资料讲义b1500介绍June20 200

1、June 20, 2006Agilent B1500A 半导体器件分析仪半导体器件分析仪半导体参数测试的最佳选择June 20, 2006完整的分析功能完整的分析功能June 20, 2006模块化的系统模块化的系统模块化的设计节约了成本保护您的投资June 20, 2006半导体参数分析仪的发展半导体参数分析仪的发展 80 85 90 95 00 054145A4145B4155A /4156A4155B /4156B4155C /4156CB1500A半导体器件分析仪半导体器件分析仪半导体参数分析仪半导体参数分析仪器件分析仪器件分析仪用于用于B1500A/B1505A的测量模块的测量模块P

2、age 5B1500AB1505A电压范围电压范围电流范围电流范围测量分辨率测量分辨率B1510AHPSMU高功率SMU200V1A10fA/2VB1511AMPSMU中功率SMU100V100mA10fA/0.5VB1517AHRSMU高分辨率SMUfuture100V100mA1fA/0.5VE5288AASUaA感测/开关单元X100V100mA0.1fA/0.5VB1514AMCSMU中电流SMU30V(Pulse)1A10pA/0.2VB1513AHVSMU高电压SMUX3000V(DC/Pulse)4mA/8mAB1512AHCSMU高电流SMUX40V(DC)20V(Pulse)

3、1A(DC)20A(Pulse)B1520AMFCMU多频电容测量单元1kHz5MHz0.035fFB1525AHV-SPGU高电压脉冲单元future40Vn/a50VB1530AWGFMU波形产生/快速测量单元future-5V5V0.014% of rangeI/V测量单元CV测量单元脉冲产生/测量单元*B1500A可以升级至可以升级至B1505A多种类型的附件多种类型的附件 满足各种应用需求满足各种应用需求N1301A-100: SMU CMU unify unit* N1301A-102: SCUU Cable (3m)N1301A-200: Guard Switch unitN13

4、01A-201/202:GSWU cable(1m/3m)N1300A-001/002: CMU cable (1m/3m)N1301A-110: SCUU Magnet Stand16493J:Interlock cable for 4155/56, E5270/60 and B1500AN1254A-100: GNDU to Kelvin adaptor for only E5270/60 and B1500AE5288A: Atto Sense and Switch UnitJune 20, 2006Id-Vd Id-VgBVdss Cgb-VgVthIdonIdoffgmIgleakR

5、gVgVdVsVsubIgIdIsIsubSMU1SMU2SMU3SMU4ModeVIModeVIModeVIModeVICMUModeAC VrangeDevice AnalyzerParameter AnalyzerBJTCMOSRelia-bilityNano-tech测试步骤革命性的变化测试步骤革命性的变化Top down approachJune 20, 2006步骤简单的参数测试步骤简单的参数测试“Why buy Agilent B1500A vs. Keithley 4200-SCS for Semiconductor Parametric Test?Crush theKeith

6、ley4200!Crush theKeithley4200!We can help you: perform accurate timing control measurement which Keithley cant do.Agilent Value #1: Reliable and accurate device measurementSingleDoubleDCPulseV or ItV or ItV or ItV or ItB1542A (10 ns to 1us)WGFMU (100 ns to 10 s)HVSPGU (5 s to 10 s)MCSMU (50 s to 2 s

7、)SMU (500 s to 2 s)Pulse width coverage of Agilent Pulsed IV parametric test solutions80 mA4.5V/10VMax. drain currentMax. gate/drain voltage10 mA10V/10V400 mA40V/40V1A30V/30V1A200V/200V10ns100ns 1us10us100us 1ms10s- - To make accurate device measurementAccurate pulse timing controlEnough sampling ti

8、me/integration timeReliable voltage/current forceTest environment with low noiseIs the SMU forcing Voltage/Current with exact timing?New!We can help you: perform accurate timing control measurement which Keithley cant do.Agilent Value #1: Reliable and accurate device measurementKeithley 4200-SMUB150

