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1、百度文库-让每个人平等地提升自我联能科技(深圳)有限公司Unimicron Technology (Shen Zhen) Co.,Ltd.TOW主任APPR:CC经理、刘课长From 王永锋Date:2005-06-26Subject垂直电镀线均匀性测试报告一、试验目的测试B线经调整后均匀性是否满足本公司品质要求二、试验参数及方法、步骤1 .飞靶两端都夹边料,并靠近板边,将两端钛篮向中间8cm左右2 .测量工具:铜厚测试仪CMI7003 .测试板规格:620mm x 400mm;板厚 1.5mm4 .电镀(铜球深度低于液位8-10cm)CuSC4H2SC4C电镀参数42.67g/L133.3m

2、l/L48ppm16ASF x 70min5.测试及计算方式:挂板方式及测试点如右图计算方法如下:S=标准差CCV=分布能力AVG=平均值MIN=最小值MAX=最大值X=横向平均值Y二竖向平均值 CCV1=S/AVGoooooooooc oooooooooc oooooooooc oooooooooc oooooooooc oooooooooc oooooooooc oooooooooc oooooooooc oooooooooc)B1B2B3B9 CCV2=1-(MAX-MIN)/(MAX+MIN)X 100%三、试验结果: X%=(X-AVG) Q AVGX 100%11 Y%=(Y-AV

3、G)B1正面12345678910YY%A18.818.3419.6119.6919.2719.9820.6521.9822.223.7920.4-0.79%B18.6519.0618.2919.2919.3519.9719.8520.7221.5922.3719.9-3.30%C18.2918.0518.841919.0319.2719.9520.7221.8622.7519.8-3.79%D18.3218.0518.8919.8719.6919.3320.421.3422.3523.7820.2-1.90%E18.6118.6518.4519.720.7119.9520.9722.0223

4、.3424.2320.70.34%F18.7418.418.8718.8719.720.6721.8223.324.8624.92212.04%G18.4218.191918.5819.7820.0620.9921.9523.2924.3620.5-0.64%H18.4218.5718.4318.9120.2121.1622.3423.3323.5724.1320.91.52%I18.5418.5718.4318.9120.2121.1622.3423.3324.5724.13212.06%J18.6118.7419.4119.2620.8421.8723.2824.3724.3224.812

5、1.64.65%X18.5418.4618.8219.2119.8820.3421.2622.3123.223.93X%-9.97%-10.35%-8.60%-6.73%-3.47%-1.22%3.23%8.31%12.63%16.18%联能科技(深圳)有限公司Unimicron Technology (Shen Zhen) Co.,Ltd.B1 正面 AVG=20.59S=2.05COV1=9.93%MAX=24.92MIN=18.05COV2=84.01%B1反面12345678910YY%A17.1216.7317.2917.7518.5619.36,19.2620.6620.9221.

6、6118.9-1.86%B16.5616.7316.616.9817.571818.4819.1219.8620.4418-6.48%C16.6417.0317.7418.5619.2220.0720.8821.822.922.6719.82.42%D16.7117.417.8918.4819.0819.7420.4121.2421.9122.7919.61.45%E17.0217.7318.1318.6319.5920.2921.2122.0722.9522.920.13.98%F17.2817.8817.9718.6819.5:20.0221.0721.6922.922.74203.57%

7、G17.1817.7417.818.7319.4420.2921.3121.7321.7922.8519.93.12%H16.3616.716.8317.618.218.7819.4820.1920.621.3818.6-3.49%I16.4516.5116.9717.4117.7318.5218.9319.2219.5920.0918.1-5.92%J20.3518.8119.2118.4619.6820.1120.5520.620.5920.6819.93.21%X17.1717.3317.6418.1318.8619.5220.1620.8321.421.82X%-10.98%-10.1

8、6%-8.51%-6.00%-2.22%1.21%4.53%8.02%10.98%13.12%AVG=19.28S=1.88COV1=9.74%MAX=22.95MIN=16.36COV2=83.24%B2正面12345678910YY%A21.1421.8922.3822.9823.323.423.322.8822.7322.4122.6-1.36%B20.2521.0621.822.2222.422.6722.6622.3422.1222.3422-4.21%C20.8522.6122.7822.8522.7322.6422.6222.4422.5522.2822.4-2.25%D21.8

