ESD静电防护基础知识(中英文版)

ESDBestPracticalSharingTITLQRA12IndexESDHistoryDefinitionofESDMaterialReduceESDDamagedMethodologyESDChecklist3~1314~1718~4647~52Page2ReminderthatESDisaseriousproblemintheentireelectronicsindustry.

提醒所有員工“靜電”對IC材料的破壞是一個非常嚴重的問題,它是整個半導體所面臨的一項挑戰.WhyDoWeNeedESDTraining?為何需要此ESD訓練課程?Itisbelievedthat25%ofallcomponentfailures

arearesultofESD.

相信有大約25%的IC材料是因靜電(ESD)的影響而遭破壞33ElectricalOverStress(EOS)-Theexposureofanitemtoa

currentorvoltagebeyonditsmaximumratings.

EOS-指一個IC材料受到超過其所能負荷的電壓,電流而遭受到破壞

的狀態Definitions

定義ElectrostaticDischarge(ESD)-Thetransferofelectrostatic

chargebetweenbodiesorsurfacesatdifferentelectrostatic

potential.ESDisasubsetofEOS.

ESD-即靜電放電之意.指不同電位的二個物體之間產生的電荷急驟流

動的現象.44ConductorsvsInsulators帶靜電的絶緣體

ChargedInsulator帶靜電的導體

ChargedConductorConductorevenlydistributeschargeoverentiresurface

平均分佈於整個表面Oppositepolaritychargescanexistonthesameinsulator.

不同極性的電荷會同時存在絶緣體上Conductorcompletely

dischargeswhengrounded.Insulatoarsdonotallowchargetoflow.

Groundinganinsulatorneitherremoves

chargeorpreventssurfacecharges.5IC++++++++++++IC--++++++----ICIC------5

Staticelectricityhasbeenacuriosityformany

hundredsofyears.HistoryToday,specialprecautionsaretakenbyindustrieswhere

staticsparkscouldcauseanexplosion,e.g..,flour

mills,hospitaloperatingrooms,etc..

在今天,靜電所產生的破壞已引起工業界的注意.例如:麵粉廠的

塵爆,院的手術過程,IC製造工業等..AftertheinventionofgunpowderbytheChinese,it

wasnolongeracuriosityforanyonemanufacturing

thatproduct.

靜電現象一直存在於人類歷史中,以前則被認為是一種奇特的異象66Strangefailuresoccurred,andthecauseofthe

problemwasnoteasilyseenwiththeoptical

microscopes-failureanalysisread:cause

unknown.

靜電造成一些奇特而不易察覺的破壞,F/A分析的結論往往是:原因

不明.

EOS/ESDisperhapsthemostsignificant

failuremechanismintheelectronicsindustry

today.

EOS/ESD對半導體之元件的破壞,可能是當今半導體界最頭痛,也

是最嚴重的一個問題.History77FundamentalsofStatic-Tribocharging

磨擦產生靜電Thissituationoccurswhenoneorbothofthematerialsareinsulators.

但這種情況為發生在其中一種物質為絕緣體Whenevertwodissimilarmaterialsmakecontactandthenareseparated,astaticchargeiscreated.

二種不同性質的物質碰在一起再分離也會產生靜電.88TriboelectricSeriesFactorstoconsider:Humidity:濕度Speedofseparation:分離速度Typeofmaterial:材料性質Contactarea:接觸面積IncreasingPositiveAir:空氣HumanHand:手RabbitFur:兔毛Glass:玻璃Mica:humanhair:頭髮Nylon:尼龍Wool:毛Silk:絲Aluminum:錫Paper:紙Cotton:棉Steel:銅鐵Wood:木頭Amber:HardRubber:橡膠Nickel,Copper,Brass,SilverPolyester:聚醋棉PolyethylenePolypropylene:軟片PVC(Vinyl)IncreasingNegative99靜電放電的模型Human-BodyModel,HBM)人體放電模型MachineModel,MM)機器放電模型Charged–DeviceModel,CDM)元件充電模型模擬由個人之手指尖端放電至元件的現像GroundedSurface10HBM波形C=100PFR=1.5K