9、0A SMU (MP/HR/HP)SMU of B1500A apply exact timing interval.Achieved accurate timing controlCant control timingKeithley can NOT provide Reliable and accurate device measurement.5.00 msecSMU of 4200 can NOT applyrequired timing interval.9.80 msecApplying 5 msecPulse widthDEMO 1We can help you: perform

10、 accurate timing control measurement which Keithley cant do.Agilent Value #1: Reliable and accurate device measurementSMU of B1500A apply exact timing interval.Achieved accurate timing controlThey need another module such as expensive 4225 PMU!500 m msecApplying 500 m msecPulse widthKeithleys SMU ca

11、n NOT set pulse width with 500 m msec.DEMO 1Keithley 4200-SMUB1500A SMU (MP/HR/HP)We can help you: Better optimize timing parameters with monitoring actual V/I waveform Agilent Value #1: New MCSMUFast pulsed IV with accurate timing control100 times narrower than Keithley!New features:Wide voltage/cu

12、rrent range (30V/1A) with 4 quadrantThe fastest SMU architecture gives 50 sec pulse width with 2 sec timing resolutionNew Oscilloscope view on EasyEXPERT can monitor accurate pulse timing on both current & voltageProductNew MCSMUB1500 SMU4200 SMUMin pulse width50 s500 s5 ms (9.8ms)Max voltage30V

13、200V210VMax current1A (Pulse) /100mA(DC1A1APulse timing resolution2s100sms orderMin. sampling rate2s100sms order1slot moduleDEMO 1B1500A New MCSMUYou can check devices very quickly and easily by just like Curve Tracer!Real time plotting during measurementDual polarity sweep capability enables device

14、 polarity check.Sweep range control using a rotary knobMeasurement data is automatically saved to internal hard disk drive.Just 1 click for calling or saving setup file.Agilent Value #2: Tracer Test Mode Quick view of IV curve for un-known deviceWe can help you: evaluate unknown device efficiently a

15、nd quicklyAgilent Value #2: Quick view of IV curve for un-known deviceAgilent B1500AAutomatically saved dataKeithley 4200-SCSOnly last setting parameter is saved.Easy check by tracer testNo tracer test Save setup to Application test/Classic testEasily get back to previous data & measurement setu

16、pNot so easy to get back to setupNeed repeat measurement to find good parameterRotary knobMore accurate measurementWe can help you: evaluate unknown device efficiently and quicklyEasyEXPERT softwareKITE softwareWe can help you: re-use pre-defined or customized application test forflexible test seque

17、nce.Agilent Value #3: Remote control functionUtilize your measurement setupFrom lab use to automated test environmentUsers Software3rd Party Software(VEE, LabVIEW, C, VB etc)Just call the app tests remotely that have not been availableB150 xA EasyEXPERTSelectSelectResultsRequest MeasurementSend Resu

18、lt dataAvailable from EasyEXPERT rev 5.5LAN I/FDEMO 2Agilent Value #4: C-V TestJune 20, 2006June 20, 2006B1500A 满足各种满足各种CV/IV的测试解决方案的测试解决方案10 fA / 0.5m mV Solution1 fA / 0.5m mV Solution0.1 fA / 0.5m mV Solution1 x MFCMU1 x MFCMU1 x MFCMU2 x MPSMU2 x HRSMU2 x HRSMU1 x SCUU1 x SCUU2 x ASU开尔文测量开尔文测量Me

19、dium Frequency Capacitance MeasurementC-V / I-V 切换切换Integrated Capacitance CompensationJune 20, 2006SMU CMU Unify Unit (SCUU) 一体单元一体单元MFCMUMPSMUs or HRSMUsOutputs converted to two pairs of triaxial outputs (Force & Sense)June 20, 2006GuardSMU 1SMU 2SCircuit commonGuardForce Force Triaxial CableT

20、riaxialconnectorTriaxialouter shieldManipulatorManipulatorHcHpLpLcCMUSCUUGSWUUsed for CV measurementTriaxial cableCable assemblySCUU 的一体化解决方案的一体化解决方案Cool guard relayJune 20, 20060.1fA的测量分辨率的测量分辨率Work with the HRSMU. Two ASUs required for C-V / I-V measurement (one for CMH and one for CML).June 20, 2

