次配工程规范

1、LG GROUP system office room LG A16H-LG Y Y-LGU A8Q8-LG A162中纬枳体电路（宁波）新建工程气体管线二次配工程规范CONTENTSPAGES.目的.范围.文件送审.施工说明.其他说明.验收标准7.保固期限.目的为使设备机台按照计划顺利装机、运转，且亦能维护Hook Up二次配管施工之 品质及作业安全。本规范如有任何疑虑依业主及总顾问公司解释为准。.范围1.制程设备气体管线Hook-up工程材料采购及管路安装；Hook-up范围， GN?、PN,、PO：. CDA自主管预留阀至机台内部接点（含支管），PH。、 SiHo SiH,/其由气体站氢

2、气纯化器出口及SiH、SiH/N二气瓶柜出口接至 机台（含VMB）,其他特殊气体自位於气体房或Subfab之气瓶柜/架至机 台内部接点（含VMB/VMP）,其中必要的管线、管件及焊接所需气体，均 由承包商负责提供。GN、PN八P0各支管位置及预留take-off阀尺寸 及数量，请参照 FAB栋一层大宗气体二次配平面图”（图号SP-211）； 各VMB/VMP位置，请参照 FAB栋一层特殊气体二次配平面图”（图号 SP-212）；气体站至FAB间气体管线，请参照”气体站至FAB栋气体二 次配管线平面图”（图号SP-234） ； GN；：、PN八P0: CDA自take-off阀 至机台间所需装设

3、之阀件，请参照 SP-2二次配管详图”（图号SP- 231）；而take-off阀及VMB八MP与机台衔接点等相关资料，请参照附 件一 Bulk gas take-off list、附件二 Specialty gas VMB/VMP list M及附件三 CDA take-off list”。承包商需根据该表资料，设 计至机台管线之路径。2.前项气体管线Hook-up工程之管路细部设计、施工图绘制、ISO图绘制 （Auto 2000或以上版本图档予顾问及业主）、安装彳爰泄漏侦测、各项不 纯物量测、讯号测试、材料存放及废料清洁等杂项工程。其中施工图及 ISO图面，需依照机台用量流程图（P&ID）

4、及机台设备外观图绘制，并配 合材料明细表供业主确认。3.本项工程为连工带料施工，并包含施工中所需之施工工具、施工设备、 无尘服、安全防护器具、管支撑及杂项消耗等，均由承包商负责。4.配合“二次配工程说明（规范标号NS-SP001）要求所需各项杂项费用。5.所有管路标示，管路标示依照”二次配工程说明”办理。所有管路防震固定支撑架之安装定位。7.高架地板开孔及收边之工程发包、请款，切割区域管理。气体站至FAB间管线所需管桥由业主提供，承包商需负责依业主指示规 划气体管线路径，并负责安装所需管夹等固定装置。3.文件送审文件名称投标阶段 （3份）设计阶段 （5份）竣工阶段（5份）文件名称投标阶段 （3

5、份）设计阶段（5份）竣工阶段（5份）报价表(Quotation form)X专案组织表(Project organization)XX专案执行时程表（Project schedule）XXL程界面清单及位置图(List & location of tie-in point)XXX系统管仪图（P&IDs）XXX焊接设备清单（Equipment list）XXX设备及材料型录及资料(Vendor s catalogs and information to support his quotation. including electrical system & I/C system)XXX仪表安装详

6、图(Instrument installation drawing)XX送审文件清单及时程(Transmittal list and schedule)X品质管制程序书(Quality control procedure)XL地办公室及物料暂存区需求(Site office and warehouse requirements)X验收及测试计划/报告(Inspection & test plan/reports)XX制造商测试报告(Manufacture s inspection& test reports/records)XX口算书(Contractor s calculations)XX管

7、线配置图(Pipe routing plan)XXX管线支撑详图(Pipe support drawing)XX管材规格(Piping material specification)XX管线施-E 程序书(Piping construction specification)XX1.承包商需於得标彳及周内提出文件送审清单，并於施工前2周提送设计文件及相关管件及标示实体供审核：送审图面则需在业主提出意见彳登3天内 修改并再次送审。.所有送审文件必须以中文或英文书写；英文送审文件需附中文说明。.所有竣工阶段需提送之文件均需检附电子档4.施工说明一般说明4. 1. 1.承包商应於施工前提送施工程序书及

