TFT工艺流程中中英文标准名称

.TFT工艺流程中英文标准名称ArrayProcessFlow阵列段工艺流程Input投料Unpacking拆包装Initialclean预备清洗Particlecount尘埃粒子测试Gate栅电极层Cleanbeforedepo成膜前清洗Gate(Mo/Alalloy)Filmdepo栅电极成膜RSmeter电阻测量MacroInspection宏观检查CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry(VCD)光刻胶低压干燥PRsoftbake前烘Expose曝光TitlerExpose/EdgeExpose打标/边缘曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Mic/MacInspection宏微观检查CDafterdevelop显影后关键尺寸检查Totalpitch长寸测量GateWetetch栅电极湿刻Contactangle接触角测量PRstrip光刻胶剥离CDafteretch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查LaserRepair激光修补Active层Cleanbeforedepo成膜前清洗ActivefilmdepoActive成膜AOI自动光学检查MacroInspection宏观检查ThicknessMeasurement厚度测量CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布

PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Mic/MacInspection宏微观检查ActivefilmDryetch&AshingActive膜干刻与灰化ThicknessMeasurement厚度测量PRstrip光刻胶剥离AEI刻蚀后自动光学检查Mic/MacroInspection宏微观检查S/D源/漏电极层Cleanbeforedepo成膜前清洗S/DMofilmdepo源/漏电极成膜RSmeter电阻测量MACROInspection宏观检查CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Edgeexpose边缘曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查MIC/MACInspection宏微观检查CDafterdevelop显影后关键尺寸检查Hardbakebyoven烘炉坚膜S/DMoWetetch源电极/漏电极湿刻n+a-SiDryetchn+高掺杂膜干刻PRstrip光刻胶剥离ThicknessMeasurement厚度测量CDafteretch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查CleanbeforeO/Stest短路/开路测试前清洗Open/ShortTest短路/开路测试Cleanbeforedepo成膜前清洗Pass'nfilmdepo保护膜成膜

Passivation保护层AOI自动光学检查MACROInspection宏观检查ThicknessMeasurement厚度测量CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Edgeexpose边缘曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Micro/MacroInspection宏微观检查SinXDryetch&ASHING氮化硅干刻与灰化PRstrip光刻胶剥离AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查ITOITO层CleanbeforePR成膜前清洗a-ITOfilmdepoITO成膜RSmeter电阻测试Anneal煺火MacroInspection宏观检查CleanbeforePR涂胶前清洗Prebake预烘PRCoating光刻胶涂布PRvacuumdry光刻胶低压干燥PRsoftbake前烘Expose曝光Develop显影PRhardbake坚膜ADI显影后自动光学检查Micro/MacroInspection宏微观检查ITOfilmetchITO膜湿刻PRstrip光刻胶剥离AEI刻蚀后自动光学检查Micro/MacroInspection宏微观检查FinalE/T最终电测Anneal煺火Arraytest阵列测试Arrayrepair阵列修补

TEGtestTEG测试Sort分级CellProcessflow制盒段工艺流程CFInput彩膜投料CFInitialClean彩膜预备清洗CFAOI彩膜自动光学检查CFSort彩膜分级PI配向膜CleanbeforePI配向膜涂布前清洗PIPrint配向膜涂布Pre-cure预固化PIInspection配向膜检查PIThickness A/，,一，，，，山，■a■一 1 ARi： … ，一配向膜厚度测量MeasurementMain-cure固化PIrework配向膜返工ODFCF&TFTMatchingCF&TFT匹配Rubbing配向摩擦RubbingInspection摩擦检查Loader&Unloader上料机/下料机Buffer缓冲器CSTBuffer工装栏缓冲器Rotation/CoolingUnit旋转/冷却单元TurnAlignUnit旋转/对位单元TurnOverUnit翻转单元AfterRubbingCleaner摩擦后清洗SpacerSpray衬垫球散布SpacerCounter衬垫球计数Spacerrework衬垫球返工SpacerCure衬垫球附着固化ShortDispense导电胶涂布SealantDispense边框胶涂布SealInspection边框胶检查LCDispense液晶滴下VacuumAssembly真空贴合UVCure紫外线固化Mis-alignmentcheck错位检查SealOven边框胶热固化EyeInspection目视检查CellgapMeasurement盒厚测试Cutting切割1/4(1/6)SheetCutting,1/4(1/6)切割StickCutting,切条