Standard資料來源:工研院電子所11自動組裝之製造環境ESD模型電感I(A)Time(ns)MM12CDMEvent的來源CDM測試機台自動插件IC的包裝(Tube)13Definition定義(1)1.Conductivematerial-ESDprotectivematerialhavingasurfaceresistivitylessthan1xE5ohms/squareoravolumeresistivitylessthan1x10E4ohm-cm.導體-ESD保護物質其表面電阻系數小於1x10E5歐姆/單位面積或容積電阻係數小於1x10E4歐姆-公分者.14Staticdissipativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E5ohms/squareor1x10E4ohm-cmvolumeresistivity,butlessthan1x10E12ohm/squaresurfaceresistivityor1x10E11ohm-cmvolumeresistivity.靜電傳導物質-表面電阻系數介於1x10E5與1x10E12歐姆/單位面積,或容積電阻係數介於1x10E4與1x10E11歐姆-公分者.Definition定義(2)153.Insulativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E12ohms/squareor1x10E11ohm-cmvolumeresistivity.絕緣物質-物質它的表面電阻係數大於1x10E12歐姆/單位面積或容積電阻係數大於1x10E11歐姆-公分者.Definition定義(3)16InsutaticMaterial-Materialthatminimizesthegenerationofstaticchargelessthan+/-200(TCP100V)voltswhenrubbedagainstitself,orwhenseparatedfromitselforothersimilarmaterials.抗靜電物質-物質若經自己相互磨擦或相互分開或與其它類似物質分開時不產生大於+/-200(TCP100V)伏特的靜電壓者.Definition定義(4)17SafetyArea

安全區域Theoperationwhereallleadsareatcommonvoltagepotential.(Wiresarebondedandtiebarisnotseparatedsuchassealing,molding,PMIandsoon.)材料所有的腳都在等電位.(已接線,且腳尚未分離.如過爐,壓模,壓模前檢查等區域).18Equipment

設備a)ElectrostaticVoltmeters/fieldmeters:靜電表b)DigitalOHMMeter:數位歐姆表c)AirIonizer:離子風扇d)WriststraporFootStrap(Optional):靜電手環或腳環e)ConductiveBag&AntistaticMagazine:導電袋及抗靜電管f)CautionLabel:提醒標籤g)Anti-StaticVoidFiller:抗靜電泡墊h)DissipativeTable/FloorMAT(Optional):靜電地氈或桌墊i)Esdprotectedworkstation:無靜電工作桌j)CautionSign:提醒看板k)ESDProtectiveShoesTester:靜電鞋測試器19DigitalOHMMeter

數位歐姆表Shallbecapableofmeasuringadcresistanceof0.1ohmthrough1megohm+/-10%withanopencircuitvoltagegreaterthan1.5V.三用電錶或直流電阻表應可量測0.1歐姆到1M歐姆+/-10%範圍的電阻,且開路電壓應大於1.5V以上.20AirIonizer

離子風扇(1)Thedevicesatworkstationmustbewithin4feetmaximumaremeasuredbyverticallinefromthefaceoftheionizersandaround45degreesoneachsideofthisline.switchedonandproperlydirectedacrosstheworksurface.工作時必須置於距離離子風扇4英尺圓弧內,兩邊各近似45度角範圍內.且方向正對著工作區域任何靜電敏感的材料放於工作台之前,必須把離子風扇先打開,而且中途不可關掉.211.IonizerBalance<+/-35V餘額電壓離子風扇的餘額=30cm,<5min.小於+/-35V2.Ionizerchargedecaytime.來量測離子風扇的放電衰退程度.<20sec,=30cm,1000Vreduceto100V3.Bluetapewillputunderionizerstreamaround5sec.thenputwaferonit.膠布撕下後，在離子風扇下大約吹5秒鐘,方可將晶片置於其上AirIonizer

離子風扇(2)22WriststraporFootStrap(Optional)

