甲基氯硅烷的物化特性

甲基氯硅烷的物化特性1、主要的物理性质（16）1） 直接法合成的甲基氯硅烷的单体混合物,为无色透明的液体（因含杂质、有时是浅黄色或深褐色的液体）。2）遇火易燃烧，发出大量黑烟，留下白色固体残渣。3）遇水极易水解，放出氯化氢气体，留下白色，胶状固体残渣。4）比重：d2541.05~1.15）沸程：40〜72°C2、重要甲基氯硅烷的物理化学常数1）三氯硅烷（HSiCl3）:（7）、（4）名称单位数据分子量135.45比重d2041.340熔点C—126.5沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—80.75mmHg—62.610mmHg—53.420mmHg—43.840mmHg—32.960mmHg—25.8100mmHg—16.4200mmHg—1.8400mmHg14.5758mmHg31.6760mmHg33.3汽化热 31.8C千卡/公斤47液体比热千卡/公斤・C0.252蒸汽比热 25C千卡/公斤・C0.163生成热气态25C千卡/克分子107.6临界压力大气压48.3临界温度C209⑵四氯化硅（SiCl4）

名 称单位数据分子量169.9比重1.483熔点C—70沸点C57.57沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—63.45mmHg—44.110mmHg—34.420mmHg—24.040mmHg—12.160mmHg—4.8100mmHg5.4200mmHg21400mmHg38.4760mmHg56.8汽化潜热57.6°CKcal/Kg40.4Kcal/mol6.86熔化热一70CKcal/mol1.84生成热气态25CKcal/mol—145.7液态25CKcal/mol—153.0标准熵气态25CKcal/mol79.2液态25CKcal/mol57.2比热 固体-220〜-80Kcal/Kg・°C0.237液态Kcal/Kg・°C0.222气态25CKcal/Kg・°C0.1685临界压力atm42.6临界温度C239(3)—甲基一氯硅烷(CH3SiH2Cl)：(17)名称单位数据分子量80.59熔点C—134沸点C8沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—955mmHg—79.210mmHg—70.120mmHg—62.040mmHg—53.760mmHg—45.2100mmHg—36.4200mmHg—22.9

续上表名 称单位数据沸点与蒸汽的关系蒸汽压mmHg沸点，°C400mmHg—7.8760mmHg+8.7(4)一甲基二氯硅烷(CH3SiHCl2)(17)名 称单 位数 据分子量115.04比重d2o41.105d041.135熔点C—90.6沸点C40.4沸点与蒸汽的关系蒸汽压mmHg沸点C1mmHg—755mmHg—56.910mmHg—47.820mmHg—37.740mmHg—26.260mmHg—18.9100mmHg—9200mmHg+6.2400mmHg23.7760mmHg41.9液体比热25CKcal/Kg・C0.364蒸汽比热25CKcal/Kg・C0.211汽化潜热40.4CKcal/Kg56.8生成热气态25CKcal/mol—89临界压力atm45.7临界温度C211

(5) —甲基三氯硅烷CH3SiCl3(17)名 称单 位数 据分子量149.48比重d2041.2715熔点C66.1沸点C—77.8沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—60.85mmHg—40.710mmHg—30.720mmHg—19.340mmHg—7.060mmHg+1.0100mmHg12.1200mmHg28.1400mmHg47.0760mmHg66.4液体比热25°CKcal/Kg・C0.304蒸汽比热25CKcal/Kg・C0.197汽化潜热40.4CKcal/Kg47生成热气态25CKcal/mol—127.5临界压力atm41.1临界温度C24.9(6)二甲基二氯硅烷(CH3)?SiCl?(17)名称单 位数 据分子量129.06比重d2041.0663熔点C—76.1沸点C70.2沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—53.55mmHg—33.810mmHg—23.820mmHg—12.740mmHg—0.460mmHg+7.4100mmHg17.4200mmHg33.9400mmHg51.9760mmHg70.3液体比热25CKcal/Kg・C0.41蒸汽比热25CKcal/Kg・C0.236

