AOI 检测原理(月报)

1、AOI 檢測原理1AOI檢測原理AGENDA:1. Automatic Optical Inspection2. Current Status of AOI 3. The Hardware of AOI4. The Software of AOI5. Conclusion6. Future Expectation2Automatic Optical Inspection影像擷取邏輯處理缺 點3Current Status of AOI目前廠內有70台AOIApplication內外層線路缺點檢查底片線路缺點檢查Defect typeOpen / ShortNick / ProtrusionPa

2、d / HoleLine / SpacePin hole / IslandPurposeMonitorReworkInspireV300PC-XX4Hardware (影像擷取)類比信號數位信號二進位信號CCD類比EIC類比 數位 數位影像前置處理二進位數位 二進位 5Hardware (Optical Structure)CCD濾光片鏡片分光鏡散射光鏡片直射光鏡片散射光鏡片散射光光纖導管散射光光纖導管散射光鏡片53 & 108散射光鏡片53 & 108直射光光纖導管6Software (AOI 檢測流程)CCD影像處理卡邏輯判斷 處理模組遮蓋處理器(MASK)參考資料處理器主處理器(MAST

3、ER)影像擷取階段檢測階段條件過濾階段缺點報告階段7Software (Threshold from Histogram)255053227Optimal Threshold RangeHighPeak25LowPeakNumber of Pixels對線寬及線距量測具較高敏感度減少線寬及線距量測時假缺點數對斷路及針孔量測具較高敏感度對短路及銅渣量測具較高敏感度8Software (邏輯檢查流程)線寬量測RayMeasurement銅渣 &針孔(I/P)Annular Ring開路(Open)接點(Junction)針墊 / 孔徑 設計規範(DRC)標準板(REF)二進位 影像9Softwar

4、e (線寬量測)AccuracyRepeatabilityVertical LineHorizontal LineDiagonalWidth ChangeSubstrateCopperLightLineWidth10Software (Frame detector)2.5 mil5 mil7.5 mil10 milHigh25%Normal 50%Low75%V. Low100%Protrusion012.5 mil5 mil7.5 mil10 milHigh25%Normal 50%Low75%V. Low 100%Nick0115 mil12 mil pad0000000101111111

5、Island & Pin hole12,18,.,42,48pixels00010001Open EndMin , Max11Software (Junction detector)T JunctionK JunctionY JunctionSHORTMEDIUMLONG每個接點定義可以旋轉45度(Rotation)和鏡射(Mirror). T Junction111012Software (Ray detector)01234567CurrentPixel每支射線最長 144 pixels CurrentPixel1 2 3 . 144像素的數目是沿著每支射線計算 (包含不同顏色).848支射線沿著垂直水平和對角線由中心往外計算.13Concept of AOI14ConclusionAOI無法保證百分百的無loss , 或無 false alarm.AOI是一種具思考和學習的設備How to survey AO