9、323.122.9923.1522.823.0223.2123.1522.8922.8422.9-0.24%E21.6522.9523.7223.6123.523.6523.6723.0823.522.9523.21.20%F22.1423.5624.0523.9323.7523.0923.9424.1424.0124.0323.73.10%G21.9523.4823.9623.7823.7124.1624.2424.0924.0224.423.83.60%H22.1123.3823.9624.0922.8624.2624.542423.9524.2423.73.43%I21.9422.982

10、3.423.7523.7423.8323.5723.7823.5123.9623.42.15%J20.1521.121.5521.9922.1222.0821.8422.0922.0822.0921.7-5.42%X21.422.6123.0623.2423.0923.2823.3623.223.1423.15X%-6.76%-1.49%0.46%1.23%0.60%1.43%1.77%1.07%0.80%0.88%AVG=22.95S=0.94COV1=4.09%MAX=24.54MIN=20.15COV2=90.18%B2反面12345678910YY%A20.2621.1121.2921

11、.1821.4521.5122.0922.2822.822.8621.7-1.92%B19.1920.3920.9821.4921.5121.5421.6322.0421.8521.8221.2-3.90%C20.4321.3921.7122.0722.0422.1122.1222.6822.3922.4821.9-0.75%D21.0522.0622.3322.722.9322.962323.1423.0123.4722.72.52%E22.3823.3123.5423.7723.823.9223.923.6124.2224.3123.77.10%F22.6923.4923.8123.832

12、4.0623.8624.1923.8124.1825.0423.98.09%G21.922.9923.4423.2823.4323.3123.8224.6423.824.0423.56.14%H20.8421.7821.7921.6621.7721.8121.822.0722.1822.4121.8-1.34%I19.0419.4119.6419.6519.419.9320.4820.520.2420.4219.9-10.11%J20.0920.3320.3819.720.2521.2721.4521.4221.2522.0420.8-5.83%X20.7921.6321.8921.9322.

13、0622.2222.4522.6222.5922.89X%-5.79%-2.18%-0.98%-0.79%-0.19%0.52%1.54%2.32%2.19%3.54%AVG=22.11S=1.41COV1=6.36%MAX=25.04MIN=19.04COV2=86.39%联能科技(深圳)有限公司Unimicron Technology (Shen Zhen) Co.,Ltd.B3正面12345678910YY%A22.2421.8221.9822.2322.2622.6422.4921.9621.9621.6622.1-0.22%B21.4121.6221.6621.621.5721.71

14、21.8421.9921.2620.9521.6-2.76%C21.6622.0522.1722.0321.9221.8821.9821.9821.5721.5821.9-1.22%D22.0422.8222.5622.3922.3122.1421.7921.720.8620.2221.9-1.22%E22.3423.0622.7122.6922.8122.1622.1422.1522.0121.5122.40.84%F23.3323.3923.2623.3523.34:23.5423.2723.1822.3921.9723.14.19%G23.8423.8823.7823.9423.6924

15、.0323.5722.7922.5121.9923.45.55%H24.3323.8224.1223.8523.8324.1923.6622.9522.4820.8223.45.56%I22.6622.4322.3222.1122.2121.5720.8719.520.1220.8721.5-3.19%J21.5821.0620.7619.8420.320.520.720.5220.1819.9520.5-7.37%X22.5422.622.5322.422.42P 22.4422.2321.8721.5321.15X%1.67%1.91%1.62%1.04%1.14%1.19%0.27%-1

16、.35%-2.88%-4.60%AVG=22.17S=1.08COV1=4.88%MAX=24.33MIN=19.5COV2=88.98%B3反面12345678910YY%A24.123.4323.1522.922.1521.9421.7421.5421.321.5122.4-0.58%B24.2623.7723.1423.0322.4522.3922.2122.1121.8621.7322.70.75%C26.125.4924.6424.3923.7423.8723.8423.5223.2222.8224.27.41%D26.7925.5425.1324.4324.1424.2523.83

