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排貨流程及策略介紹

DispatchflowandstrategyIntroductionContentDispatchPurpose&strategyTerminologyintroductionTraditionalmanualdispatchoperationflowNowDispatchingEngineoperationflowD-Engine’sBenefitBasicdispatchstrategyconceptD-Enginearchitecture&defaultdispatchstrategyOPI&D-EngineperformancedemoDispatchPurpose&strategyModelingintegrateddispatchruleindispatchingsysteminordertosystematized.Purpose:Achievemonthly/quarterlyproductionplan,createthemaximumrevenuereduceproductioncycletime,inventoryOntimedeliveryStrategy:EnhancelinebalanceBottleneckmachineutilization

MovetargetcontrolBackTerminologyICflowLot(晶圓批)WIP:Workinprogress(在製品)Move(晶片移動量)T/R:TurnRate(晶片週轉率)Cycletime(生產週期)WaferIn/Out(晶片投入量/晶片產出量)ProductionPlan(生產企劃)Lotpriorityclass(晶圓批優先權)BackICflowWaferstartWetT/FDiffPhotoEtchIMPWaferoutCMPBackWPMovedefinitionMove:晶片移動量Definition:PureMove=EffectiveMove….BackT/RDefinitionT/R:週轉率Definition:T/R=Move/WIPT/R=PassedStepscount/DayExample:

Back11/19Fab8Amove=677478pcs,WIP=88473pcs Fab8AT/R=677478/88473=7.66CycletimedefinitionT/RCycletime例如0.15um256MDDRTR/Day=6.5,totalstepcount=620T/Rcycletime=620/6.5=95dayOutputCycletime例如Lot12003/07/0107:30投入,2003/09/0107:30產出Outputcycletime=31+31=62dayIn-linecycletimeOP1flowC/T134產出投入投入->產出=1+3+4=8dayOP1->OP3=1+3=4dayOP2OP3Waitingtime+Holdtime+processingtime+transfertimeBackFabproductionPlanMasterproductionplanDailyAvginput/outputplanBack0.15um_S9*0.165um_NS*0.18um_N5*0.18um_N5*0.165um_NS*0.15um_S9*LotpriorityclassPriority:優先度Priorityclass:1:Q-timeshortlotsie:WJ->RGP2:UQTATLots.:SuperHotlots3:QTATLots:needtobehurryup.4:STDlotsneedtobequick.5:STDlots.6:STDlotscanbelittlelate.BackTraditionalmanualdispatchoperationflow

Flow

MFGMovetargetsupervisordailyproductionactionitempersonalexperiencereportsupportGroupleader/TEotherareasupervisorOperatorQueryOPIMFGManuMoveTargetNextNowD-EngineoperationflowDispatchinglotlistOperator

