用英语写学术论文的目的主要有两个

用英语写学术论文的目的主要有两个，一是参加国际学术会议，在会议上宣讲，促进学术交流；二是在国际学术刊物上发表，使国外同行了解自己的研究成果，同样也是出于学术交流的目的。

不同的学科或领域、不同的刊物对论文的格式有不同的要求，但各个领域的研究论文在文体和语言特点上都有许多共性。了解了这些语言共性，便会起到触类旁通的作用。

对我国青年学者或学生来说，用英语写作的难点不是没有写作材料，不是不熟悉专业词汇，也不是没有打下良好的英语基础。用英语写论文难，是因为不太了解学术英语的语言特点。关于学术英语写作的语言技巧，我们已在第一部分作了较详细的介绍。此部分讨论学术论文写作的方法，包括学术论文写作中常用的句型结构，我们都在此作较详细介绍，以便读者模仿练习，将写作工作化难为易。

一般来说，一篇完整规范的学术论文由以下各部分构成：

Title(标题)

Abstract(摘要)

Keywords(关键词)

Tableofcontents(目录)

Nomenclature(术语表)

Introduction(引言)

Method(方法)

Results(结果)

Discussion(讨论)

Conclusion(结论)

Acknowledgement(致谢)

Reference(参考文献)

Appendix(附录)

其中Title，Abstract，Introduction，Method，Result，Discussion，Conclusion，Reference等八项内容是必不可少的(其他内容根据具体需要而定)。在这八项内容中，读者最多的是Title，Abstract和Introduction部分，读者会根据这些内容来决定是否阅读全文。也就是说，一篇研究论文赢得读者的多少，在很大程度上取决于Title，Abstract和Introduction写得好坏。因此这三项内容将各分章详细加以讲述。

学术论文的正文一般包括Method，Result，Discussion三个部分。这三部分主要描述研究课题的具体内容、方法，研究过程中所使用的设备、仪器、条件，并如实公布有关数据和研究结果等。Conclusion是对全文内容或有关研究课题进行的总体性讨论。它具有严密的科学性和客观性，反映一个研究课题的价值，同时提出以后的研究方向。

标题的写法

论文标题是全文内容的缩影。读者通过标题便能够预测论文的主要内容和作者的意图，从而决定是否阅读全文。因此，为了使文章赢得有关领域里众多的读者，论文的标题必须用最精炼的语言恰如其分地体现全文的主题和核心。本章主要探讨英语学术论文标题的语言特点及写法。

6.1标题的长度

标题单词总数名词数介词数形容词等

1)FireResistantSteelsforConstruction:Design,PropertiesandMicrochemistry9612

2)DampingCapacityofShapeMemoryAlloy6510

3)MicroelectronicAssemblyandPackagingTechnology:BarriersandNeeds8503

14)SolidOxideFuelCell:ASurvey6402

5)ProgressonFuelCellandItsMaterials7412

6)ComputerSimulationandExperimentalStudyonColdShutDuringMoldFilling11524

英语科技论文中，标题不宜过长，大多为8—12个单词左右。表6.1和表6.2列出了一些学术论文的标题的字数及词性统计资料。

表6.1学术论文标题中字数及词性统计(一)

标题单词总数名词数介词数形容词等

7)OntheFatigueLifePredictionofSpotWeldedComponents9522

8)AbsorbableImplantsinFingerFractures:ABiomechanicalandComparativeStudy10414

9)AcousticsofLongSpaces:TheoryandApplication74l2

10)InvestigationofAirBagsDeploymentForcesonOut-of-PositionOccupant720

11)Semi-IntegralAbutmentsinBridgeSeismicDesign63l2

12)HighSpeedFlowSensorandFluidPowerSystemsModelling9702

13)SurfaceEngineeringofPolymersforBiomedicalApplication742l

14)TheDesignofUser-OrientedDatabaseofMaterialPerformanceBasedonClient/ServerModel13733.