靜電手環或腳環(1)Wriststrapconnectedtodissipativeorconductivetabletopthroughanintegral1Mohm+/-10%resistorshouldbewornbyoperators.Thiswayresultinthewriststrapbeing2Mohm+/-10%groundandisacceptable.靜電環必須有1M歐姆+/-10%的電阻連接到導電或靜電傳導的工作桌面.若因此使得靜電環與接地間形成2M歐姆+/-10%之電阻是可接受的。23Theworkingresistorofwriststripmustbecheckedshiftilyasfollowingpath,fromtheuser'shand,throughtheuser'sbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector.Anditshouldbeduring500k-10MEGAOHMS,recordisrequired.靜電環的工作電阻必須以如下的迴路每班檢驗並做記錄,而其阻抗值需介於:或500k到10MEGA歐姆.迴路帶者的手帶者的身體身體與手環接觸點1M+/-10%歐姆的靜電環內含電阻手環連接線接地點 歐姆計WriststraporFootStrap(Optional)

靜電手環或腳環(1)24ConductiveBag&AntistaticMagazine

導電袋及抗靜電管(1)

1.AllESDSdevicesshallbepackedinESDprotectivepackagingwhennotatanESDprotectedareaorwork-station.當不在靜電防護區域或工作站時所有的靜電敏感材料必須裝在靜電防護包裝之內.2.Conductivemagazine,bagorcontainerwhichFaradaycagecontainersimulatedwillbeusedforalldevicetransportationandstorage.材料在貯存或運送中必須以導電管子,袋子或導電容器等法拉第容器包裝.25

3.Tubewillbeanti-staticorconductive.管子要用抗靜電或導電的材質．There-cycleperiodforanti-statictubeusedonlineshouldnotexceedoneyear.線上用做循環使用之管子，使用期限不得超過一年。ConductiveBag&AntistaticMagazine

導電袋及抗靜電管(2)26CautionLabel

提醒標籤AyellowESDcautionlabelshallbeattachednoconductivebagandonesideofpackingbox.黃色的ESD警告標誌必須貼在導電袋及包裝箱上.2.EachESDprotectivepackageshallhaveacontrastingESDcautionlabel.Thecautionlabelshallbelegibletonormalvisionatadistanceofthreefeet.每件靜電防護包裝物必須有明顯的靜電警告標籤.這靜電警告標籤必須能在三英尺外以正常目視可辨識出.27Anti-StaticVoidFiller

抗靜電泡墊PackingandfillermaterialsforESDsdevicesshallnotturboelectricchargetogreaterthan+/-200(TCP100V)voltsundernormal/intendeduse.靜電敏感材料的包裝及填充物當使用時不得因摩擦而產生大於+/-200(TCP100V)伏特之靜電壓.28DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(1)1.ESDprotectivestatic>/=10E5to<10E9ohmdissipativeworksurfacetoESDgroundresistance.靜電防護傳導物表面至靜電接地之電阻等於或大於10E5歐姆到10E9歐姆Therecommendedlowerlimitis10E5ohm.Howeveralowervaluemaybeusediflocalsafetyrequirementscanstillbemet.建議最低的阻抗值是10E5歐姆.但是如果能夠符合當地安全要求則低於此建議值的阻抗可以採用.29Electrodes--Twocylindrical2.27kg(5pound)electrodeswithadiameterof63.5mm(2.5inches)eachhavingcontactsofelectricallyconductivematerialwithaShore-A(IRHD)udometerhardnessof50-70.Theresistancebetweenthetwoelectrodesshouldbelessthan1kilohmwhenmeasuredat10Vorlessonametallicsurface.電極-兩個重約2.27公斤(5磅),直徑6.35公分(2.5英吋)的圓柱型電極,每個都要有硬度在(IRHD)50-70間的導電物相接觸.兩個電極間的電阻在金屬表面及10伏特或更低的量測電壓下時不得大於1k歐姆.DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(2)30Cleanelectrodewithaclean,low-liningcloth.orusingaminimumof70%isopodan-watertocleanit.Allowelectrodetoairdry.使用清潔且不會脫纖維的布料來清潔電極.或用至少含有70%的異丙醇水溶液來清潔電極,並讓電極在空氣中乾燥.ConnectoneleadofthemetertoESDground,andtheotherleadtotheelectrode.Placeelectrodeonthesurfaceofthematerialbeingtested.Applytestvoltageandrecordtheresistanceafterthemeasurementhasstabilizedorafter15secondshaselapsed.Removetestvoltageandremoveelectrodefromsurface.連結儀表的一端到接地點,另一端到電極.將電極置於待量測物體表面相距至少3英尺.輸入測試電壓並在量度穩定或15秒後記錄阻抗值.停止測試電壓且將電極也移開.DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(3)31PerformaminimumoffivetestspercontiguousFloorsurfacematerialoraminimumoffivetestsper5,000Squarefeetoffloormaterial,whicheverisgreater.AMinimumofthreeofthefivetestsshouldbeconductedinThoseareasthataresubjecttowearorthathavechemicalorWaterspillageorthatarevisiblydirty.在連續的地板面至少要做5次測試或每5000平方英尺要做5次測試,那種次數多就採用那種.5次中至少有3次要在有受磨損,或受化學物,水污染或看起有些髒的地方DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(4)32ESDProtectedWorkStation