CellCutting切粒VisualTestVisual测试ECPEdgeGrind磨边Dippingclean浸泡式清洗CleanbeforePol贴片前清洗PolAttach贴片PolInspection贴片检查Polrework贴片返工AutoClaveAutoClave消泡LaserLaserTrimmer激光切线TrimmerTest测u试GrossTest终检Repair修补Binsorter分级OQCTest出货检查Store货栈

ModuleProcessFlow模块段工艺流程COGPadcleaning端子清洗ICBondingIC邦定MicroscopeInspection镜检Adhesivetest自动光学检查FOGACFAttachingACF粘贴FOGBondingFOG邦定MicroscopeInspection镜检Peelingstrengthtest拉力测试ETtest1电测1ICorFPCRepair修补UVgluesealing封胶FPCreinforcement补强UVgluecuringUV胶固化Assembly组装ETtest2电测2anti-ultraviolettapeattaching遮光胶带粘贴protectedtapeattaching保护胶带粘贴Backlightassembly背光源组装Backlightsoldering背光源焊接Touchpanelassembly触摸屏组装FinalETtest最终电测Rework返工Aging老化QCtestQC检验Codeprinting喷码Packing包装OQCTest出货检验Finishedgoodshipment合格品出货CIMname集成控制系统名称CIM计算机集成制造系统CIMSystem计算机集成制造系统ManufacturingExecutionSystem(MES)制造执行系统（MESPreventiveMaintenanceSystem(PMS)设备预防保养系统（PMSStatisticalProcessControl(SPC)统计过程管理（SPCEquipmentAutomationProgram(EAP)设备自动化（EAP）Report报表EngineeringDataAnalysis(EDA)工程数据分析（EDAFinishedGoodManagementSystem(FGMS)成品管理系统（FGM$Product产品Glass玻璃基板Panel面板ProcessFlow工艺流程Operation操作EDC工程数据收集Equipment设备Chamber腔体Unit单体SubUnit副单体Port端口OIC(OperatorInterfaceClient)操作者界面EDB工程数据库FGMS成品管理系统Dispatcher派货Create建立Start下线Scrap报废Unscrap取消保废Complete完成Ship出货Unship取消出货Receive收料TrackIn入账TrackOut出账Wait等待Hold滞留Release释放Rework返工Vehicle搬运车Robot机械手AGV(AutomaticGuidedVehicle)自动搬运车MGV(ManualGuidedVehicle)人工搬运车Cleanlifter净化电梯LIM(LinearInductionMotor)Carrier线性感应马达传送载具OHS(OverheadHandlingSystem)天车搬送系统Stocker(cleandepot) 工装篮存放架

Battery电池Bay 作业区Inter-bay作业区和作业区之间Intra-bay作业区之内Bumper减震缓冲器Charger充电器Controller控制器Conveyor传送带Crane吊车（在Stocker内）FFU(FanFilterUnit)风扇过滤器Host主机I/O(Input/Output)输入/输出IR(Infra-Red)红外线IRIF(Infra-RedInterface)红外接口Load上料Unload下料Magnetictape磁条（AGV路径所使用的磁条）Retrieve检索RTM(RotaryTransferMachine)旋转传送机构SCARAarmAGV专送臂Reset重新设定Transportation传输Recipe工艺参数的组合Stockout将工装篮取出货栈Request要求，请求Transfer传送,运送Instruction命令，指令Select选择Cancel取消Operation作业,操作Support支援,支持Process工艺Start开始Batch批量Lot批（指生产线的在制品或产品控制单位）ID(Identity)识别码(如LotIDorChipID)Sheet片（Array区玻璃基版计数单位）Inspection检验Defect缺陷Hold滞留Release释放Equipment设备（简称为EQPTool工具，机台WIP(WorkInProcess)在制品（工艺在制品）Maintenance维修保养Cassette工装篮（阵列段），卡匣（制盒段及模块段）Empty空的Reserve预备Report报告Rework返工Logon登录，入系统Logoff注销登录，离开系统Note批注Unpackingline拆包线Unpacker拆包机Glassconveyor玻璃传送带InitialCleaner预清洗Unloader下料机CassetteManualGuideVehicle(MGV)工装篮人工搬运车ArrayCassetteArray工装篮ODFCassetteODFX装篮AutomatedMaterial HandlingSystem(AMHS)自动物料搬运系统CleanStocker(STK)洁净工装篮存放架（STKOverheadHandlingSystem(OHS)天车搬送系统（OHSMaterialControlSystem(MCS)物料控制系统（MCSCleanRobot洁净机械手Loader/Unloader上/下料机Sorter分片机