15)ImpingementHeatTransferofDieselFlamesinaRapidCompressionandExpansionMachine13823

平均（约）95.51.52

来源：中国第三届青年学术会议论文集，材料科学与工程技术。北京：中国科学技术出版社，1998。

标题单词总数名词数介词数形容词等

1)UseofVitaminandMineralSupplementsbytheElderly9522

2)DietarySupplementandBodyImageinFemaleCollegeStudents96l2

3)KnowledgeofCardiovascularDiseaseinUniversityStudents742l

4)SevereWeatherandtheAutomobile5203

5)HeavyWeightContenders：aLookatFat7412

6)A1uminutn：IsItHazardoustoYourHealth?7313

7)TheUseofTechnologyinHigherEducationPrograms:aNationalSurvey11524

8)SustainingtheDiscussion：EcologyintheHumanitiesClassroom84l3

9)DiversityintheFutureWorkForce641l

10)ModelsofSustainingHumanandNaturalDevelopmentinanUrbanEnvironment11326

11)VariationinAcornProductionandChemistryofTwoOakOakSpecieswithrespecttoTopography14851

12)TraditionalVersusAdultStudiesStudents:theCollegeExperience8503

13)SolvingtheFoodShortageProbleminNortheastandNorthwestAfricaUsingHydroponicallyGrownPeanuts&SolarlyDistilledWater181017

14)ImpactofCancer：CopingProcessandQualityofLife9522

标题单词总数名词数介词数形容词等

15)ApplicationofDigitalImageAnalysisforHelpingtoDefinethePrognosisOfSelectedMalignancies14635

平均(约)9.551.53

来源：TheOhioJournalofScienceVol.96(2)

表6.1中列出的是中国科协第三届青年学术年会论文集中15篇英文论文的标题，平均9个单词。表6.2列出的是从TheOhioJournalofScience中随机挑出的15篇论文的标题，平均9．5个单词。要想用有限的字数概括全文的主旨，用词必须仔细斟酌和推敲，选择最简练、最准确、最贴切的词来表达全文的主要内容。

6.2标题的用词

从表6.1和表6.2可以看出，标题中用得最多的是名词(包括动名词)，平均占总单词数的50％～60％之高。其中有的标题中80％以上的词为名词。除名词外，用得较多的是介词，有时使用形容词、冠词、连词、副词。

标题是对全文重要内容的高度概括，因此用词要贴切、中肯，不能有任何随意性。为了便于检索，标题中所用的词尽量使用表达全文内容的关键词，下面举例说明标题中关键词的出现率。例1

a．标题：OntheFatigueLifePredictionofSpotWeldedComponents

b．关键词：fatiguespotweldautomobilelifeprediction·

疲劳点焊汽车寿命预测

b．标题：ComputerSimulationandExperimentalStudyOnColdShutDuringMoldFilling

关键词：moldfillingcomputersimulationcoldshutcasting

铸件充型计算机模拟冷隔铸造

c．标题：InvestigationofAirBagsDeploymentForcesonOut-ofPositionOccupant

关键词：airbagout-of-positionoccupant

安全气囊离位乘员

c．标题：NewFatigueTestandStatisticalMethodforMetallicMaterialsUsedinVehicleTransmissions

关键词：fatigueteststatisticalmethodtestspecimens

疲劳实验统计方法试样分析：

例1a中，有4个关键词，在标题里出现了3个，而标题中出现的两个名词词组fatiguelifeprediction和spotweldedcomponents都是文章的关键词。

在例1b中，有4个关键词，其中3个出现在标题里。标题中用了4个名词词组：computersimulation，experimentalstudy，coldshut，moldfilling，其中3个是关键词。

例1c中有2个关键词，在标题里都出现。标题中用了3个名词或名词词组：investigation，airbagsdeploymentforces，out-of-positionoccupant，其中两个是关键词。

例1d中有3个关键词，其中2个出现在标题里。

从上面四个例子可以看出，标题中的用词多是文章的关键词，明确、精炼，将文章的主要内容予以高度概括。

标题中用得最多的是名词或名词词组，一般不用动词或动词词组。如果用动词，则用非谓语动词形式，如动名词、不定式或分词。

从表6.1和表6.2可以看出，在标题平均9个单词中，有5.5个是名词，占一半以上。除名词外，用得较多的是介词of，in，on等，再其次是连词and和形容词。偶尔也需要用一些其他词性的词，如副词、冠词等。

6.3标题的结构

学术文章的标题主要有三种结构：名词性词组(包括动名词)，介词词组，名词词组介词词组。间或也用一个疑问句作标题(多用在人文社会科学领域)，但一般不用陈述句或动词词组作标题。

(1)名词性词组

名词性词组由名词及其修饰语构成。名词的修饰语可以是形容词、介词短语，有时也可以是另一个名词。名词修饰名词时，往往可以缩短标题的长度。以下各标题分别由两个名词词组构成。

