2015年洁净产品线宣传英文

SIASUNCleanroomrobotLeadingIntelligentTransformationAboutSIASUNIndustryApplicationsSIASUNPerformanceCatalogueProductPresentationBusinessIntroductionHighestQualityAboutSIASUN

CompanyProfile>

DevelopmentHistory>Industrylayout>Construction>CompanyProfileSIASUNRobot&AutomationCo.,LTD.(Hereinafter“SIASUN”),foundedin2000,isahigh-techcompanynamedfromthefatherofChineserobotJiang,andformerlyknownasroboticnationalresearchcenterinShenyangInstituteofAutomation,CAS.SIASUNisthelargest,themostpowerfulandwiththemostcompleteproductslineinChina.Isahigh-techenterprisewhichtakesrobotic&automationtechnologiesasthecoreandfocusesondigitalhigh-endequipmentsmanufacturing.Basedonitsselfinnovation,individualtechnologies,coreparts,leadingproductsandcompleteindustrialtechnologysolutions,SIASUNhasformed9industrialgroups,namelyIndustrialRobot,AutomatedTest&AssemblyLine,LogisticAutomation,RailTransitAutomation,LaserTechnology&Equipment,Eco-friendlyEquipment,CleanRoomAutomation,EnergySourceEquipmentandIntelligentServiceRobot.In2009,SIASUNasthefirstbatchoflistedroboticenterpriseinShenzhenGEM.SponsorsConferenceofSIASUNSIASUNEstablishedFirstListedEnterpriseinRobotinChinaSIASUNPhase1ParkOpeningCeremony2000199920022009

DevelopmentHistoryHangzhouHeadquartersEstablishedSouth&NorthDevelopSimultaneously2010RobotIndustryAllianceEstablishedAcclaimedQuDaokuichairman20132014QuDaokuiwon“AnnualTechnologicalInnovationLeader”Intelligentservicerobotwasputintouse2015SIASUNrobotintoZhongnanhaiSIASUNrobotnamedChina’stoptenbrandlistDevelopmentHistoryIndustryLayout●Industryofindustrialrobot●intelligentlogistics●automationofsetsofequipment●cleanroomequipment●lasertechnologyandequipment●railautomation●energyautomationequipment●specializedequipment●intelligentservicerobotBusinesscoversfieldsofmanufacturing,transportation,energy,specialequipmentandotherindustrialsectorsMultipointLayout,ComprehensiveGrowth,South&NorthDevelopSimultaneously。HangzhouSIASUNLaser&AutomationCO.,LTD.BeijingSIASUNJiaheElectronicSystemCO.,LTD.QingdaoSIASUNRobot&AutomationCO.,LTDShanghaiSIASUNRobot&AutomationCO.,LTD.GuangdongIntelligentRobot&IndustrialAutomationResearchCenterIndustryLayoutRobotEngineeringCenterShandongBranchSIASUNShanghaiInternationalHeadquarterSIASUNBranchinSouthwestSIASUNBranchinmiddleSIASUNBranchinSouthSIASUNRobot&AutomationCO.,LTDShenyangSIASUNDigitalDriveCO.,LTD.●Ahigh-techenterprisefocusesonadvancedmanufacturingtechnologyR&Dandregardsrobottechnologyasthecore.●Establishedacomplete

industrialchainwithuniquetechnology,thecorecomponent,leadingproductsandindustrysystemsolutions.●EstablishtwoindustrialgroupsinShenyang&Hangzhou●Thebiggestsize,mostproductsrangeandmostinfluentialadvancedequipmentmanufacturingindustrygroupsinChina.SIASUNTodayTalentedPersonTeamOneAcademiciansofChineseAcademyofEngineering8doctortutorsandmastertutors500master'sdegreeoraboveMorethan2000employeesandamongwhich70%areseniortechnicalandmanagementpersonnelSIASUNhasa

first-classnationalR&Dteam!Phase1ParkConstructionPhase2ParkConstructionPhase3,SIASUNwisdomparkParkConstructionParkinSouth(Hangzhou),SIASUNphotoelectricparkParkConstructionSIASUNcleanroomrobotfamilyBusiness

introductionAtmosphereRobotSeries(CleanClass1,Singleordoublearms,Doubleend,sideframe,Turnoverable…)VacuumRobotSeries(Basepressure1x10-6Pa,Ferro-Fluidic,Directdrive,Symmetricconnectingrod,Highload…)