21、006EasyEXPERTEasyEXPERT(Offline)Data Analysis &Application TestDevelopmentAutomaticData ExportWafer Prober ControlSwitching MatrixControlEasyEXPERT: 完整的参数分析仪系统完整的参数分析仪系统June 20, 2006Desktop EasyEXPERT支持远程控制支持远程控制GPIBONLINE MODE: Control the B1500A (and other instruments) from a stand-alone PC ju

22、st like using the B1500A front panel.LAN (or other data transfer mode)OFFLINE MODE: Analyze data and create application tests.June 20, 2006内部集成开关切换控制内部集成开关切换控制 Switching Matrix Control for the B2200A/B2201AJune 20, 2006快速测试模式快速测试模式June 20, 2006自动数据导出功能自动数据导出功能June 20, 2006探针控制探针控制June 20, 2006Nanote

23、ch 应用测试应用测试June 20, 2006 “Classic Mode” 4155/56界面模式界面模式如果你喜欢4155/56的操作界面那么B1500A也可以让你实现June 20, 20064155/4156 设置转换设置转换Agilent 4155/4156 “.MES” setup file可以直接把4155/4156的测试设置文件倒入到B1500A内June 20, 2006EasyEXPERT 3.0u支持更多的仪表支持更多的仪表 : u4155B/C and 4156B/Cu支持更多的新功能支持更多的新功能 :u QSCV, List Sweep/Multi-Channel

24、 Sweepu Standby mode, Free-run modeu改进数据显示以及分析的功能改进数据显示以及分析的功能uAutomatic auto-scaling while measurementuMultiple marker/pointeruText editor in Data windowu 非常容易的去修改或者创建自己的测试应用非常容易的去修改或者创建自己的测试应用u所见即所得的 GUI 创建u直接控制June 20, 2006高级的高级的QSCVu B1500A 可以提供内部集成的CV 测试 从DC到5MHz.u 高级 QSCV 可以补偿 Gate 漏电流uEasyEXP

25、ERT 3.0支持高级QSCV QSCVJune 20, 2006列表扫描列表扫描 List Sweepu List sweep function 改变扫描的间隔.uList Sweep 可以在一些重要的数据区域进行测试u列表扫描的参数可以从Excel里copy获得Cut & Past from ExcelMeasurement for HysteresisComplex sweepJune 20, 2006多通道扫描多通道扫描Multi-Channel Sweepu Multi-channel sweep 多通道的测量能力u最多10个都可以成为主扫描通道 (VAR1)Two or m

26、ore channels can be set as VAR1.Vd1Vd2VgJune 20, 2006测量中的测量中的Auto-scalingu 当测量的数据超出给定的显示范围,X以及Y轴都可以延伸Auto-scalewhile MeasurementJune 20, 2006更多的更多的Marker和和Pointeru更多的Marker和Pointer 可以更加容易的获得测量的结果并进行比较Multiple-pointersMultiple-markersJune 20, 2006文本的编辑功能文本的编辑功能u文本编辑功能对于做测量报告是非常有用的u可以调整文本的内容大小背景Text E

27、dit Menu barTextJune 20, 2006简单的创建或修改测试应用简单的创建或修改测试应用uDirect Control 通过命令行的方式来执行一系列的测试步骤通过命令行的方式来执行一系列的测试步骤.FLEX command scriptJune 20, 2006方便的图形化操作方便的图形化操作u通过图形化的方式来定义测试界面Define the location of entry fields by using Mouse.June 20, 2006软件平台的更新软件平台的更新System Requirement3.13.11EasyEXPERTDesktopEasyEXPE

28、RTEasyEXPERTDesktopEasyEXPERTOSWindows XP Professional 32bitSP2Windows XP Professional 32bitSP2Windows XP Professional 32bitSP2Windows XP Professional 32bitSP2Microsoft .NET FrameworkRedistributable Package 1.1SP1Redistributable Package 1.1SP1Redistributable Package 2.0SP1Redistributable Package 2.0

