内容文稿案例shanghai university operating manual

1、DENTON VACUUMEXPLORER® COATING SYSTEMUSER MANUALEXPLORER® COATING SYSTEM: TURBO PUMP MAIN CHAMBERS; MAGNETRON SPUTTER DEPOSITION; AUTOMATIC LOADLOCKShanghai UniversitySYSTEM SERIAL# 71959DENTON VACUUM, LLC1259 N. CHURCH STREET MOORESTOWN, NJ 08057PHONE: FAX:TABLE OF CONTENTSSectionPage No.

2、GENERAL DESCRIPTION5SAFETY WARNINGS5MECHANICAL REQUIREMENTS6SYSTEM GROUNDING PRACTICE FOR RF SYSTEMS6ELECTRICAL STANDARDS6SAFETY INTERLOCKS7MOVING PARTS7POWER SYSTEMS7ENVIRONMENTAL CONDITIONS7SAFETY SYMBOLS8INSTALLATION8TURBO PUMP8MECHANICAL PUMP8HIGH PURITY GAS LINES9TECHNICAL AGREEMENT10DESCRIPTIO

3、N OF CONTROLS19SOFTWARE OVERVIEW19SYMBOL OVERVIEW20SYSTEM STARTUP21LOGIN SCREEN22SYSTEM SECURITY22ASSIGNING USERS AND ROLES23LOG IN TO SYSTEM25OVERVIEW SCREEN26TOP OVERVIEW BAR27LEFT OVERVIEW SCREEN28INTERLOCKS30GAS/TARGET NAMES SETUP30GAS CONTROL31AUTO MODE33MANUAL MODE36SERVICE MODE36LEAK UP TEST3

4、7CENTER OVERVIEW SCREEN38PUMPING SYSTEM39PROCESS CHAMBER40LOADLOCK CHAMBER41LOADLOCK GATE VALVE422TABLE OF CONTENTSSectionPage No.SUBSTRATE ROTATION42GAUGE CONTROL AND STATUS43RIGHT OVERVIEW SCREEN44RECIPE SCREEN45AUTOMATIC PUMP CONFIGURATION45DEPOSITION T-STEPS47PROGRAMMING A T-STEP FILE48MASTER RE

5、CIPE BUILDER51CREATE A NEW MASTER SEQUENCE RECIPE:52EDIT AN EXISTING MASTER SEQUENCE RECIPE54FACTORY PROGRAMMED SEQUENCES55SYSTEM ALARMS56ALARM SCREEN57STACKED ALARM MESSAGES58CLEARING THE ALARM SCREEN59ALARM MESSAGES59OPEN DATALOG65DATALOG FILE66DATALOG RESET67PLC RACKS67TOLERANCE ALARMS68TOLERANCE

6、 SETPOINT69TREND69CHAMBER PRESSURE69CHAMBER TEMPERATURE70SYSTEM OPERATION71START-UP71AUTOMATIC OPERATION71AUTOMATIC RECIPE DOWNLOAD71MANUAL OPERATION73MAIN CHAMBER PUMPING73MAIN CHAMBER VENT73LOADLOCK CHAMBER PUMPING74LOADLOCK CHAMBER VENTING74SUBSTRATE TRANSFER743TABLE OF CONTENTSSectionPage No.SUB

7、STRATE LOAD75SUBSTRATE UNLOAD75SPUTTER STATUS AND CONTROL76HEAT CONTROL - PID78REMOTE ACCESS79MAINTENANCE80GENERAL MAINTENANCE80MECHANICAL PUMP81HIGH VACUUM VALVE81ROTARY FEEDTHROUGHS81OTHER SYSTEM MAINTENANCE81TROUBLESHOOTING81SAFETY WARNINGS81REQUIRED TOOLS82VACUUM SYSTEM CONTROL RACK83VALVES &

8、; SHUTTERS84ROTATION86MECHANICAL PUMP87SUMMARY87FUSE LIST88ELECTRICAL SCHEMATICS89EQUIPMENT LIST SERIAL NUMBERS & VENDOR MANUALS . 91LIST OF MECHANICAL DRAWINGS924D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0GENERAL DESCRIPTIONThe Denton Vacuum Exp

9、lorerâ Deposition System is designed for either thin film production or research. The Explorerâ configuration provides easy access to substrates, sources, and instrumentation while maintaining excellent pumping characteristics. This system is designed to simplify the geometries necessary f

10、or the coordination of multiple source depositions.Because Denton uses the finest available subsystems and components, the system is highly reliable and durable. The system's inherent flexibility allows for the operation of conventional sputter sources and rotation.This Explorerâ system inc

