田口式品质工程

1、No.ABC12345678111122221122112212121212 No.ABCDEFG觀測值1234567812222222112222221112222211112222111112221111112211111112Y1Y2Y3Y4Y5Y6Y7Y8NO.NO.步驟步驟計算方式計算方式結果結果1 1計算各別因子之自由度計算各別因子之自由度自由度自由度= =水準數水準數-1-12-1=12-1=12 2計算總自由度計算總自由度總自由度總自由度= =各因子自由各因子自由度之總和度之總和1 1 7=77=73 3計算實驗次數計算實驗次數實驗次數實驗次數= =總自由度總自由度+1+17+

2、1=87+1=84 4找出實驗次數找出實驗次數( (列數列數) )與水準均符與水準均符合之直交表合之直交表L8L8為符合實驗次數、因子數以及水準為符合實驗次數、因子數以及水準數之直交表數之直交表直交直交表表列數列數 最多因子最多因子個數個數在這些水準的行數在這些水準的行數最大值最大值2 23 34 45 5L4L44 43 33 3- - - -L8L88 87 77 7- - - -L9L99 94 4- -4 4- - -L12L12121211111111- - - -行行 行行1(1)23(2)321(3)4567(4)54764(5)674523(6)7654321(7)123456

3、7外測直交表外測直交表O O1 12 22 21 1N N1 12 21 12 2內測直交表內測直交表MM1 11 12 22 2A AB BC CD DE EF FG G數據數據N NO.O.1 12 23 34 45 56 67 7y1y1y2y2y3y3y4y41 11 11 11 11 11 11 11 1* * * * *2 21 11 11 12 22 22 22 2* * * * *3 31 12 22 21 11 12 22 2* * * * *4 41 12 22 22 22 21 11 1* * * * *5 52 21 12 21 12 21 12 2* * * * *6

4、 62 21 12 22 21 12 21 1* * * * *7 72 22 21 11 12 22 21 1* * * * *8 82 22 21 12 21 11 12 2* * * * *niiSTBynSN12101log10niiLTBynSN121011log102210log10sySNNTB21211,niiyynSniiyny11N0.N0.A AB BC CD DE E觀測值觀測值SNSN1 12 23 34 45 56 67 71 11 11 11 11 11 11 11 15 57 79 98 816.5616.562 21 11 11 12 22 22 22 27

5、77 77 77 716.9016.903 31 12 22 21 11 12 22 26 65 55 55 514.3214.324 41 12 22 22 22 21 11 1101010109 99 919.5219.525 52 21 12 21 12 21 12 29 98 88 89 918.5418.546 62 21 12 22 21 12 21 16 64 46 64 413.4513.457 72 22 21 11 12 22 21 17 77 76 68 816.7716.778 82 22 21 12 21 11 12 27 78 88 88 817.7417.7456

6、.168191715141log10222210SN73.1674.1777.1690.1656.1681 TABCDE水準116.8316.3616.5515.5218.09水準216.6317.0916.9017.9315.36差異0.200.730.362.422.734321141A52.1932.1490.1656.164183.16因子因子說明說明Level 1Level 2Level 3A石灰含量石灰含量5%1%B壽山石含量壽山石含量43%53%63%C壽山石種類壽山石種類新配方加新配方加添加物添加物原來配方原來配方新配方無新配方無添加物添加物D燒粉含量燒粉含量0%1%3%E添加

7、物粒徑添加物粒徑小一些小一些原來粒徑原來粒徑大一些大一些F燒成次數燒成次數一次燒成一次燒成二次燒成二次燒成三次燒成三次燒成G長石含量長石含量7 %4%0%H黏土種類黏土種類K-type各一半各一半G-type因子效果圖354045A1 A2 B1 B2 B3 C1 C2 C3 D1 D2 D3 E1 E2 E3 F1 F2 F3 G1 G2 G3 H1 H2 H3因子水準SN比niiyn121011log10niiyn12101log10- 13. 71- 13. 48- 13. 17- 13. 21- 13. 45- 12. 94- 13. 39- 13. 26- 11. 34- 15. 3

