MEMS介绍教学讲解课件

1MEMSMadeEasy!Studentsarepresentedwithaspectsofgeneralproductionandmanufacturingofelectromechanicalsystemstoenablethemtobetterliaisewithandparticipateinthemanufacturingindustrysector.1MEMSMadeEasy!2MicroElectroMechanicalSystemsIntheUnitedStates,thetechnologyisknownasmicroElectroMechanicalsystems(MEMS);inEuropeitiscalledmicrosystemstechnology(MST).MEMSisaportfoliooftechniquesandprocessestodesignandcreateminiaturesystems;Itisaphysicalproductoftenspecializedanduniquetoafinalapplication-onecanseldombyagenericMEMSproductfromtheelectronicshop;MEMSisawayofmakingthings.Thesethingsmergethefunctionsofsensingandactuationwithcomputationandcommunicationtolocallycontrolphysicalparametersatthemicroscale.2MicroElectroMechanicalSystem3ThisSubjectisCalledMicroElectroMechanicalSystem(MEMS)intheUnitedStates.MicrosysteminEuropeMicromachinesinJapan.3ThisSubjectisCalledMicroEl4History1750sElectrostaticmotorsdemonstratedbyBenjaminFranklinandAndrewGordon.1824DiscoveryofSiliconbyBerzelius.1927 FieldeffecttransistorpatentedtoLilienfield.1947 Inventionofthetransistor(madefromgermanium).1954 PiezoresistiveeffectinGermaniumandSiliconinventedbyC.S.Smith.1958 Siliconstraingaugesavailableinthemarket.1961 SiliconpressuresensordemonstratedbyKulite1967 Surfacemicromachininginvented.1970 FirstsiliconaccelerometerdemonstratedbyKulite.1977 FirstcapacitivepressuresensordemonstratedinStanford.1980 SilicontorsionalScanningMirrordemonstratedbyK.E.Petersen.1982 Demonstrationofdisposablebloodpressuretransducer.4History1750sElectrostaticmo5History,Cont.1982 Activeon-chipsignalconditioning.1984 FirstpolysiliconMEMSdevice(Howe,Muller).1988 Rotaryelectrostaticsidedrivemotors(Fan,Tai,Muller).1989 Lateralcombdrive(Tang,Nguyen,Howe).1991 Polysiliconhinge(Pister,Judy,Burgett,Fearing).1992 Gratinglightmodulator(Solgaard,Sandejas,Bloom).1992 MCNCstartsMUMPS.1993DigitalmirrordisplaybyTexasInstruments1993 Firstsurfacemicromachinedaccelerometersold.1994 XeF2usedforMEMS.1999OpticalnetworkswitchbyLucentTechnologies.Adaptedfrom:VeljkoMilanovic,LectureNotesatBekerly5History,Cont.1982 Activeon-6WhatareMEMS?MEMSisaclassofsystemsthatarephysicallysmall.Thesesystemshavebothelectricalandmechanicalcomponents.MEMSoriginallyusedmodifiedintegratedcircuit(computerchip)fabricationtechniquesandmaterialstocreatetheseverysmallmechanicaldevices.Todaytherearemanymorefabricationtechniquesandmaterialsavailable.SensorsandactuatorsarethetwomaincategoriesofMEMS.Sensorsarenon-invasivewhileactuatorsmodifytheenvironment.Microsensorsareusefulbecausetheirphysicalsizeallowsthemtobelessinvasive.Microactuatorsareusefulbecausetheamountofworktheyperformontheenvironmentissmallandthereforecanbeveryprecise.6WhatareMEMS?MEMSisaclass7PrecisionEngineeredGearsareshownheretobefabricatedbyadeepX-raylithographyandelectrodepositionprocess.Eachgearis100micronstall,madeofnickel,andareheldtosubmicrondimensions.MEMScanbeusedtocreatepartsofsystemswherehightolerancesarenecessary.ThesegearsbridgethegapbetweenMEMSandtraditionallymachinedprecisecomponents.7PrecisionEngineeredGearsar8MagneticMicroMotorscanalsobefabricatedbyadeepX-raylithographyandelectrodepositionprocess.Therotorismagneticallysalienttoallowamagneticfieldappliedtoeachofthetwopolestocausetherotortoturn.Externalloadinggearshavebeenadded.Thismotorhasbeenusedtotestthefrictioningeartrainsbyusinganexternalmagneticfieldtodrivethesalientrotor.Thisisanexampleofarotationalactuator.