無靜電工作桌(1)1.StaticdissipativeESDprotectiveworksurfacesarepreferred.Adirectconnectiontogroundisrecommended.Aresistorof1Mohm+/-10%inthegroundingwireisoptional.建議最好使用靜電傳導防護工作面,且直接連結到接地.接地線可加或不加1M+/-10%電阻.WhenhighlyconductiveESDprotectiveworksurfacesarerequiredduetothemanufacturingprocessneeds(e.g.,stainlesssteel),theyshallbeconnecteddirectlytoESDgroundwithoutaseriesresistortoensuretheyarecontinuouslyatgroundpotential.InthiscaseGroundfaultcircuitinterrupters(GFCI)isarecommendation.當高導電性靜電防護工作面(如:不銹鋼工作面)因製造部需要而設置時,它們需直接連結到靜電接地而不須外加一串連電阻以確定它們持續的維持接地電位;此時每一電源插座建議需有漏電斷路器(GFCI).33WhenunprotectedESDSdevicesorassembliesarecandledonconductive/highlyconductiveworksurfaces,theworksurfaceshallbecoveredwithagroundedstaticdissipativeworksurfaceormeettheresistancerequirementofstaticdissipativeworksurface,10E5to10E9ohms.當使用不銹鋼工作桌面處理材料時,必需在其上覆蓋一層已接地的靜電傳導性桌面或其桌面電阻要符合靜電傳導性桌面電阻的要求,10E5到10E9ohms.ESDProtectedWorkStation

無靜電工作桌(2)34CautionSign

提醒看板SDcautionsignsshallbepostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas.靜電警告標誌必須置於每一個無靜電工作桌,且或在每個靜電防護區域的入口處.警告標誌可如下或類似者:Caution注意StaticCanDamageComponents靜電會破壞材料HandleItemsonlyinAccordancewithESDspecification處理材料必須依照靜電規格行之35ESDProtectiveShoesTester

靜電鞋測試器ESDprotectiveshoes>/=1Mohmto=/<450Mohm靜電防護鞋迴路1M歐姆到450M歐姆間.36ESDProtectiveSmocks

靜電防護衣1.ESDprotectivesmocks.</=+/-200V(TCP:100V)靜電防護衣靜電壓小於或等於200伏特(TCP:100V)TheESDprotectivesmocksshallbebuttoned(exceptforthecollar)wheneverthewearerisatanESDprotectedworkstationorinadesignatedESDprotectedarea.當穿者在靜電防護工作站或靜電保護區內時,靜電防護衣的鈕扣(衣領上的除外)或拉鍊需要扣好,拉好37ESDGround