汽化潜热40.4°CKcal/Kg55生成热气态25CKcal/mol—108.9临界压力atm39.1临界温度C253(7)三甲基一氯硅烷(CH3)3SiCl名 称单 位数 据分子量108.65比重D19-2540.8536折光率n20D1.3884熔点C—57.7沸点C57.6沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—62.85mmHg—43.610mmHg—34.020mmHg—23.240mmHg—11.460mmHg—4.0100mmHg+5.0200mmHg21.9400mmHg39.4760mmHg57.9液体比热25CKcal/Kg・C0.56蒸汽比热25CKcal/Kg・C0.288汽化潜热40.4CKcal/Kg63生成热气态25CKcal/mol—90.3临界压力atm36.5临界温度C232⑻四甲基硅烷(CHJ4Si(17)名 称单 位数 据分子量88.23比重d2040.6480折光率n20D1.3591沸点C26~27熔点C—102.1沸点与蒸汽的关系蒸汽压mmHg沸点，C1mmHg—83.85mmHg—66.710mmHg—5820mmHg—48.340mmHg—37.460mmHg—30.3100mmHg—20.9200mmHg—6.5

400mmHg+10760mmHg27生成热气态25°CKcal/mol—71.7临界压力atm33临界温度C185（9）几个甲基氯硅烷的主要物性参数（50）沸点，±0.5C比重折光指氯含量色谱分析数据,%实测(mmHg),760mmHgd204数n20D实测,计算主要化合物杂质和，含量(CH3)2HSiCl35.9(765)35.70.86251.382237.637.4799.52CH3HSiCl2,0.48CH3HSiCl241.3(764)41.21.10691.399261.561.6499.60(CH3)2HSiCl,0.40(CH3)3SiCl57.6(759)57.70.85901.389032.732.6399.76Si—(CH3)2HSiCl(CH3Si)2Q0.170.07微量CH3SiCl66.4(768)66.11.27611.412371.171.1599.80(CH3)3SiQ0.20(CH3)2SiCl270.2(761)70.21.06661.400355.154.9499.50CH3SiCl3(CH3)3SiCl0.430.073、纯氯硅烷沸点的计算：（8）可按以下方程式计算，具有足够的准确度:t沸点230.14（工tN）i/3—543式中XtN—组成分子的单个原子和原子基团的沸点值之和.Tn值如下表.原子原子基团基团原子基团-Si-Cl,Si(Cl)2-Si-Cl3SiQR3SiClR-Si-R2-Si-R3-Si-RQSi4.20 4.204.204.204.20CH33.453.173.022.74H0.600.600.600.60C2H56.836.175.915.89Cl5.05 4.173.593.394.51C3H79.478.978.337.85（6比18.8718.7618.417.73如果常压沸点是已知的话,那么该物质在一定压力的沸点可按下面所示的诺模图进行计算,其精度在±5%范围内.4、 氯硅烷蒸汽密度的计算（8）按以下方程式计算:dn=M/22.4・P/760・273/T式中:dn 蒸汽密度（Kg/m3）M 分子量P 操作压力（mmHg）T——操作温度（0K）5、 氯硅烷折光指数的计算（8按以下方程式计算：叫=1±（0.321阻0.38・耳0.12）/N0.06式中：dL——20°C时液体密度（g/cm3）Tb——760mmHg柱下的沸点（oK）N――分子中原子的数目按该方程式计算的折光指数高于文献上列表的值，对于原子数小于2o的氯硅烷误差约为10%，对于原子数大于或等于20的氯硅烷误差约为7%。6、氯硅烷表面张力的计算（8）可按作缔合烃方程式计算（精确度＜10%）a=2.12（TKp-T）（dL・dn/M）0.667式中：TKP——临界温度（0K）T——给定温度（0K）dl•dn 液体和蒸汽的密度（g/cm3）M 分子量表面张力a（达因/厘米）与温度t（C）的关系用下式确定：at=a0—Bt式中：a0在C时的表面张力（dn/cm）B温度系数（dn/cm•C）如下：氯硅烷甲基三氯硅烷二甲基二氯硅烷三甲基氯硅烷四氯化硅B值0.11090.10660.10130.1106三氯硅烷甲基二氯硅烷苯基三氯硅烷二苯基二氯硅烷0.12140.13660.09700.09627、氯硅烷的表面张力和粘度（8）化合物表面张力dn/cm液体粘度Cs蒸汽粘度,uP（沸点）20Ctk20Ct.四氯化硅16.31,18.9———115.5三氯硅烷18.3 17.4517.00.250.23104.4苯基二氯硅烷27.218.4—0.39115.0二苯基二氯硅烷m-th-H--th—- 卜宀34.3510.65.170.23110.2甲基苯基二氯硅烷1.350.32105.6甲基乙烯基二氯硅烷—r-th-H--th—- 卜宀——0.5096.11.480.30106.0甲基二氯硅烷19.718.714.60.380.3596.2三甲基氯硅烷19.717.5812.7,15.920.500.4284.6二甲基二氯硅烷19.720.1611.00.500.3896.5甲基三氯硅烷19.720.2411.50.450.36104.6乙基二氯硅烷21.721.515.00.550.490.3696.7二乙基氯硅烷22.3—0.48—87.0乙基三氯硅烷23.716.10.530.35104.3二乙基二氯硅烷29.321.50.740.3396.9三乙基氯硅烷————87.0

