofbulkdensity.
5.2.1
6.2.1
Resistivity
Eachbatch
Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,take10rectanglesamplesof120mmlongwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofresistivity.
5.2.1
6.2.2
Linerexpansibility
Quarterlyinspection
Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,take5rectanglesampleswiththesamesizebyalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationoflinearexpansivity.
5.2.1
6.2.3
Flexuralstrength
Quarterlyinspection
Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,takesamplesrequiredwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofflexuralstrength.
5.2.1
6.2.4
Residualstrength
Quarterlyinspection
Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,takesamplesrequiredwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofresidualstrength.
5.2.1
6.2.5
Averagegrainsize
Quarterlyinspection
cleanthesamplesthataredonewiththedensityinspection,anddrythemwithtissuetoinspect
5.2.1
6.2.6
Physicalspecification
Eachpiece
Eachpiece
5.3
6.3
Appearancequality
Eachpiece
Eachpiece
5.4
6.4
Internalquality
Eachbatch
cleanthesamplesthataredonewiththedensityinspection,anddrythemwithtissuetoinspect
5.5
6.5
7.4DeterminationofInspectionResults
7.4.1ItiscarriedoutbyGB/T8170fortheroundingoffforvaluesoftheinspectionresultsandtodeterminethevaluesafterroundedoff.
7.4.2Thisproductisunqualifiediftheresultsofthechemicalcomponent,physicalproperties,internalqualityarenotinlinewiththeDocument.
7.4.3ThisproductisunqualifiedifthephysicalspecificationandappearancequalityarenotinlinewiththeDocument.
8Logo&Tags,Packaging,Transportation,Storage&Attachments
8.1Logo&Tags
EachpieceofITOshouldshowthefollowing:
productname;
productnumber;
specificationandsize;
netweight;
productiondate;
companyname.
8.2Packaging
EachpieceofITOshouldbevacuumedpackagedunderthecleancircumstanceandanti-vibrationshouldbeimplemented.
8.3Transportation&Storage
ITOshouldbestoredinacoolanddrypl
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