8、管路测试程序书，经审核 通过彳发，方可据以施工。4.1.2.承揽商需於工作场所设置工程负责人，需有相关工程经历三年 以上，其工作职责为：4. 1.2. 1.施工进度控制。4. 1.2.2.施工人员管理及安排。4. 1.2.3.材料数量管制。4. 1. 2. 4.现场会勘放样。4. 1.2.5.参与承揽商沟通协调会议4. 1. 3.承揽商需於工作场所设置品管负责人，需有相关工作经历三年 以上，其阶层与工程负责人同等，其工作职责为：4. 1. 3. 1.施工品质控制。4. 1.3.2.施工完工品质验收。4. 1.3.3.施工验收报告汇总。4. 1.3.4.原料进厂自主检查。承揽商需於工作场所设置物

9、管负责人，需有相关工作经历一年 以上，其工作职责为：1.4. 1.材料数量管理。1.4.2.进厂料件验收。承揽商需於工作场所设置工安卫负责人，需有相关工作经历一 年以上，其阶层与工程负责人同等，其工作职责为：4. 1.5. 1.现场安全卫生工作监督。4. 1.5.2.参与承揽商安全卫生协调会议。4. 1.5.3.承揽商施工人员安全卫生训练。4. 1. 6.施工人员数组，依工程数量适时增加人员，但在工程期限内最 低需保留三组，每组人员最少三人，每组至少有一人有焊接执 照，并由一资深组长带领，所有进厂施工之人员必须经过认可 且通过工安检定之人员。4. 1. 7.品管人员数组，依工程数量适时增加人员

10、，但在工程期限内最 低需保留一组，每组人员最少二人，由一资深组长带领，但不 可由品管负责人担任。4. 1. 8.承揽商有任何人员调动需经过认可，且业主相关之人员有权提 出异议要求更换，承揽商不得有异议。材料说明4. 2.1.气体管线之分类及其材质要求如下表规定办理。气体种类材质一般大宗气体GN,CDACDA (for burnbox)SUS 316L BA/ 5SSUS 316L AP/ 5SSUS 304 / 5S自燃性气体SiHi, SiHi/N2, PH/N,内管SUS 316L EP/外管SUS 304其他气体PNc, PO, SiH：CL, NH PH：, BJWM, CL, HBr

11、, NFs, BCL, HF, CHR, CE, C%, SFs,SS 316L EP/ 5S ：另 BCL、SiHk之管线需气体种类材质PAr, PHe, N。He/0：提供加热带以确保供气 量。2.2.各类管线、管件及仪表厂牌，请依下表规定办理，承包商应以 一次配选用厂牌为优先考量，如欲选用非下表规定之厂牌，需 经过业主审核同意彳发使得选用。项目规格厂牌SUS 316L BA pipe u mSumikin/ KuzeSUS 316L BA tubeL umSumikin/ KuzeSUS 316L BA fitting （for Pipe）L umKitz/ Kuze/ Swagelok

12、/ HamletSUS 316L BA fitting （for tube）R* umKitz/ Kuze/ Swagelok/ HamletSUS 316L EP pipeRx umSumikin/ KuzeSUS 316L EP tube （注 1）L umSumikin/ KuzeSUS 316L EP fitting （注 1）L UmKitz/ Kuze/ Swagelok/ HamletSUS 316L BA valve （叁 15A）Bellow valve, L M mKitz/ Ohno/ MotoyamaSUS 316L BA valve 15A）Diaphragm val

13、ve, R3 P mKitz/Fujikin/Ohno/MotoyamaSUS 316L EP valve （叁 15A）Bellow valve, L M mKitz/ Ohno/ MotoyamaSUS 316L EP valve 15A）Diaphragm valve, L P m)P2、P0：每段支管末端。所有机台Tie-in点前。=1 pcs/scf ( Um)其他制程气体机台Tie-in点前=1 pcs/scf ( U m)6. 6.氧气含量测试：6. 6. 1.承包商应使用PNe作为purge gas,并连续纪录氧气含量变化，以观 察其下降趋势及作为是否合格之依据。6. 6. 2

14、.各类气体测试点及含量要求应依下表办理：气体种类应测试位置氧气含量要求GNc每段支管末端。所有机台Tie-in点前。=100 ppbPN=每段支管末端。所有机台Tie-in点前。二10 ppb其他制程气体机台Tie-in点前名10 ppb检附各项测试报告及竣工ISO图面。7.保固期限自验收合格彳发保固期限一年。附件一 Bulk Gas Take-off ListTAKE-OFFTAKE-OFFNO.尺寸Tool机台流量 LPM机台接 头尺寸机台接 头型式NOTEGN55011/2”CV-etcher/QC LabCV-etcher553/8”DECAP(QC)1/8”ETCHER(QC)1/4