11、orporates a Loadlock (optional) which allows the operator to change samples without exposing the process chamber to atmosphere.The Explorerâ system is fully automatic and is controlled by a PC running GE Cimplicity® HMI software combined with a GE programmable logic controller. The compute

12、r, keyboard, gauges, and switches are installed in the electrical control cabinets. The main cabinet is located next to the chamber on a frame for easy installation, observation and operation.The system offers you a myriad of thin film process options. However, it is important to note that with all

13、of this systems potential, safety considerations exist. Individuals who are to operate, service, or maintain this system should familiarize themselves with this manual.SAFETY WARNINGS5Lethal voltages, high temperatures, high pressures, and powerful mechanical drive mechanisms are present throughout

14、the system.Every attempt has been made to safeguard operating and maintenancenel. Interlocking of subsystems provides a high degree of operator safety.The system offers you a range of thin film process options. However, it is important to note that with all of this systems potential, safety consider

15、ations exist. Individuals who are to operate, service, or maintain this system should familiarize themselves with this manual.If this equipment is used in a manner not specified by Denton Vacuum, the protection provided by the equipment may be impaired.A complete understanding of this control system

16、 is recommended before operating the vacuum system.D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0MECHANICAL REQUIREMENTSCommercially purchased components will be new, of industrial quality and demonstrated "best in class" availability.All ferr

17、ous or aluminum ms will have proper finishes to prevent corrosion or oxidation. Allpneumatic lines, valves, cylinders and flow controls are designed to operate at a minimumpressure of 80 psi and aum pressure of 110 psi.SYSTEM GROUNDING PRACTICE FOR RF SYSTEMS§§§Ground connection must

18、be made between vacuum system and building steel.Denton supplies 25 of 3” x 0.050” flat copper conductor.Copper conductor is bolted to vacuum system frame and nearest available building steel.Never interrupt the system ground.§ELECTRICAL STANDARDSAll signal power will be isolated from system po

19、wer; proper shielding and routing practices must be followed. All electrical, electronic, and optical sensors must be adequately protected from process contamination.Three-phase distribution is 380 V AC (+/- 5%), 50/60 Hz, 3 phase 5 wire (all equipment with three phase inputs must be supplied for th

20、is voltage); single-phase inputs shall be 380 V AC and 230 V AC.All equipment shall have panelized control with a single entrance protection by a heavy duty disconnect switch. The disconnect switch will have a "lockout" provision to ensure that no electrical power can be delivered to the s

21、ystem during maintenance operations.6System/software interlocks should never be defeated unless servicing of the system requires temporary interlock overrides. Hardwired safety interlocks must never be defeated.All safety/software interlocks should be returned to operational status when problems hav

22、e been corrected.Operating and maintenance manuals have been provided and should be thoroughly understood before any operations are contemplated. Onlynel with proper training and process experience should operate the system. If the equipment is in a manner not specified by the manufacturers, the pro

23、tections provided by the equipment may be impaired.D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0SAFETY INTERLOCKSThe system will be equipped with a hardwired safety interlock system, which fully protectsoperators and maintenanceinterlocks will be provi

24、ded.nel fromal injury.The following hardwired§§DC power supply: Vacuum safety bellows switch, and water flow switches.Loadlock / Chamber isolation valve: transfer home position sensor.The status of all hardwired safety interlocks will be displayed to the system operator(s) at alltimes. Sys

25、tem controller “software” interlocks will duplicate all hardwired safety interlock status.MOVING PARTSSliding surfaces and pinch points are fully guarded to prevent injury to operators andmaintenancenel.In the event of a power failure, all moving parts come to a complete stop. Upon initiating aresta

26、rt cycle, all moving parts proceed to their home position without damage to theequipment or injury to operations and/or maintenancenel.POWER SYSTEMSIn the event of an interlock dropout or power failure, all power to internal sources of energy will be interrupted. When power is restored, or an interl

27、ock is satisfied, a hard, manual reset of the affected subsystem will be required.Denton Vacuum supplied step-down transformer as applicable.ENVIRONMENTAL CONDITIONSThe system is designed and intended for use in the following environmental conditions. If all specifications are not met, system compon

28、ents may malfunction and can possibly cause injuries.§§§Altitude up to 2000mTemperature ranges from 5° to 40° Cum relative humidity 80% for temperature up to 31° C decreasing linearly to 50% relative humidity at 40° CMain supply voltage fluctuations not to exceed +

29、/- 5% of the nominal voltage. Other supply voltage fluctuations as stated by the manufacturerPollution degree 2 in accordance with IEC 664§§§7D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0SAFETY SYMBOLSINSTALLATIONAfter ensuring that all

30、utility connections have been made (See Utility Requirements), the installation can be completed.The vacuum system requires minimal assembly upon installation because most subassemblies are mounted on the unit frame. Qualified Denton Vacuum technicians complete all mechanical assembly. A qualified D

