球面绝对检验-上传

球面绝对检验两球面绝对检验可以获得

/40的检测精度所需仪器设备ZYGOGPI干涉仪标准球面透镜被测球面五轴调整架、转盘、叉丝标记检测光路要求测量步骤注意事项有效区域无切割尽量调到零条纹使用叉丝做标记球面标准镜的校正/products/caliball-i-iiCaliBalleasilycalibratesthereferencesurfacetoλ/30orbetterrms,3Xbetterthancommercialgradetransmissionsphereoptics.CaliBallcomesintwomodels:CaliBallIforverticalinterferometersetupsandCaliBallIIforhorizontalsetupswhichbayonetmountsintoatypicalZygoorESDI4″mount.原理ASimpleBallAveragerforReferenceSphereCalibrationsUlfGriesmann,QuandouWang,JohannesSoons,andRemiCarakosNationalInstituteofStandardsandTechnology(NIST),ManufacturingEngineeringLaboratory,Gaithersburg,MD20899-8223,U.S.A.TheballismadefromSchottUG-1filterglass，不透明，直径50mmCaliBallCaliBallisa25.4mmdiameter,highprecisionsiliconnitrideballandkinematicmountusedtocalibratephase-measuringinterferometersbydeterminingtheerrorsinthetransmission-spherereference-surface.

TheCaliBallislocatedwithitscenteratthefocusofthetransmissionsphereandalignedtobetterthanonefringe.Ameasurementoftheballistaken,theballpickedup,arbitrarilyrotatedandreplacedonitsmount.Thecenteroftheballwillreturntotheoriginalpositionduetothekinematicmount.Anothermeasurementoftheballisthentaken.

Thisprocessisrepeatedaboutadozentimesandtheinterferogramsaveraged.Theaveragerepresentstheerrorsinthetransmissionsphereandinterferometerbecausetheballisextremelyroundandthesmallimperfectionsoftheballaveragetozero.Thecalibrationcanbedoneinaslittleas10minutesandtheresultisdifficulttodispute.BestusedwithlowF/#transmissionspheres.CaliBall随机球面测试法标定透射球面镜标定工具，如下图：25mm半径的小球，等级为5级，圆度优于125nm，抛光表面，粗糙度在1~2nm；小球下面的支承座，由三个同样大小的小球组成；标定时，将小球支承安装到合适的干涉仪调整架上，底座切平的一侧靠近TS；支承一定要固定紧，并且测试时需带好无尘手套，避免手直接接触小球。如果小球表面比较脏，可用丙酮或者酒精将表面清洁干净。打开软件，先粗对准光路，使小球的球心接近TS的焦点；打开软件视频窗口，设置好软件参数，比如光强、选中移除piston、tilt及focus项，调节TS和小球，尽量使条纹散开至零条纹；做16次平均测量，保存测试结果