8MagneticMicroMotorscanals9But,NotOnlyMiniaturizationMEMSdevicesaremanufacturedinasimilarfashiontocomputermicrochips.Thebiggestadvantagehereisnotnecessarilythatthesystemcanbeminuaturized,butratherthatthelithographictechniquesthatnowmass-producethousandsofcomplexmicrochipssimultaneouslycanalsobeusedtomanufacturemechanicalsensorsandactuators.Asthepriceofthesecomponentsisreducedtonearlyzero,ashashappenedwithmicroprocessors,theycandeployedpervasively,revolutionizingfuturesocietytoagreaterextent,possibly,thaneventhemicroprocessor.

9But,NotOnlyMiniaturization10WhatareMicrosystems?

Amicrosystemisdefinedasanintelligentminiaturisedsystemcomprisingsensing,processingand/oractuatingfunctions.Thesewouldnormallycombinetwoormoreofthefollowing:electrical,mechanical,optical,chemical,biological,magneticorotherproperties,integratedontoasingleormultichiphybrid.Microsensorsdetectchangesintheparametertobecontrolled,electroniccontrollogicthenoperatesmicroactuatorsbasedoninformationfromthesensors,tobringtheparametertobecontrolledwithinthedesiredlimits.

LeveldemandedControlLogicCircuitActuatorParameterstobeControlledSensor10WhatareMicrosystems?

Amic11SensorsMicrosensorsmeasuretheenvironmentwithoutmodifyingit.Microsensorsareusefulbecausetheirsmallphysicalsizeallowsthemtobelessinvasiveandworkinsmallerareas.Sofar,microengineeringasamanufacturingtechnologyhasbeenappliedmostsuccessfullytosensors.Thepay-offintermsofminiaturization,improvedperformance,andreducedproductioncosthavetransformedthemarketinpressuresensorsinparticular.Microphones.Accelerometers.Vibrationanalyzers.Flowmeters.Gassensors.Radiationdetectors.Chemicalsensors.Ionsensors.11SensorsMicrosensorsmeasure12ComparisonFrom:/c1.res.ppt/ppt/g.tutorial/ppt.htm12ComparisonFrom:http://mems.13ActuatorsActuationreferstotheactofeffectingortransmittingmechanicalmotion,forces,andworkbyadeviceonitssurroundingsinresponsetotheapplicationofabiasvoltageorcurrent.Microactuatorsinteractwiththeenvironment.Thefirstapplicationsthatwereidentifiedformicroengineeringweresensors.Thenotionofusingthesetechniquesforactuatorshasdevelopedfromthem.Examplesofactuatorsnearoralreadyonthemarketarelistedbelow:MicropumpsPressurepulseinkjetactuatorsThermalinkjetsThermalprintheadsFluidicamplifiersOpticalcommunicationselementsScanningmirrors13ActuatorsActuationrefersto14MicrostructuresThereisadiverserangeofmechanicalobjectsthatfallintoneitherthesensornortheactuatorcategory.Theyarebestdescribedasmicrostructures.Theseitemsareoftennomorethanarraysofsimpleshapessuchasgrooves,holes,nozzles,gridsetc.Examplesinclude:MicrosievesOpticalelementsSiliconhybridcircuitboardsMicroelectroniccomponentcoolingSiliconvacuumelectronicvalvesFluidisotopeseparatorsMicroconnectors(electricalandoptical).