CleanroomautomationequipmentproductsIC

Equipment

Verticalmulti-jointrobotseries(couldtransfer2mx2.4msizetablet)Levelofmulti-jointrobotseries(couldtransfer2mx2.4msizetablet)Cleanroomcoatingmanipulator

FPDHandlingRobotSeries

Atmospherictransmissionplatform,vacuumchamber,semiconductorequipmentfront-endmodule(EFEM),automaticwaferalignmentunit(Aligner),cleanroomboxingmanipulatorIn2015thecompanysuccessfullydevelopedvacuumtransmissionplatform,theplatformisintegratedvacuumrobot,atmosphererobot,aligner,vacuumchamberetc..Canprovidewafertransferintegrationschemetocustomers.Topromotetheprogressofthedomesticsemiconductorindustrychain,effectivelysupportthedevelopmentofthedomesticequipmentbusinessICEquipmentExtension

CleanroomlogisticsautomationtransferequipmentAMHS(Stocker,orbit,OHS,OHT,cleanroomRGV,8/12inchLoadPort...)FPDcleanlogisticstransmissionequipment(C/V,Diverter,Turntable,Centering,Updownlift,Pin-up,Buffer,Tilt,Coolingunit)FPDsubstratebeforeandaftertherobotintoequipment(substratehandlinghandlingrobot,cleansubstratebalesrotatingdevice,takepapermanipulator,robotgraspingPin-upunit)

Automatictransmissionsystem

CleanroomautomationequipmentproductsTailor-madeCustomrobot、EFEM、Aligner、LoadPortCustomVACtranslatechamber/ATMtranslateplatformCustomcommunicationprotocolQuicklyserviceforrobotmaintenanceandreplacementCommonlysemirobotreplacementserviceSpecialsemirobotreplacementserviceIndustry-specificsolution

RobotandAutomatictransmissionsystemcustomizationservices

CleanroomautomationequipmentproductsBusinesssummary

SemiconductorEquipmentProducts>RobotFamilyFillsnationalgapsandbreaksinternationalblockadeontechniques.MainlyappliedfieldscoveredIC-manufacturing,flatpaneldisplay(FPD),electronic,bio-pharmaceuticalsandfood,etc.Couldprovidecompletetechnologysolutionandturnkeyprojectforcustomer.Holdstheindependentintellectualpropertyrightsandcoretechnologycompletely.Leadingthedomestictechnicallevel,SIASUNcleanroomrobotictechnicallevelhasreachedtheadvancedinternationallevel.CleanroomrobotSIASUNcleanroomproductsincludeatmosphererobot,vacuumrobot,cleanroomrailtransportrobot,aligner,sorter,EquipmentFrontEndModule(EFEM),etc.couldprovidewholetechnologysolution.Coretechnologieshavereachedleading&internationaladvancedlevel. Cleanroomrobotunit洁净机器人族谱SIASUNcleanroomproductsSRBZ783A-CDSVacuumrobotOthercleanunitproductsFPDtransferingrobot:SCARAVerticalmulti-jointsrobotAtmosphericrobotSRBZ820A-SMSXCustom-Tailor:LoadandarmofautomaticlogisticshandlingsystemcanbecustomizedSRBZ1000A-SMFXSRBZ1050A-DMFXSRBZ1035A-DDFXSRBZ1400ASRBJ1A-AS3361SRBJ1B-AS3751SRBJ1A-AS5482大行程大气机械手EFEMVacuumChamberAlignerETCHLED