17、23.6223.4623.1824.48.30%E26.525.9325.1624.6223.9724.2324.0423.5923.4723.0724.58.74%F26.7425.724.7124.1123.5823.5423.3923.1522.9223.1324.16.97%G23.822.9622.2920.7821.421.321.3721.142120.9321.7-3.68%H21.220.5220.1919.3519.2119.4319.7719.719.4219.1919.8-12.12%I22.0421.2320.5119.4319.0119.7419.7319.6719

18、.4719.1220.0-11.23%J24.5923.4521.7519.9220.0520.0421.1821.5222.620.9421.6-4.13%X24.61,23.8023.071r 22.3021.9722.0722.11r 21.9621.8721.56X%9.23%5.64%2.40%-1.02%-2.49%-2.04%-1.86%-2.53%-2.93%-4.31%AVG=22.53S=1.97COV1=8.72%MAX=26.79MIN=19.01COV2=83.01%B4正面12345678910YY%A21.9722.1121.8521.7521.6821.5721

19、.5521.1220.9620.6821.51.11%B21.2621.7521.2921.5921.4221.4120.9720.3620.0620.0421-1.28%C21.4322.312221.7121.1221.7320.9120.7820.2420.3521.3-0.14%D22.2722.6522.1521.4422.0121.2920.8320.5720.4320.5721.40.62%E22.3523.3722.6222.5422.2922.5721.4721.3520.8121.3422.13.68%F22.7223.8223.1422.6922.0921.582221.

20、5321.3721.1122.24.31%G23.2423.7923.1822.8822.8123.1123.0522.0721.8721.3222.76.78%H22.5123.222.3422.2422.3421.7921.5721.5220.7920.7621.92.90%I20.2320.720.0619.8820.2320.0719.7419.519.2618.9619.9-6.70%J18.2518.9719.4919.5319.0718.8119.3518.6818.5818.1718.9-11.27%X21.6222.2721.8121.6321.5121.3921.1420.

21、7520.4420.33X%1.57%4.60%2.46%1.58%1.02%0.49%-0.68%-2.54%-4.00%-4.50%AVG=21.29S=1.28COV1=6%MAX=23.82MIN=18.17COV2=86.54%联能科技(深圳)有限公司Unimicron Technology (Shen Zhen) Co.,Ltd.MAX=23.86MIN=17.76COV2=85.34%B4反面12345678910YY%A21.4221.1720.720.3620.6120.2820.7621.1721.0820.820.84.66%B20.7520.6220.2819.8219

22、.6420.0619.7520.0920.320.3620.21.31%C20.6720.9120.6420.420.1119.9720.2520.1220.3620.6720.42.53%D20.8620.820.7620.320.2520.3320.4120.6920.6820.6220.63.47%E20.5921.1120.7720.420.2420.3420.4620.5320.6620.8220.63.47%F19.7721.2920.7320.620.3520.0620.2820.0520.3722.4620.63.47%G19.0119.9219.8219.5419.3519.

23、1419.3819.5719.2519.9719.5-2.07%H17.7619.131918.9718.3418.218.4318.518.5718.7718.6-6.73%I17.0318.0818.0217.9917.5217.3917.9118.2118.8118.8718-9.67%J19.1319.8220.7820.1519.8618.7719.0720.0820.3520.5519.9-0.26%X19.720.2920.1519.8519.6319.4519.6719.920.0420.39X%-1.05%1.90%1.22%-0.27%-1.41%-2.88%-1.19%-

24、0.03%0.68%2.42%AVG=19.91S=1.01COV1=5.09%MAX=22.46MIN=17.03COV2=86.25%B5正面12345678910YY%A20.519.7721.2721.9722.0222.2522.8422.7822.2822.1921.81.08%B22.7322.3421.9322.6522.3522.5822.5522.9122.9122.8822.64.77%C22.1322.1521.5322.2522.822.8923.322.122.6622.9222.54.26%D22.9823.1622.9722.4922.2822.1321.762

25、1.321.7222.2422.33.43%E22.1722.5423.0823.0522.821.8422.222.0322.0320.9522.33.43%F20.7820.9421.7522.0221.7521.4121.1720.9320.320.0521.1-2.13%G20.6120.7521.1421.7221.3821.221.5821.3920.9720.6621.1-2.13%H21.4321.1921.2921.3421.0621.0420.8920.5420.1419.5720.8-3.28%I20.3921.0621.1321.0721.321.4321.3821.1

26、820.9320.5621-2.38%J21.2121.1420.7520.5219.9820.0919.8719.4318.961820-7.24%X21.4921.521.6821.9121.7721.6921.7521.4621.2921X%-0.29%-0.24%0.60%1.64%1.01%0.61%0.92%-0.45%-1.23%-2.57%AVG=21.56S=1.02COV1=4.74%COV2=87.17%MAX=23.3MIN=18B5反面12345678910YY%A20.3220.2520.6521.4921.8222.7418.619.3619.6119.6720.