14MicrostructuresThereisadi15ApplicationAreasofMEMSInvasiveandnoninvasivebiomedicalsensorsMiniaturebiochemicalanalyticalinstrumentsCardiacmanagementsystems(e.g.,pacemakers,catheters)DrugdeliverysystemsNeurologicaldisordersEngineandpropulsioncontrolAutomotivesafety,braking,andsuspensionsystemsElectromechanicalsignalprocessingDistributedsensorsforcondition-basedmaintenanceandmonitoringstructuralhealthDistributedcontrolofaerodynamicandhydrodynamicsystems.15ApplicationAreasofMEMSInv16WhyisMEMSUseful?MEMSarephysicallysmall,thisisthereasonwhyMEMSisuseful.MEMSusedforsensorsisusefulbecausesmallsensorsinterferelesswiththeenvironmenttheyaremeasuringthanlargerdevices.Anarrayofsmallsensorscanalsobeusedforredundancy.MEMSisusefulforactuatorsbecausethemotiontheydelivercanbeveryprecise.MEMSdevicescanalsobeplacedinsmallspacessuchasinsideautomobileengines,smallappliances,andlivingorganismstomeasureand/oraffecttheirenvironment.16WhyisMEMSUseful?MEMSare17WhatisMicroengineering?Microengineeringreferstothetechnologiesandpracticeofmakingthreedimensionalstructuresanddeviceswithdimensionsintheorderofmicrometers.Thetwoconstructionaltechnologiesofmicroengineeringaremicroelectronicsandmicromachining.Microelectronics,producingelectroniccircuitryonsiliconchips,isaverywelldevelopedtechnology.Micromachiningisthenameforthetechniquesusedtoproducethestructuresandmovingpartsofmicroengineereddevices.OneofthemaingoalsofMicroengineeringistobeabletointegratemicroelectroniccircuitryintomicromachinedstructures,toproducecompletelyintegratedsystems(microsystems).Suchsystemscouldhavehavethesameadvantagesoflowcost,reliabilityandsmallsizeassiliconchipsproducedinthemicroelectronicsindustry.17WhatisMicroengineering?Mic18MicroengineeringEnablesTheproductionofsmaller,lighter,andfasterversionsofexistingmechanicaldevices,withincreaseddimensionalaccuracy,e.g.micromotors.Theproductionofsensors,mainlyexploitingtheelectromechanicalpropertiesofsilicon,whereelectricalcharacteristicschangeinresponsetoachangeinaparticularexternalparameter,e.g.temperature,pressure,acceleration,humidityandradiation.Theuseofmaterialsandprocessescommontointegratedmicroelectronicswithmicromechanicalcomponentsbringingimprovementsinperformanceandcost.Batchprocessingtofabricatelargevolumesofminiaturecomponentsatlowcost,e.g.inkjetnozzles.Theopportunitytoextendprocesstechnologytoincludematerialsandtechniquesnotusedinmicroelectronics,butwhichofferspecificadvantagestomicromechanicaldevices.Theeconomicintegratedmanufactureofcompletesystemstoincludesensing,computationandactuation.18MicroengineeringEnablesThe19MarketsforMicroengineeredProductsMicroengineeringnotonlyprovidesanewmanufacturingrouteforexistingproducts,butalso,importantly,allowsthecreationofcompletelynewproductsandnewmarkets.Microengineeringisalreadyestablishedinthesensormarket,providinglargevolumesoflowcostsensorstotheautomotiveindustry,andlowvolumehighperformance,smallandlightweightsensorstoaerospaceanddefence.Thesensormarketisexpectedtogrowsignificantlyinthenextfewyears,withexceptionalgrowthinthesub-categoryofminiaturizedsensors.TheprojectedMEMSmarketfortheyear2002isexpectedtoreach6.7B$.19MarketsforMicroengineered20SuccessfulApplicationsAutomotiveIndustry ManifoldairpressuresensorsAirBagSensorsHealthandMedicine

BloodPressureSensorsMuscleSimulatorDigitalMirrorDisplay

VideoProjectionSystemPrinters

HPandCanon.

