EBL基本组成及工作原理

宋晨之20150202EBL基本结构与工作原理1精选2021版课件EBL=ElectronBeamLithography=电子束光刻2精选2021版课件3精选2021版课件一、电子束曝光系统结构4精选2021版课件5精选2021版课件column6精选2021版课件电子源的分类

直热式W，2700K热发射电子源旁热式LaB6，1800K电子源

热场发射ZrO/W，1800K场发射电子源

冷场发射7精选2021版课件四种电子源对比电子源三个关键参数：有效源尺寸，亮度，电子能量分布热发射源能量分布大，聚焦斑束大，产生严重相差。冷场致发射稳定性差，对真空要求高。故EBL系统选用热场致发射源。8精选2021版课件旁热式&热场致电子源结构示意图阳地超高电场阴阴阳9精选2021版课件EBL中电子源结构示意图10精选2021版课件几个牌子的EBL性能参数11精选2021版课件二次电子探测器Detector12精选2021版课件Illustrationswithdifferentsignalsources13精选2021版课件14精选2021版课件ImagingbymeansofSE2detector:>5mmWDImagingbymeansofInlensdetector:<=10mmWD(dependingonhighvoltagesetting)ImagingbymeansofBSEdetector:8-10mm(OptimumoftheBSelectrondetection)15精选2021版课件InfluenceofAccelerationVoltage16精选2021版课件InfluenceofBeamCurrent17精选2021版课件InfluenceofWorkingDistance18精选2021版课件二、坐标系的对准19精选2021版课件建立坐标系20精选2021版课件写场对准21精选2021版课件三、曝光22精选2021版课件扫描模式23精选2021版课件Exposureparameter24精选2021版课件Areadose25精选2021版课件Linedose26精选2021版课件Dotdoes27精选2021版课件Areamode28精选2021版课件29精选2021版课件Linemode30精选2021版课件Circlemode31精选2021版课件ExposurestrategiesUsedbyRaith32精选2021版课件四、临近效应33精选2021版课件VisualizationofEnergyDepositionGrid(EDG)34精选2021版课件高能电子打断PMMA内高分子链示意图35精选2021版课件前散射和背散射随PMMA厚度的变化关系36精选2021版课件MonteCarloSimulations37精选2021版课件Energydeposition38精选2021版课件ProximityfunctiontrajectoriesenergydepositionenergydistributiondoubleGaussianProximityfunctionproximityfunctionhasthesame

shapeasenergydistribution

withrespecttolateraldistancesbut:nodirectrelationbetween

energyandPE!(it’sjustamodel)39精选2021版课件Influence