SelectthefirstlotUserDataSettingInterfaceOperationPrtD-EngineDBLotinformationEQPinformationRecipeinformationFlowinformation...supervisorNextdailyproductionactionitempersonalexperiencereportsupportD-EngineBenefit上線前上線後現場派工–現場派工訊息不直接傳遞–現場派工依人的不同而不同,沒有一定的模式現場派工訊息直接傳遞現場派工有一定的模式產品交期人工處理更改產品交期系統自動調整交期機台負荷機台負荷平均化不易全盤掌握系統自動調整機台負荷平均化BackBasicDispatchStrategy-1/13Example:LotpriorityforpriorityclassEQPALot2Lot1ReadyLot3SuperhotlothotlotNormallotExample:LotpriorityforduedateEQPALot2Lot1ReadyLot3Ahead:3.1dayAhead:1.1dayDelay:1.1dayNextBasicDispatchStrategy-2/13EQPAAReadyAAABTarget400pcsTarget0pcsD-Strategy:EQPAdispatchlothaveremainingtarget,Atypelotwillbefirstdispatched.Example:LotpriorityforMovetargetNextBasicDispatchStrategy-3/13Example:LotpriorityforQ-timeEQPBLot2Lot1ReadyLot3RemainQ-time:3.1hrsRemainQ-time:2.3hrsRemainQ-time:0.5hrsOP1flowQ-timeConstraint4hrOP2OP3EQPAReadyD-Strategy:EQPA’sWIPdispatch,willconsiderQ-WIPquantityifhaveoverEQPB’sloading.NextBasicDispatchStrategy-4/13EQPCEQPAEQPBRunDown/PM/S.S/processInhibitBBAAAReadyExample:LotpriorityforthenextOPofEQP’’sstatusNextBasicDispatchStrategy-5/13EQPCEQPAEQPBRunRunABBAAAReadyBAAAAAssumethatproductA,BprocesstimearethesameExample:LotpriorityforthesametypeofEQP’sWIPNextBasicDispatchStrategy-6/13EQPCEQPAEQPBRunRunABBAAAReadyBAAAAExample:LotpriorityforthefollowingWIP/StandardWIP121D-Strategy:LottypeAwillbedispatchfirstduetotheWIPofEQPAismoresmallerthanstandardWIPStandardWIPNextBasicDispatchStrategy-7/13EQPAEQPBABAReadyReadyEQPAEQPBAABOptimizeRunRunEQPAEQPBABARunReadyBadExample:LotpriorityforEQP’’SutilizationNextBasicDispatchStrategy-8/13EQPAEQPBABRunRunEQPAEQPBOptimizeRunEQPAEQPBBadVVVVVLotprocessingonloadportEmptyloadportcanreserveanotherlotVVVVVVVVVVExample:LotpriorityforassignlotbalanceNextBasicDispatchStrategy-9/13EQPAVC1C2RecipeARecipeA->C1chamberRecipeB->C2chamberOptimizeBadEQPAVVC1C2RecipeARecipeAEQPAVVC1C2RecipeARecipeBExample:LotpriorityforchamberutilizationRecipeARecipeBNextBasicDispatchStrategy-10/13EQPAMaxbatchsize=2lotsRecipeARecipeALotX’ferLotatStkBadOptimizeEQPARecipeARecipeAEQPARecipeARecipeAD-Strategy:EQPAWaitforanotherlotfinishedX’’fer,thendispatchtogetherExample:LotpriorityforbatchsizeNextBasicDispatchStrategy-11/13EQPAMaxbatchsize=4lotsRecipeARecipeARecipeARecipeARecipeBEQPARecipeARecipeARecipeARecipeARecipeBNormallotNormallotSuperhotlotNormallotExample:LotpriorityforbatchsizeNextBasicDispatchStrategy-12/13EQPAMaxbatchsize=4lotsRecipeARecipeARecipeANormallotOP3OP4OP5RecipeAOP2OP1CT=8hrTM=4Because¾¾>4/(4+8)D-strategy:EQPAdon’twaitforanotherlot,dispatchcurrentlotExample:LotpriorityforoptimizebatchsizeNextBasicDispatchStrategy-13/13EQPARecipeARecipeARecipeARecipechangeneedtotake15minsetuptime.D-strategy:EQPAdispatchnextlotfolloweduppre-lot’srecipe.RecipeBRecipeBRecipeBVRecipeARecipeAExample:LotpriorityforsamerecipecontrolbackNewD-EngineSystemArchitectureissueSACSAC00~04Rule