例2

a．SevereWeatherandtheAutomobile

(名词词组)(名词词组)

b．SoilBehaviorandCriticalSoilMechanics

(名词词组)(名词词组)

c．HighSpeedFlowSensorandFluidPowerSystemsModelling

(名词词组)(名词词组)

d．TraditionalVersusAdultStudiesStudents:theCollege

(名词词组)(名词词组)

Experience

(2)介词词组

介词词组由介词十名词或名词词组构成。如果整个标题就是一个介词词组的话，一般这个介词是“on”，意思是“对……的研究”。

例3

a．OntheDistributionofSoundinaCorridor

b．OntheCrushingMechanismofThinWalledStructures

(3)名词／名词词组介词词组这是标题中用得最多的结构。

例4

a．FundamentalsofFlowMeasurement．

(名词)(介词词组)

b．ScatteredSoundandReverberationonGityStreetsandinTunnels

(名词词组)(介词词组)

c．DietarySupplementandBodyImageinFemaleCollegeStudents

(名词词组)(名词词组)(介词词组)

d．KnowledgeofCardiovascularDiseaseinUniversityStudents

(名词)(介词词组)(介词词组)

e．DiversityintheFutureWorkForce

(名词)(介词词组)

f．ProgressonFuelCellandItsMaterials

(名词)(介词词组)

g．DampingCapacityofShapeMemoryAlloy

(名词词组)(介词词组)

h．AcousticsofLongSpaces：TheoryandApplication

(名词)(介词词组)(名词词组)

i.InvestigationofAirBagsDeploymentForces

(名词)(介词词组)

onOut-of-PositionOccupant

(介词词组)

j.ModelsofsustainingHumanandNaturalDevelopment

(名词)(介词词组)inanUrbanEnvironment

(介词词组)

标题中的介词词组一般用来修饰名词或名词词组，从而限定某研究课题的范围。这种结构与中文的“的”字结构相似，区别是中文标题中修饰语在前，中心词在后。英文正好相反，名词在前，而作为修饰语的介词短语在后。

例5

a．ProgressonFuelCellandltsMaterials

燃料电池及其材料进展

b．ComputerSimulationandExperimentalStudyOnCo1dShutDuringMoldFilling

铸件充型中冷隔过程计算机模拟及其实验研究

c.OntheFatigueLifePredictionofSpotWeldedComponents

点焊汽车构件疲劳寿命预测

c．InvestigationofAirBagsDeploymentForcesonOut-Of-PositionOccupant

安全气囊对离位乘员作用力的分析与研究

(4)其他形式

对于值得争议的问题，偶尔可用疑问句作为论文的标题，以点明整个论文讨论的焦点。

例6

a．DoElectromagneticFieldsAffecttheWayPlantsGrow?

b．DoSpecificAmbientOdorsEnhanceShortTermMemoryFunction?

c．130HeterotrophicProtozoaReleaseMajorQuantitiesOfDissolvedOrganicPhosphorousinLakeWater?

有的标题由两部分组成，用冒号(：)隔开。一般来说，冒号前面一部分是研究的对象、内容或课题，比较笼统，冒号后面具体说明研究重点或研究方法。这种结构可再分为三种模式。

模式1研究课题：具体内容

例7

a．MicroelectronicAssemblyandPackagingTechnology：BarriersandNeeds

b．FireResistantSteelsforConstruction：Design，PropertiesandMicrochemistry

c．AcousticsofLongSpacesTheoryandApplication

d．ImpactofCancer：CopingProcessandQualityofLife

模式2研究课题：方法/性质

例8

a．SolidOxideFuelCell：ASurvey

b.AbsorbableImplantsinFingerFractures.ABiomechanicalandComparativeStudy

c.TheUseofTechnologyinHigherEducationPrograms:aNationalSurvey

d.DevelopmentofNewPublicWaterSupplyWell-fieldsUsingElectromagneticConductance:TwoCaseStudies

模式3研究课题：问题焦点

a.Aluminum:IsItHazardoustoYourHealth?

b.Noise:Good?Bad?MaybeBoth?

c.Manure:FriendorFoe?