20SuccessfulApplicationsAutom21From:/c1.res.ppt/ppt/g.tutorial/ppt.htm21From:http://mems.colorado.e22From:/c1.res.ppt/ppt/g.tutorial/ppt.htm22From:http://mems.colorado.e23/c1.res.ppt/ppt/g.tutorial/ppt.htm23/c1.24WhatisMicromachining?Micromachiningisthesetofdesignandfabricationtoolsthatpreciselymachineandformstructuresandelementsatascalebelowthelimitsofourhumanpreceptivefaculties-themicroscale.MicromachiningistheunderlyingofMEMSfabrication;itisthetoolboxofMEMS.ThemicromachiningistheUnderlyingofMEMSfabrication;itisthetoolboxofMEMS.Theberthofthefirstmicromachinedcomponentsdatesbackmanydecades,butitwasthewell-establishedintegratedcircuitindustrythatindirectlyplayedanindispensableroleinfosteringanenvironmentsuitableforthedevelopmentandgrowthofmicromachiningtechnologies.24WhatisMicromachining?Micro25JustReminderofMicroelectronicFabrication25JustReminderofMicroelectr26CommercialFabrication26CommercialFabrication27DeviceComplexitybyStructuralLayers27DeviceComplexitybyStructu28Commonprocessingtechniquesthatareusedtosculptmechanicalstructuresinclude:bulkmicromachining.Wafer-to-waferbonding.Surfacemicromachining.High-aspectratiomicromachining.28Commonprocessingtechniques29BulkMicromachiningBulkmicromachiningisthetermappliedtoavarietyofetchingproceduresthatselectivelyremovematerial,typicallywithachemicaletchantwhoseetchingpropertiesaredependentonthecrystallographicstructureofthebulkmaterial.29BulkMicromachiningBulkmicr30Wafer-to-WaferWafer-to-waferbondingisastrategycommonlyemployedtogetaroundtherestrictionsinthetypeofstructuresthatcanbefabricatedusingbulkmicromachining.Becauseanisotropicetching,bydefinition,onlyremovesmaterial,bondingofwafersallowsfortheadditionofmaterialtothebulkmicromachiningrepertoire.30Wafer-to-WaferWafer-to-wafer31SurfaceMicromachiningInsurfacemicromachining(SMM),alternatinglayersofstructural(usuallyPolysilicon)andsacrificialmaterial(usuallysilicondioxide)aredepositedandetchedtoformtheshaperequired.Surfacemicromachiningenablesthefabricationoffree-form,complexandmulti-componentintegratedelectromechanicalstructures,givingfreedomtofabricatedevicesandsystemswithoutconstraintsonmaterials,geometry,assemblyandinterconnectionsthatisthesourcefortherichnessanddepthofMEMSapplicationsthatcutacrosssomanyareas.Morethananyotherfactor,itissurfacemicromachiningthathasignitedandisattheheartofthecurrentscientificandcommercialactivityinMEMS.31SurfaceMicromachiningInsur32TestingTestingisveryimportantforqualityandreliabilitypurposes.TestingMEMSdevicesisunique.Comparedtoelectronicdevices,thathaveelectricvoltage/currentasinputandelectricvoltage/currentasoutput,MEMSdevicesmayhaveaclosedloopfromsensorstoactuators.Theinputcanbetemperature,humidity,loudness,acceleration...andtheoutputcanbevariouselectricalormechanicalresponses.TestingMEMSdevicesrequirethepropersetupofinputsandaccuratemeasureoftheoutputs.32TestingTestingisveryimpor33BasicStructures

BulkSiliconMicromachining

isasubtractivefabricationtechniquewhichconvertsthesubstrateintothemechanicalpartsoftheMEMSdevice.Packagingofthedevicetendstobemoredifficultinbulkmachiningbutstructureswithincreasedheightsareeasiertofabricate.33BasicStructures