8、1A1A2B1B2C1C2D1D2E1E2變異來源變異來源自由度自由度平方和平方和均方均方F F值值淨平方和淨平方和貢獻度（貢獻度（）A A1 10.1190.119B B1 10.1910.191 C C1 11.181.181.181.1811.9211.921.0811.0813.253.25D D1 10.0340.034E E1 131.56331.56331.56331.563318.82318.8231.46431.46494.6794.67誤差誤差2 20.1490.149（合併誤差）（合併誤差）5 50.4930.4930.0990.0990.6910.6912.082.08

9、總和總和7 733.23633.23633.23633.236100100558. 324. 325. 350. 333. 3log102222268.1061.05183099.061.6晶圓進料檢驗Wafer Incoming Inspection晶圓貼片Wafer Mount晶圓切割/清洗 Wafer Saw / Clean品管按批QC Lot Acceptance拒收Reject切割後目檢Post Saw Inspection允收Pass上片Die Bond銀膠烘烤 Epoxy Cure接線 Wire Bond接線後目檢Post Bond Inspection品管按批QC Lot Ac

10、ceptance拒收Reject允收Pass續後頁Continue on next page Assembly Process Flow - IDies on TrayO Op pt ti io on n晶圓上膠帶Tapping晶圓研磨Grinding晶圓下膠帶DetappingO Op pt ti io on n晶粒覆膠Die Coating晶膠烘烤Coat Cure2210log10SySNNBT1 12 23 34 45 56 67 78 89 9101011111212131314141515BCB*CDFAA*CEGE*F1 11 11 11 11 11 11 11 11 11 11

11、 11 11 11 11 11 12 21 11 11 11 11 11 11 12 22 22 22 22 22 22 22 23 31 11 11 12 22 22 22 21 11 11 11 12 22 22 22 24 41 11 11 12 22 22 22 22 22 22 22 21 11 11 11 15 51 12 22 21 11 12 22 21 11 12 22 21 11 12 22 26 61 12 22 21 11 12 22 22 22 21 11 12 22 21 11 17 71 12 22 22 22 21 11 11 11 12 22 22 22 21

12、 11 18 81 12 22 22 22 21 11 12 22 21 11 11 11 12 22 29 92 21 12 21 12 21 12 21 12 21 12 21 12 21 12 210102 21 12 21 12 21 12 22 21 12 21 12 21 12 21 111112 21 12 22 21 12 21 11 12 21 12 22 21 12 21 112122 21 12 22 21 12 21 12 21 12 21 11 12 21 12 213132 22 21 11 12 22 21 11 12 22 21 11 12 22 21 1141

13、42 22 21 11 12 22 21 12 21 11 12 22 21 11 12 215152 22 21 12 21 11 12 21 12 22 21 12 21 11 12 216162 22 21 12 21 11 12 22 21 11 12 21 12 22 21 1編號12345678910平均 標準差1 136.537.837.835.335.136.633.435.533.734.435.611.554127.20352 223.827.527.529.132.635.329.935.131.835.230.783.899217.94643 330.234.534.5

14、32.429.438.331.234.327.238.333.033.658319.11434 438.641.141.145.443.340.245.440.648.138.542.233.199422.41135 533.6373727.626.333.941.634.531.33233.484.534517.3666 632.832.832.827.33532.335.531.834.931.232.642.365622.7987 73837.637.636.738.149.338.438.145.24940.84.992718.24698 831.942.742.733.137.243

15、.939.543.836.742.239.374.438818.95869 940.732.132.133.427.634.529.83429.23332.643.603919.1406101046.6424241.941.543.948.346.541.345.643.962.582 10 24.6218111145.548.248.247.447.34752.351.750.749.548.782.206 11 26.8909121230.229.929.929.725.826.33230.328.326.828.922.029 12 23.0802131345.241.441.440.6

16、36.744.543.549.538.946.742.843.806 13 21.0265141444.345.145.144.645.748.645.556.443.44946.773.823 14 21.7505151529.829.429.427.726.925.129.625.32825.727.691.857 15 23.4684161644.953.853.848.849.55549.248.650.150.750.443.032 16 24.4206平均38.1238.1221.77821.778總合324.02324.02觀測值SNA1A2C123.0922.01C220.0321.98B1B2C121.67 23.43C219.34 22.67E1E2F124.14 21.66F220.93 20.3919.0020.0021.00