思考题

下面这写论文标题是否合适？如果不合适，请修改。

1.AuditoryPerspectivesofDifferentTypesofMusic

2.ElectromagneticFieldsHaveHarmfulEffectsonHumans

3.HowtoUseWaterResourcesforIrrigationinSemiaridLand

4.WaterQualityCanBeProtectedThroughtheSuccessfulIntegrationofResearchandEducation

5.TheSingleCommunityConcept:AModelforAdultEnvironmentalEducation

6.PhysicsandArt:ConceptualLinkagesCanBeUncovered

7.DiamondIsUsedforElectronicDevices

8.YellowFever'sEffectonTransportationandCommerce

9.TheNatureofStudentScienceProjectIsComparedwithEducationalGoalsforScience

10.AQualitative/QuantitativeAnalysisoftheAdministrativeManagementInstituteatCornellUniversity

11.TheAmericansWithDisabilityActandItsApplicability

totheMentallyIll,HumanImmune-DeficiencyVirusandAcquiredImmuneDeficiencySyndromePopulations:AStatisticalAnalysis

参考答案

下面这写论文标题是否合适？如果不合适，请修改。

1.AuditoryPerspectivesofDifferentTypesofMusic(合适)

2.ElectromagneticFieldsHaveHarmfulEffectsonHumans(不合适）

改为：HarmfulEffectsofElectromagneticFieldsonHumans

3.HowtoUseWaterResourcesforIrrigationinSemiaridLand（不合适)

改为：UsingWaterResourcesforIrrigationinSemiaridLand

4.WaterQualityCanBeProtectedThroughtheSuccessfulIntegrationofResearchandEducation(不合适)

改为：ProtectingWaterQualityThroughtheSuccessfulIntegrationofResearchandEducation

5.TheSingleCommunityConcept:AModelforAdultEnvironmentalEducation(合适)

6.PhysicsandArt:ConceptualLinkagesCanBeUncovered（不合适）

改为：PhysicsandArt:UncoveringConceptualLinkages

7.DiamondIsUsedforElectronicDevices(不合适)

改为：UseofDiamondforElectricDevices

8.YellowFever'sEffectonTransportationandCommerce(合适）

9.TheNatureofStudentScienceProjectIsComparedwithEducationalGoalsforScience(不合适)

改为：TheNatureofStudentScienceProjectsinComparisontoEducationalGoalsforScience

10.AQualitative/QuantitativeanalysisoftheAdministrativeManagementInstituteatComellUniversity(合适)

11.TheAmericansWithDisabilityActandItsApplicabilitytotheMentallyIll,HumanImmune-DeficiencyVirusandAcquiredImmuneDeficiencySyndromePopulations:AStatisticalAnalysis(不合适)

改为：TheAmericansWithDisabilityActandItsApplicabilitytotheMentallyIll,HumanImmune-DeficiencyVirusandAIDSPopulations:AStatisticalAnalysis

英文技术论文写作要领及常犯文法错误范例

作者：林正平

一、为何要用英文写科技论文？

1.英文科技论文是国际通用语言。

2.英文文法结构严谨，可以写出条理清晰、文字简洁的科技论文。

二、一般人常有的疑问和常犯的毛病

1.该用现在式还是过去式？

a、讲解实验结果和数据和表达自己想法时用现在式，好比与读者对谈，可使文章更为生动。

b、说明有关实验的过程和动作时须用过去式。

c、阐述理论时用现在式，因为你必须相信那些理论是真理，不会过时的。

2.每一章节的第一句必须写下最重要的观点或结论，皆下来的句子都是根据它

来做逻辑辩证，这与一般文章的写法大为不同。逻辑辩证一定要够严谨，不可有跳跃性的思考，否则会减低了文章的可信度和说服力。

3.实验数据太多，文字太少也是一般人常犯的毛病。其实作者应该很清楚自己要表达的论点和别人可能有的反驳意见，所附上的数据和图表数量只要足够支持自己的论点即可，倒不用为了完整性全部都附上。

4.一般人写英文科技论文常有很多赘词，有时多出很多句子和段落都是在重复前面已提过的事情。反复检查删去赘词赘句可以让文章更为简洁。

5.文章可读性的重要不亚于作者要表达的内容，作者常常忽略了大多数来自别的领域的读者。增加可读性的要领是：a.交代背景；b.深入浅出；c.少用小区域流传的专有名词；d.讨论原理和机制时回归基础科学的说法。