8、氯硅烷蒸汽粘度计算（8）按以下方程式计算:卩n=1.286X10-4Mi/2P2i3kp（T/TQ式中：un――蒸汽粘度卩M 分子量PKP 临界压力（kg/cm2）TKp——临界温度（oK） T——蒸汽或气体温度（oK）9、氯硅烷饱和蒸汽压与湿度的关系（1）甲基氯硅烷的饱和蒸汽压计算式：logP=A—B（t+C）或logP=E—D/T式中：P——饱和蒸汽（mmHg） A、B、C、D、E——常数t——温度，（°C） T温度（oK）常数A、B、C、D、E值及适用范围见下表。分子式ABC适用压范围（mmHg）DE适用压范围（mmHg）SiHCl37.091191170246760—201485.707.7612760-1CH3SiHCl27.048421179242760—201484.947.6068760-3SiCl46.972871200236760—201605.447.7463760-3(CH3)3SiCl6.95051191235760—201576.097.647760-10CH3SiCl36.872131167226760—201638.277.7158760-1(CH3)2SiCl27.143531328241760—21648.077.6818760-102）某些氯硅烷饱和蒸汽压力与温度的关系：（5）化合物lgP(mmHg)四氯化硅7.7463—1605.44/T三氯化硅7.7612—1485.70/T甲基二氯硅烷7.6068—1485.70/T三甲基氯硅烷7.6470—1576.09/T二甲基二氯硅烷7.6818—1648.07/T甲基二氯硅烷7.7158—1638.27/T乙基二氯硅烷7.61426—1644/(t+276)三乙基氯硅烷7.25390—1662.9/(t+234)二乙基二氯硅烷7.42603—1636.2/(t+229.5)乙基三氯硅烷7.56820—1564.8/(t+234.6)乙烯基三氯硅烷7.32234—1513/(t+250)甲基乙烯基二氯硅烷7.715—1767.4/(t+273)苯基三氯硅烷7.40343—1949.2/(t+230.2)二苯基二氯硅烷m-th-H--th—- 卜宀7.76387—2555.5/(t+229.5)甲基苯基二氯硅烷—-E-th-H--th 卜宀7.39465—1966/(t+230.1)-二甲基苯基氯硅烷7.47819—1949.4/(t+230.9)甲基二苯基氯硅烷7.72216—2459.2/(t+218.1)甲基氯苯基二氯硅烷9.036—3620/(t+345)