BulkSilico34Example

RadioFrequencyMEMS34Example

RadioFrequencyMEMS35MaterialsMetalsAl,Au,Cu,W,Ni,TiNi,NiFe,InsulatorsSiO2-thermallygrownorvapordeposited(CVD)Si3N4-CVDPolymersTheKingofSemiconductors:Siliconstrongerthansteel,lighterthanaluminumsinglecrystalorpolycrystalline10nmto10mm35MaterialsMetals36MEMSMadeEasy!Studentsarepresentedwithaspectsofgeneralproductionandmanufacturingofelectromechanicalsystemstoenablethemtobetterliaisewithandparticipateinthemanufacturingindustrysector.1MEMSMadeEasy!37MicroElectroMechanicalSystemsIntheUnitedStates,thetechnologyisknownasmicroElectroMechanicalsystems(MEMS);inEuropeitiscalledmicrosystemstechnology(MST).MEMSisaportfoliooftechniquesandprocessestodesignandcreateminiaturesystems;Itisaphysicalproductoftenspecializedanduniquetoafinalapplication-onecanseldombyagenericMEMSproductfromtheelectronicshop;MEMSisawayofmakingthings.Thesethingsmergethefunctionsofsensingandactuationwithcomputationandcommunicationtolocallycontrolphysicalparametersatthemicroscale.2MicroElectroMechanicalSystem38ThisSubjectisCalledMicroElectroMechanicalSystem(MEMS)intheUnitedStates.MicrosysteminEuropeMicromachinesinJapan.3ThisSubjectisCalledMicroEl39History1750sElectrostaticmotorsdemonstratedbyBenjaminFranklinandAndrewGordon.1824DiscoveryofSiliconbyBerzelius.1927 FieldeffecttransistorpatentedtoLilienfield.1947 Inventionofthetransistor(madefromgermanium).1954 PiezoresistiveeffectinGermaniumandSiliconinventedbyC.S.Smith.1958 Siliconstraingaugesavailableinthemarket.1961 SiliconpressuresensordemonstratedbyKulite1967 Surfacemicromachininginvented.1970 FirstsiliconaccelerometerdemonstratedbyKulite.1977 FirstcapacitivepressuresensordemonstratedinStanford.1980 SilicontorsionalScanningMirrordemonstratedbyK.E.Petersen.1982 Demonstrationofdisposablebloodpressuretransducer.4History1750sElectrostaticmo40History,Cont.1982 Activeon-chipsignalconditioning.1984 FirstpolysiliconMEMSdevice(Howe,Muller).1988 Rotaryelectrostaticsidedrivemotors(Fan,Tai,Muller).1989 Lateralcombdrive(Tang,Nguyen,Howe).1991 Polysiliconhinge(Pister,Judy,Burgett,Fearing).1992 Gratinglightmodulator(Solgaard,Sandejas,Bloom).1992 MCNCstartsMUMPS.1993DigitalmirrordisplaybyTexasInstruments1993 Firstsurfacemicromachinedaccelerometersold.1994 XeF2usedforMEMS.1999OpticalnetworkswitchbyLucentTechnologies.Adaptedfrom:VeljkoMilanovic,LectureNotesatBekerly5History,Cont.1982 Activeon-41WhatareMEMS?MEMSisaclassofsystemsthatarephysicallysmall.Thesesystemshavebothelectricalandmechanicalcomponents.MEMSoriginallyusedmodifiedintegratedcircuit(computerchip)fabricationtechniquesandmaterialstocreatetheseverysmallmechanicaldevices.Todaytherearemanymorefabricationtechniquesandmaterialsavailable.SensorsandactuatorsarethetwomaincategoriesofMEMS.Sensorsarenon-invasivewhileactuatorsmodifytheenvironment.Microsensorsareusefulbecausetheirphysicalsizeallowsthemtobelessinvasive.Microactuatorsareusefulbecausetheamountofworktheyperformontheenvironmentissmallandthereforecanbeveryprecise.6WhatareMEMS?MEMSisaclass42PrecisionEngineeredGearsareshownheretobefabricatedbyadeepX-raylithographyandelectrodepositionprocess.Eachgearis100micronstall,madeofnickel,andareheldtosubmicrondimensions.MEMScanbeusedtocreatepartsofsystemswherehightolerancesarenecessary.ThesegearsbridgethegapbetweenMEMSandtraditionallymachinedprecisecomponents.7PrecisionEngineeredGearsar43MagneticMicroMotorscanalsobefabricatedbyadeepX-raylithographyandelectrodepositionprocess.Therotorismagneticallysalienttoallowamagneticfieldappliedtoeachofthetwopolestocausetherotortoturn.Externalloadinggearshavebeenadded.Thismotorhasbeenusedtotestthefrictioningeartrainsbyusinganexternalmagneticfieldtodrivethesalientrotor.Thisisanexampleofarotationalactuator.