27、5-0.05%B20.0719.8620.4320.8621.3321.6522.7219.2319.1919.3720.5-0.05%C19.8419.8219.9220.4521.1521.5122.1519.5119.0119.0220.2-1.34%D19.6219.7220.2720.8921.3222.1922.5519.4519.191920.4-0.54%E19.8819.9319.920.621.1521.6922.6919.7819.1519.220.4-0.54%F19.9919.920.59P 21.1921.6422.3122.9619.8518.9719.0320.

28、60.63%G19.4919.9120.0520.4920.8621.7522.3423.3419.5819.3820.70.93%H18.9519.8220.0620.0120.8421.5721.9122.8623.8619.5720.92.10%I18.9119.5820.0220.5121.8822.6218.9119.219.6920.2220.2-1.75%J21.4422.0822.8322.7622.0822.8317.7618.0818.1218.9720.70.93%X19.8520.0920.4720.9321.4122.0921.2620.0719.6419.34X%-

29、3.23%-2.08%-0.20%2.01%4.36%7.67%3.64%-2.18%-4.27%-5.71%AVG=20.51S=1.35COV1=6.56%联能科技(深圳)有限公司Unimicron Technology (Shen Zhen) Co.,Ltd.B6正面12345678910YY%A22.7422.4722.6823.2123.4523.3623.4423.3823.1422.1723.0-0.90%B22.2722.7722.8222.923.5622.9722.622.6622.7522.1622.7-2.20%C22.4323.5823.2723.0423.1122.

30、9622.6522.522.8622.6222.9-1.34%D22.6223.1523.9523.8523.9924.123.4623.2222.6222.5523.40.82%E22.6423.0423.823.9923.6824.2324.3623.8723.6822.7323.61.68%F23.0423.6223.2523.4322.4922.1622.0822.7823.523.6423.0-0.90%G23.9723.9523.6522.221.623.2524.5724.6724.7924.8123.72.11%H24.5922.9222.0523.5725.0224.9925

31、.224.7224.6924.324.24.27%I22.7322.8925.1425.2825.1124.7424.3425.2324.4424.0524.45.13%J21.2420.318.9920.3621.3221.7221.6221.2420.1924.3421.1-9.09%X22.8322.8722.9623.1823.3323.4523.4323.4323.2723.34X%-1.65%-1.46%-1.07%-0.11%0.54%1.03%0.96%0.94%0.25%0.55%AVG=23.21S=1.17COV1=5.05%MAX=25.28MIN=18.99COV2=

32、85.79%B6反面12345678910YY%A24.225.1124.9224.925.0124.8624.7424.4824.2924.3224.70.69%B23.8724.6224.224.2224.3724.4524.4424.1124.524.8224.4-0.53%C24.0424.4724.6224.4924.3524.3924.3324.3624.7625.3224.5-0.12%D24.8525.1825.0624.724.824.8124.8124.2724.3424.8424.81.10%E25.725.7725.6825.6825.4725.425.4825.352

33、4.7325.0525.43.69%F25.425.9825.9426.1925.9925.7325.7725.7825.1925.6225.85.02%G25.9825.9826.0725.8425.7325.5225.2425.4725.6425.8925.74.93%H25.6926.0325.6725.6825.6425.3124.7925.6225.8324.8825.54.02%I24.9725.0424.0624.825.124.6222.2522.0722.122.2123.7-3.28%J21.3820.9321.8120.2619.8820.6220.7721.1720.9

