PCB蚀刻均匀性测试报告

TO张主任CC张仑蛰、司课长TO张主任CC张仑蛰、司课长From王永锋五、蚀刻均匀性测试方法、步骤及结果如下：（要茨COV290%）a.将试验板离隹从2OZ蚀刻至1OZ，蚀板速度V=5m/rriin,蚀刻段有效喷淋长度为2.8mAPPR:Date2005-3-18SiWiect:蚀刻均匀性测试报告―、测试目的：通过试板评判外层蚀刻线蚀刻均匀性是否满足本公司品质要求，并根据试验结果决定是否应调整蚀刻参数二试板勰裁板-蚀刻-水洗-烘干-测量三、 试验板规格：①尺\f610mmx460mm②"厚1.5mm ③底铜2OZ四、试板金苗a蚀刻药水参数b.利用铜厚测试仪按测Ji式点分布示意图测J大上板面及下板面各点蚀刻前铜厚及蚀刻后残铜厚度，并分别记录（单位：um）c测式点分别如示意图，测试点数量n=121（thhth2,th3.・・・・・th⑵）d.蚀刻均匀性COV计算方法时顾目Cu2+(g/L)比重（S.G）ci(g/L)PH值温度（C）控制范围115-1651.18-1.22170-2208.1-8.850±2融值1351.2081958.350±2分解果13431.205190.18.2248b.蚀刻机压力参数所有测星点铜厚平均值thn=(thi+th2+......+th121)/n n=i2i(thn-thA+fthn-thz)2+ +(thn-th121)2n-1蚀刻均匀性COV二(l-(SAhn)JxlOO%KJIHGFEDCBAe.mo匀性斯哉搦吓（单位：KJIHGFEDCBAe.mo匀性斯哉搦吓（单位：um）淋簇分粒吓图，麟板尺寸单位：mmABCDEFGH1JK喷项目数据AVGRS数据31.0932.9334934.3335.234.2834.88353335.4435.5634.23M254.471341334.6535.9336.2538.2336.5838.4937.41387337.583836.9237.164.0812393孔53“4837.2437.3冲373八8.0437/IX37.87俪1.刀M31.0433.4654.1535.5734.9936.8835.6836837.06364335.9235.276.021807333.6935.0236.9237.4337.7835.9739.2638.4639.8638.3738.737.4164836.1237.6637.9238.2383738.7738.3637.5337.7437.105刀1828032.72343936.4936.7636.7937.7338.2538.0137.8937.2936.6936.645.531677333.1934.6836.5937.5138.137.8838.6938.7739.4238.0238.1737.376.2318734%4335.6636.7237.6438.7738.7238.8338.7938.9438.6238.4137.784.511526233.5335.2635.7136.4637.2638.5238.1437.7438.5237.7437.4236.944.9915569舛5634.4636.9836.1636.62363337.3136.3736.91363135.9636.182.850.9138AVG33.3134.6136.0636.7737.0337.3937.6537.8037.9237.4336.99R3.613.033.753.93.784.444.383.464.423.064.47S129740.8827119%111931.16631385813429L1582L27210.95113075值MAX=39.86 MIN=31.04 AVERAGE二36.63314STDEV二1.801039COV二95.08%

项目AVGS数据32.2632.8331.9232.6131.932.4832.9132.732.6733.5633.1832.641.660.498833.7733.6134.0734.1334.0433.5334.0534.1834.6334.4135.0534.131.520.442233.8333.9234.2834.0434.4134.1334.3633.6534.3734.2535.2534.231.60418431.6931.2231.7531.5231.831.9131.6232.131.7532.432.8631.871.640446032.432.8132.5832.9332.8833.0132.883333.133.6333.7933.001.390.404633.5832.9433.9532.8634.2533.4234.1333.6734.4234.535.1433.902.280.688132.1431.9732.5732.2732.5332.4332.5232.9233.3933.3633.8132.721.840.580632.8932.8133.0133.0733.0633.0532.8733.133.7334.1834.6233.311.810.599333.2333.633.7133.5333.2633.3733.5533.5733.8633.7234.8933.661.660.450433.0834.0433.1834.3733.23342733.2534.3333.1634.334.1233.761.290.561832.9232.532.9432.1733.4132.2933.2333633.7133.4334.2533.112.080.6257AVG32.8932.9333.0933.0533.1633.0833.2133.3333.5333.7934.27R2.142.822.532.852.612.362.742.232.882.12.39S0.70190.84810.85040.89930.86750.75510.79440.6510.84490.61980.8046值MAX=35.25MIN=31.22 AVERAGE=3330223 STDEV=0-854572 COV=97.43%f.蚀刻均匀性（上喷）COV二95.08%，蚀刻后正面横向和纵向铜厚平均值分布图如下:系歹U1.36•-6363. «b366■W3§ 3 86 3i・ 4八64644375■3737334l止面纵同御厚平均（自分如系歹Ml234 5 678 9 10 113b:63643sIF面横向平分布2 3-456T89 1