8MagneticMicroMotorscanals44But,NotOnlyMiniaturizationMEMSdevicesaremanufacturedinasimilarfashiontocomputermicrochips.Thebiggestadvantagehereisnotnecessarilythatthesystemcanbeminuaturized,butratherthatthelithographictechniquesthatnowmass-producethousandsofcomplexmicrochipssimultaneouslycanalsobeusedtomanufacturemechanicalsensorsandactuators.Asthepriceofthesecomponentsisreducedtonearlyzero,ashashappenedwithmicroprocessors,theycandeployedpervasively,revolutionizingfuturesocietytoagreaterextent,possibly,thaneventhemicroprocessor.

9But,NotOnlyMiniaturization45WhatareMicrosystems?

Amicrosystemisdefinedasanintelligentminiaturisedsystemcomprisingsensing,processingand/oractuatingfunctions.Thesewouldnormallycombinetwoormoreofthefollowing:electrical,mechanical,optical,chemical,biological,magneticorotherproperties,integratedontoasingleormultichiphybrid.Microsensorsdetectchangesintheparametertobecontrolled,electroniccontrollogicthenoperatesmicroactuatorsbasedoninformationfromthesensors,tobringtheparametertobecontrolledwithinthedesiredlimits.

LeveldemandedControlLogicCircuitActuatorParameterstobeControlledSensor10WhatareMicrosystems?

Amic46SensorsMicrosensorsmeasuretheenvironmentwithoutmodifyingit.Microsensorsareusefulbecausetheirsmallphysicalsizeallowsthemtobelessinvasiveandworkinsmallerareas.Sofar,microengineeringasamanufacturingtechnologyhasbeenappliedmostsuccessfullytosensors.Thepay-offintermsofminiaturization,improvedperformance,andreducedproductioncosthavetransformedthemarketinpressuresensorsinparticular.Microphones.Accelerometers.Vibrationanalyzers.Flowmeters.Gassensors.Radiationdetectors.Chemicalsensors.Ionsensors.11SensorsMicrosensorsmeasure47ComparisonFrom:/c1.res.ppt/ppt/g.tutorial/ppt.htm12ComparisonFrom:http://mems.48ActuatorsActuationreferstotheactofeffectingortransmittingmechanicalmotion,forces,andworkbyadeviceonitssurroundingsinresponsetotheapplicationofabiasvoltageorcurrent.Microactuatorsinteractwiththeenvironment.Thefirstapplicationsthatwereidentifiedformicroengineeringweresensors.Thenotionofusingthesetechniquesforactuatorshasdevelopedfromthem.Examplesofactuatorsnearoralreadyonthemarketarelistedbelow:MicropumpsPressurepulseinkjetactuatorsThermalinkjetsThermalprintheadsFluidicamplifiersOpticalcommunicationselementsScanningmirrors13ActuatorsActuationrefersto49MicrostructuresThereisadiverserangeofmechanicalobjectsthatfallintoneitherthesensornortheactuatorcategory.Theyarebestdescribedasmicrostructures.Theseitemsareoftennomorethanarraysofsimpleshapessuchasgrooves,holes,nozzles,gridsetc.Examplesinclude:MicrosievesOpticalelementsSiliconhybridcircuitboardsMicroelectroniccomponentcoolingSiliconvacuumelectronicvalvesFluidisotopeseparatorsMicroconnectors(electricalandoptical).