15、”GN55O21/2”9F19F1251/4”9F11203/8”9F11203/8GX55031/2”9F29F21203/8”9F21203/8”GN55O11/2”8F8F一 003/8”8F503/8”8F503/8”GN55051/2”WJ-999 (1)/(2)WJ-999(1)553/8”WJ-999(2)553/8”GN55O61/2”SPAREGN55071/2”ND-6200ND-6200201/4”ND-6200201/4”GN55081/2”NOVELLUSNOVELLUS201/4”NOVELLUSGN55O91/2”SPARE匚1GN55101/2”SPAREGN5

16、5111/2”SPAREGN55121/2”SPAREGN55131/2”AMI 8330CAMI 8330C31/4”AMI 8330C31/4”AMI 8330C31/4”AMI 8330C31/4”GN55141/2”SPAREGN55151/2”AMI 8330DAMI 8330D31/4”AMI 8330D31/4”AMI 8330D31/4”AMI 8330D31/4”GN55161/2”AMI 8330BAMI 8330B31/4”AMI 8330B31/4”AMI 8330B31/4,AMI 8330B31/4”TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机

17、台接头尺寸机台接头型式NOTEGN55171/2”SPAREGN55181/2”LAM 590A/PSC-4LAM 590A101/2”LAM 590A31/2”LAM 590A31/4”LAM 590A11/2”PSC-131/4”PSC-131/4”GN55191/2,LAM 590C/BLAM 590C1。1/2”LAM 590C31/2”LAM 590C3i/rLAM 590C11/2.LAM 590B101/2”LAM 590B31/2”LAM 590B31/4”LAM 590B11/2”GN55201/2”LAM 4420A/B/S6000LAM 4420A103/8”LAM 44

18、20A103/8.LAM 4420A31/4”LAM 4420A31/4”LAM 4420B103/8LAM 4420B103/8”LAM 4420B31/4”LAM 4420B31/4”S60001/4”GN55211/2”SPAREGN55221/2”LAM 190C/BLAM 490C101/2”LAM 190C31/2”LAM 490C31/4”LAM 490C11/2”LAM 490B101/2”LAM 490B31/2,LAM 490B3i/rLAM 490B11/2”GN55231/2”LAM 190ALAM 490A101/2”LAM 490A31/2”LAM 490A31/4

19、”LAM 490A11/2”GN55241/2”Tegal900A/B（位置未定）Tegal900A31/4”Tegal900A31/4”Tegal900B31/4.Tegal900B31/4”TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接 头尺寸机台接 头型式NOTEGN55251/2”SPAREGN55261/2”SPAREGN55271/2”H2H2一3/8”H23/8”GN55281/2”HF1703/8”GN55291/2”SPAREGN55301/2”HlHl3/8”Hl3/8GN55311/2”H31703/8”GN55321/2”SPAREGN65O11

20、/2”7F7F553/8”7F1503/8”GN65021/2”7F7F1503/8”7F1503/8”GN65O31/2”6FGN65O1GN65O51/2”1/2”SPARESPARErGN65O61/2”SOG-273/8”GN65O7GN65081/2”1/2”SPARESPAREGN65O91/2”SPAREGN65101/2”AMI 8310B/AAMI 8310A31/4”AMI 8310A31/4”AMI 8310A31/4”AMI 8310A31/4”AMI 8310B31/4”AMI 8310B31/4”AMI 8310B31/4,AMI 8310B31/4”GN65111

21、/2”SPAREGN65121/2”MATRIX(l)/(2)MATRIX (1)31/2”MATRIX(2)31/2,GN65131/2”LAM 1520LAM 4520103/8”LAM 4520103/8”LAM 452031/4”LAM 452031/4”GN65141/2”SPAREGN65151/2”SPAREGN65161/2”PSC-5PSC-531/4”TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接头尺寸机台接头型式NOTEPSC-531GN65171/2”SPAREGN65181/2”PSC-3/1PSC-331PSC-33i/rPSC-13i/rP

