深圳贝加尔镀铜添加剂Cu603生产板均匀性与深镀能力评估

1、2ME技彳折I幸艮告害文件傅送和文件做成.雷核.批准收件ZPTIN作成李吉平2008/6/10抄送各相辱能罗里割亥| FAX批准文件褊号虎:文件核心内容描述 技80%切片分析：深能力十算方法A:(e+f+g+h+I+j)/6(a+b+c+d)/100%2ffi均能力COV: 100%言平估项目和相指票:就 K 方 案 及 就 K 方 案 及 & 果bd(-)ffi缸高横比(10:1； 7)1 深能力淇斌K：高横比板3墟制板由我司提供，板厚2.0MM，孔彳陛舄0.2MM;0.30MM，即横 比舄10: 1和7: 1aB件舄：前虔理正常逵行，雷导同10ASF/80MIN;会同缸桑水中条件：澧度舄

2、80.5G/L H2SO4 澧度舄 205.5G/L CL 45PPM每墟板取5：固切片(横比10:1; 7各取15侗切片)，共30侗切片，取切片方式及 敷方式圈如下：食虫刻彳爰做高横比通孔通斤淇斌取切片示意圈:3#PTIN21#ffi缸CU603 分同添加胃。：横10： 1表面图电铜厚孔壁图电铜厚深能力横7： 1表面图电铜厚孔壁图电铜厚深能力abcdefghijabcdefghij1-129.4332.424.5625.9328.0128.416.9217.7121.3323.1880.45%1-133.0231.7932.8731.7928.9928.3421.5319.6824.2326

3、.7176.97%1-222.0524.8622.1223.5518.2918.911.2412.7718.318.771.55%1-225.5423.1424.824.623.423.8517.6118.3420.7520.7184.37%1-321.0523.4625.5526.3716.5920.4313.5213.218.6618.6369.7%1-325.6522.5227.3625.5317.6319.3515.1814.1519.3321.0570.38%1-423.4624.5028.6528.6619.5819.0414.5113.5418.7818.3265.72%1-42

4、7.9529.3330.0228.9924.6524.5016.9118.6324.3122.0875.15%1-523.8723.823.9324.5820.820.0111.712.520.520.3873.4%1-526.2629.3524.1724.2125.5919.6717.617.2819.6718.6875.96%2-123.1319.0219.3319.219.6720.412.4211.0420.7117.6384.18%2-124.5223.8223.1823.8222.0822.7815.1815.5320.0219.0580.16%2-223.1623.8223.12

5、23.4820.3621.1511.3912.0820.0618.6873.89%2-222.1225.2523.1325.5920.4320.7514.8415.8718.6317.9475.25%2-320.5419.8124.6223.3213.5716.2711.212.518.7121.6770.92%2-321.5720.8423.2823.2819.419.9115.2815.9619.819.8682.58%2-421.1220.0822.7922.7815.1812.7710.0613.1215.8916.8764.45%2-422.7922.7823.1624.8818.3

6、414.8413.8112.7723.5322.0875.04%2-520.721.4617.6118.2117.6117.6110.3610.416.9617.6177.41%2-519.0323.4721.1824.5621.1217.9413.4616.8519.7418.5181.31%3-124.2426.9524.5824.5820.0119.0016.915.8720.7019.4374.41%3-130.4328.6724.8429.6927.2928.4317.9618.7121.1322.8480.00%3-226.0326.6526.3(24.6220.0619.3314

7、.2514.1521.4923.8972.82%3-230.0728.3429.3825.5927.0724.5617.6816.9123.0227.0281.12%3-322.5622.5623.925.4221.2318.7514.5614.2522.1523.1880.56%3-323.5922.9424.623.019.3322.5318.4514.1616.9921.4679.97%3-428.128.3128.2928.324.9924.8417.6117.5625.2426.1280.45%3-433.1331.0530.0728.8929.1126.5719.9418.5627

8、.2726.7980.20%3-520.721.4617.6118.2117.6117.6110.3610.416.9617.6177.41%3-519.0323.4721.1824.5621.1217.9413.4616.8519.7418.5181.31%3#PTIN24#ffi缸ST-901疆间添加胃。横10： 1表面图电铜厚孔壁图电铜厚深能力横7： 1表面图电铜厚孔壁图电铜厚深能力abcdefghijabcdefghij1-117.5618.4322.0122.1516.5615.7614.5815.8717.3617.6381.31%1-118.2919.4324.0224.1516