14MicrostructuresThereisadi50ApplicationAreasofMEMSInvasiveandnoninvasivebiomedicalsensorsMiniaturebiochemicalanalyticalinstrumentsCardiacmanagementsystems(e.g.,pacemakers,catheters)DrugdeliverysystemsNeurologicaldisordersEngineandpropulsioncontrolAutomotivesafety,braking,andsuspensionsystemsElectromechanicalsignalprocessingDistributedsensorsforcondition-basedmaintenanceandmonitoringstructuralhealthDistributedcontrolofaerodynamicandhydrodynamicsystems.15ApplicationAreasofMEMSInv51WhyisMEMSUseful?MEMSarephysicallysmall,thisisthereasonwhyMEMSisuseful.MEMSusedforsensorsisusefulbecausesmallsensorsinterferelesswiththeenvironmenttheyaremeasuringthanlargerdevices.Anarrayofsmallsensorscanalsobeusedforredundancy.MEMSisusefulforactuatorsbecausethemotiontheydelivercanbeveryprecise.MEMSdevicescanalsobeplacedinsmallspacessuchasinsideautomobileengines,smallappliances,andlivingorganismstomeasureand/oraffecttheirenvironment.16WhyisMEMSUseful?MEMSare52WhatisMicroengineering?Microengineeringreferstothetechnologiesandpracticeofmakingthreedimensionalstructuresanddeviceswithdimensionsintheorderofmicrometers.Thetwoconstructionaltechnologiesofmicroengineeringaremicroelectronicsandmicromachining.Microelectronics,producingelectroniccircuitryonsiliconchips,isaverywelldevelopedtechnology.Micromachiningisthenameforthetechniquesusedtoproducethestructuresandmovingpartsofmicroengineereddevices.OneofthemaingoalsofMicroengineeringistobeabletointegratemicroelectroniccircuitryintomicromachinedstructures,toproducecompletelyintegratedsystems(microsystems).Suchsystemscouldhavehavethesameadvantagesoflowcost,reliabilityandsmallsizeassiliconchipsproducedinthemicroelectronicsindustry.17WhatisMicroengineering?Mic53MicroengineeringEnablesTheproductionofsmaller,lighter,andfasterversionsofexistingmechanicaldevices,withincreaseddimensionalaccuracy,e.g.micromotors.Theproductionofsensors,mainlyexploitingtheelectromechanicalpropertiesofsilicon,whereelectricalcharacteristicschangeinresponsetoachangeinaparticularexternalparameter,e.g.temperature,pressure,acceleration,humidityandradiation.Theuseofmaterialsandprocessescommontointegratedmicroelectronicswithmicromechanicalcomponentsbringingimprovementsinperformanceandcost.Batchprocessingtofabricatelargevolumesofminiaturecomponentsatlowcost,e.g.inkjetnozzles.Theopportunitytoextendprocesstechnologytoincludematerialsandtechniquesnotusedinmicroelectronics,butwhichofferspecificadvantagestomicromechanicaldevices.Theeconomicintegratedmanufactureofcompletesystemstoincludesensing,computationandactuation.18MicroengineeringEnablesThe54MarketsforMicroengineeredProductsMicroengineeringnotonlyprovidesanewmanufacturingrouteforexistingproducts,butalso,importantly,allowsthecreationofcompletelynewproductsandnewmarkets.Microengineeringisalreadyestablishedinthesensormarket,providinglargevolumesoflowcostsensorstotheautomotiveindustry,andlowvolumehighperformance,smallandlightweightsensorstoaerospaceanddefence.Thesensormarketisexpectedtogrowsignificantlyinthenextfewyears,withexceptionalgrowthinthesub-categoryofminiaturizedsensors.TheprojectedMEMSmarketfortheyear2002isexpectedtoreach6.7B$.19MarketsforMicroengineered55SuccessfulApplicationsAutomotiveIndustry ManifoldairpressuresensorsAirBagSensorsHealthandMedicine

BloodPressureSensorsMuscleSimulatorDigitalMirrorDisplay

VideoProjectionSystemPrinters

HPandCanon.

20SuccessfulApplicationsAutom56From:/c1.res.ppt/ppt/g.tutorial/ppt.htm21From:http://mems.colorado.e57From:/c1.res.ppt/ppt/g.tutorial/ppt.htm22From:http://mems.colorado.e58/c1.res.ppt/ppt/g.tutorial/ppt.htm23/c1.59WhatisMicromachining?Micromachiningisthesetofdesignandfabricationtoolsthatpreciselymachineandformstructuresandelementsatascalebelowthelimitsofourhumanpreceptivefaculties-themicroscale.MicromachiningistheunderlyingofMEMSfabrication;itisthetoolboxofMEMS.ThemicromachiningistheUnderlyingofMEMSfabrication;itisthetoolboxofMEMS.Theberthofthefirstmicromachinedcomponentsdatesbackmanydecades,butitwasthewell-establishedintegratedcircuitindustrythatindirectlyplayedanindispensableroleinfosteringanenvironmentsuitableforthedevelopmentandgrowthofmicromachiningtechnologies.24WhatisMicromachining?Micro