31、enton Vacuum technician completes all electrical assembly. Note:Initial installation is completed by Denton Vacuum Technicians.A few subsystems may require start-up in the future as a result of routine maintenance.Instructions for this start-up are included for future reference.TURBO PUMPThis requir

32、es no set-up. Proper clearance must be left for proper air circulation. See the manufacturers operation manual for details on the air flow requirements.If the turbo pump is water-cooled as an option, the water connections are located in the rear of the unit. The unit is equipped with an “in” line an

33、d an “out” line, each designed for ¼” tube.MECHANICAL PUMPAttach the pump to the vacuum lines that connect it to the rear of the vacuum chamber and turbo pump. All vacuum fittings and clamps are included with the system.Connect the pump electrically to the power distribution box on the rear of

34、the system. The Pump is supplied with a “twist-lock” plug that mates with an outlet in the power distribution box. The outlet is labeled “Mechanical Pump” and sized to fit the plug.8CAUTION: Risk of Electrical ShockCAUTION: This symbol is intended to alert the user to the presence of important opera

35、tion & maintenance instructions in this manual.Protective Conductor Terminal: this symbol indicates where the protective earth ground is connected.D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0HIGH PURITY GAS LINESArgon, Oxygen, NitrogenAll pumps mu

36、st be operational before connecting the high purity gas line.Verify that the Gas Correction Factors and the mass flow control (MFC) Full Range set-points are correct on the Gas Setup screen.All gas supply lines must have an ON/OFF valve between the regulator and the vacuum system.Connect the gas sup

37、ply line to the rear of the machine and close the valve near the pressure regulator.With the chamber under high vacuum, open the Gas Isolation Valve. Use the on-screen Gas Status & Control screen to increase the gas flow setpoint to 40 SCCM. Continue pumping out the system until the actual flow

38、in the line decreases.Increase the flow setpoint to theapproximately zero (0).um. Continue pumping until the actual flow isReduce the setpoint to zero and close the Gas Isolation Valve. Open the valve between thevacuum system near the pressure regulator and adjust the regulator to aof 1 bar (15 psi)

39、.um pressure9D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0TECHNICAL AGREEMENT设备型号：丹顿真空EXPLORERÒ磁控溅射系统Equipment M: Denton Vacuum EXPLORERÒ Sputtering System§真空室 Deposition Chamber§不锈钢真空室，约为20英寸宽，20英寸深，20英寸高Stainless steel chamber, me

40、asuring approximately 20.0" (wide)×20.0"(deep) ×20.0" (high)§大开门Large-profile, front-loading full width opening chamber door三个安装在真空室顶部的ISO100圆盘，用于密封安装溅射靶枪和挡板(3) ISO100 removable, top-mounted plates, compression type cathodes and source shutter feedthrough一个直径4英寸观察窗(前门)，

41、可以观察所有溅射靶枪和工件盘(1) Shuttered 4.0" diameter viewport (front door) to permit viewing of all installed deposition sources and substrate fixturing所有所需的端口和密封导通孔All required ports and feedthroughs提供两套不锈钢内衬Two sets of internal chamber deposition shields included.真空室安装在带脚轮和支撑的整体框架上Chamber supported by s

42、teel frame with casters and leveling legs§§§§§自动进样室 Automatic Loadlock可以传送直径6英寸工件盘6.0" diameter substrate carrier can be transferred进样室门上带边长4英寸观察窗§§10D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 04.0" square

43、viewport on loadlock door用一个VAT电控气动插板阀与主真空室连接(1) VAT electro-pneumatic gate valve connected to main chamber电控气动粗抽阀Electro-pneumatic, roughing valve电控气动放气阀Electro-pneumatic, vent valve前级管道带检漏阀Leak check valve mounted on foreline§§§§抽真空系统Vacuum Pumping System§一个EBARA EBT1100泵(

44、1) EBARA EBT 1100 turbo pump一个VAT公司8英寸三位节流阀(1) VAT 8" three position gate valve assembly.一个瓦里安DS602机械泵(1) Varian DS602 mechanical pump电控气动真空阀Electro-pneumatic vacuum valves前级管道上安装手动检漏阀Manual leak check valve mounted in foreline配有液氮冷阱以增加抽气速率LN2 trap is used for shorten pumping speed§§&

45、#167;§§真空计和工艺气体流量Vacuum Gauging and Process Gas Flow Control一个全量程真空规(1) Inficon full range gauge transmitter.§11D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0§两个皮拉尼真空规(2) Inficon Pirani pressure transducer.三个MKS流量计，其中两个最大流量100sccm ，另