IndustryFPDIndustryICIndustryTRACKMOCVDPVDMEMSCMPSRBZ820D-SMSXSRBZ780A-SMSCSRBJ1A-AS4441SRBJ1A-AS5376SSRBJ1A-AS4581SRBJ1C-AD5376SSORTERSRBZ540A-SMSCCleanroomrobotseriesSRBZ780A-SMSCMechanicalStructureCylindricalCoordinate/SCARADOF1Payload2.5kgObjectSize330mmMaximumSwingdiameter620mmMovingRangeRotational-AxisTaxismanualfine-tuningExtension-AxisR780mmMaximumMovingSpeedRotational-AxisNoneExtension-Axis780mm/2sRepeatabilityRotational-Axis无NoneExtension-Axis±0.1mm(3σ)BasePressure1x10-5PaCleanClassCLASS1BodyWeight35kgPowerSupplyVAC220V±10%ApplytoETCHCollisionprotectionIOinterlockingFerrofluidicsealsSRBZ820A-SMSXMechanicalStructureCylindricalCoordinate/SCARADOF2Payload1.5kgObjectSize330mmMaximumSwingdiameter620mmMovingRangeRotational-AxisInfiniterotationExtension-AxisR820mmMaximumMovingSpeedRotational-Axis180°/2sExtension-Axis820mm/2sRepeatabilityRotational-Axis±0.01°（3σ）Extension-Axis±0.1mm(3σ)BasePressure1x10-6PaCleanClassCLASS1BodyWeight50kgPowerSupplyVAC220V±10%ApplytoETCHCollisionprotectionIOinterlockingApplytoLETindustryFerrofluidicsealsSRBZ820D-SMSXMechanicalStructureCylindricalCoordinate/SCARADOF2Payload2.5kgObjectSize370mmMaximumSwingdiameter610mmMovingRangeRotational-AxisInfiniterotationExtension-AxisR820mmMaximumMovingSpeedRotational-Axis180°/2sExtension-Axis820mm/2sRepeatabilityRotational-Axis±0.01°(3σ)Extension-Axis±0.1mm(3σ)BasePressure1x10-6PaCleanClassCLASS1BodyWeight41kgPowerSupplyVAC220V±10%Noiseatwork≤85dBApplytoETCHCollisionprotectionDirectdriveApplytoLETindustryFerrofluidicsealsSRBZ540A-SMSCMechanicalStructureCylindricalCoordinate/SCARADOF2Payload0.5kgObjectSize200mmMaximumSwingdiameter460mmMovingRangeRotational-AxisInfiniterotationExtension-AxisR540mmMaximumMovingSpeedRotational-Axis180°/2sExtension-Axis540mm/2sRepeatabilityRotational-Axis±0.01°(3σ)Extension-Axis±0.1mm(3σ)BasePressure1x10-5PaCleanClassCLASS1BodyWeight41kgPowerSupplyVAC220V±10%ApplytoETCHCollisionprotectionApplytoLETindustryFerrofluidicsealsSRBZ783A-CDSMechanicalStructureCylindricalCoordinate/SCARADOF4Payload0.7kgObjectSize200mm/300mmMaximumSwingdiameter620mmMovingRangeUp/Down(

Z)-Axis35mmRotational(T)-AxisinfiniterotationExtension(Z)-AxisR783mmMaximumMovingSpeedUp/Down(

Z)-Axis80mm/sRotational(T)-Axis120°/sExtension(Z)-Axis250mm/sRepeatabilityUp/Down(

Z)-Axis±0.05mm(3σ)Rotational(T)-Axis±0.003°(3σ)Extension(Z)-Axis±0.05mm(3σ)BasePressure10-6PaCleanClassCLASS1BodyWeight41kgPowerSupplyVAC220V±10%ApplytoETCHCollisionprotectionIOinterlockingCompatiblewithMag8ApplytoICindustryDirect-driveservodriveHighprecision、HighperformanceSRBZ1000A-SMFXMechanicalStructureCylindricalCoordinate/Frog-legArmDrivingmethoddirectdriveNumberofArmSingle