甲基二氯苯基二氯硅烷6.040—1228/(t+117)（3）某些氯硅烷二元系统计算蒸汽压（饱和）的A,B,C常数（20）CH3SiHCl2 SiCl4 CH3SiCl3 SiCl4I II I IIX1ABCX1ABC0.0007.40421442.80.1007.07831274.9245.40.0607.54871572.950.30013.08087291.1656.100.2008.67192369.50.6009.24072877.7391.270.4959.70623204.50.9007.84051744.6293.20.6908.39082103.51.0008.66552380.6345.160.8956.4484887.76CH3SiCl3 (CH3)3SiCl CH3SiHCl2 (CH3)3SiClI I I IX1ABCX1ABC0.1508.23922057.4324.51.00019.641018222.21046.20.5329.7753371.9428.20.9004.1838116.0346.720.8508.57992324.9343.170.5008.91302390.0347.70.2168.40393153.5336.10.1006.70001036.2215.00.006.2424829.4188.610、氯硅烷热容（cp）、导热系数⑴、蒸发热（AH）、生成热（AH0）（8）化合物Cpcal/mol・°C25°Cf・104cal/cm•s•CAHKcal/molAH0Kcal/mol四氯化硅34.74一7.0—153.7 --153.0三氯化硅一一6.35—113二甲基氯硅烷一一5.9—124.8甲基二氯硅烷33.2835.522.96.86.5—99—101三甲基氯硅烷45.2430.982.87.07.05—84.6—91.9甲基三氯硅烷39.1940.813.47.47.3—139.8—139二甲基二氯硅烷41.5842.983.17.5—110.9--108.4乙基二氯硅烷40.040.402.97.67.48—96.0三乙基氯硅烷63.41一9.0—82.0乙基三氯硅烷42.5143.133.07.79.2—134—124.5二乙基二氯硅谷烷51.3251.573.210.09.4—108乙烯基三氯硅烷41.84一8.13一苯基三氯硅烷52.760.32.71010.78—96.5二苯基二氯硅烷67.812.714.014.2—52.211、氯硅烷的热容计算(8)可用经验方程式计算Cp=b/W2.3(cal/g・°C)式中:b――适用于同系(化合物)的系数w 系数w系数由以下方程式定：w=0.1745—0.0838Ty式中:Ty给定温度b由下式定:对于非缔合物的液体b=2.5X10—3(0.82-dkp)对于缔合液体b=17.5X10—3(0.377-dkp)式中:dkp,临界温度(g/cm3)对于Tyv0.65和Pv10Kg/cm2时，方程是适用的.12、 氯硅烷的导热系数计算(8)按以下方程式计算:入=3.59X10—3CpdN(dW/M)1/3式中：入导热系数(cal/cm•s•C)Cp——热容(cal/g・C)dW 液体密度(g/cm3)M 分子量由此计算准确度±20%13、 氯硅烷汽化热计算(8)按K—K方程式计算:dP/dT=AHI/ThAV式中:P 蒸汽压(Kg/cm2)Th——饱和温度(oK)AH 汽化热(cal/mol)I——热功当量，等于41.3Kg/calAV 饱和蒸汽和液体间的克分子体积差(cm3/mol)若已知临界值,则AH=[RTm^(P/Pkp)]/[T/Tkp—1]14、 氯硅烷的临界参数(8)1)用近似方程确定临界参数TKP=1.5T式中:TKp——临界温度(0K)T——在790mmHg下的沸点(oK)误差X2~3%,在个别情况下比较大.2)用严格法计算临界温度T/TKp=EAt/100式中:工At――原子，基团和结构因素的总值误差为1.5%临界参压力的计算:Pkp=M・104/(工Ap)2式中：M 分子量EAP――原子，基团和结构因素总值.误差为7.5%临界压力，温度，体积三者关系:PKP=21.8TKP/VKP式中: 临界体积(cm3/mol)5)有关氯硅烷的临界参数化合物Tkp 0KPKP Kg/cm2VKPcm3/moldKP g/cm3三氯硅烷四氯化硅甲基二氯硅烷甲基三氯硅烷二甲基二氯硅烷三甲基氯硅烷二氯硅烷三氯硅烷二乙基二氯硅烷三乙基氯硅烷苯基氯硅烷二苯基二氯硅烷469495507506506475518518520520498498525560560600598620711880100071541.237.037.038.554.935.534.433.531.631.23533.232.930.030.226.828.022.518.526.8268254326.33302912903393403503503633603504004024604565254806307804850.5030.53三苯基氯硅烷甲基苯基氯硅烷

乙烯基氯硅烷56054.0374—15、氯硅烷的闪点tBCn、自燃点tCB和可燃性界限⑻大多数氯硅烷是倾向于易燃液体,其参数如下:化合物tBcn，€t °Clcb,C可燃性体积极限可燃性温度极限下上下上三氯硅烷低于一501751.290.5—5638甲基二氯硅烷低于一701750.291.0低于一7037三甲基氯硅烷—28.0445,395———2830甲基三氯硅烷6.04088.099.03.064二甲基二氯硅烷—28.03800.839.3—41.042乙基二氯硅烷低于一702200.258.0低于一7057二乙基二氯硅烷—6.02950.277.5—18122乙基三氯硅烷14.0——————————苯基二氯硅烷4.0390——1.0169苯基三氯硅烷49.05080.377.549170二苯基二氯硅烷m-th-H--th—- 卜宀400甲基苯基二氯硅烷384900.25.720111甲基二苯基氯硅烷72480——72200甲基乙烯基二氯硅烷—123000.787.0—358716、相对挥发度的系数的计算(8)可用loga=At/Tkun(7.30-1.15logP+Tkun/179logP)计算式中:At——组分对沸点差Tkun-—混合物的平均沸点(oK)P——系统压力(mmHg)CH3SiHCl2--SiCl4 SiCl4--CH3SiHCl2I II I IIP=760mmHg P=760mmHgt,CX1Y1t,CX1Y141.11.0001.00040.750.95350.96942.20.8950.92641.750.8250.88244.40.6900.76543.150.6900.78546.60.4950.60244.950.5450.66448.60.4000.52047.150.3880.53050.20.2950.42050.550.2300.35852.40.2000.31253.050.1180.19853.050.1450.25054.20.1000.18055.50.0600.125