靜電接地(1)TheESDgroundshallbetheequipmentgroundorearthground.Equipmentgroundistheelectricalground(green)wireatreceptaclesthathavebeentestedWhenbothequipmentandearthgroundsareusedatthesameESDprotectiveworkstationtheyshallbebondedtogetheratsomepointinthegroundsystem.靜電接地應使用設備接地或大地接地.設備接地是電源插中的電氣接地(綠)線它需經過測試.當兩種接地方式於同一靜電防護工作站均被採用時,在接地系統上它們必須被連結在一起.38EachESDworkstationshallbeindividuallyconnectedtotheESDground.Thegroundingshouldnotbehookedinseries.Thisistoavoidtheadditiveresultofresistiveandresultinginincreaseofdecaytime,alsotoavoidthegroundingdisconnectedsimultaneouslywhenanygroundingwirebecomeopen.每個靜電工作站必須個別的連結到靜電接地.當一個靜電工作站上有很多靜電工作面時則每一個靜電工作面需個別的接到靜電接地點.接地線也不可串接,為的是防止增加衰減時間,並防止同時斷路的發生.ESDGround

靜電接地(2)39Anyinsulatormaterialswhichmakecontactwithorcomewithintwelve(12)inchesofthesemiconductordevicesastheypassthroughthetestequipmentshouldbereplaced(wherepractical)withantistaticorstaticdissipativematerials.Ifthisisnotfeasible,theinsulatormaterialsshouldbetreatedwithanantistaticsolution.Inaddition,anymetalpartsinthetestequipmentwhichcomeincontactwithsemiconductordevicesatanytimeshouldbegrounded.Thisisespeciallyimportanttoavoidthechargeddevicemodelfailuresinhighlysensitivesemiconductordevices.電性測試設備上的任何絕緣物若會接觸到或靠近半導體材料12英吋以內時應以抗靜電或靜電傳導物取代之.如果不可能的話,則該絕緣物必須用抗靜電溶液處理過.此外,測試機臺上的金屬零件部份若會接觸到半導材料時則該金屬部份無論何時均要接地.是非常重要的,可以避免高敏感的半導體材料因靜電而受損傷.ESDGround

靜電接地(3)40Impedanceofequipmentgroundingconductorislessthan1.0ohm.設備接地導線的阻抗需小於1歐姆.Note:Alligatorclipforwriststrapisnotallowedtouse.鱷魚夾頭禁止使用.ESDGround

靜電接地(4)41Gloves/Fingercoats

手套/手指套Onlycottongloves,antistatic/conductivegloves,orantistatic/conductivefingercotsshouldbeusedforhandlingESDsdevices.當需要用手套或手指套時,只有棉手套,抗靜電/導電手套或抗靜電/導電手指套可用來處理靜電敏感材料.PeoplehandlingESDSdevices.Theyshouldusethegloves,fingercotsorgloveswithfangcots.處理靜電敏感材料時,可只用手套,手指套或手套加上手指套.42StorageAreas

儲存地區WhenthestorageshelvingisnotanESDprotectedareaorworkstation,theESDSdevicesshallbeinESDprotectivepackaging.若儲物架不是一個靜電防護區域或工作站,則靜電敏感材料必須置於靜電防護包裝物中.2.Thegroundchainfortrailers(forWipe/finishgood)enoughtocompletelycontactwithgroundandkeepthechainclean,replacinganewoneifnecessary.裝載材料成品的推車必須要有接地鍊條,其長度要能夠完全與地面接觸,並保持乾淨整潔,若不潔淨則必需更換之.43

MobileEquipment

可移動的設備Mobileequipment(e.g.,carts,chairs,tablesshallnotgenerateelectrostaticvoltagesgreaterthan+/-200V(TCP100V)withintwelve(12)inchesofunprotectedESDSdevicesduringuse.可移動的設備(例如:車子,椅子,桌子)在使用時若接近未受保護的靜電敏感材料12英吋以內不得產生大於+/-200(TCP100V)伏特之靜電壓.44MethodsforMinimizingStaticCharging