22、SC-131/4”GN65191/2”SPAREGN65201/2”SPAREGN65211/2”SPAREGN65221/2”SPAREGN65231/2”SPAREGN65241/2”CDO 1/2/3（位置未定）CDO 11/4”CDO 21/4”CDO 31GN65251/2”SPAREGN75O11/2”SPAREGN75O21/2”5F/4F5F553/8.IF553/8*GN75O31/2”3F553/8GN75O41/2”SPAREGN75O51/2”CR-19911/2”GX75O61/2”CR-19911/2”GN75O71/2”STEPPER14/COATER7/8STE

23、PPER14201/4”COATER7/83/8,GN75O81/2”CR-39911/2”GN75O91/2”STEPPERI3/8STEPPER13201/4”STEPPERS201/4”STEPPER7201/4”STEPPERS201/4”GN75101/2”SPAREGN75111/2”CR-39911/2”GN75121/2”STEPPER12/6/2STEPPER12201/4”STEPPER6201/4,STEPPER2201/4”GN75131/2”SPAREGN75141/2”STEPPER11/5/1STEPPERI1201/4,STEPPER5201/4”STEPPER

24、I201/4”GN75151/2”SPAREGN75161/2”0BMM3 TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接头尺寸机台接 头型式NOTEOBM30i/rM3170i/rM31701/4”GN75171/2”UL-2/AN1l：L-23 8”AN1453/8GN75181/2”M2M21701/4”M21701/4,GN75191/2”AN2453/8GN75201/2”MlMl1701/4”Ml1701/4”GNS5O11/2”2F2F553/8”2F1503/82F1503/8GN85O2L2IFIF553 8”IF1503/8IF1503/8*GN85

25、O31/2”SPAREGN85O41/2”SPAREGN85O51/2”SPAREGN85O61/2”SPAREGN85O71/2”COATER4/5/1OCOATER4/53/8.COATERIO11/4”GN85081/2”SPAREGN85O91/2”C0ATER1/DEV12COATER1/2/33/8.DEVELOPER1211/4”STEPPER!20i/rGN85101/2”DEV1OPER7/1DEVELOPER7/8/93/8”DEVTL0PER1/2/33/8S88201/4”（位置未定）PX55O11/2”CWC ROOMCWC-OXIDE2831/4”CWC-POLY2

26、831/4CWC-METAL2831/4”PN55O21/2”TUBE CLEAN/SORTEROVEN203/8OVEN203/8CV-etcher553/8”SORTER8501/4”chemical hood(QC)5661/4”TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接头尺寸机台接头型式NOTESEM(S-4700, QC)i/rSEM(JSM-6700F, QC)1/4”PN55O31/2”9F-1/2/AOHOOAG41001519F-170i/r9F-2553/8PN55M1/2”8F/QS3008F553/8”QS3008501/4”PN55O512

27、”WJ-1/2 wj-i553/8*WJ-2553/8PN55O6L2”Local scrubber（位置未定）Local scrubber501/4”Local scrubber501/4”Local scrubber501/4”Local scrubber501/4.Local scrubber501/4”Local scrubber501PN55O71/2”SPAREPN55081/2”ND-6200(2)/N0VELLUSND-6200(2)151/4”NOVELLUS151/4”PX55O91/2”5F55F5553/8”5F5553/8PN55101/2”SPAREPN55111/

28、2”SPAREPN55121/2”SRD/EKC-N/OVENOVEN31/4”SRD1703/8*SRD1703/8EKC-N2851/4”PN55131/2”SRD/EKC-C/OVENOVEN31/4”SRD1703/8*SRD1703/8”EKC-C2851/4”PN551412”AMI 8330CAMI 8330C101/4”AMI 8330C2003/8,AMI 8330C31/4”AMI 8330C11/4.AMI 8330C1/4”PN55151/2”AMI 8330DAMI 8330D101/4”AMI 8330D2003/8”TAKE-OFFTAKE-OFFNO.尺寸Too

29、l机台流量LPM机台接头尺寸机台接头型式NOTEAMI 8330D3i/rAMI 8330D1i/rAMI 8330D1/4”PN55161/2”AMI 8330BAMI 8330B10i rAMI 8330B2003/8AMI 8330B31/4”AMI 8330B1i/rAMI 8330B1/4”PN55171/2”SPAREPN55181/2”LAM 590A/PSC-1LAM 590A1/2”PSC-131/4,PSC-131/4”PN55191/2”LAM 59OC/BLAM 590C1/2”LAM 590B1/2”PN55201/2”LAM 4420A. BLAM 4420A101