29、SP1IO Lib14.014.014.214.015.0Agilent T&M Programmers ToolkitRedistributable Package 1.1Redistributable Package 1.1-June 20, 2006B1500A 以及以及 EasyEXPERT 持续不断的满足客户的测持续不断的满足客户的测试需求试需求B1500A EnhancementWorldwide CustomersSPGUEasyEXPERT 3.0New FeaturesApplications:QSCV, NBTIJune 20, 2006A Revolutionar

30、y Solution for Non-Volatile Memory TestDeveloped for脉冲发生器模块脉冲发生器模块June 20, 2006NVM测试的市场测试的市场u Market situation of NVMuThe market of NVM, especially Flash Memory is rapidly growing.uNVM has been used for various application.u Market needs to NVMuPrecise process and Multi-bit for larger capacity.uNece

31、ssity of reliability improvement.uDevelopment of new types of NVMuMRAM, PRAM, RRAM,u Needs from NVM evaluation and developmentuMore precise measurement of evaluationuHigher throughputuMore complex control and waveformJune 20, 2006B1500A 脉冲发生器模块脉冲发生器模块Timing Gen.Ch1Ch2B1525AA fully integrated high-vo

32、ltage pulse generator unit module Two channels Two types of module: HV-SPGU, Advanced HV-SPGU+/- 40V pulse supply capabilitySuperior pulse level accuracyThree-level pulse and open-state pulse capability on each channelComplex waveform generation Integrated in to B1500A mainframe June 20, 2006应用应用1 高

33、速耐久测试高速耐久测试 GateDrainSourceSubSPGUSPGUNAND CellNOR CellSemiconductor SW for open-stateThree level pulse on one channel40V-40V*) Compared with the solution with 41501BuMinimum 10 times faster than current solution *) NAND Type Flash Memory TestBoth 3 level pulse and high voltage output capability per

34、 1 channelNOR Type Flash Memory TestEmbedded semiconductor SW for Open-state pulse June 20, 2006应用应用2 完整以及精确的闪存测试完整以及精确的闪存测试New SPGU41501B (40V range)Pulse level resolution1.0mV8.0mVPulse level accuracy+/-(0.5%+25mV)+/-(3%+50mV)*) Compared with the solution with 41501BSuperior pulse level accuracy L

35、evel resolution : 1.0mV8 times better than current solutionLevel accuracy : 0.5% + 25mVUp to 6 times better than current solutionuAccurate prediction of duration of lifeuAccurate evaluation of Multi-bit cell June 20, 2006应用应用3 复杂波形产生复杂波形产生Complex waveformWaveform EditoruSupports new NVM technology r

36、equirementsuMRAM, PRAM, RRAM, NAND and NOR flash,SPGU generates complex waveformEasy to edit waveform by using intuitive waveform editorJune 20, 2006ASPGU-Ch#1SPGU-Ch#2SPGU-Ch#3SMU1SMU2SMU3GateDrainSubstrateSourceSW2SW1Agilent 16440A SMU/Pulse Generator SelectorB1500A16440AAgilent B1500A Device Anal

37、yzerNVM 测试示例测试示例Advanced HV-SPGUJune 20, 2006Key SpecKey SpecificationHV-SPGU41501BNoteB1525AVoltage Level 40V(Tr 100ns) 40VHigh-Z TerminationVoltage Level Resolution1mV4mV/8mV(20Vrange/40Vrange)50 TerminationVoltage Level Accuracy (0.5% +25mV) (3.0% +50mV)Typical50 TerminationMinimum Transition Tim

38、e Range10ns100nsMinimum50 TerminationMinimum Transition Time Resolution2ns1ns50 TerminationMinimum Pulse Width Range12.5ns1.0us50 TerminationPulse Width Resolution2.5ns0.1us50 TerminationPulse Width Accuracy (1% + 1ns) (3% + 2ns)50 TerminationMax Synchronized Channels102Output DC Voltage Monitoring