armPayloadnamewaferdiameterΦ210mmDOF3MovingRangeR-axisR1000mm(可定制)θ-axisinfiniterotationRobotminimumturningdiameterwithΦ210mmwafer640mmRepeatability±0.1mmBasePressure10­-6PaLeakrate≤10-9std.cc/secHeCollisionprotectionIOinterlockingSingleArmFrog-legCompatiblewithMag7SRBZ1050A-DMFXMechanicalStructureCylindricalCoordinate/Frog-legArmDrivingmethoddirectdriveNumberofArmSymmetricarmsPayloadnamewaferdiameterΦ300mmDOF3MovingRangeZ-axis90mmR-axis,robotcentertoprocesschambercenter极限(ultimate)1050mmθ-axisinfiniterotationRobotminimumturningdiameterwithΦ210mmwafer940mmRepeatability±0.1mmBasePressure10­-6PaLeakrate≤10-9std.cc/secHeCollisionprotectionIOinterlockingDualArmFrog-legCompatiblewithMag7SRBZ1035A-DDFXMechanicalStructureCylindricalCoordinate/Frog-legArmDrivingmethoddirectdriveNumberofArmSymmetricarmsPayloadnamewaferdiameterΦ300mmDOF3MovingRangeZ-axis90mmR-axis,robotcentertoprocesschambercenter(ultimate)1035mmθ-axisinfiniterotationRobotminimumturningdiameterwithΦ300mmwafer910mmRepeatability±0.1mmBasePressure10­-6PaLeakrate≤10-9std.cc/secHeBodyWeight38kgCollisionprotectionIOinterlockingDualArmFrog-legCompatiblewithMag7SRBZ1400AMechanicalStructureCylindricalCoordinate/SCARADOF3Payload20.5kg

(withatray)ObjectSize655mmMaximumSwingdiameter1280mmMovingRangeUp/Down(

Z)-Axis35mmRotational(T)-AxisinfiniterotationExtension(R)-AxisR1400mmMaximumMovingSpeedUp/Down(

Z)-Axis80mm/sRotational(T)-Axis120°/sExtension(R)-Axis250mm/sRepeatabilityUp/Down(

Z)-Axis0.1mm(3σ)Rotational(T)-Axis0.01°(3σ)Extension(R)-Axis±0.2mm(3σ)BasePressure10-6PaCleanClassCLASS1BodyWeight70kgPowerSupplyVAC220V±10%CollisionprotectionIOinterlockingSCARAStructureApplytoMOCVDHeatresistantfingerdesignStrengthenthearmdesignFerrofluidicsealsSRBJ1A-AS3361MechanicalStructureCylindricalCoordinate/SCARADOF3NumberofArm1MovingRangeUp/Down(

Z)-Axis330mmRotational(T)-Axis350°Extension(Z)-AxisDistancefrompillarcentertothemovingobjectscenterofthebiggestR-axisstretchingisR535mmMinimumrunningtimeUp/Down(

Z)-Axis2sRotational(T)-Axis2sExtension(Z)-Axis2sRepeatabilityUp/Down(

Z)-Axis±0.1mm(3σ)Rotational(T)-Axis±0.01°(3σ)Extension(Z)-Axis±0.1mm(3σ)Payload(Onlybycarryingobjects)payload≤300mmchipMinimumRotationRadiuswithload300mm245200mm220CleanClassCLASS1BodyWeightAbout41kgPowerSupplyVAC220V±10%SinglearmSCARAVacuumgrabCorrelationMappingTransferwithhighefficiencyAnodizedsurfaceSRBJ1D-AS4441MechanicalStructureCylindricalCoordinate/SCARADOF4NumberofArm2MovingRangeUp/Down(

Z)-Axis450mmRotational(T)-Axis350°Extension(Z)-AxisR535mmMinimumrunningtimeUp/Down(

