SZT-2说明书复习过程

1、Good is good, but better carries it.精益求精，善益求善。SZT-2说明书-SZT-2自动四探针测试仪使用说明书一概述SZT-2自动四探针测试仪是运用四探针原理的多用途综合测试装置，它可以测量片状、块状半导体材料的径向和轴向的电阻率，测量扩散层的薄层电阻（亦称方块电阻）。换上特制的四探针测试夹具，还可以对金属导体的低、中值电阻进行测量。仪器由主机、自动测试架等部分组成，测试结果由数字表头直接显示。主机主要由高灵敏度数字测量系统和高稳定性横流源组成。自动测试架由步进电机进行精确控制，着力均匀，测试压力一致性好，大大提高测量的可重现性；测试探头采用宝石导向轴套和高

2、耐磨炭化钨探针制成，故定位准确、游移率小、寿命长。仪器适用于半导体材料厂、半导体器件厂、科研单位、高等院校对半导体材料的电阻性能的测试。二技术参数测量范围电阻率：10-3105cm方块电阻：10-4105电阻：10-4105可测半导体材料尺寸直径：15130mm长（或高）度：400mm测量方向轴向、径向均可横流源输出：10uA；100uA；1mA；10mA；100mA误差：0.5四探针测试探头探针间距：1mm游离率：1.0探针：炭化钨，0.5mm电源AC220V50Hz三使用方法首先连接好测试架两个插头，打开电源，等液晶显示“就绪”时，就可以对机器进行设置。首先按“Menu”键，出现一个菜单，

3、功能分别为：1。测试功能设定：用于决定测试模式，分别为“电阻率测试”，“方块电阻测试”和“电阻测试”根据需要选择（开机默认为电阻率档）。2。测试电流设定：有5档测试电流可供选择，直接按电流前的数字键就可以。在设定好测试电流后，每次测试，仪器会使用设定好的数字提供电流，如果设置电流过大，仪器会自动降低测试电流；如果设置电流过小，考虑到样本安全问题，仪器并不自动增加测试电流，则可能测试失败，此时，需按菜单键重新选择匹配的电流（如下：）。测量时，预估的样品阻值范围应该选择相对应的电流范围，关系如下表：电阻率范围（cm）电流档0.012100mA0.0080.610mA0.4601mA40120010

4、0uA80010uASZT-2测试电压通过电流自动校正，大大减少了用户对电压档位选择的烦琐的操作，规避了测试风险。3。修正系数设定：普通版本客户可根据所测物体的厚度在修正系数表中查取相应的数据进行修正。如所测物体批量厚度一致，查表得出修正系数后可通过点击：菜单键、选择3；输入所查系数，然后测试，屏幕上给出的数字则为修正后的值，直至此批厚度相同的测试物完成测试为止，不用重复查证、操作。可大大提高测试效率。4电阻测量；一，将测试架上的探头输入插头拔出，更换成带有四只鳄鱼夹的四线五芯插头，（注意：电机控制插头保持原样，不能拔出。），红塑料套的鳄鱼夹为恒流源电流输出线，黑塑料套的鳄鱼夹为信号电压输入线

5、。二，按菜单键，使液晶显示屏显示菜单，按“1”键，选择“测试功能”中的“电阻测量”。三，再按菜单键，选择“2”电流设定，可根据被测电阻，估计阻值选择合适的测试电流，如无法估出被测电阻的阻值时，只能从最小的电流开始，逐项设定并试测，直到测出结果为止。被测电阻红色夹子黑色夹子红色夹子夹子连接方法示意图附：修正系数表：附录1A样品厚度修正系数G（EQF(W,S)）样品厚度较薄：EQF(W,S)=0.0011见表5W：样品厚度（m）：S：探针间距（mm）W/SW01234567890.000.010.020.030.040.050.060.070.080.090.100.110.120.130.140

6、.150.160.170.180.190.200.210.220.230102030405060708090100110120130140150160170180190200210220230.000.007.014.022.029.036.043.051.058.065.072.079.087.094.101.108.115.123.130.137.144.151.159.166.001.008.015.022.030.037.044.051.058.066.073.080.087.095.102.109.116.123.131.138.145.152.159.167.001.009.016

7、.023.030.038.045.052.059.066.074.081.088.095.102.110.117.124.131.139.145.153.160.167.002.009.017.024.031.038.045.053.060.067.074.082.089.096.103.110.118.125.132.139.146.154.161.168.003.010.017.025.032.039.046.053.061.068.075.082.089.097.104.111.118.126.133.140.147.154.162.169.004.011.018.025.032.040