二.TFT材料中英文标准名称类型TypeMaterialsname材料名称玻璃GlassGlass玻璃基板Colorfilter彩色滤光膜Bareglass白玻璃基板LCDPanel液晶面板靶材TargetAINd/AITarget铝钕/铝靶材MoNb/MoTarget钼铌/钼靶材ITOTargetITO靶材化学液体ChemicalAlEtchantAl蚀刻液ITOEtchantITO蚀刻液HNO3硝酸CH3COOH乙酸Developer显影液Stripper录IJ离液MEA单乙醇胺PhotoResist光刻胶OrganicPhotoResist有机膜用光刻胶Thinner稀释剂NMPN-甲基-2-吡咯烷酮HF氢氟酸Acetone丙酮IPA异丙醇Ethanol酒精辅助器材SubmaterialPhotoMask光罩APRPlateAPR版RubbingCloth摩擦绒布AdhesiveTape双面胶布Probeframeforarraytester阵列电测架E/TFrame电测用探测架CellETProbeUnit屏电测用探测头Open/Shorttesterandprober开路、短路电测用探测头TeflonTape特氟龙带Siliconrubber硅胶皮WiperTape无尘卷布高纯气体NF3三氟化氮

HighpuritygasSiH4硅烷SF6六氟化硫NH3氨气Cl2氯气HCL氯化氢CHF3三氟甲烷PH3磷烷CF4四氟甲烷N2氮气02氧气H2氢气Ar氩气He氦气液晶LCLC液晶材料胶膜FilmPolarizer偏光片Diffuser散光膜涂料DopePI聚酰亚胺树脂ResinSealant边框胶UVglueUV胶ACF各向异性导电膜ConductiveSpacer导电衬垫球SpacerusedinSealant边框胶内衬垫球SpacerusedinCell （White）盒内衬垫球（白）SpacerusedinCell （Black）盒内衬垫球（黑）元器件PartsBackLightUnit背光源Integratedcircuit/DriverIC集成电路/驱动ICPCB印刷电路板FPC柔性印刷线路板ModuleFrame模块外框TouchPanel/Touchfilm触摸屏/触摸膜RCL阻容器件焊接材料SolderingFLUX助焊剂SOLDERCREAM焊锡/焊接剂material

三.TFT设备中英文标准名称Englishname中文名称PHOTO曝光Exposer曝光机CoaterDeveloper陈列黄光制程清洗机-涂布机-显影机longsizemeasuringandcritical dimensionmeasuringmultipleequipment测长仪和线宽测量仪Titler&EdgeExposer打标机和边缘曝光复合机EdgeExposer边缘曝光机AFM原子力显微镜FIB聚焦离了束系统FE-SEM场发射扫描电子显微镜UVMeterUV照度计EXCIMERUV准分子紫外清洗机lonizerBar除静电棒FireExtinguisher灭火器Photolonizer软X射线静电消除器PVD&WET溅射&湿式PVD(Multi-chambertypesputteringsystem)磁控溅射成膜机Particlecounter尘埃粒子测量仪UltrasonicCleaner超声波清洗机Stripper脱膜机ContactAngleAnalyzer接触角测量仪RSMeter(4pointProbe)四探针仪CassetteCleaner工装篮清洗机InitialCleaner预备清洗机PreCVDcleaner成膜前清洗机HFCleanerbeforeS/DS/D成膜前带HF清洗机LiquidParticleCounter液体内尘埃粒子测量仪CCSS中央化学品供应系统AnnealOven退火炉HardBakeOven后烘炉FilmTester薄膜附着力测试仪EtchantConcentrationManagementSystem刻蚀液浓度管理系统DMS显影液浓度管理系统DRS显影液溶剂回收系统RMS剥离液浓度管理系统WetEtcher湿刻机4.5G-MacroReviewSystem4.5G宏观检查机4.5G-Mic/MacReviewSystem4.5G宏观、微观检查机RGA(ResidualGasAnalyzer)残余气体分析仪PECVD化学气相沉积HotN2TransferSystem热N2供应系统PECVD等离子增强化学气相淀积设备SpecialGasSupply&MonitorSystem特种气体供应和监视管理系统TemperatureRecorder温度记录仪

