12英寸主要原辅材料消耗表

12英寸（40K/月）主要原辅材料的消耗一览表序号原料名称应用工段每片消耗量（kg/片）年消耗量（kg/a）1硅片--576000片2光掩膜版--329片3ACT-935单乙醇胺（50〜60%）;羟胺（10〜20%）0.78315375,909.74BOELAL15(300:1,SA-X,200KG/DR)NH4F(16.7〜17.3%);HF(0.06%)0.52132250,233.15BOELAL1400(SAX200KG/DR)NH4F(19.7〜20.3%);HF(3.8〜4.2%)3.327531,597,214.26H2O22.389541,146,980.67H2SO41.75190840,912.08H3PO40.71820344,736.09HF(100:1)8.740584,195,476.210HF(49%)SA0.40178192,855.311HF(49%)SAX0.1903891,382.312HNO30.0705033,840.013HSS(ABBRASIV)0.0864041,472.014HSS(ADDITIVE)0.21400102,720.015IPA0.69233332,317.416NH4OH2.01501967,206.217OXIDESLURRY(SS-25)扩散2.556111,226,933.818SSW20000.27427131,648.219T.C.A(7N,1500CC,2KG/CYL)0.00133636.020TMA(AL(CH3)3,6N,4L,2.406KG/BT)0.003781,812.0211%PHa/HE0.00038184.322CLFa0.00119571.723DCS（二氯硅烷）0.004332,077.024F20.00048230.025HF0.00025121.826N2O0.0362917,421.127NF30.00090429.628NH30.0259312,444.229SiH40.0438121,026.930AR0.0001045.631AsHa0.0000628.332BF30.0001466.533PH30.0000314.934Xe0.0000313.435CO20.0001154.236IPA薄膜0.1730883,079.437THINNER0.018809,025.0

38SOG0.003061,468.839TEOS(7N5,5GL,18KG/CYL)原硅酸四乙酯0.0244511,736.040TEB(4N,15KG/CYL)0.002281,092.041TEPO(4N,15KG/CYL)0.00128612.042TDMAT(EX,0.4KG,1.3LT/CYL)0.0001885.243TMB(7N5,5GL,15KG/CYL)0.00090432.044TMPI(7N5,5GL,15KG/CYL)0.00090432.0451%PHa/H20.000028.246B2H60.00069330.747CLF30.003201,535.848N2O0.1159355,645.949NF30.60786291,774.950NH30.0481423,105.351SiH40.012846,160.852TQI40.004402,112.053WF60.1179856630.6254DEVELOP（四甲基氢氧化铵20%）感光13.255776,362,768.755HMDS（六甲基二硅烷胺99.70%）0.0497123,859.656LSTRINSE0.64212308,215.757P/R0.1725282,808.258POLYMIDE0.005452,617.059THINNER0.91913441,181.960F2/Ar/Ne/Xe(F:Ar:Ne：Xe=1:1：1:1)0.00022104.061Ar/Xe/Ne0.00047223.762F2/Kr/Ne(F:Kr:Ne=1:1:1)0.00023111.463Kr/Ne0.00029140.664N2/Ne0.003681,766.965BCla刻蚀0.009184,405.066C2F60.00141678.367C4F60.013516,486.268C4F80.005902,832.269C5F80.008784,213.970CF40.0816539,191.571CH2F20.003451,654.372CHF30.0275713,233.773Cl20.016818,068.374CO0.00117560.275H2/N2(4/96)0.0000521.6**注：其中含有中水示范工程水量 666490t/a76HBr0.005942,849.377NF30.00123590.978SF60.0415519,942.879Xe0.00050241.080