8、.047.054.061.069.076.083.090.097.105.112.119.126.133.141.148.155.162.170.004.012.019.026.033.040.048.055.062.069.077.084.091.098.105.113.120.127.134.141.149.156.163.170.005.012.019.027.034.041.048.056.063.070.077.084.092.099.106.113.120.128.135.142.149.157.164.171.006.013.020.027.035.042.049.056.063

9、.071.078.085.092.100.107.114.121.128.136.143.150.157.164.172.006.014.021.028.035.043.050.057.064.071.079.086.093.100.107.115.122.129.136.144.151.158.165.172W/SW01234567890.240.250.260.270.280.290.300.310.320.330.340.350.360.370.380.390.400.410.420.430.440.450.460.470.480.490.502402502602702802903003

10、10320330340350360370380390400410420430440450460470480490500.173.180.188.1953202.209.216.224.231.238.245.252.260.267.274.281.288.296.303.310.317.324.331.338.346.353.360.174.181.188.195.203.210.217.224.232.239.246.253.260.268.275.282.289.296.303.311.318.325.332.339.346.353.360.175.182.189.19.203.211.2

11、18.225.232.239.247.254.261.268.275.283.290.297.304.311.319.326.333.340.347.354.361.175.183.190.197.204.211.219.226.233.240.247.255.262.269.276.283.291.298.305.312.319.326.333.341.348.355.362.176.183.190.198.205.212.219.227.234.241.248.255.263.270.277.284.291.298.306.313.320.327.334.341.348.355.363.1

12、77.184.191.199.205.213.220.227.234.242.249.256.263.270.278.285.292.299.306.314.321.328.335.342.349.356.363.177.185.192.199.206.214.221.228.235.242.250.257.264.271.278.286.293.300.307.314.321.329.336.343.350.357.364.178.185.193.200.207.214.221.229.236.243.250.257.265.272.279.286.293.301.308.315.323.3

13、29.336.343.351.358.365.197.186.193.201.208.215.222.229.237.244.251.258.265.273.280.287.294.301.308.316.323.330.337.344.351.358.365.180.187.194.201.208.216.223.230.237.245.252.259.266.273.281.289.295.302.309.316.324.331.338.345.352.3593.68W/SW01234567890.510.520.530.540.550560.570.580.590.600.610.620

14、.630.640.650.660.670.680.690.700.710.720.730.740.750.760.77510520530540550560570580590600610620630640650660670680690700710720730740750760770.367.374.381.388.395.402.409.416.422.429.436.443.450.456.463.470.476.483.489.496.502.508.515.521.527.533.540.368.375.382.389.396.402.409.416.423.430.437.444.450

15、.457.464.470.477.483.490.496.503.509.516.522.528.534.540.368.375.382.389.396.403.410.417.424.431.437.444.451.458.464.471.477.484.491.497.503.510.516.522.529.535.541.369.376.383.390.397.404.411.418.425.431.438.445.452.458.465.472.478.485.491.498.504.510.517.523.529.535.541.370.377.384.391.398.405.411

16、.418.425.432.439.446.452.459.466.472.479.485.492.498.505.511.517.524.530.536.542.370.377.384.391.398.405.412.419.426.433.439.446.453.460.466.473.479.486.492.499.505.512.518524.530.537.543.371.378.385.392.399.406.413.420.427.433.440.447.454.460.467.474.480.487.493.500.506.512.519.525.531.537.543372.3

17、79.386.393.400.407.414.420.427.434.441448454461.468.474.481.488.494.500.507.513.519.525.532.538.544372.379.386.393.400.407.414.421.428.435.442.448.455.462.468.475.481.488.494.501.507.514.520.526.532.538.544.373.380.387.394.401.408.415.422.429.435.442.449.456.462.469.476.482.489.495.501.508.514.520.5

18、27.533.539.545W/SW01234567890.780.790.800.810.820.830.840.850.860.870.880.890.900.910.920.930.940.950.960.970.980.991.007807908008108208308408508608708808909009109209309409509609709809901000.546.552.558.564.569.575.581.587.592.598.603.609.614.619.625.630.635.640.645.650.655.660.665.546.552.558.564.5

19、70.576.581.587.593.598.604.609.615.620.625.630.636.641.646.651.656.660.547.553.559.565.571.576.582.588.593.599.604.610.615.621.626631.636.641.646.651.656.661.547.553.559.565.571.577.583.588.594.599.605.610.616.621.626.631.637.642.647.652.657.661.548.554.560.565.572.577.583.589.594.600.605.611.616.62

20、2.627.632.637.642.647.652.657.662.549.555.561.567.573.579.584590.596.601.607.612.617.623.628.633.638.643.648.653.658.663.549.555.561.567.573.579.584.590.596.601.607.612.617.623.628.633.638.643.648.653.658.663.550.556.562.568.573.579.585.591.596.602.607.613.618.623.628.634.639.644.649.654.658.663.550