6.既然写英文科技论文这么困难，为什么还要写呢？

A．身为半导体公司的工程师，这是我们的专业，就像音乐演奏家为了上台演奏，须经过百般磨练是一样的道理。

B.我们一定要坚持一个信念，那就是好的实验结果或观点一定要发表出来和别人分享，唯有经过所有人的检验才能显示出其价值。这也是科学的根本精神。

7.技术论文在描述实验步骤与结果时为了强调其客观性常使用被动语态，尽量不用“We”,“Theauthors”或“I”作主词。

三、冠词范例

1.Self-alignedsilicideprocesshasbeendeveloped.→Aself-alignedsilicideprocesshasbeendeveloped….（我们常常忘记”不定冠词”）

2.InthescalingdownofMetal-Oxide-Semiconductor(MOS)devicestosubmicrondimensions,→Inscalingdown…（我们常常乱加“定冠词”）

3.一个句子中有“F-enhancedBpenetration”，“B-Oxygencompoundformation”，“Bdistribution”或“pointdefectgeneration”时前面不须加“a”或“the”，但以下写法必须加“the”例如“thegenerationofpointdefects”

4.TheslightenhancementofBpenetrationduetotheTiSi2formationwasalsoobserved.→AslightenhancementofBpenetrationduetotheTiSi2formationwasalsoobserved.

5.Ascanbeseen,thesiliconridgesappearonbothsurfaces.→…..,siliconridgesappear….

6.TheSITOXTiSi2haslargergrainsizethantheconventionalTiSi2.→SITOXTiSi2hasalargergrainsizethanconventionalTiSi2.

7.Fig.10showsthetypicalcurrent-voltagebehaviorsofthediodes.→….Showtypicalcurrent-voltagecharacteristicsofthediode.

8.AfterRCAclean→afteranRCAclean

9.inanN2ambient→inaN2ambient

10.TheeffectofSimicrostructuresonthethermalstability…→TheeffectoftheSimicrostructureonthermalstability

11.Intherecentyears→inrecentyears

12.ThemainpurposeofthisprocessistoavoidtheimplantdamageintheSisubstrate.→..istoavoidimplantdamageintheSisubstrate.

13.Finally,thestandardAlmetallizationprocesswasusedonallthewafers.→Finally,astandardAlmetallizationprocesswasusedforallthewafers.

14.Theconcentration-dependentdiffusivityofBinsinglecrystalSiwasobtainedbytheBoltzmann-Matanoanalysis.→……obtainedbyBoltzmann-Matanoanalysis.

15.TheeffectivediffusivityofBinpolysiliconwasobtainedassumingerrorfunctiondistributionandconstantdiffusivity.→…..assuminganerrorfunctiondistributionandconstantdiffusivity

16.Thedepletionwidthisproportionaltosquarerootofthevoltageacrossthejunction→…thesquarerootofthevoltage…….

四、介系词范例

1.如果提到时间的先后，“priorto”isbetterthan“before”

2.Theactivationenergyofdiffusioncurrentisabouttwotimeshigherthanthatofrecombinationcurrent.→Theactivationenergyforadiffusioncurrentisabouttwicethatforarecombinationcurrent.

3.Inallofthefigures→Inallthefigures

4.FurtherstudyontheSITOXprocess→AdetailedstudyoftheSITOXprocess

5.→ManyresearchgroupshaveconductedfundamentalstudiesonsilicideformationintheTi-SiO2-Sisystem.

6.TheTifilmwasdepositedwithadepositionrateofabout0.2nm/min.→atadepositionrateof…..

7.Oneofthereasonsofitslowerandmoreuniformleakage→oneofthereasonsfor…..

8.Thetypicalactivationenergy(0.5Eg)ofShockley-Reak-Hallgenerationcurrent→..for….

9.TheauthoralsowouldliketothankDrMattTheyerforhishelponSEManalysis→helpwithSEManalysis.

10.80nmTideposition→80nmofTideposition

11.ChannelingtailsontheBimplantprofileresultindeeperjunction.→intheBimplantprofile…

12.SIMSanalysesshowthatwitha20keV,2x1016cm-2BF2implantandan900C60sdopantdrive-outanneal,chemicalBconcentrationatthe….interface……

→SIMSanalysesshowthatfora20keV,….,thechemicalBconcentrationatthe…interface.

13.…,followedbya300nmpolysiliconoramorphousSideposition.→….,followedby300nmofpolysiliconoramorphoussilicondeposition.

14.200nmpolysilicon→200nmofpolysilicon

15.SincetheenergyforBF2implantwaschosensuchthatmostoftheBatomswereconfinedwithintheCoSi2layer→SincetheenergyoftheBF2implantwaschosensuchthattheBprofilewasconfinedtotheCoSi2layer.