30、/4”LAM 4420A11/4”LAM 4420A11/4.LAM 4420A11/4”LAM 4420A11/4”LAM 4420A11/4.LAM 4420B10i/rLAM 4420B11/4”LAM 4420B11/4”LAM 4420B11/4”LAM 4420B11/4,LAM 4420B11/2”PN55211/2”SPAREPN55221/2”LAM 490C/0VENLAM 490C1/2”OVEN31/4”PN55231/2”LAM 490A/BLAM 490A1/2”LAM 490B1/2”PN55211/2”SPAREPN55251/2”BOE5O:1/H2O2/SR

31、D/OVENB0E50:l5671/4”H2O25671/4”SRD5671/4”OVEN31/4”PN55261/2”SPAREPN55271/2”SPAREPN55281/2”SPAREPN55291/2”SPARETAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接头尺寸机台接头型式NOTEPN65O11/2”SPAREPN65O21/2”6F/7F6F553/87F553/85F553/8”PN65O31/2,SPAREPN65O11/2”SPAREPN65O53 rFSI-63123/4.PN65O63 rFSI-53123/4”PN65O71/2”SPAREPN6

32、5081/2”SRD-CR1SRD-CR11703/8”SRD-CR11703/8*PN65O91/2”LAM 8310BLAM 8310B101/4”LAM 8310B2003/8,LAM 8310B31/4”LAM 8310B11/4”PN65101/2”SPAREPN65111/2”LAM 8310ALAM 8310A101/4”LAM 8310A2003/8,LAM 8310A31/4”LAM 8310A11/4”PN65121/2”MATRIX1/2/0VENMATRIX 131/2”MATRIX 231/2”OVEN31/4”PN65131/2,SPAREPN65141/2”LAM

33、4520LAM4520101/4”LAM4520i/rLAM4520101/4”LAM45201/4”PN65151/2”SRD-CR3SRD-CR31703/8.SRD-CR31703/8”PN65161/2”SRD-CR2/CR2SRD-CR21703/8”SRD-CR21703/8.CR-22831/4”PN65171/2”B17/18/PSC-1/3/5B17/182831/4”PSC-131/4”PSC-131/4”PSC-331/4.PSC-331/4”TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接头尺寸机台接头型式NOTEPSC-53i/rPSC-531/

34、4”PN65181/2”SRD-B17/18SRD-B17/181703/8.SRD-B17/181703/8”PN65191/2,SRD-BOE2SRD-BOE2SRD-BOE21701703/83/8”PN65201/2,BOE-22853/8PN65211/2”BOE-12853/8PN65221/2”SRD-BOE1SRD-BOE11703/8*SRD-BOE11703/8PN65231/2”GAMA subsystem（位置未定）Preheat2851 rPreheat2851/4”H/DI2851PN65211/2”SPAREPN65251/2”SPAREPN75O11/2,SPA

35、REPN75O21/2”4F/3FIF553/8*3F553/8PN75031/2”SPAREPN75O43/4*FSI-43123/4”PN75O5FSI-33123/4”PN75O61/2”SCRUBBER5661PN75O71/2”SPAREPN75O81/2”CR-1CR-1301/4”CR-1301/4.CR-1301/4”CR-130i/rPN75O91/2”CR-3CR-3301 rCR-3301/4”CR-3301/4”CR-3301/4”PN75101/2,SPAREPNS5O11/2”SPAREPN85021/2”1F/2FIF553/82F553/8PN85031/2”H

36、F50:l/SRDHF5O:12831/4”SRD2831/4”PN85O13/4FSI-13123/4”TAKE-OFFTAKE-OFFNO.尺寸Tool机台流量 LPM机台接头尺寸机台接 头型式NOTEPN85053/4”RCA5003/4”PN85O61/2”Megasonic/SRD（位置未定）Megasonic5671/4”SRD5671/4”PN85O71/2”coater 7/8, 4/5, 10coater 7/83/8coater 4/53/8coater 103/8PN85O81/2”SPAREPN85O91/2”developer 12,7/8/9developer 12

37、3/8developer 7/8/93/8*PNS5101/2”Developer 1/2/33/8”P055011/2”9F-2/8F/AG1100AG41002018F20i/r9F-211/4”P055021/2”SPAREP055031/2”町-1/2wj-i201/4”WJ-2201/4”P055O11/2”ND-6200(2)/N0VELLUSND-6200(2)201/4”NOVELLUS201/4”P055051/2”SPAREP055061/2”5F55F5221/4”5F5221/4”P055071/2”AMI 8330B/C/DAMI 8330B1/4”AMI 8330C