GasScrubberforPECVDPECVD用尾气处理装置FullAutomaticSpectroscopicEllipsometerforFlatPanelDisplay平板显示用全自动椭圆偏振光谱仪CleanCrane洁净室起重机设备SpectroscopeReflectometer平板显示用全自动分光反射光谱仪HeLeakDetector氦气检漏仪DRY干刻DryPumpforCVD化学气相沉积设备用真空泵DryPumpforPVD物理气相沉积设备用真空泵EPDforDryEtching干刻终点侦测器DrypumpforDryEtching干刻机设备用真空泵DryEtching/AshingSystem干刻灰化一体机ProfilerSystem段差量测机ChillerforDryEtching干刻机辅助设备冷却器LocalScrubberSystemforDryEtchingICELL制盒RubbingLine: 摩擦线BeforePIcleanerPI前清洗机CassetteBF工装篮缓冲器PIPrinterPI涂布机Pre-Cure一 预固化炉Main-Cure主固化炉Loader/UnloaderPAPRcleanerA上5板清洗机RubbingInspection摩擦检查机AfterRubbingCleaner摩擦后清洗机ODFSystemODF相关设备SealDispenser边框胶涂布机ShortDispenser导电胶涂布机SealDe-bubblingmachine边框胶脱泡机UVcure紫外线固化机SpacerCureOven衬垫球固化炉Cooling/RotationUnit冷却/旋转装置SealCureOven边框胶固化炉LCdispenser液晶滴下机LCde-bubbling液晶脱泡机VacuumAssembly真空贴合系统Mis-alignChecker对位检查机VisualInspection目视检查机ODFInlinetransferand linecontrolblockODF联线传输和软件控制系统Loader(3port)上料机Unloader(3port)下料机CassetteBuffer卡匣缓冲器TurnAlignBuffer旋转对位缓冲器Pairing/NGBuffer配对/不良制品缓冲器SpacerNGBuffer衬垫球散布不良制品缓冲器TurnOverAlign翻转对位器UVMaskstockUVMask存储柜BufferafterUVcure紫外线固化后缓冲器

CoolingBuffer冷却缓冲器SpacerUSCleaner衬垫球超声波清洗机SpacerRemover(USC)衬垫球聚团去除装置（超声波清洗机）USCleaneraftersealantdispensing边框胶涂布后超声波清洗机USCleaneraftershortdispensing点胶后超声波清洗机MasterPLC主PLCCIMPCCIMPCSealInspection边框涂布检查机CellGapInspection盒厚检查机DrySpacerSpray&Spacercount干式散布机衬垫球计数器AutoClave偏光片贴附后加压消泡机EdgeGrinder液晶面板磨边机LCDPanelcleaningandPolarizerattachsystem液晶面板清洗和偏光板贴附机系统PanelCleaner面板清洗机（用于液晶面板清洗和偏光板贴附机系统）PolarizerAttachMachine偏光板贴附机（用于液晶面板清洗和c 偏光板贴附机系统）LCDPanelPolarizerReworkMachinePCellCassette(3"-10.4")液晶面板4偏光片返工卡匣Singleheadscriber单刀头切割机LCDglassin-lineScriber液晶面板在线切割机MultiheadScriber多刀头切割机MODULE模块COGbondingmachine自动COG邦定机COGSemi-automaticBondingMachine半自动86邦定机Agingtestsystem老化测试系统SignalgeneratorforLCDInspectionLCD检查用信号发生器AutoOpticalInspection自动光学检测仪AirParticleCounter空气尘埃粒子测量仪Backlighttester背光源色度亮度测量仪Projector投影仪Microscope显微镜lonizerblower离子风扇Surfaceresistaneetestkit (点检)rChargedPlateMonitor表面电带电测试仪Staticelectricityvoltagetesting静电电压测量仪TEST测U试ADI-AOI显影后检测AEI-AOI刻蚀后检测CF-AOI彩色滤光片检测ArrayTester阵列电测机Open/Shorttesterandprober开路/短路检测和探针系统ARRAYO/Sprobe开路/短路探针系统TEGProber丁£6探针系统TEGTesterTEG测试系统ProbeUnitforTEGTEG测试用探针系统Arrayrepair激光修补系统