56.80.0000.000SiCl4－－CH3SiCl3 SiCl4－－(CH3)3SiClI II I IIP=760mmHg P=760mmHgt,°cXiYit,cX1Y56.80.0000.00056.50.9560.93757.50.1000.09055.80.8660.83258.30.2000.18255.00.7450.71759.00.3000.25854.80.6590.63959.80.4000.33454.7*0.6080.59860.70.5000.42454.70.5510.54861.60.6000.51054.80.4510.47262.60.7000.61554.90.4110.43063.60.8000.72855.50.2620.29564.70.9000.85555.70.2120.24865.50.9600.93356.00.1820.21865.91.0001.00056.90.0560.072*为共沸温度SiCl4－－(CH3)2SiCl2IIP=748mmHgt,cX1Y1Y1Y2「265.60.1920.2131.2981.0151.98063.250.2360.3611.2431.0151.93159.650.5000.5951.0991.1581.48257.600.7510.7971.0191.2111.29856.950.9000.9201.0021.2281.299(CH3)2SiHCl－－CH3SiHCl2IIP=760mmHgt,cX135.40.9000.91836.00.8000.83336.80.6500.70037.650.5000.55538.70.3500.40539.750.2000.24040.450.1000.122CH3SiCl3－－(CH3)2SiCl2

IIP=760mmHgt,°IIP=760mmHgt,°cX1Y70.020.020.023669.900.040.047069.800.060.070269.680.080.093169.570.100.115769.040.200.226168.570.300.331968.110.400.434067.110.500.533067.300.600.629566.930.700.724366.610.800.817266.440.850.863466.290.900.909066.230.920.927366.160.940.945466.100.960.963666.040.980.9818&K2a121.180.99631.18431.13050.96731.16641.0340.9191.1241.00180.911.109HSiCl3－－C6H6 CH3SiHCl2－－(CH3)3SiClI II I IIP=760mmHg P=760mmHgt,cX1Y1t,cX1Y131.91.0001.00041.11.0001.00034.70.8950.93541.50.9750.98741.80.6400.89042.80.9000.94047.70.5000.84244.60.7800.86056.90.3000.68848.70.5000.58060.60.2300.60854.10.2160.40068.00.1530.41256.10.1000.20076.00.0400.11557.60.0000.000CH3SiCl3－－(CH3)2SiCl2 (CH3)2SiHCl－－(CH3)3SiClI I I IP=760mmHg P=760mmHgPmmHgt,ca12t,cX1Y111420.11.14636.820.900.0.95921133.81.13838.500.8000.91326040.01.13540.950.7000.852

41052.01.13143.300.6000.78060063.11.12545.60.5000.69675270.01.12347.450.4000.59850.750.3000.47553.050.2000.32555.500.1000.168CH3SiCl3－－(CH3)3SiClI IIP=760mmHgt,°CX1Y1Y2a1264.900.9000.8810.9970.9281.49964.100.7500.7050.9900.9501.50562.200.5000.4320.9700.9761.50959.900.2500.1940.9520.9951.51158.420.1000.0740.9320.9991.520(CH3)3SiCl－－(CH3)2SiCl2IIP=760mmHgt,CX1Y1Y1Y2a1269.000.1000.1350.9350.9991.49967.200.2500.3120.9350.9961.50564.020.5000.6000.9780.9801.50960.780.7500.8270.9970.9561.51158.80.9000.9370.9990.9361.520SiCl4－－CCl4 SiCl4－－CH3CNIIP=760mmHgIIP=760mmHgt,CX1Y1t,CX1Y157.21.0001.00056.91.0001.00058.10.9250.95352.30.9500.80060.00.7830.85350.40.9000.73861.60.6700.78049.40.8500.70563.10.6060.72149.10.8000.69464.20.5400.66549.10.7000.69467.20.3670.50549.10.6000.69468.70.2760.41049.10.5000.69471.20.1930.30049.10.4000.69472.80.1220.20249.10.3000.69474.40.0660.11550.20.2000.69476.50.0000.00050.90.1500.690