34、220.120.8-15.26%X24.6124.9124.824.6824.6324.5724.2624.2724.2324.31X%0.33%1.57%1.13%0.61%0.44%0.18%-1.08%-1.06%-1.21%-0.90%AVG=24.53S=1.5COV1=6.12%MAX=26.19MIN=19.88COV2=86.3%B7正面12345678910YY%A24.6926.5426.3626.426.7626.8526.9427.0327.1726.7326.53.57%B25.5525.2725.4925.3825.8825.8826.325.8725.9625.6

35、225.70.34%C25.3225.522625.925.6525.8426.2425.8625.6425.7925.80.56%D23.9224.3524.9824.9525.3325.6426.0326.2126.2226.425.4-0.90%E24.324.524.8725.0825.5126.0826.3526.2326.4426.6725.6-0.12%F24.8825.2625.7225.5826.0926.626.726.5126.4826.8126.11.68%G25.3325.926.2726.0626.5426.8526.826.6527.0727.1326.53.23

36、%H25.5326.2426.3226.2926.2926.6226.326.2626.5626.5626.32.59%I25.8425.6125.4525.4425.0425.3224.8524.624.824.6525.2-1.84%J23.7523.7223.34123.4623.523.4923.2723.0823.1222.2523.3-9.11%X24.9125.2925.4825.4525.6625.9225.9825.8325.9525.86X%-2.82%-1.33%-0.60%-0.70%0.10%1.11%1.35%0.77%1.22%0.89%AVG=25.63S=1.

37、05COV1=4.1%MAX=27.17MIN=22.25COV2=90.04%联能科技(深圳)有限公司Unimicron Technology (Shen Zhen) Co.,Ltd.B7反面12345678910YY%A28.2227.3926.7827.1427.6827.6927.8927.527.4827.4327.55.34%B26.6427.2527.327.2627.1126.926.8926.1326.5126.6726.92.84%C26.126.3626.3326.2526.3726.6826.4126.6427.0726.9326.51.49%D25.2126.3726

38、.5926.5626.8926.9326.6926.4227.2227.3526.61.91%E25.6726.6126.8227.3326.9427.8827.5526.526.8927.49273.23%F25.3726.6427.1426.8127.2127.4127.1726.5227.4227.3126.92.97%G24.9226.3326.726.5426.8726.9926.8626.8126.68 26.7326.51.60%H24.6925.7225.2525.1725.3125.5425.4825.2224.7925.1425.2-3.42%I22.2522.9322.8

39、223.2423.9824.0223.7723.0122.5323.323.2-11.25%J24.7124.5824.4124.7725.2425.6925.3624.6723.96 25.5424.9-4.71%X25.3826.0226.0126.1126.36:26.5726.4125.9426.06 26.39X%-2.86%-0.41%-0.42%-0.07%0.90%1.72%1.08%-0.70%-0.27%1.01%AVG=26.12S=1.34COV1=5.12%MAX=28.22MIN=22.25COV2=88.17%B8正面12345678910YY%A26.7726.

40、926.6426.7826.7627.3727.2827.5327.9828.2427.23.44%B25.826.0326.2526.3226.3727.0427.0527.2427.227.3726.71.32%C26.126.1426.4426.1926.3726.7426.826.6727.5127.0326.61.06%D26.0426.3426.1526.4126.5826.6627.1226.9127.2426.8126.61.06%E27.1226.6528.9426.9627.126.9626.5626.4426.1726.72272.58%F26.6626.552727.2

41、626.727.1827.2827.022726.5626.92.29%G28.0527.6226.8727.1326.9826.8726.6226.6426.5326.31272.58%H27.2126.9426.5526.5126.9826.4526.1727.0926.4225.9226.61.16%I25.0624.9424.6324.2824.4324.5725.8223.7923.1522.9124.4-7.45%J25.4325.0523.4423.7124.0724.2524.5524.1523.8623.8924.2-7.90%X26.4226.3226.2926.1626.2326.4126.5326.3526.3126.18X%0.40%-0.01%-0.10%-0.62%-0.32%0.34%0.79%0.11%-0.05%-0.54%AVG=26.32S=1.17COV1=4.44%MAX=28.94MIN=22.91COV2=88.37%B8反面12345678910YY%A28.7728.9928.9628.9529.1729.5129.528.7729.629.6929.25.09%B28.1128.1128.1328.4628.628.

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