Z)-Axis2sRotational(T)-Axis2sExtension(Z)-Axis2sRepeatabilityUp/Down(

Z)-Axis±0.1mm(3σ)Rotational(T)-Axis±0.01°(3σ)Extension(Z)-Axis±0.1mm(3σ)Payload(Onlybycarryingobjects)payload≤300mmchipMinimumRotationRadiuswithload300mmCleanClassCLASS1BodyWeight41kgPowerSupplyVAC220V±10%DualarmSCARAVacuumgrabCorrelationMappingTransferwithhighefficiencyAnodizedsurfaceSRBJ1B-AS3751MechanicalStructureCylindricalCoordinate/SCARADOF3Payload1kgObjectSize200mm/300mmMaximumSwingdiameter610mmMovingRangeUp/Down(

Z)-Axis175mmRotational(T)-Axis490°Extension(R)-AxisR586mmMaximumMovingSpeedUp/Down(

Z)-Axis333mm/sRotational(T)-Axis324°/sExtension(R)-Axis900mm/sRepeatabilityUp/Down(

Z)-Axis±0.1mm(3σ)Rotational(T)-Axis±0.01°(3σ)Extension(R)-Axis±0.1mm(3σ)CleanClassCLASS1BodyWeight50kgPowerSupplyVAC220V±10%SinglearmSCARAVacuumgrabCorrelationMappingApplytoETCHSRBJ1A-AS5482CartwheelarmClampergrabApplytoCMPMechanicalStructureCylindricalCoordinate/SCARADOF5Payload0.7kgObjectSize200mm/300mmMaximumSwingdiameter580mmMovingRangeUp/Down(

Z)-Axis330mmRotational(T)-Axis350°Extension(R)-AxisR650mmW(4-axis)±90°MaximumMovingSpeedUp/Down(

Z)-Axis330mm/sRotational(T)-Axis350°/sExtension(R)-Axis1600mm/sW(4-axis)180°/sRepeatabilityUp/Down(

Z)-Axis±0.1mm(3σ)Rotational(T)-Axis±0.01°(3σ)Extension(R)-Axis±0.1mm(3σ)W(4-axis)±0.003°(3σ)CleanClassCLASS1BodyWeight41kgPowerSupplyVAC220V±10%SRBJ1A-AS5376SMechanicalStructureCylindricalCoordinate/SCARADrivingmethodservomotorNumberofArm2DOF5+1

(externalaxis)MovingRangeUp/Down(

Z)-Axis330mmRotational(T)-Axis340°(Canspecifythedeadzone)Extension(R)-AxisDistancefrompillarcentertothemovingobjectscenterofthebiggestR-axisstretchingisR651mmPayload(Onlybycarryingobjects)chipCleanClass100级Dual-ArmWithOneFingerTurnoverableCollisionprotectionMaximum6-AxisWithExtendAxisOptionalSRBJ1C-AD5376SMechanicalStructureCylindricalCoordinate/SCARADrivingmethodservomotorNumberofArm2DOF4+1