54.262.081.50.1000.0500.0000.6600.5300.000[共沸物(CH3)3SiCl—SiCl4]――CH3SiHCl2I IIP=760mmHgt,°cX1Y1XSiCl4X三甲基氯硅烷YSiCl4Y三甲基氯硅烷41.10.0000.0000.0000.00041.90.0270.0230.0160.01443.80.1350.1150.0920.07845.40.2160.1840.1520.12846.80.2710.2290.2110.17949.80.3790.3210.3190.27151.00.4220.3580.3730.31752.90.4370.4130.4590.38954.00.5140.4360.4980.42254.80.5410.4590.5410.459共沸物组成:SiCl4 54.07 mol%(64.8Wt%)(CH3)3SiCl45.93mol%(35.2Wt%)CH2=CHSiHCl3——CH2=CHCH3SiCl2IIP=760mmHgt,cX1Y190.71.0001.00090.90.9000.90391.30.7500.76291.40.7000.71891.80.5000.52292.30.3000.32092.60.2000.21592.80.1000.11593.00.0000.000C6H5SiHCl2——C6H5SiCl3 C6H5SiHCl2——C6H5SiCl3

P=760mmHg P=760mmHgt,°cX1Y1t,cX1Y1184.40.9000.932117.80.9000.930186.90.7500.822119.80.7500.828191.00.5000.504122.80.5000.610196.00.2500.349126.50.2500.359199.00.1000.153128.90.1000.160C6H5SiHCl2－－C6H5SiCl3 (CH3)2C6H5SiCl－－6526533265CH3C6H5SiCl2C6C6H5SiCl3－－(C6H5)2SiCl2III II I IIP=40mmHg P=760mmHgt,cX1Y1t,cX1Y193.50.9000.936195.10.9000.91995.30.7500.832196.20.7500.81698.30.5000.627198.50.5000.555101.70.2500.365201.10.2500.272104.10.1000.165202.30.1000.122(CH3)2C6H5SiCl－－CH3C6H5SiCl2 (CH3)2SiCl2－－C2H5SiHCl2I I I IP=50mmHg P=758mmHgt,cX1Y1t,cX1Y1107.70.9000.92270.80.8310.883108.60.7800.82571.750.6640.70110.40.5000.57072.600.4960.53112.40.2300.28273.550.3290.358113.30.1000.12774.450.1660.196t,cX1Y1t,cX1Y179.30.760.988139.80.750.9888.80.500.980151.50.500.957105.60.250.955171.40.150.900(C6H5)2SiCl2—-(C6H5)3SiCl2(C6H5)2SiCl2——(C6H5)3SiClIIIIP=11mmHgP=40mmHgt,cX1Y1t,cX1Y1C6H5SiCl3－－(C6H5)2SiCl2IIP=10mmHg P=100mmHg157.00.9000.993193.40.9000.985159.50.7810.981196.10.7810.962166.00.5420.945203.20.5420.894178.70.2830.790216.70.2830.748194.00.1000.505232.50.10000.45618、甲基氯硅烷热力学函数(21)气态CH3SiCl3ToKC0p©0Cal/mol・°CS0H°t_H0°Cal/molH0tKcal/molZ0tKcal/mol00000—138.8—138.8298.1524.4766.7983.915104—141.0—126.530024.5366.8984.065151—141.0—126.540027.4272.1391.547764—141.4—121.550029.6176.6699.9010620—141.8—116.460031.3480.68103.4513662—142.0—111.370032.7584.29108.4216891—142.2—106.380033.9387.58112.8520216—142.3—101.190034.9590.62116.9223670—142.4—96.0100035.8293.49120.6827190—142.4—90.8110036.5896.12124.1430822—142.4—85.6120037.2398.54127.3531512—142.3—80.4130037.80100.92130.3538259—142.3—75.2140038.29103.13138.1842070—142.2—70.1150028.72105.22135.8345915—142.1—65.0气态(CH3)2SiCl2T0KC0p©0Cal/mol•CS0H°t—H0°Cal/molH0tKcal/molZ0tKcal/mol00000—111.0—111.0298.1527.2767.6486.215537—115.0—94.830027.3567.7586.375586—115.0—94.740031.6273.4994.618448—116.0—87.750035.1878.52102.0011740—116.9—80.660038.1383.03108.7215414—117.6—73.370040.6487.17114.8719390—118.0—65.9

