溅镀站参数规范(已改)

1、 标准书Specification制订部门Written byDepartment撰写者 / 日期Written by / Date审核者 / 日期Reviewed by / Date核准者 / 日期Approved by / Date工程部谢红梅文件变更履历页Document Change History版次 Rev.撰写者Originator变更内容简述Change Description变更依据文件号码DCN #生效日期Eff. DateA001谢红梅New Release接续页CONTINUATION-是YES；否NO 1.0 目的Purpose:根据不同的制程，不同的溅镀薄膜材质制定

2、程序参数规范。According to different process and material to define fit recipe parameter2.0 适用范围Scope:生产在线6吋及8吋芯片的铝薄膜溅镀。Aluminum alloy sputtering on both 6 and 8-inch wafer currently参考文件Reference:溅镀站标准作业标准书；Sputter Station Specification.PE-045名词定义Definition: NA5.0 参数说明 Recipe explain NA 程序名称及参数Recipe Name

3、and Parameter: 6.1 Process Name:sputter_Lead Step Nr.TypeNameStep Description / Notes12235678910111213LC-PumpLC-DegaseLC-Etch1LC-Etch2Transp. to MCMC-PumpMC-PresputterHMC-preSputterLMC-sputter LMC-sputter HMC-PumpTransp. to LCLC-ventpump downheaterignetch surfacetrans cagepump downsputter AICU4pumpt

4、rans rotaryventTorr30 passes 30s, 50%power1 passes 30s,0.2kw, 10sccm20 passes 30s,0.7kw,0V,10sccm TorrDC,5 passes 10s,120sccm,2:5kwPDC,5 passes 10s,120sccm,2:0.2. kwPDC,1 passes 10s,120sccm,2:0.2. kwPDC,108 passes 10s,120sccm,2:10kwP1.0E-6Torrstop before ventEdit Step LC-PumpTransf. Press. X 5E-6 mb

5、ar Name pump downPressure Timeout 0 s NotesTime per Pass 30 sEdit Step LC-DegasPasses 30 Name ventTime per Pass 30 s NotesDegas Power 50 %Start Pressure none mbarPressure Timeout 0 sGas Ramp Time 0 s No. Name Ramp Start FlowGas A 0 sccmEdit Step LC-Etch 1 Continue Step Offset: 0 steps Auto Replays:

6、0Passes 1 Name ignTime per Pass 30 s NotesStart Pressure X 9.8E-6 mbar Gas A Purge Time 4 sPressure Timeout 0 s Gas Stab. Time 5 sGas Ramp Time 0 s No. Name Ramp Start FlowGas A 2 Ar_et 10 sccm Flow PulseGas B 0 sccm Gas C 0 sccm Etch Power 0.20 kw Heat Power 0 %Etch Voltage 0 vEdit Step LC-Etch 2 C

7、ontinue Step Offset: 0 steps Auto Replays: 0Passes 20 Name etch surfaceTime per Pass 30 s NotesStart Pressure none mbar Gas A Purge Time 0 sPressure Timeout 0 s Gas Stab. Time 0 sGas Ramp Time 0 s No. Name Ramp Start FlowGas A 2 Ar_et 10 sccm Flow PulseGas B 0 sccm Gas C 0 sccm Etch Power 0.70 kw He

8、at Power 0 %Etch Voltage 0 vEdit Step Transport LCMCp LC none mbar Name trans cagePump Timeout 0 s NotesEdit Step MC-Pump 1 Pressure X E-7 mbar Name vacuumPressure Timeout 0 s NotesTime per Pass 30 s RGAEdit Step MC-Presputter 1 Continue Step Offset: 0 steps Auto Replays: 3 Comp.Passes 5 none Name p

9、resp AlCuTime per Pass 10 s Notes PV ThrottleGas Ramp Time 0 s Gas A Purge Time 0 s Gas Stab. Time 5 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 25 s Pos. Type Material Ramp Start Set point Voltage Comp.Source A 2 DC AlC

10、u X 5.00 0Source B 4 DC AlCu X 5.00 0Source C 0Source D 0Edit Step MC-Presputter 2 Continue Step Offset: 0 steps Auto Replays: 3 Comp.Passes 5 none Name presp AlCuTime per Pass 10 s Notes PV ThrottleGas Ramp Time 0 s Gas A Purge Time 0 s Gas Stab. Time 5 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c

11、120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 25 s Pos. Type Material Ramp Start Set point Voltage Comp.Source A 2 DC AlCu X 0Source B 4 DC AlCu X 0Source C 0Source D 0Edit Step MC-Sputter 1 Continue Step Offset: 0 steps Auto Replays: 0 Comp.Passes 1 none Name AlCu t

12、arTime per Pass 10 s Notes X Shutter open/close control First Time: 0 deg Increment: 0 deg PV ThrottleGas Ramp Time 0 s Gas A Purge Time 0 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 0 s Pos. Type Material Ramp Start Set

13、 point Voltage Comp.Source A 2 DC AlCu 0.2 0Source B 4 DC AlCu 0.2 0Source C 0Source D 0Edit Step MC-Sputter 2 Continue Step Offset: 0 steps Auto Replays: 0 Comp.Passes 108 none Name AlCu tarTime per Pass 10 s Notes X Shutter open/close control First Time: 0 deg Increment: 0 deg PV ThrottleGas Ramp

14、Time 0 s Gas A Purge Time 0 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 0 s Pos. Type Material Ramp Start Set point Voltage Comp.Source A 2 DC AlCu 10 0Source B 4 DC AlCu 10 0Source C 0Source D 0Edit Step MC-Pump 2 Press

