太阳能电池硅片缺陷检测

1、硅片缺陷自动检测仪中科院上海光机所研制成功“硅片缺陷自动检测仪”样机（图1），灵敏度优于180纳米（图2），检测速度30片/小时（8英寸硅片），拥有6项专利（3项发明），具有自主知识产权。该类型设备市场非常大，目前我国完全依赖进口，单台价格达千万元人民币以上。该样机研制成功，对于改变我国IC专用检测设备长期依赖进口局面、研制和开发国产化设备取得重要进展。该技术还可用于检测卫星用太阳能电池帆板碎片(图3)以及光学元件表面疵病。An Automated Wafer Defects Detection SystemAn automated wafer defects detection system

2、 has been developed in Shanghai Institute of Optics and Fine Mechanics, CAS. The photograph of this detector is shown in figure 1. The apparatus can detect defects of size of 180nm on wafer surface, with velocity of 30 pieces per hour for 8 inch wafer. The oscilloscope signal is shown in figure 2. T

3、his type of detecting apparatus will have large demand in China in future. It entirely depends on importing now and its unit price outvalues ten millions yuan. Therefore, the successful development of this detecting apparatus (having 6 Chinese patents) is very important to change the situation of de

4、pending on importing and manufacture home-made products. This detecting technology can also be used to detect flaws on surfaces of solar cell array and large-caliber optical elements. The oscilloscope signal of detecting solar cell array is shown in figure 3.图1硅片缺陷检测仪(置于洁净台中)Fig.1 The automated wafer defects detection system (in cleaningplatform)图2 检测硅片表面0.18m粒子的示波器信号Fig.2 The oscilloscope signal of 180nm wafer defects图3 检测太阳能电池帆板表面缺陷的示波器信号(中间小峰为缺陷信号)Fig.3 The o