80042.7991.00120.5223616—118.3—58.490044.6794.85125.7328035—118.5—50.9100046.3097.93130.5632630—118.6—43.4110047.73101.10135.0637356—118.7—35.9120048.98104.10139.2742204—118.6—28.3130050.07106.96143.2347151—118.5—20.8140051.62109.88146.9852220—118.4—13.3150051.85112.28150.5357375—118.3—5.8气态（CHJ3SiClToKC0p©0Cal/mol・°CS0H°t-H0°Cal/molH0tKcal/molZ0tKcal/mol00000—79.0—79.0298.1530.7865.9985.895933—84.7—58.030030.8966.1086.075911—84.7—58.040036.4072.3395.729356—86.4—48.950041.1777.89104.4013255—87.5—39.260045.2582.99112.2817574—88.6—29.470048.7587.69119.5122274—89.3—19.680051.8292.09126.2427320—89.8—9.690054.5296.22132.5032652—90.1+0.5100056.89100.15138.3538200—90.310.6110058.99103.98143.9844000—90.520.5120060.81107.53149.2050004—90.530.6130062.41110.92154.1356173—90.440.7140063.80114.18158.8162488—90.350.81500.65.03117.3163.2568925—90.260.919、液相密度e'和饱和蒸汽密度e'、(51)t,Ce'g/cm3e''g/cm3t,Ce'g/cm3e''g/cm3二甲基二氯硅烷乙基三氯硅烷200.00.7140.090220.00.8310.081210.00.6910.101238.00.7870.102226.00.6220.148255.00.7330.126234.00.5870.172265.00.6860.158

239.0241.0243.0245.0245.4245.8246.30.5480.5380.5100.4800.4700.4480.4500.2010.2100.2350.2600.2690.2890.288272.0275.6279.0282.0283.0284.0285.4285.90.6450.6170.5950.5690.5440.5240.4940.4700.1890.2110.2270.2520.2720.2910.3200.344t,°ce''g/cm3e''g/cm3三甲基氯硅烷200.0210.0216.0219.2221.0222.0222.4222.8223.40.5250.4800.4450.4200.4000.3840.3790.3700.3590.1040.1350.1620.1820.1990.2140.2180.2270.23720、CH3SiHCl2(1)—(CH3)3SiCl二元体系饱和蒸汽的压力mmHg,密度Y・10-3(g/cm3),分子量(M)(48)X,=1 d20尸1.1049X,=0.500 d204=0.9704t,cP,mmHgY・10-3Mt,cP,mmHgY・10-3M19.9346.32.2217117.320.4263.21.6163112.525.0426.62.6709116.425.5325.71.9630112.229.7508.63.1539117.130.0390.72.3185112.435.1615.03.8013118.836.6494.32.9188114.137.0660.34.0543118.836.7496.32.9200113.739.2710.74.3136118.341.5587.33.4101114.040.6746.64.5034118.146.1688.43.9436114.141.0761.04.5932118.347.5722.84.1303114.341.6775.54.6764118.448.6760.04.3100114.342.1787.04.7266118.148.9770.34.3822114.3X,=0.900 d204=1.0778X,=0.216 d204=0.9055t,cP,mmHgY・10-3Mt,cP,mmHgY・10-3M36.5615.33.7204116.430.1332.91.9354109.937.0626.13.7661116.835.4403.82.3207110.641.0727.24.3625117.540.5485.02.7554111.241.5731.24.3774117.545.3573.33.2261111.7

42.8760.04.5500118.250.5686.23.8262112.643.3774.44.6263117.851.4703.43.9186112.846.0853.05.0230118.353.5752.64.1690112.953.8760.04.2050112.854.24.2615112.4X,=0.100 d204=0.8784X,=0 d204=0.858t,°cP,mmHgY・10-3Mt,cP,mmHgY・10-3M21.2205.620.1185.41.1122109.730.7304.420.2188.01.1247109.540.5441.130.3284.01.6319108.849.5607.030.4284.91.6309108.449.6608.435.6349.71.9541107.655.3736.036.1353.32.0006109.255.5740.340.3407.62.2842109.656.2766.245.5498.82.7377109.150.4591.03.1761108.555.0687.83.6878109.857.4745.0一一57.6760.04.0000109.657.7765.04.0611109.521、CH3SiHCl2—SiCl4二元体系饱和蒸汽压力mmHg，密度Y・10-3(g/cm3),分子量(M)X】=0.000 d204=1.483X,=0.06 d204=1.4586t,cP,mmHgY・10-3Mt,cP,mmHgY・10-3M19.9189.51.7165171.421.2222.81.9348159.525.5240.12.2007170.725.9270.02.3296160.930.2290.32.6138169.830.0317.02.6993161.034.9347.43.0774170.234.9378.93.1975162.140.3423.33.7188171.840.05455.93.8298164.145.4509.04.4246172.744.9539.14.4806164.949.7591.85.1030173.750.25648.65.3418166.252.2642.95.5004173.654.6742.16.0872167.754.4691.35.8803173.855.5760.06.2400167.956.6724.06.2810174.158.0828.86.7574168.456.8760.06.3000174.2X,=0.69 d20尸1.2477X,=0.895 d2o尸1.1561t,cP,mmHgY・10-3Mt,cP,mmHgY・10-3M19.9314.42.2049128.220.4344.92.2297118.425.6375.42.6485130.923.3382.02.4745119.8