46、一个最大流量50sccm(3) MKS mass flow controller (Two are 100sccm full scale, another one is 50sccm full scale)§溅射源Sputter Sources三个直径3英寸，杆状安装，角度可调的圆形溅射靶枪(3) 3.0" diameter, internal “stalk-mount”, flexible planer magnetron sputter sources§ 两个标准磁控靶枪，一个磁性增强靶枪可用于溅射导磁材料(2)Standard magnetron catho

47、de, (1) Magnetron enhanced cathode for magneticmaterial deposition靶枪和工件间距±4英寸可调4.0" variable source to substrate distance防止交叉污染的挡板Cross contamination shields§§§§三个的电控气动挡板(3) Independent, electro-pneumatic cathode shutters直流溅射电源DC Sputter Power Supply一套1200瓦High Voltage

48、Concepts 直流电源(1) High Voltage Concepts 1200W DC power supply直流电源可以切换到三个靶枪DC switchable to all three cathodes硬件互锁(真空室门，靶枪水流量，真空度等)Hardwired safety interlock (chamber door, cathode water, bellows safety switch)§§§射频溅射电源RF Sputter Power Supply12D E N T O N V A C U U M , L L C E X P L O R

49、 E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0§两套600瓦Seren射频电源，含电源、器和自动匹配网络(2) Seren 600W RF power suppliers, including generator, controller and auto matching network§其中一个射频电源可以切换到两个靶枪和工件台，另一个可以切换到三个靶枪(1) RF switchable to two cathodes and substrate stage, another (1) switchable to thr

50、ee cathodes§硬件互锁(真空室门，靶枪水流量，真空度等)Hardwired safety interlock (chamber door, cathode water, bellows safety switch)加热工件台Heating Substrate Stage直径6英寸旋转工件台，底部驱动转速0-20RPM可调节6.0" rotating stage assembly, bottom drive, speed adjustable (0-20RPM)§ 与溅射靶枪共用一个600瓦的射频电源RF power shared with one 600

51、W sputter power supply listed above.§ 集成到主控系统Interfaced to system process controller带镍合金套的加热组件，可加热至600°C，带PIDInconel sheathed heater assembly for heating to 600°C, with PID control控温系统连接到计算机Temperature control system interfaced to system computer配有铠装热电偶以用于温度反馈Sheathed thermocouple for

52、 temperature feedback§§§§系统自动ystem Control and Automation计算机（Windows操作系统）Computer control (Windows)带平板显示器，使用鼠标键盘操作Flat-panel display; mouse and keyboard interface§§13D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0§Proce

53、ssPro软件可适应不同的硬件配置ProcessPro control software configured for specific delivered hardware§可通过计算机泵，阀，沉积源，子系统，真空计，设定数值，编辑自动工艺Computer control of pumps, valves, deposition sources, subsystems, gauging, setpoints, and automatic process sequence activation§ 显示所有系统运行的数据Data display of all system o

54、perating parameters§所有系统自动运行时的数据Datalog of all system parameters during automatic operation§全面的设定功能Full remote setpoint capability§ 真空室Chamber pressure§ 气体流量Gas flow rates§ 靶枪启动Active cathodes各种自动化操作：Multiple automatic operations:§ 自动抽真空Auto Pump§ 自动放气Auto Vent模式Mu

55、ltiple operation modes§ 手动Manual§ 自动§§14D E N T O N V A C U U M , L L C E X P L O R E R ® S Y S T E M1 - 8 5 6 - 4 3 9 - 9 1 0 0Automatic§ 维护Maintenance§ 自动工艺程序创建和编辑Automatic process sequence generation and editing§通过用户提供的网线可实现登录Remote access via user-supplied

56、 dedicated Ethernet line emergency-Stop tested and functionality verified安装条件 UTILITIES三电Electrical380 VAC (+/-5%)，50/60Hz，3相，25千瓦380 VAC (+/- 5 %), 50/60 Hz, 3 Phase，25KW§§面板上带有单一保护的重负载断开开关，由丹顿真空提供Panelized control with single entrance protection by heavy duty disconnect switch with "

57、;lockout" provision, provided by DVI水Cooling Water流量15-20 升/分钟，15-25摄氏度，进水和出水压差2.75-§3Bar(最大进水.4Bar)；多回路水排(进出水流量；水路设计为：15 - 20 L/min, 15° -25° C, 2.75 - 3 bar differential between supply andreturn (3.4 barum inlet pressure); multi-circuit water manifold(metering on supply and return side); circuit designations follow:溅射靶#1（流量传感器/保护）Sputter cathode #1 (flow sense/interlock)溅射靶#2（流量传感器/保护）Sputter cathode #2 (flow sense/interlock)溅射靶#3（流量传感器/保护）§§§15D E N T O N V A C U U M , L L C E X P L O R E R ® S