16.Title:ReliabilityStudyofPPolysiliconGatePMOSFETsFabricatedbyusingBF2-implantedCosi2AsaBDiffusionSourceforPolysiliconGateDopingandshallowSource/DrainJunction.→….FabricatedusingBF2-implantedCosi2AsBDiffusionSource….

17.C-Vmeasurementsonthetestcapacitorsshowthattheas-depositedamorphousSigateisdegeneratelydopedwiththe950C,60sdrive-outanneal.→….C-Vmeasurementsonthetestcapacitorshowthattheas-depositedamorphousSigatesaredegeneratelydopedaftera950C…

18.Thegrainsizeofa70nmSITOXTiSi2filmisestimatedtobeabout10umwidewhilethatofa100nmconventionalTiSi2filmisabout3umwide.→Thegrainsizeina70nmSITOXTiSi2film…..in…..

19.ItwasfoundthatSITOXdeviceshadanaverageforwardcurrentabout50mA,whichiscomparablewiththatofconventionaldevices.→…hadanaverageforwardcurrentofabout50mA,whichiscomparabletothatofconventionaldevices.

20.Thisisaresultofthecompetitionofdifferentepitaxialorientations.→…thecompetitionbetweendifferentepitaxialorientations

五、连接词范例

1.Furthermore,fromFigure3,allthecurrent-voltagecurvesforsilicidedsamplesexhibitsimilarfunctionalbehaviorincludingthejunctionwithonly20nmdepositedtitaniumwhileitisunlikelythatthesilicidewouldpenetratethejunctioninthiscase.→Furthermore,fromFigure3,allthecurrent-voltagecurvesforsilicidedsamplesexhibitsimilarfunctionalbehaviorincludingthejunctionwithonly20nmdepositedtitanium,forwhichcase,itisunlikelythatthesilicidewouldpenetratethejunction.

2.Therefore,…=So,…=Hence,…

3.…Onlythatitisverydifficulttodeterminewhichtypeofpointdefect(vacancyorinterstitial)isgeneratedinthiscase.→However,itisverydifficulttodetermineconclusivelyfromthisresultwhichtypeofpointdefect(vacancyorinterstitial)isgenerated.

4.ThedatashowsthattheleakagecurrentsscalewithperimetersinsteadofareasfortheSITOXandconventionaldiodes.→…scalewithperimeterratherthanareaforbothSITOXandconventionaldiodes.

5.Thus,theeffectsofCoindiffusiononthereliabilityofpMOSFETs…→Thus,theeffectsofCoindiffusion,ifany,onthe…

6.Todate,onlyitsdependenceonthethicknessofinterfacialSiO2hasbeenstudied.→Previously,

7.Besides,→Inaddition,

六、标点符号范例

1.TheeffectofCoindiffusionalongwithBdiffusionduringthedopantdrive-outannealonthegateoxideintegrityisdiscussedindetail.→TheeffectofCoindiffusion,alongwithBdiffusion,..

2.Foritemizedsentencesorphrases,usesemicolon,e.g.Threesteps:(a);(b);(c).

3.Thereversebiasleakagecurrentiswellknowntohavetwocomponent,i.e.,diffusionandSRHgenerationcurrent.→twocomponent:diffusionandSRHgenerationcurrents.

4.onn-type<100>SiSubstrate→onn-type(100)Sisubstrate

七、语态范例

1.SiliconanddepositedTireactedinanAr/N2ambient→SiliconanddepositedTiwerereactedinanAr/N2ambient

2.Althoughsiliconisknowntobethedominantdiffuserduringtheformationoftitaniumsilicided,someinterdiffusionstilloccursbetweenSiandTi.→……..hasbeenshowntooccurbetween..

3.Sincebothgateandsubstratearep-type,carrierswillbeaccumulatedinsubstratewhiledepletednearthepolysilicon/SiO2interfacewithnegativegatebias.→…..,holeswillbeaccumulatedinthesubstratewhilebeingdepletednearthepolysilicon/SiO2interfacefornegativegatebias.

八、时式范例

1.Theidealityfactorsofforwardcurrentshavebeencalculatedtobeabout1.1forbothsilicidedandnon-silicidedjunctions.→….wasfoundtobeabout1.1forboth……

2.AlthoughsiliconwasshowntobethedominantdiffuserduringTiSi2formation……→……..hasbeenshown……

4.FromSIMSanalysis,itwasfoundthatBpenetrationeffectwasenhancedbyTiSi2formation.→…..,itisfoundthat……isenhancedbyTiSi2formation.