29.2448.23.1644133.226.6435.62.7782119.233.4521.33.6141132.629.9493.53.1401120.337.6602.74.1463133.433.4558.63.5267120.740.3661.44.5033133.436.3618.13.8739121.043.45735.24.9824133.939.3685.24.2693121.444.4760.05.1300134.041.4735.14.5690122.045.5786.95.1389134.242.2760.04.7250122.342.8770.34.7916122.1X,=0.200d20尸1.4064X,=0.495 d204=1.3110t,°cP,mmHgY・10-3Mt,cP,mmHgY・10-3M20.6244.21.9922149.520.6296.82.2316137.824.7288.32.3104148.925.3356.52.6351137.630.9364.52.8675149.229.3415.13.0385138.335.2424.33.3066149.935.4516.93.7436139.440.2506.73.9223151.339.55586.54.2719139.744.4586.54.9923151.741.9646.24.6020140.049.1685.45.2309153.543.5684.64.8519140.051.2724.85.5814155.846.3751.65.3181140.852.4760.05.8000153.846.6760.05.3700140.952.6768.15.8482154.047.7785.85.5340141.022、CH3SiCl3—SiCl4二元体系饱和蒸汽压力mmHg,密度丫・10-3(g/cm3),分子量(M)(48)X,=1.000d20尸1.2770X,=0.700 d20尸1.2890t,cP,mmHgY・10-3Mt,cP,mmHgY・10-3M23.5162.11.2592143.124.6180.61.4644150.730.1210.31.6195145.730.4227.31.8120150.940.2308.62.3356148.039.6322.22.5230152.849.8440.13.2804150.245.15394.93.0470153.255.6536.83.9516151.049.8467.13.5802154.460.25626.34.5938152.654.8553.84.1983155.165.9760.05.5321154.060.0654.24.9186156.266.4763.25.5526154.164.7760.05.6616157.065.2774.75.7676157.1X]=0.600d204=1.3402X]=0.300 d204=1.4080t,cP,mmHgY・10-3Mt,cP,mmHgY・10-3M

20.55179.01.4906152.519.9197.31.7362160.929.5252.22.0748155.329.45276.82.3776162.240.1371.22.9925157.536.65357.73.0234163.549.15511.24.0504159.340.15406.43.4123164.153.75599.24.7291160.945.15481.94.0076165.158.3695.05.4409161.949.85570.04.7022166.261.6760.05.9288162.956.8715.35.8605168.662.65772.56.0281163.059.0760.06.2026169.163.1807.56.2950163.559.6782.56.3892169.5X]=0.100d204=1.4595X]=0.100 d204=1.4595t,°cP,mmHg10-3Mt,cP,mmHg10-3M21.25203.91.8383165.651.8628.45.3176171.530.3287.72.5524167.855.45707.95.9538172.435.0347.63.0374168.057.5760.06.3856173.340.0417.13.6109169.158.15771.46.4780173.645.1498.94.2845169.723、CH3SiCl3—（CH3）3SiCl二元体系饱和蒸汽压力mmHg,密度Y•10-3(g/cm3),分子量(M)X,=0.850d20尸1.2087X,=0.532 d20尸1.0880t,cP,mmHg10-3Mt,cP,mmHg10-3M23.75175.31.3248140.021.9183.71.224012229.65220.01.6508141.629.1239.61.5620122.340.1326.62.3875142.839.25349.52.2142123.45.0390.82.8261143.549.2492.63.100412650.45475.93.9993144.253.3567.53.552012756.1573.64.0501145.055.95620.53.856312760.3659.74.6295146.061.4738.64.559312864.7760.05.2850146.662.0760.04.692012765.2770.55.3568146.763.6790.24.8711127X^O.850d2o4=1.2O87t,cP,mmHg10-3M20.55189.01.1425110.629.50272.91.6055111.235.1328.61.9234112.640.0393.32.2783113.247.1505.82.8849113.95