低靜電的方法

AntistaticSolution

抗靜電液Antistaticchemicals(antistatsolutions)canbeusedtopreventstaticchargegenerationonstaticgenerating/chargingmaterialsintheworkorstorageareas.Duringapplicationofanyantistaticchemical,theusermustconsiderthefollowing:抗靜電化學物(抗靜電液)可以用來防止在工作或儲存區的靜電產生或充電物發生靜電充電.在使用任何抗靜電化學物時,使用者應考慮下列:1.抗靜電液要選擇不會污染靜電敏感材料者.2.抗靜電噴劑或溶液不可用於能夠產生能量的電氣部份或設備上.3.當裝置或包裝體直接暴露在噴霧下時不可使用抗靜電溶液.4.靜電溶液需要的程度以及使用頻率要根據在正常作業下使用靜電伏特計來做靜電壓量測的結果來做決定.45MethodsforMinimizingStaticCharging

低靜電的方法

RelativeHumidityControl

相對濕度的控制Relativehumidityhasasignificantimpactonthegenerationofstaticelectricityanditscontrolisrecommendedwherepracticable.相對濕度對靜電產生有很大的影響如有能力最好要加以控制.Note:Therecommendedminimumhumidityis40%R.H.註:建議最小的濕度為40%R.H.46MethodsforMinimizingStaticCharging

低靜電的方法

Training

訓練It'stheresponsibilityofeachareasupervisortomakesurethathis/herpeoplereceiveESDcontroltraininginitiallyforworkinginhandlingESDSitems.每一區域的主管必須確定其操作靜電敏感材料的人員,須受過ESD的訓練.Note:PersonnelenteringESDprotectedareasshouldreceiveESDawarenesstraining.註:進入靜電防護區域之人員必須受過靜電認知訓練.47CheckList

檢查表(1)1_____Doesthecalibrationsystemforallinspection,measuringandtestequipmentusedtoperformrequiredESDitemcheckslistedinTable1meettheTITLcalibrationrequirementsofTQ-General01002有ESD量測儀器是否都有校正,且都在有效期內? 2_____AregroundedflooringorfloormatscoveringthefloorareaswherepersonnelormobileESDprotectiveworkstationsareusingfloorgroundingmethods?使用靜電防護鞋的工作區域是否配合有接地良好之靜電防護地板?3_____Iseachpersonhandlingorwithintwelve(12)inchesofunprotectedESDSdevicesgroundedbyeitherawriststraporESDprotectivefootwear?在接近ESDS產品(即IC材料)12英吋範圍內的人員是否都有戴靜電手環或穿靜電鞋?4_____Whenpersonnelfloorgroundingmethodsareused,istheESDprotectivefootwearwornonbothfeet?是否所有人兩隻腳都穿有靜電鞋(不能只穿一支腳)?5_____ArenonessentialandpersonalitemskeptoffoftheESDprotectiveworksurfaces?靜電防護工作桌面上是否沒有不必要的東西或私人用品?6_____Arethestaticvoltagesgeneratedbyessentialmaterials/itemslessthan+/-200volts(top100V)withintwelve(12)inchesofunprotectedESDSdevices?在接近ESDS產品(即IC材料)12英吋範圍內是否沒有會產品大於+/-200V(TCP100V)靜電壓的任何物品?7_____WhenESDprotectivesmocksareused,dothesmockscoverallpersonalgarmentsabovethewaistexceptattheneckarea?靜電服是否能蓋到由腰部以上(頸部除外)的部位?8_____WhereunprotectedESDSdevicesarehandled,aregroundedstaticdissipativeworksurfacesused?處理ESDS產品(即IC材料)時,是否在接地良好的靜電防護工作桌面上處理?489_____AreESDcautionsignspostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas?是否在靜電防護區域的入口或工作桌區域有一靜電防護的”警式看板”?10_____Arethedailywriststrapchecksbeingperformedandrecordedtheresults?靜電手環是否每班做檢查及記錄檢查結果呢?11_____Doesthewriststrapresistancemeasurementpathgofromthewearer'shand,throughtheuser'sbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector?靜電手環檢測是否由穿戴者的手,使用者的身體,靜電環內阻,一直到靜電接地做一迴路電阻值量測.12_____ArethedailyESDprotectivefootwearchecksbeingperformedandrecordedtheresults?靜電鞋是否每班做量測與記錄呢?13______AretheESDgroundconnectionvisualchecksbeingperformedweekly?所有靜電接地,如靜電手環,桌墊.,靜電地板的接地聯接是否每週目檢一次?14_____ArethemonthlyESDprotectivesmockstaticvoltagechecksbeingperformedandkeptrecord?靜電衣的靜電壓是否每個月偵測一次並記錄其電壓值?15_____AretheESDprotectedareaandworkstationstaticvoltagesurveysbeingperformed&recordmonthly?生產線上ESD保護區域和工作桌區域的靜電壓是否每個月檢檢測一次.並記錄其電壓值?16_____AretheESDprotectivestaticdissipativeworksurfacetoESDgroundresistancechecksbeingperformed&recordedquarterly?ESD防護工作桌面(靜電消散桌面)到其接地的電阻是否每季檢測一次並記錄CheckList