9、.5617.9416.5815.8719.3319.6782.24%1-218.2921.0518.2921.0517.8117.9411.3912.117.6518.5580.87%1-221.0520.0121.0521.0119.6718.0215.1816.2319.9716.9183.4%1-317.5618.4322.0122.1516.5615.7614.5815.8717.3617.6381.31%1-318.2919.4324.0224.1516.5617.9416.5815.8719.3319.6782.24%1-427.0533.1230.3830.3824.6227.9

10、517.619.7123.925.9377.02%1-431.431.137.6439.3425.5429.3419.9923.4133.1320.4977.4%1-530.0231.0531.0731.0723.1523.1526.1214.5116.5823.8171.53%1-533.1233.0230.0332.7828.6428.8420.0119.3225.9126.2477.01%2-118.3417.9922.1822.4916.7418.6411.7414.5617.9717.9880.35%2-118.7118.3423.5023.5316.9917.3413.8415.9

11、318.3419.8181.07%2-218.6619.3317.6318.3216.9416.9611.9211.5216.9416.9682.26%2-218.3219.6820.4020.4016.2315.8714.1513.4017.8917.9982.26%2-318.0117.0217.8120.3614.8514.1513.4612.7715.5316.5679.53%2-318.5017.5218.2920.0115.8714.8714.8415.9617.2715.8784.93%2-419.7119.4(21.8020.0415.6215.2212.8411.7315.2

12、016.7471.94%2-419.3719.3221.0920.0618.4016.9913.8115.5420.8820.0688.24%2-519.6821.3922.0821.7418.0218.9814.5014.8418.9820.0182.72%2-521.3922.0823.8120.7019.0317.9516.2717.2519.7119.6783.26%3-120.3822.1121.0521.0620.0119.3314.5012.5016.9118.6380.28%3-122.4421.3924.5020.7018.6318.6316.1017.2819.6021.4

13、083.60%3-220.3823.0134.7534.7521.0422.0317.9717.1925.6523.5375.24%3-222.9424.0537.1937.1522.2823.0521.2319.5627.6027.4377.56%3-324.1724.5022.7822.7820.7719.0314.1812.4622.2121.3977.85%3-324.8523.8124.5224.5221.4020.0917.2717.3118.9822.0179.8%3-423.8524.1723.8523.5021.0922.4717.6316.6522.4422.0985.54

14、%3-424.1924.8621.7823.8721.6718.6318.7917.6821.0821.5384.04%3-532.7432.1331.5230.2128.7129.5318.9019.1826.0224.9077.54%3-527.7429.0833.2434.5526.6025.8923.8721.1224.5631.8182.31%上面敷撮分析言十算结果:就 K 方 案 及 结 果深能力丘十算方法 A:(e+f+g+h+I+j)/6(a+b+c+d)/4：询板敷量8免 尺寸舄16.0”xL8.0”熊条件S：ffiB流密度20ASF、导鼬寺 75MIN;桑水条件：CuSO4

15、澧度舄75G/L,$04澧度舄 210G/L. CL45PPM分布&式焉编吉果：百宙板正面数3豕:1墟板2墟板3墟板4墟板5墟板6墟板7墟板8墟板21.820.921.424.824.62424.224.322.226.425.424.726.226.427.222.221.521.623.422.221.827.25.925.721.922.221.724.623.823.622.921.521.325.825.224.723.723.22322.921.921.723.922.722.226.24.824.423.623.524.924.92423.722.221.420.726.525.

16、424.623.723.123.223.822.722.7242322.125.(S 24.824.2就K结果结olffl跟B行重力1墟板2墟板3墟板4墟板5墟板6墟板7墟板8墟板26.724.823.624.223.623.520.620.72024.523.924.924.223.424.623.222.923.922.823.523.824.324.225.821.521.520.523.823.323.821.120.120.824.524.524.524.424.223.722.822.923.52323.223.724.424.625.620.520.121.123.623.924.622.221.221.825.124.825.426.825.825.622.422.323.322.72323.725.726.126.8最大值：27.7最小值：20.7平均值：23.67 COV : 6.9% 板反面ffi：最大值：26.8最小值：20平均值：23.5COV : 7.1%(1根上面的敷撮分析横比舄10： 1通孔深能力ST-901添加胃此匕Cu603 分同添加胃。的深能力高 4.4%;比舄7： 1通孔深能力ST-901添加胃此匕Cu603 ffi添加胃。的深能力高3.04%，深能力 重交差。(2ffi厚分布正反面COV相差不大均小於10%，故此桑水厚分布均匀性