2012年部门体系绩效指标达成报告 Audit Report1三段论模版

外延一部管理评审报告EPITeam1Managementauditreport本部门1-9月三标推进基本情况综述SummaryofthegeneralsituationofISO9000,14001,18000advancementofourteamfromAug.toSep.1.1：组织本部门人员认真学习了三标标准;制订了本部门的质量、环境及职业健康安全目标。ArrangeourteammembersfinishingthestudyofISO9000,14001,18000.Edittargetofthequality,environment,vocationalhealthandsafetyaboutourdepartment.1.2:完成了相关的SOP18份Makethe18relativeSOPfiles.1.3:对本部门员工进行了相关专业技能培训。Conductthetechnicaltrainingforourteammembers.目标及完成情况分析TargetandanalysisoftherelativeProgress2.1质量目标及进展情况QualityTargetandProgress部门TeamNo.内容Item总目标TotalTarget8月Aug9月Sep.外延技术一部EpiProductionTechnologyTeam11生产良率（MOCVD出片率*表面良率*均匀性良率*波长良率*点测良率*ESD良率）ProductionYield(%)(OutputRatio*SurfaceYield*UniformityYield*WavelengthYield*ProbingYield*ESDYield)80%70%70%结果Result39%62%2MOCVD使用率（使用的MOCVD数/总共机台数）MOCVDoperatingrate(OperatingMOCVDnumber/TotalMOCVDnumber)80%70%70%结果Result58%74%3投入量产的MOCVD机台数MassProductionentrynumberofMOCVD19set66结果Result24工艺组ProcessGroup1改善表面（表面不良的片数/总投入片数）Improveofsurface(Surfacefailwafernumber/Totalinputwafernumber)<5%目标/月target/month10.00%10.00%结果Result1.27%3.78%2改善均匀性（均匀性不良的片数/总投入片数）ImproveofUniformity(Uniformityfailwafernumber/Totalinputwafernumber)<5%目标/月target/month10.00%10.00%结果Result4.5%49%3改善点测良率（点测良率在70%以下的片数/总投入片数）ImproveofProbingYield(electriccharacteristicbelow70%wafernumber/Totalinputwafernumber)<5%目标/月target/month10.00%10.00%结果Result12.6%4.5%4ESD良率（ESD良率在80%以上的片数/总投入片数）ESDYield(2000v)(ESDYieldover80%wafernumber/Totalinputwafernumber)≥85%≥85%≥85%结果Result57.5%86.8%5出片率（出片数/总投入片数）Outputratio(Outputwafernumber/MOCVDinputwafernumber)>95%目标/月target/month95%95%结果Result95.65%97.15%6改善波长特性（波长超出一定范围的片数/总投入片数）ImproveofWavelengthoutofRangeratio(Wavelengthoutofrangewafernumber/Totalinputwafernumber)<5%目标/月target/month10%10%结果Result13.8%19.7%设备组EquipmentGroup7MOCVD运行状况MOCVDoperatingstatusMOCVD运行效率（MOCVD运行时间/计划量产时间）MOCVDrunningefficiency(MOCVDrunningtime/productionplantime)>95%95%95%结果Result88.9%88.2%8MOCVD事故次数MOCVDaccidenttime2次/月（1台）*量产机台数2times1212/month（1set）*ProductionMOCVDnumber结果Result26外延一部正处于初步量产阶段,部份质量结果尚未达到目标值，工艺参数需要进一步优化和改善。目前，所有工程师正在为尽快实现目标而努力着。Inthestageoftheprimaryproduction,partoftheQualityTargethasnotbeenaccomplishedandprocessneedtobeimprovedandoptimized.Nowalltheengineersarestrivingfortarget.资源需求和改进意见Resourcerequirementanditsimprovementsuggestion需要及时得到产品的最终测试数据