(externalaxis)MovingRangeUp/Down(

Z)-Axis330mmRotational(T)-Axis340°(Canspecifythedeadzone)Extension(R)-AxisDistancefrompillarcentertothemovingobjectscenterofthebiggestR-axisstretchingisR651mmPayload(Onlybycarryingobjects)chipCleanClass100级Dual-ArmWithoutFingerTurnoverableCollisionprotectionMaximum6-AxisWithExtendAxisOptionalSRBJ1A-S4512CRS大气手MechanicalStructureCylindricalCoordinate/SCARANumberofArm1PayloadnamewaferdiameterΦ200mmweight≤0.1kgDOF4Armlength250mmFingerlength(distancefrominstallcentertowafercenter)307mmMovingRangeZ轴Z-axis450mmR轴R-axis500mmθ轴θ-axis350°W轴W-axis350°MaximumMovingSpeed(loadaccelerationconstant)Z轴Z-axis330mm/sR轴R-axis1600mm/sθ轴θ-axis350°/sW轴W-axis180°/sRepeatabilityZ轴Z-axis±0.1mmR轴R-axis±0.1mmθ轴θ-axis±0.01°W轴W-axis±0.01°MinimumRotationDiameterwithφ200mmload555mmWeightMain-body+Controller65kgIOinterlockSupportfor16workingIOinterlockCommunicationEthernet,serialports,IOSupportlocationnumbers60SRBJ1A-ALD4T42ApplicationAreaETCHPVDCVDTRACKMechanicalStructureCylindricalCoordinate/SCARANumberofArm1PayloadnamewaferdiameterΦ300mmweight≤0.1kgDOF3Armlength175mmFingerlength(distancefrominstallcentertowafercenter)300mmMovingRangeZ轴Z-Axis1200mmR轴R-Axis620mmθ轴θ-Axis350°MaximumMovingSpeedZ轴Z-Axis3000mm/sR轴R-Axis1600mm/sθ轴θ-Axis350°/sRepeatabilityZ轴Z-Axis±0.1mmR轴R-Axis±0.1mmθ轴θ-Axis±0.003°MinimumRotationDiameterwithφ300mmload525mmWeightMain-body+Controller45kgNoiseatwork<70dBReliabilityMTBF≮1000hIOinterlockSupportfor16workingIOinterlockCommunicationEthernet,serialports,IOSupportlocationnumbers60EFEMApplicationAreaETCHPVDCVDTRACKBaseFrameQ235steelCoatingAnti-staticPaintFanFilterPTFEULPA99.95~99.9995%@0.3micrometersefficiencyWaferSize300mmLoadPort2AtmosphericRobot(types)SRBJ-AS3491Pre-Aligner(types)SALN-812C-3VWaferMappingLoadPortinsideSoftwareInterfaceSEMIE84CommunicationsEthernet/RS232Load/Unload28sorless(withmapping)MERecoverytime<1minuteAirFlowVelocity0.4~0.6m/sStandardComplianceSEMI

S2,F47CleanClassISOClass2Repeatability±0.1mm(3σ)EFEMApplicationAreaETCHPVDPECVDMOCVD…SORTERSSORT21AAlignerApplicationAreaETCHPVDCVDTRACK…ApplicationAreaETCHPVDCVDTRACK…TheVacuumChamberHighestQualityStriveforperfection,Beyondexpectations>precisionresolution3umhighaccuracyintelligentcameradatabaserecord<±0.1mm@1.5kgText-RepeatabliltyText-LeakRateminimumleakagerate（toHe）≤5×10-11Pa.m3/sleakageratedisplayrange2×10-11～1.0×10-5Pa.m3/sresponsetime

≤3sstartingtime≤8minleakdetectionportmaximumpermittedpressure20PaHighvacuumlowleakagerateText-Pathrepeatability±0.5mmDistanceMeasurementPerformancecentralizedADMoptionalinterferometerresolutionratio:0.5μmresolutionratio:0.158μmpointtocapturerate:10,000/s

precision:2μm+0.4μm/mprecision:8μm+0.4μm/mmaximumradialvelocity:4m/sR0parameter:8μmAngularMeasurementPerformanceangularaccuracy:10μm+2.5μm/mmaximumangularrate:

180°/soptionalprecisionlevelprecision:+/-2arc/sText-Granularityparticlesizerange0.1-5.0μmchannelsize

Standard:0.1,0.15,1.0,2,0.25,0.3,0.5,1.0,5.0

μmcalibrationNISTfollowing

4-20mA

airvelocitytransducer（4sensors)optionsincludehygrothermograph,airmeter,differentialpressuregauge,ect.report

FS-209E,ISO-14644-1,BS-5295&ECGMP

thesampleoutputbuilt-inhighefficiencyfilter(>99.997%@0.3μm)

ISOClass2Text-Vibration3-axisaccelerometerresolutionratio0.1ganalysisoftheresonancepointfordesignimprovements<±0.3gText-StaticFlexibilitylaserrangingresolutionratio0.1umsupportdatabaseanalysis<4.96mm@10.5kg@1200mPerformance-StaticFlexibilityarmstaticflexibilityanalysisfiniteelementanalysisbearingnonlinearcontactanalysisnumbersofpatentsPerformance-SEMICertificationSEMIS2certificationSEMIF47certificationCEcertificationfullsupportSEMIstandardSMICapprovePerformance-MTBF一、ForecastMethodAccordingtothefailureaccumulative