21、.556.562.568.574.580.585.591.597.602.608.613.618.624.629.634.639.644.649.654.658.664.551.557.563.569.575.580.586.592.597.603.608.614.619.624.629.635.640.645.650.655.659.664附录1B样品厚度修正系数G（EQF(W,S)）样品厚度较厚：EQF(W,S)=0.013.49见表W：样品厚度（m）：S：探针间距（mm）W/S0.000.010.020.030.040.050.060.070.080.090.000.100.200.30

22、0.400.500.600.700.800.901.001.101.201.301.401.501.601.701.801.900.00000.07210.14430.21640.28840.35970.42930.49570.55760.61410.66470.70930.74820.78170.81060.83520.85630.87430.88970.90290.00720.07940.15150.22360.29560.36680.43610.50210.56350.61940.66940.71340.75180.78480.81320.83750.83820.87600.89110.

23、90410.01440.08660.15870.23080.30270.37380.44290.50850.56940.62470.67410.71750.75530.78790.81580.83970.86010.87760.89250.90530.02160.09380.16590.23800.30990.38080.44960.51480.57510.62990.67870.72150.75890.79080.81840.84190.86200.87920.89390.90640.02890.10100.17310.24520.31710.38780.45630.52100.58090.

24、63510.68330.72550.76220.79380.82090.84410.86390.88080.89520.90760.03610.10820.18030.25240.32420.39480.46300.52730.58660.64020.68770.72940.76660.79670.82340.84620.86570.88230.89650.90870.04330.11540.18750.25960.33130.40180.46960.53340.59220.64520.69220.73330.76890.79960.82580.84830.86750.88380.89780.

25、90990.05050.12260.19480.26680.33850.40870.47620.53960.59780.65010.69650.73710.71220.80240.82820.85030.86920.88530.89910.91100.05770.12980.20200.27400.34560.41560.48270.54560.60330.65510.70090.74080.77540.80520.83060.85240.87090.88680.90040.91210.06490.13710.20920.28120.35260.42240.48920.55160.60870.

26、65990.70510.74450.77860.80790.83290.85440.87260.88830.90160.9131W/S0.000.010.020.030.040.050.060.070.080.092.002.102.202.302.402.502.602.702.802.903.003.103.203.303.400.91420.92390.93230.93960.94590.95140.95620.96040.96410.96740.97030.97280.97510.97720.97900.91520.92480.93310.94020.94020.95190.95660

27、.96080.96440.96770.97050.97310.97530.97740.97920.91620.92570.93380.94090.94700.95240.95710.96120.96480.96800.97080.97330.97560.97760.97940.91720.92660.93460.94150.94760.95290.95750.96160.96520.96830.97110.97360.97580.97780.97950.91820.92740.93530.94220.94820.95340.95790.96190.96550.96860.97130.97380

28、.97600.97790.97970.91920.92830.93610.94280.94870.95380.95830.96230.96580.96890.97160.97400.97620.97810.97990.92020.92910.93680.94350.94930.95430.95880.96270.96610.96920.97180.97420.97640.97830.98000.92110.92990.93750.94410.94980.95480.95920.96300.96640.96940.97210.97450.97660.97850.98020.92210.93070

29、.93820.94470.95030.95530.95960.96340.96670.96970.97240.97470.97680.97870.98030.92300.93150.93890.94530.95090.95570.96000.96370.96710.97000.97260.97490.97700.97880.9805如需所测值更精确，请查下表附录2样品形状和测量位置的修正系数D（EQF(d,s)）（1）圆形薄片直径d(mm)探针位置距圆心位置距边缘位置0mm1/4d5mm4mm3mm2mm202325273032353840424550555760636570758090100

30、0.97880.98390.98630.98820.99040.99160.99290.99400.99460.99510.99570.99650.99710.99730.99760.99780.99790.99820.99850.99860.99890.99910.96330.97190.97610.97940.98320.98520.98760.98940.99040.99130.99240.99380.99190.99520.99570.99610.99630.99680.99720.99760.99810.99840.96330.96620.96770.96880.97020.9709

31、0.97180.97250.97290.97330.97380.97440.97490.97510.97520.97550.97570.97600.97620.97640.97680.97700.95080.95380.95530.95650.95800.95880.95980.96060.96100.96140.96200.96270.96330.96350.96380.96400.96410.96450.96480.96500.96540.96570.92630.92950.93120.93250.93420.93510.93620.93710.93770.93820.94880.94970.94030.94060.94090.94120.94140.94180.94210.94240.94290.94330.87020.87390.87580.87730.87930.88040.88170.88290.88350.88410.88490.88590.88680.88710.88750.88790.88810.88860.88910.88950.89010.8904（2）矩形薄片正方形矩形d/sa/d=1a