5.Inthiswork,…..isinvestigated.→Inthiswork,….wasinvestigated.

6.Inthiswork,SIMSanalysesarealsoperformed.→…werealsoperformed.

7.→Inthisstudies,dopantdrive-outcapability,thermalstabilityandinterfaceroughnessoftheSITOXTiSi2filmarecomparedwiththosefortheconventionalTiSi2process.

8.ThedatashowthatBdiffusivityinsinglecrystalSiismorethanoneorderofmagnitudehigherthanthepublisheddatawhereagasphasediffusionsourcewasused.→…whereagasphasediffusionsourceisused.

九、名词范例

1.Theanomalousbehaviorsofforwardandreversebiascurrentversusappliedvoltageintitaniumsilicidedsourcedrainjunctionhavebeenstudied.→……behavior……has…..

2.Thestressconditionswerechosentobeeitherpeakgatecurrentorpeaksubstratecurrentforvariousdrainbiasesfrom–7Vto–9V.→Thestressconditionwaschosentocorrespondtoeitherpeakgatecurrentorpeaksubstratecurrentconditionsfor

3.twoevidences→twopiecesofevidence

4.ThekindofdopantintheSisubstrate→thetypeofdopant……

5.Deepleveltrapsneartheperimeterregionmightbethemajorcauseoftheleakagecurrent.→mightbethemajorsourceof….

6.…..arediscussedindetails.→….arediscussedindetail.

7.Thesheetresistanceofasilicidelayerisagoodindicationofthedegreeofitsthermaldegradation.→agoodindicationoftheextentofitsthermaldegradation.

8.While…..,mostefforttodatehasbeendevotedto….→mosteffortstodatehavebeen….

9.Thehistogramofleakagecurrent→thehistogramofleakagecurrents

十、助动词范例

1.However,titaniumatomsstillcanmoveintothesiliconsubstratethroughdiffusiveprocess,→……..atomscanstillmoveinto……..diffusiveprocess

2.…..alsocan…..→…canalso…..

3.Thiscouldbealsoduetothe…→Thiscouldalsobedueto….

十一、副词范例

1.easily→readily（偶偶也要变化一下写法）

2.probably≠possibly(probably比possible更肯定一些)

十二、动词范例

1.Thegenerationcurrentinducedbythetraps…→…createdby…

2.FprohibitsthecompoundformationbetweenBandOxygen,thusmoreboronatomscandiffuserapidlythroughthegateoxide→FinhibitscompoundformationbetweenBandoxygenintheoxide.Thus,moreBatomsarefreetodiffuserapidlythroughtheoxide.

3.使用“pushed”作为“push”的过去式

4.ThesurfacedopantconcentrationswereevaluatedbySUPREMIIItobeabout5x1019cm-3→wereestimatedtobe…..

5.Moreworkneedtobedonetoelucidatethedetailedmechanism.→moreworkneedstobedone…

6.TheelectricaldataforcapacitorswithasdepositedpolysilicongatesarecomplicatedbytheCoindiffusionduringthedopantdrive-outanneal.

7.Lowionbeamenergyof5keVandanimpactangleof60wereusedtoavoidprofilebroadeningeffects.→AlowCsionbeamenergyof5keVandanimpactangleof60wasused……

8.AwiderangeofenergylevelsassociatedwiththeTitrapshavebeenreported.→AwiderangeofenergylevelsassociatedwithTitrapshasbeenreported.

十三、形容词范例

1.Use“mono-crystallinesilicon”or“singlecrystalsilicon”butnot“singlecrystallinesilicon”

2.TheSITOXTiSi2filmismorethermallystablethantheconventionalTiSi2film→TheSITOXTiSi2filmisthermallymorestable…….

3.ExtensivematerialanalysesincludingXRD,SIMS,TEMwerealsoperformed.→Extensivematerialsanalysesincluding……

4.Fig.9showsthehighfrequencycapacitanceversusappliedbiasasafunctionofdopantdrive-outannealingtimeforthetestcapacitor.→…dopantdrive-outannealtime……

5.100nmCoSi2layer→100nmthickCoSi2layer

6.Afterthesilicidationprocess,theOconcentrationattheTiSi2/SiinterfaceisapproximatelytwoordershigherfortheSITOXprocessthanfortheconventionalsilicidationprocess.→…twoordersofmagnitudehigherthan…..