ArrayProbeframe阵列电测架Visualtestprobeunit目测用探针系统ETProbeunit2英寸电测用探针系统Microscope显微镜（Panel）Microscopeandlasersystem带激光的显微镜BarcodeReader条形码阅读器Fixed2DCodeReader2维读码器系统（固定类型）Portable2DCodeReaderP2维读码器系统（可移动类型）PI+MacroinspectionsystemPI+Macro检测系统CellGapMeasureSystem盒厚测量系统LaserTrimmer激光切线系统CellLaserRepair液晶盒激光修补系统Oscilloscope示波器Manualprobe手动探针系统PrecisionParameterAnalyzerTFT参数分析仪R&D研发ProductOpticalQualityMeasurementSystem产品光学质量检测系统OpticalParametersMeasurementSystem光学特性量测设备Circuitdrawing〃0rcad电路图编辑器P-spiceAnalogSimulationP-spice电路仿真器PCBArtworkPCB线路图编辑器3DMechanicalDesignTool3D机械设计工具2DstructureDesignTool2D结构设计工具PatternGeneratorP 测试图形发生器ResistaneeAttenuator电阻衰减器illuminanceColorimeter亮度色度计Spectrophotometer亮度色度光谱仪ColorAnalyzer色彩分析仪R,L,CMeasurementR,L,C测试仪ESDGun(EMI/EMS)table静电枪台UVTESTchamber紫外线测试箱Sealdispenser边框胶涂布机threeaxisMeasurementStage三轴量测平台Pre-tiltangle&cellgapmeasurementsystem倾斜角盒厚量测仪LCresistivitymeter液晶电阻率测量仪Oscilloscope(Analog)模拟示波器Thermo-hygrostat恒温恒湿柜ThermalShockChamber冷热冲击舱ESDGun(EMI/EMS)静电枪Liquidcrystalinjectionmachine灌晶机Plasmacleaningmachine等离子清洗机SimulationsoftwareofLCDOpticalparametersLCD光学特性模拟软件Layouteditorformask版图设计软件

CIM集成控制CIMSystem-.ManufacturingExecutionSystem(MES)-.PreventiveMaintenanceSystem(PMS)-.StatisticalProcessControl(SPC)-.EquipmentAutomationProgram(EAP)-.ReportSystem-.EngineeringDataAnalysis(EDA)-.FinishedGoodsManagementSystem(FGMS)-.EngineeringDataBase(EDB)计算机集成制造系统-.制造执行系统-.机台预防保养系统-.统计制程管制.设备自动化.报表系统.工程数据分析.产成品管理系统OperatorInterfaceClient(OIC)操作者界面FABMonitoringClient(FMC)工厂监控系统Dispatcher(DSP)任务分配系统FaultDetectionandClassification(FDC)「 缺陷检查和分类系统AlarmManagementSystem(AMS)机台报警系统RealTimeAnalysis/MonitoringSystem(RTAMS)缺陷管理的实时监控/分析系统SystemManagementSystem(SMS)系统管理系统AMHS物料搬运Unpackingline-.Unpacker-.Glassconveyor-.InitialCleaner-.Unloader拆包线-.拆包机-.玻璃传送带-.预清洗-.下料机CassetteManualGuideVehicle(MGV)1 工装篮人工引导车ArrayCassetteArray工装篮ODFCassetteODF工装篮AutomatedMaterialHandlingSystem(AMHS)-.CleanStocker(STK)-.OverheadHandlingSystem(OHS)-.MaterialControlSystem(MCS)自动物料搬运系统-.洁净堆料机（STK-.天车搬送系统（OHS-物料控制系统。心CleanRobot 洁净机械手Loader/Unloader上下料机Sorter分片机CIMServer集成控制系统服务器MESDBServerMES数据服务器MESAPPServerMES应用服务器EDA/EDBServerEDA/EDB服务器FDCServerFDC服务器PMSServerPMS服务器YMSServerYMS服务器FileServer文件服务器CentralizedBackup/RecoveryServer中央备份服务器DevelopmentServer开发服务器TestingServer测试服务器Storage/DiskArray磁盘阵列SANSwitch/StorageLinkSAN交换机TapeLibrary磁带库Switch网络交换机Router网络路由器Firewall网路防火墙MessageBus信息总线