ServerEXT/IFLotprtyfile1.5hrLotprtyfile1.5hrAC-RACLotdb:1minOhters:5minEQPTCSCRWhat’’sNextOPIWhat’’sNextFATX101PriorityServerLotPriorityTableBeupdatedevery15minsInquiryLotPriorityNewD-EngineWMB:LotListPEC:KeepPMCchangelot’’spriorityclassI/FKeepSectionPriorityFA:sortagainbyQ-Time=>sortingPEC:Step6Q-Timeissue…….FA:What’snextnormalrule:reserved,formbatch,nearbystocker(FA:mustkeepwherenextlogic)=>ByEQcharacteristic,ifnocapacityissue,don’tapplyWMBrulefeedforwardrule.Lotcheck(route,recipe,tool)PEC:AskMFGrunby““priority”TCSEQ:sortby“priority”toshowlotlistLog(forTargetHitRate)LotList先先紀錄在NewD-EngineWMBrule:WIP/MoveBalanceKeeptotallinebalanceandprocessthemostdelaylotfirst,tocompletemovetargetateachprocesssteps,finallyachievemaximumoutputandontimedelivery.SGSloadingbalanceruleEquipmentspriortoSGSoperationstepsmusthelptobalancetheloadingofSGSscannersforreducetheimpactofkeyscanner’sproductivity.GeneralRule:---appliedtoallequipmentgroupsFactorsWIPbalancen-HrMovetargetLotclassOutputcutlineDemandduedateRemaincycletimeSGSWIPSGSCapacityNextCR<1: meansthelotisdelayed,andhashigherprioritytobeprocessedCR>1: meansthelotisahead,andhaslowerpriorityIf>1LowHighNotyetCompleteSGSLoadingCriticalRatioH.LPushNormalHighNormalLowYesNotyetCompleteHighLowIf<=1LowHighNotyetCompleteSpecialLotSectionPriorityCutLinePriorityMoveTargetWIPBalanceSGSLoadingCriticalRatioGeneralrulesummary:SortingCriteriaCR1=(3/20-3/10)/11=0.91<1CR2=(3/22-3/10)/11=1.09>1Priority:L1>L2Now3/10Due13/20Due23/22L1L2StdCT=11dayYesRemainingQ-time<6hrsBackGeneralRule:SectionPrioritysettingManualsettingtoraiseorlowerpriorityoftheWIPincertainsectionrange.Byproduct,startOPcode,endOPcode,priority,quantityortimeperiodBykey#,startOPcode,endOPcode,priorityStartOPcodeGS-XLXX1WJ-WL4A1DA-DLLP1QE-DLKF3DF-SLS92QP-PLKX3WJ-WL4D1MZ-SLS11DP-DLCR1QW-PLK51EndOPcode256MDDRHigherpriorityFromWJ-WL4A1toDP-DLCR1Quantity800pcs(orfrom02/287:30to2/297:30)256MDDRSelectedsectionBackMonthendCTCutlineprioritythismonth,upcoming2monthcutline&UTTcutlineIfdelay,higherprioritya.today到月月底還差差2500pcsd.由由cutline往後後找到超超前一天天STD.CT的位位置Torunwhichlotfirst,accordingtoM1processb.Then把WIP由799往往前累加加到2500pcs為其其cutlinec.Checkcutlinelotdelaystatus1stmonth2ndmonth3ndmonthLotlist11/3031,000pcs12/3035,000pcs1/3033,000pcsGeneralRule:WIPBalance*ConsiderupstreamanddownstreamWIPofcertainmachine110799STDWIP10515911IAPWI3AP1IAPWI4BD1上游堆貨且下下游lowWIP的step優先run因為LBratioofI4BD1>I3AP1,soI4BD1的的lot優優先run??Run幾個==>依Excelmovetarget????Run哪幾個==>依依CriticalRation-hrtarget在維持linebalance的情況下,去rundelay最嚴重重的lot*LineBalanceRatio=(UpStreamSTDWIPxWeight)(UpStreamActWIPxWeight)(DownStreamACTWIPxWeight)(DownStreamSTDWIPxWeight)X若沒有STDWIP,,則LBRatio=1,且出warningreport若DownStreamActWIP=0,則LBRatio=10000Largertheratio,higherthepriority往前16hr,往後16hrLineBalanceRatioUpstreamWeightWeightofI4BD1=(16-0)/16=1WeightofP4K31=(16-4)/16=0.75WeightofP4811=(16-4-8)/16=0.25WeightofW3WC1=(16-4-8-4)/16=0110799STDWIP10515813IAI3AP1IAI4BD1往前16hr,往後16hr1296484P4K31P4811W3WC1W41T1P481AP4KKACT=DownstreamWeightWeightofW4WT1=0.6WeightofP481A=0.3WeightofP4KKA=0.1*LineBalanceRatio=(UpStreamSTDWIPxWeight)(UpStreamActWIPxWeight)(DownStreamACTWIPxWeight)(DownStreamSTDWIPxWeight)XLBratioofI4BD1=defineupstreamanddownstreamstepandit’sweightHowmanystepforupstreamanddownstream?BaseonCycletime==>withinCT16hrDifferentWeightnearerstepmoreweight,farthersteplessweightWeight=(16hr–CT)/16若沒有STDCT,則先先暫訂8站,,且出warningreport;另外需需設計可供user設定定“16hrs與N站站”的UIPS:(600/60)/24*16=8WeightofWIPBalanceStepiWeight0.6DownStreamWIPUpStreamWIPCT=16hrsGeneralRule:MoveBalanceThroughputThethroughputratesofeachoperationstepshadbeendesignedtobeapproximatelyequivalent.Ingenerally,thethroughputofdifferentequipmentgroupsisinproportiontothenumberofprocessstepsusingthatequipmenttype.Operation:123456789Eqp.Type:ACBACADCA:unitthroughputrateofeachoperationEqp.Type:ABCDBackGeneralRule:MoveBalancen-HrMoveControlOPcoden-Hrtargetcontroltokeepproductionlinemovebalance,preventresourcesareallocatedoncertainoperationstep.Productcodetargetcontroltomakesureeachproducttargetcanbecompleted.FlowTargetbyTargetbyProductOP_CodeEQP_G1P1P2P3WIPTargetCR1<CR2<CR3P3P2P1OP_CodeTargetP1P2P3SpecialWithinDailyTargetOverTargetSHL/HL/Tier:WIPBalance n-HrtargetOP1OP2OP3OP1OP2OP3SHL/HLOP1OP2OP3OP1OP2OP3OP1OP2OP3n-HrTargetProd.TargetNextIncludestep4–SGSdispatchingStep0Step0.5Step0.7Step1Step2Step3Step4Loading>1Loading<=1BalancetheloadingonpxmachineNonbottleneckmachinemusthelptokeepbottleneckefficiencyPreventthebottleneckidlewhichisduetotheLoadingBias(SGS)SGSToolLoading=CTAvailableWIPCTAvailableCapacityStep4:SGSloading1FTGBS1BBL2BPX202PX203PX204PX205PX301PX202PX203PX204PX205PX301PX202PX203PX204PX205PX301PX202PX203PX204PX205PX301PX202PX203PX204PX205PX301PX202PX203PX204PX205PX30123day

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