38、1/4.AMI 8330D1/4”P055091/2”SPAREP055091/2”SPAREP055101/2”LAM 590A/PSC-4LAM 590A1/2”PSC-121/4”PSC-121/4”P055111/2”LAM 590B/C/PSC-3/5LAM 590B1/2*LAM 590C1/2”PSC-321/4,PSC-321/4,PSC-521/4”PSC-521/4”P055121/2”LAM 4420A./BLAM 4420ATAKE-OFFTAKE-OFFNO.尺寸Tool机台流量LPM机台接头尺寸机台接 头型式NOTELAM 4420Ai/rLAM 4420Bi/rL

39、AM 4420B1/4”P055131/2”LAM 490A/B/C/PSC-1LAM 490B1/2”LAM 190C1/2”LAM 190A1/2”PSC-121/4”PSC-121/4”P055141/2”Tegal900A/B（位置未定）Tegal900A1/4”Tegal900B1/4”P055151/2”SPAREP055161/2”SPAREP065011/2”6F/7F6F221/4”7F221/4,5F221/4”P065021/2”SPAREP065031/2”SPAREPO6SO41/2”AMI 8310A/BAMI 8310A1/4”AMI 8310Ai/rAMI 83

40、10B1/4,AMI 8310B1/4”P06505P075011/2”MATRIX 1/2MATRIX 11/2”MATRIX 21/2”1/2”3F/4F3F221/4”IF221/4”P075021/2”SPAREP07503P085011/2”SPARE1/2”1F/2FIF221 r2F221/4”P085021/2”SPAREPOS5O31/2”SPARE附件二Specialty Gas VMB ListCATEGORYNO.GASVMBVMPSERVICE TOOL NO. /CONNECTOR SIZE & TYPETypeNo.LocationTypeNo.Location1

41、2345678PYROPHORIC/ FLAMMABLE1SiH3cb3+1GVB-30389-HJIF2F9F11/4UJR1/VUJR1/4”UJR2Si&3+1GVB-30256YHNovelND62008F18F21/4UJR1/4*UJR1/4UJR1/4UJR3+1GVB-30489-HJIF2F7F1/4UJR1/4”UJR1/4UJR3NH,3+1GVB-30156-HNovel9F18F18F21/4”UJR1/4.UJR1/4UJR1/4.UJR3+1GVB-30589-HJIF2F1/4UJR1/4.UJR4ft7+1GVB-70189-HJIF2F3F4F5F5F56F

42、7F1/4UJR1/4“UJR1/4UJR1/4-UJRi/rUJR1/4-UJR1/4*VJR1/4UJR5ph,/n33+1GVB-30856fHIJ1WJ21/4”UJR1/4“UJR6SiK/N,3+1GVB-30656fHIJ1町21/4”UJR1/4”UJR7BA/N,3+1GVB-30756fHUIU21/4UJR1/4*UJRCORROSIVE/ TOXIC8Cl,5+1GVB-70256-EF490A490B490C8330A8330B8330C1/21/21/21/4*VCR1/4”VCR1/4*VCR7+1GVB-70356-FG4420A4420BP5000P50001

43、/4VCR1/4VCR9HBr5+1GVB-70456-EF4420A4420BP5000P50001/4”VCR1/4.VCR10NF,3+1GVB-3096f8310A8310B1/4VCR1/4VCR11BC1,5+1GVB-3106f8330A8330B8330CCATEGORYNO.GASVMBVMPSERVICE TOOL NO. /CONNECTOR SIZE ft TYPETypeNo.LocationTypeNo.Location123456781/4/VCR1/4“VCRi/rVCR12HFno VMBCV-ETCH1/4”UJRINERT13CHF,5+1GVP-7O36

44、-F590A590B590C8330A8330B8330C1/21/2*1/21/4”VCR1/4VCR1/4*VCR3+1GVP-3O367-F4520A4520B8310A8310B1/4VCR1/4VCR1/4VCR1/4-VCR14CFi7+1GVP-7O156-FGND6200P5000P50008330A8330B8330c1/4UJR1/rVCR1/4VCR1/4-VCR7+1GVP-7O7gEF4420A4420B590A590B590C4520A4520B1/4.VCR1/4VCR1/4,VCR1/2*1/2”1/4*VCR1/4”VCR15GF.7+1GVP-7086-EF