TIBCORendezvousTIBCO消息集聚器DataProtector数据保护者Facility工程ExhaustFan(FRP)排气风机（玻璃钢离心式）UPWsystem纯水超纯水设备Autocontrolsystem自动控制系统CDAsystem压缩空气系统Bulkgassupplysystem大宗气体供应系统ExhaustFan排气风机FanFilterUnit送风过滤系统Gasandliquidleakdetectionsystem气体和液体测漏系统Dieseloilgenerator柴油发电机系统VOCscrubber有机物蒸气洗净机PlantVacuumpump工厂真空系统cleaningvacuumpump清洁真空系统wastewatermonitorsystem废水检测系统vesdasystem空气烟感探测分析系统chiller冷水机组coolingtower冷却塔HVACPUMP空调水泵heatenergysupplysystem集中供热系统LPGsystemLPG站系统PCWsystemPCW系统35KVtransformer35KV变压器Telephonesystem电话系统CATVsystem有线电视系统broadcastingsystem广播系统firealarmsystem一 火警系统WWT废水处理系统35KVswitchdevice35KV开关装置Mvswitchgears,castcoiltransformers,unitsubstations,powerscada中压变配电系统Security&CCTVsystem安保和闭路电视系统Firefightingsystem消防系统Analysisroom分析室Singleheadscriber单刀头切割机ContactAngle接触角测量仪Eyewash洗眼台Wetstation带通风橱的中央实验台

四.TFT生产常用中英文名称Englishname中文名称General一般专有名词LCD(LiquidCrystalDisplay)液晶显示器Glass,substrateorglasssubstrate玻璃基版TFT(ThinFilmTransistor)薄膜晶体管Panel面板Array阵歹UCell液晶盒Module模块Monitor监视器Pixel像素Computer电脑Notebook-PC笔记本电脑（简称为NE）RGB(Red,Green,Blue)指红绿蓝三基色PM(PreventiveMaintenance)预防保养Quality品质Standard标准（指作业标准或质量指针）Material材料Yield良率CIM(ComputerIntegrationManufacturing)计算机集成制造（指以计算机系统整合制造流程）FA(FactoryAutomation)工厂自动化Exit出口Precaution汪意Warning警告Emergency紧急Alarm警报CleanRoom洁净室Cleanroom洁净室HEPA(HighEfficientParticulateAir)高效能粒子空气过滤网Cottamination污染Temperature(TEMP)温度Humidity湿度Pressure压力UPW(Ultra-PureWater)超纯水DIW(De-IonizedWater)去离子水IPA(IsopropylAlcohol)异丙醇Stickymat粘尘垫

Cleanliness洁净度ESD(Electro-staticDischarge)静电放电Laminarflow层流（流体力学名词）Turbulentflow扰流（流体力学名词）Alcohol酒精Acetone丙酮Particle微粒子Dust灰尘Gowningroom换衣间Raisedfloor(gratingfloor)高架地板Airshower风淋室Prohibit禁止Cleansuit(bunnysuit,dust-freegarment)无尘服Glove手套Hairnet网帽Hood头罩Mask口罩Cleanshoes(dust-freeshoes,boots)无尘鞋FactoryAutomation工厂自动化Vehicle搬运车Robot机械手AGV(AutomaticGuidedVehicle)自动搬运车MGV(ManualGuidedVehicle)人工搬运车Cleanlifter净化电梯LIM(LinearInductionMotor)Carrier线性感应马达传送载具OHS(OverheadHandlingSystem)天车搬送系统Stocker(cleandepot)工装篮存放架Battery电池Bay作业区Inter-bay作业区和作业区之间Intra-bay作业区之内Bumper减震缓冲器Charger充电器Controller控制器Conveyor传送带Crane吊车（在Stocker内）FFU(FanFi