39、/ AdjustmentNONoComplex Waveform GenerationNONoSemiconductor SW for Open-StateNO (External)NO (External)2022年3月17日星期四June 20, 2006Page 50Pulse IV SolutionJune 20, 2006半导体技术的发展半导体技术的发展栅极氧化层厚度的趋势栅极氧化层厚度的趋势 SIA: Technology Generations Roadmap提升性能的一些新的技术提升性能的一些新的技术: :1. SOI structure2. Ultra thin oxide3

40、. High-K dielectricJune 20, 2006对于对于 High-k/SOI 为什么要采用为什么要采用 Pulsed IV IdVdId under actual operation environment (AC)Id measured by DCMOS-FET on SOI n+p-SiGateSourceDrainpEfEvEcGatep-SiBarrier OxideHigh-KSiO2n+pMOS-FET with High-k Gate dielectricsSelf-heating effectTrapped electron & Gate leakag

41、eProblem of SOI/High-k DeviceNo correlation between DC and ACSOIHigh-kJune 20, 2006测量方法测量方法DSGRDC Bias SourceVoltage dropShunt ResistanceIdVdGate bias pulseVoltage drop by IdPulse GeneratorR erersistancShunt Idby drop VoltageIdJune 20, 2006系统配置系统配置 以及阻抗匹配以及阻抗匹配Agilent 81110A Pulse GeneratorGate Puls

42、e Monitor ChAgilent E5262A SMUDC Bias ChGate Pulse Output ChAgilent 54854A 4 GHz Digital Storage OscilloscopeDSGDrain Current Monitor Ch11636B Pulse Divider909D TerminatorBias-TDUTBias-TRF coaxial cableRF coaxial cableRF coaxial cableTri axial cableJune 20, 2006B1530A 波形产生器和快速测量单元波形产生器和快速测量单元 WGFMUB

43、1530A Minimum Pulse Width:100ns Up to 10V/10mA output 200MHz samp/s 2nA current measurement resolution 2ch/ModuleUp to 5 modulesB1530A enables to see what never seen.Offer the combination of arbitrary linear waveform generation (ALWG) with synchronized fast and precise current or voltage (IV) measur

44、ementOptional module for B1500A Compact solution without any external equipment Multi-channel parallel testing for up to 9 devices Upgradable for existing B1500A mainframeJune 20, 2006B1530A 定位定位 Pulse/Staircase outputUltra High resolutionHigh flexible output High SpeedHigh resolutionPulse outputUlt

45、ra High SpeedLow resolutionProduct415xC/B1500A(SMU)B1530ACombination of Infinium Osc. + PGSampling Freq.10KHz200MHz1GHz -4GHzCurrent measurement Resolution1pA2nA500uA(5V,50ohm, wo/Averaging)ADC20bit14bit8bitMin. Pulse width500us 100ns1-3nsMax. output Voltage100V : MP/HRSMU200V : HPSMU10V20V : 81110A

46、Customers benefit All-in-oneCommercial standard productUltra low current measurementAll-in-oneCommercial standard productFast and precise sampling analysisRe-use existing equipmentUltra fast samplingPreciseFastJune 20, 2006应用应用1 可靠性测试可靠性测试Customer benefits Get more exact prediction of device degrada

47、tion for device reliability Precisely analyze dynamic recovery effect Minimize the process development cyclesTarget Customers: Leading semiconductor companies developing advanced precise process , such as 45nm and 32nm. IBM and alliance companies : IBM, SEC, CSM, Freescale, Toshiba, Sony, Infineon A

48、MD, Sematech, TSMC, UMC, TI, STM, NXP, Fujitsu, Matsushita, RenesasSemiconductor : Reliability, Ultra-Fast NBTI/TDDB/HCI, Quality Assurance Features: Industry first product for fast and precise current measurement High-speed nA level IV sweep measurement in 100us Glitch-free programmable AC stress Current sampling measurement 1us after release of the stressJune 20, 2006应用应用2 : Image sensing : RTS (Random Telegraph Noise) C