45、Novel4420A4420B490A490B490c1/4UJR1/4-VCR1/4VCR1/2*1/2.1/2*16SF511GVP-70467-GHTegal 900ATefal 900B590B590C1/41/4”1/21/2.3+1GVP-7096-EF590A490A490B490C1/2,1/2*1/21/2*7+1GVP-70256-FG4420A4420BP-5000P-50001/4VCR1/4.VCR17Ar3+1GVP-30467-F8310A8310B4520A4520BCoater(QC)1/4VCR1/4“VCRi/rVCR1/4“VCR5+1GVP-71089

46、-DAN1AN2UL-23/8-3/83/8187+1GVP-7O56-EF490A490B490C590A590B590C4520A4520B1/21/2”1/2.1/2“1/21/25+1GVP-70656-FG4420A4420B1/4”VCR1/4*VCRno VMPSOG3/8”CATEGORYNO.GASVMBVMPSERVICE TOOL NO. /CONNECTOR SIZE ft TYPETypeNo.LocationTypeNo.Location1234567819SO3+1GVP-30156-GHNovel8F18F2NM2001/4UJR1/4.UJR1/4,UJR1/

47、4-UJR20He/O,3+1GVP-30256-FGP5000P5000附件三CDA Take-off ListTAKE-OFFNO.TAKE-OFF 尺寸机台名称机台流量NLPM机台接头 尺寸(in)机台接头型式NOTEnun0inoCDA-S Main 0125-18713phase I only 8bar state WAT tube clean tube clean tube clean tube clean cwc cwc 位置未定 tube clean位置未定CDA-S Sub 1652 1/273752 1/2CA5501401 1/2CV-etcher601/4poly-fl

48、ow5601/4poly-flow5601/4Parts clean5601/4Tube clean5601/4CWC-0XIDE1281/4CWC-Metal2801/4CWC-poly2801/4Boat clean5601/4CA55O2401 1/29F2 TEOS601/49F-1 NITRIDE601/4RTA AG4100151/48F1201/4CA5503401 1/2spareCA5501401 1/2PECVD ND-6200(2)151/45F5303/85F5303/8Cassette clean5601/4Magesonic5601/4CA5505401 1/2OV

49、EN31/4EKC B232831/4OVEN-N31/4AMI 8330(C)31/451/4101/4CA5506401 1/2AMI 8330(A)31/451/4101/4AMI 8330(B)31/451/4101/4PSC-l31/431/4EKC N-PPS2831/4LAM 590C33/8LAM 590A33/8CA5507401 1/2spareCA55OS401 1/2LAM 4420B3S1/4LAM 4420A381/4S6000301/4LAM 590B33/8LAM 490A33/8LAM 490B33/8TAKE-OFFNO.TAKE-OFF 尺寸机台名称机台流

50、量NLPM机台接头 尺寸(in)机台接头型式NOTEinOLAM 490C33/8 8bar state位置未定 位置未定 位置未定位置未定 位置未定OVE-l31/4CA5509401 1/2KLA2132303/8H2025661/4SRD5661/4CA5510401 1/2HITMP NV-10(2)303/8HI-IMP NVr-10(l)303/8BOE 50:111/4RS35-1301/4CA55U401 1/2spareCA5512401 1/2NV-10(3)4503/8CDA-S Sub 2652 1/239782 1/2CA6501401 1/2spareCA65O24

51、01 1/27F201/46F601/4CA6503401 1/2FSI-6301/2FSI-5301/2CA6501401 1/2WT-15601/4WT-25601/4WT-35601/4CA6505401 1/2AMI 8310(A)31/451/4AMI 8310(B)31/451/4CA6506401 1/2MATRIX (1)21/2MATRIX (2)21/2LAM 4520 A381/4LAM 4520 B381/4OVEN-231/4CA65O7401 1/2PSC-531/431/4legal 900A31/4legal 900A31/4Preheat(GAMA Subsystem)2831/22831/4CA650S101 1/2PSC-331/431/4PSC-131/431/4B17/B182831/4CA6509401 1/2BOE 1/3/52831/4OVEN-431/4CA6510401 1/2MED-IMP NV-6200A(3)1501/4NVr-6200A(2)1501/4CA65U401 1/2HITMP NV-10