15、ure X 1.0E-6 mbar Name pumpPressure Timeout 0 s NotesTime per Pass 30 s RGAEdit Step Transport MCLCp LC none mbar Name trans rotaryPump Timeout 0 s NotesEdit Step LC-VentPressure none mbar Name vent X Stop before Vent Notes Gas during LOAD/UNLOADGas Ramp Time 0 s No. Name Ramp Start FlowGas A 0 sccm

16、6.2 process name:sput_padStep Nr.TypeNameStep Description / Notes12235678910111213LC-PumpLC-DegaseLC-Etch1LC-Etch2Transp. to MCMC-PumpMC-PresputterHMC-preSputterLMC-sputter LMC-sputter HMC-PumpTransp. to LCLC-ventpump downheaterignetch surfacetrans cagepump downsputter AICU4pumptrans rotaryventTorr3

17、0 passes 30s, 50%power1 passes 30s,0.2kw, 10sccm20 passes 30s,0.7kw,0V,10sccm TorrDC,5 passes 10s,120sccm,2:5kwPDC,5 passes 10s,120sccm,2:0.2. kwPDC,1 passes 10s,120sccm,2:0.2. kwPDC,38 passes 10s,120sccm,2:10kwP1.0E-6Torrstop before ventEdit Step LC-PumpTransf. Press. X 5.0E-6 mbar Name pump downPr

18、essure Timeout 0 s NotesTime per Pass 30 sEdit Step LC-DegasPasses 30 Name degasTime per Pass 30 s NotesDegas Power 50 %Start Pressure none mbarPressure Timeout 0 sGas Ramp Time 0 s No. Name Ramp Start FlowGas A 0 sccmEdit Step LC-Etch 1 Continue Step Offset: 0 steps Auto Replays: 0Passes 1 Name ign

19、Time per Pass 30 s NotesStart Pressure none mbar Gas A Purge Time 4 sPressure Timeout 0 s Gas Stab. Time 20 sGas Ramp Time 0 s No. Name Ramp Start FlowGas A 2 Ar_et 10 sccm Flow PulseGas B 0 sccm Gas C 0 sccm Etch Power 0.20 kw Heat Power 0 %Etch Voltage 0 vEdit Step LC-Etch 2 Continue Step Offset:

20、0 steps Auto Replays: 0Passes 15 Name etch surfaceTime per Pass 30 s NotesStart Pressure none mbar Gas A Purge Time 0 sPressure Timeout 0 s Gas Stab. Time 0 sGas Ramp Time 0 s No. Name Ramp Start FlowGas A 2 Ar_et 10 sccm Flow PulseGas B 0 sccm Gas C 0 sccm Etch Power 0.70 kw Heat Power 0 %Etch Volt

21、age 0 vEdit Step Transport LCMCp LC none mbar Name trans cagePump Timeout 0 s NotesEdit Step MC-Pump 1Pressure X 5.0-7 mbar Name vacuumPressure Timeout 0 s NotesTime per Pass 30 s RGAEdit Step MC-Presputter 1 Continue Step Offset: 0 steps Auto Replays: 3 Comp.Passes 5 none Name presp AlCuTime per Pa

22、ss 10 s Notes PV ThrottleGas Ramp Time 0 s Gas A Purge Time 0 s Gas Stab. Time 5 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 25 s Pos. Type Material Ramp Start Set point Voltage Comp.Source A 2 DC AlCu X 5 0Source B 4 DC

23、 AlCu X 5 0Source C 0Source D 0Edit Step MC-Presputter 2 Continue Step Offset: 0 steps Auto Replays: 3 Comp.Passes 5 none Name presp AlCuTime per Pass 10 s Notes PV ThrottleGas Ramp Time 0 s Gas A Purge Time 0 s Gas Stab. Time 5 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 60.00 sccm none Flow Pulse

24、Gas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 25 s Pos. Type Material Ramp Start Set point Voltage Comp.Source A 2 DC AlCu X 0Source B 4 DC AlCu X 0Source C 0Source D 0Edit Step MC-Sputter 1 Continue Step Offset: 0 steps Auto Replays: 0 Comp.Passes 1 none Name AlCu tarTime per Pass 10 s Not

25、es X Shutter open/close control First Time: 0 deg Increment: 0 deg PV ThrottleGas Ramp Time 0 s Gas A Purge Time 0 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 0 s Pos. Type Material Ramp Start Set point Voltage Comp.Sour

26、ce A 2 DC AlCu 0.2 0Source B 4 DC AlCu 0.2 0Source C 0Source D 0Edit Step MC-Sputter 2 Continue Step Offset: 0 steps Auto Replays: 0 Comp.Passes 34 none Name AlCu tarTime per Pass 10 s Notes X Shutter open/close control First Time: 0 deg Increment: 0 deg PV ThrottleGas Ramp Time 0 s Gas A Purge Time

27、 0 s No. Name Ramp Start Flow Comp.Gas A 1 Ar_c 120 sccm none Flow PulseGas B 0 sccm Gas C 0 sccm Gas D 0 sccmSource Ramp Time 0 s Pos. Type Material Ramp Start Set point Voltage Comp.Source A 2 DC AlCu 10 0Source B 4 DC AlCu 10 0Source C 0Source D 0Edit Step MC-Pump 2 Pressure X 1.0E-6 mbar Name pu

28、mpPressure Timeout 0 s NotesTime per Pass 30 s RGAEdit Step Transport MCLCp LC none mbar Name trans rotaryPump Timeout 0 s NotesEdit Step LC-VentPressure none mbar Name vent X Stop before Vent Notes Gas during LOAD/UNLOADGas Ramp Time 0 s No. Name Ramp Start FlowGas A 0 sccm程序选择choose precedure： sput_pad Nameprocedureremark PI008sput_pad38 Change pass No. while target consume PI017sput_pad38Change pass No. while target consume PI018sput_pad38Change pass No. while target consume PI016sput_pas