




版权说明:本文档由用户提供并上传,收益归属内容提供方,若内容存在侵权,请进行举报或认领
文档简介
1、micro sensors華梵大學機電工程學系基礎課程名稱:微製造工程導論微微/奈米光機電高科技學程奈米光機電高科技學程sensorstransfer the mechanical behavior ( such as deformation, stress, and acceleration ) to electrical signal.sensing techniques can be characterized as static and dynamic approaches. static method : stress and deformation + stress detecti
2、on piezoresistive strain gauges piezoelectric sensing. + deformation detection capacitance interferometer.dynamic method : resonant frequency + resonant frequency.華梵大學機電工程學系source:自強工業科學基金會 清華大學 方維倫 教授stress detection piezoresistive strain gauge strain gauge a conductor or semi conductor that is fab
3、ricated on or bonded directly to the surface to be measured and that changes in dimension along with the surface. the gauge resistance is very proportional with the change in gauge dimension by two factors, + deformation of the shape of the gauge. + piezoresistivity effect. piezoresistivity a materi
4、al property where the bulk resistivity , ,is influenced by the mechanical stresses applied to the material.華梵大學機電工程學系source:自強工業科學基金會 清華大學 方維倫 教授stress detection piezoresistive strain gauge the sensitivity is expressed by the gauge factorgf = (1 + 2) + (d/)/ where, is poissons ratio is residual stra
5、in the strain gauge can also be used to measure the vibration frequency of a structures + the stress status of a structure ( at a certain face ) can vary from tension to compression during vibration, for example , a cantilever beam.華梵大學機電工程學系source:自強工業科學基金會 清華大學 方維倫 教授micro machined strain gauge ha
6、s two advantages+easy to define the pattern of the gauge.華梵大學機電工程學系+ high gf traditional conductor strain gauge the gf mainly determined by m, however, the gf is domainated by (d/) for a semiconductor strain gauge.source:e,o. doebelin, measurement systems, 1990stress detection piezoelectric sensing
7、piezoelectricity the phenomenon in which an electrical voltage develops due to an externally applied stress. an opposite effect is also true the piezoelectric material will deform under an input voltage , therefore it can also be a material for actuator. silicon is not a piezoelectric material, ther
8、efore an additional piezoelectric film has to be deposited onto the substrate when applying this technique. zno is the most common piezoelectric material used in microfabrication.華梵大學機電工程學系source:自強工業科學基金會 清華大學 方維倫 教授deformation detection - capacitance the basic parallel plate capacitor equation isc
9、 =a/dwhere is dielectric constant a is overlapping plate area d is distance between two plates there are several ways to sense the deformation by the changing og capacitance, for example華梵大學機電工程學系source:自強工業科學基金會 清華大學 方維倫 教授why microsensors? the primary advantages of the micro sensor is the reducing of its size + lower weight + lower manufacturing cost + sensitivity + power consumption華梵大學機電工程學系source:semiconductor sensors, edited by s.m. sze, 1994 micro machining processes ba
温馨提示
- 1. 本站所有资源如无特殊说明,都需要本地电脑安装OFFICE2007和PDF阅读器。图纸软件为CAD,CAXA,PROE,UG,SolidWorks等.压缩文件请下载最新的WinRAR软件解压。
- 2. 本站的文档不包含任何第三方提供的附件图纸等,如果需要附件,请联系上传者。文件的所有权益归上传用户所有。
- 3. 本站RAR压缩包中若带图纸,网页内容里面会有图纸预览,若没有图纸预览就没有图纸。
- 4. 未经权益所有人同意不得将文件中的内容挪作商业或盈利用途。
- 5. 人人文库网仅提供信息存储空间,仅对用户上传内容的表现方式做保护处理,对用户上传分享的文档内容本身不做任何修改或编辑,并不能对任何下载内容负责。
- 6. 下载文件中如有侵权或不适当内容,请与我们联系,我们立即纠正。
- 7. 本站不保证下载资源的准确性、安全性和完整性, 同时也不承担用户因使用这些下载资源对自己和他人造成任何形式的伤害或损失。
最新文档
- 2025版绿色金融抵押担保借款合同范本
- 2025版基础设施信息化工程承揽合同样本
- 2025版家具行业产品质量检测服务合同范本
- 2025年度文化产业合作合同补充协议书
- 二零二五年度智慧园区项目可行性研究报告咨询服务合同
- 麻疹的防治知识培训课件
- 二零二五年电子产品质量检测与认证服务合同
- 二零二五年度电子行业技术交流保密合同
- 紧急救援吊装劳务分包应急合同
- 二零二五年度离婚协议书:女方权益保障与财产分割规范
- 电影产业宣传推广与市场营销策略
- 新能源会计面试题及答案
- 艺术疗愈与心理健康工作室行业深度调研及发展战略咨询报告
- 血管活性药物静脉输注护理解读
- 老年人急症与急救护理
- 心脏瓣膜病围手术期的护理
- 二零二五年度环保包装袋回收与再利用合作协议2篇
- 仓储相关制度培训
- 浅析广东促进科技成果转化的现状、问题及对策
- 2025年国家电投集团招聘笔试参考题库含答案解析
- 2025医疗护理员理论考试试题含答案
评论
0/150
提交评论