檢查表(2)4917_____AretheESDprotectivefloortoESDgroundresistancechecksbeingperformedper&recordedquarterly?ESD防護地板到其接地的電阻是否每季檢測一次並記錄其電阻值?18_____AretheESDgroundcontinuitychecksbeingperformed&recordedquarterly?靜電接地,如靜電手環,工作桌面,地板等的接地線是否每季量測一次並記錄其電阻值?19_____Aretheionizebalancechecksbeingperformedper&recordedsemi-annual?離子風扇的balance電壓和DecayTime是否每半年校正一次並有記錄?20_____Whenused,aretheairionizesaimedatthedevicesandoperator'shandsratherthanattheoperator?離子風扇是否朝向處理材料的雙手,而非朝向operator?21_____IsanannualESDsystemcompliancechecktotherequirementsofthisstandardbeingperformed?每一工作區域是否每年做一次檢查,看是否符合此靜電管制規格的要求?22_____Whencompliancetothedaily,weekly,quarterly,semiannual,and/orannualchecksisnotcontinuouslymaintained,arethechecksperformedadoublefrequency?如果任何定期的測量不通過其量測頻率是否增加一倍呢?23_____ArerecordsoftheESDitemchecksmaintainedatleast2yearsminimumrequirement.所有ESD量測的記錄皆必須保存至少二年的要求?24____DoeseachESDprotectivepackagehaveacontrastingESDcautionlabel?是否每一靜電防護包裝都有一明顯的靜電警告標示25_____AretheESDcautionlabelslegibletonormalvisionatadistanceofthreefeet?是否此靜電警告標示(籤)在3英呎的距離即可看得清楚?26_____WhenmorethanoneESDworksurfaceisusedataworkstation,iseachsurfaceindividuallyconnectedtotheESDground?是否每一工作桌面或桌墊都有其個別的靜電接地?CheckList

檢查表(3)5027____Whenconductive/highlyconductiveESDprotectiveworksurfacesareused(e.g.,stainlesssteel),aretheyconnecteddirectlytoESDgroundwithoutaseriesresistortoinsuretheyarecontinuouslyatgroundpotential?不鏽鋼工作桌面是否直接接地,即不需連接一1Mega歐姆的電阻?28_____Whenafloorgroundingdevice(e.g.,dragchain,dragwire,conductivecastor)isusedtogroundmobileESDprotectedworkstations,isanESDprotectivefloorormatused?當移動性工作桌,車子被用來當成處理材料的工作桌時,它們是否有靜電接地?及在有靜電地板的工作環境?29_____AreallESDSdevicespackedinESDprotectivepackaging,whennotatanESDprotectedareaorworkstation?當ESDS產品(即IC材料)不在靜電防護區域時它們是否有在靜電防護包裝之內?30_____ArethepackingmaterialdonotGeneratestaticvoltagemorethan+/-200voltswhenoperation?所有包裝用的材料,在使用時是否不會產生大於+/-200v(TCP100V)的靜電壓?31____Isapplyingorremovingstaticgeneratingtapesandlabelstoantistatictubes,magazinesandcarrierswithESDSdevicesinside,performed?當有IC材料在管子或盤子內時,是否沒有做會產生大於+/-200v(TCP100V)靜電壓的撕膠布或貼膠布的動作?32____AreallESDS