7.InaconventionalTiSi2silicidationprocess,SisubstratesareusuallysubjectedtoashortHFdipforremovingthenativeSiO2beforeTideposition.→Ina….,SisubstratesareusuallysubjectedtoabriefHFdipforremovingthenativeSiO2priortoTideposition.

8.TheformationofSITOXTiSi2involvedthreestepssameasthosefortheconventionalTiSi2formation.→…involvedthesamethreestepsasforconventionalTiSi2formation

9.ThedataindicatethatthethickertheTilayer,themoreeasilytheinterfacialSiO2canbeconsumed.→ThedataindicatethatthethickertheTilayer,themoreeasilyistheinterfacialSiO2consumed.

10.Plane-viewTEManalysis→planviewTEManalysis

11.FordepositedTithicknessmorethan60nm,→FordepositedTithicknessgreaterthan60nm,

12.FordepositedTithicknesslessthan40nm,.→FordepositedTithicknesssmallerthan40nm,

十四、其它语法范例

1.有一些语法无关文法，而是约定成俗的惯例，甚至是一种流行。

2.InthebulkofTiSi2,theO2concentration….→InthebulkoftheTiSi2film,…

3.reverse-biasedvoltage→reversebiasvoltage

4.Theactivationenergyextractedfromtemperatureeffectoftheleakagecurrentalsodecreaseswithincreasingbiasvoltage→Theactivationenergyofleakagecurrentextractedfromthetemperaturedependenceofthecurrentdecreases…….

5.Electricalcharacterizationoftheleakagecurrentinp/njunction(1300A)→…….p/njunctions(xj=130nm)

6.ArevisedmechanismincorporatingFrenkel-Poolebarrierlowering→AnewmechanisminvolvingFrenkel-Poole………

7.isstillnotclear→isyetnotclear

8.Titaniumfilmofvariousthicknessfrom200Ato800Awasused→Titaniumfilmsofvariousthicknessesbetween20nmand80nmwereused

9.Whentalkingaboutchangesoftemperature,peopleusedeg.Cinsteadof℃.

10.Figure3plotsthetemperatureeffectonleakagecurrentofjunctionswith800Atitaniumatdifferentappliedvoltages.→Figure3showsthetemperaturedependenceofleakagecurrentforjunctions…….

11.Thegenerationcurrentissohighthatthediffusioncurrentbecomenegligible.→Thegenerationcurrentissohighthatitdominatesthediffusioncurrent.

12.TheactivationenergyextractedfromFig.3versussquarerootofelectricfieldareplottedinFig.4→InFig.4,theactivationenergyextractedfromtheArrheniusplotinFig.3isplottedversusthesquarerootofelectricfieldinthep/njunction.

13.Theimpactoftitaniumsilicideondeviceperformanceisofgreatinterestinrecentyears.→Theimpactoftitaniumsilicideondeviceperformancehasbecomeanareaofgreatinterestinrecentyears.

14.Followingastandardcleaningprocedure,thesiliconwafers(1-10Ω-cm,ntype<100>)wereimplanted…→…n-type(100)siliconwafers(1-10Ω-cm)wereimplanted…

15.Thisisbecausethatthesource/drainregioncanbeconsideredasacombinedstructureofaTiSi2layerandapsiliconlayerinparallel.→…canbeconsideredasaparallelstructureofaTiSi2layerandapsiliconlayer.

16.Thedatashowsthatcurrentdensitiesarealmostconstantasperimeterincreases→…currentdensitiesareindependentofperimeter.→ThereisatradeoffbetweentheTiSi2sheetresistanceandthejunctionleakagecurrentwhenchoosingthetitaniumthickness.

17.HowdoesthestructurechangeaffectthemechanicalpropertiesofaTiSi2filmisstillunknown.→Howthestructurechangeaffectsthe…….

18.TheDISADSprocessisveryattractivefordualgateCMOSdevicesforsilicidedshallowsource/drainjunctionformationwhilesavingtwomasklevelsforoppositetypepolysilicondoping.→TheDISADSprocessisveryattractiveforthedual-gateCMOStechnologyandparticularlyforsilicidedshallowsource/drainjunctionformation,sinceitreduceprocesscomplexities(byeliminatingtwomasklevelsforn-typeandp-typepolysilicondoping).

19.A200nmpolysilicon(amorphoussilicon)layerwasthendepositedonthesewafersat625C(550C).→A200nmpolysilicon