在TFT-LCD_工艺制程简介

1、上海天隔微雪子有B胞司SHANGHAI IIANMA M IC R OE L E C TRON I CsQ/S 口.上海天马微电子企业标准Q/S0001-2007TFT工艺流程、材料、设备、生产常用中英文标准名称版 号： 1.0 总页数： 23制定部门：制造部 生效日期：2007年4月28日拟制：方永学2007-4-3审核：向传义2007-4-3标准化： 吴乃亮2007-4-25会 签： 颜建军 朱希玲2007-4-20蔡明宏2007-4-24凌志华2007-4-3 安德浩2007-4-242007-04 发布2007-04实施上海天马微电子发布TFT工艺流程、材料、设备、生产常用中英文标准名

2、称Q/S0001-2007第 2 页共 23 页更改状态更改内容更改人更改日期一.TFT工艺流程中英文标准名称Array Process Flow阵列段工艺流程Input 投料Unpacking拆包装Initial clean预备清洗Particle count尘埃粒子测试Gate栅电极层Clean before depo成膜前清洗Gate (Mo/Al alloy ) Film depo栅电极成膜RS meter电阻测量Macro Inspection宏观检查Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry(VCD)光刻胶低

3、压枯燥PR soft bake前烘Expose曝光Titler Expose/Edge Expose打标/边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Mic/Mac Inspection宏微观检查CD after develop显影后关键尺寸检查Total pitch长寸测量Gate Wet etch栅电极湿刻Contact angle接触角测量PR strip光刻胶剥离CD after etch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Laser Repair激光修补Q/S0001-2007第 3 页共

4、23 页Active 层Clean before depo成膜前清洗Active film depoActive成膜AOI自动光学检查Macro Inspection宏观检查Thickness Measurement厚度测量Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压枯燥PR soft bake前烘Expose曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Mic/Mac Inspection宏微观检查Active film Dry etch & AshingActive膜干刻与

5、灰化Thickness Measurement厚度测量PR strip光刻胶剥离AEI刻蚀后自动光学检查Mic/Macro Inspection宏微观检查S/D 源/漏电极层Clean before depo成膜前清洗S/D Mo film depo源/漏电极成膜RS meter电阻测量MACRO Inspection宏观检查Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压枯燥PR soft bake前烘Expose曝光Edge expose边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检

6、查MIC/MAC Inspection宏微观检查CD after develop显影后关键尺寸检查Hard bake by oven烘炉坚膜S/D Mo Wet etch源电极/漏电极湿刻n+ a-Si Dry etchn+高掺杂膜干刻Q/S0001-2007第 4 页共 23 页PR strip光刻胶剥离Thickness Measurement厚度测量CD after etch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Clean before O/S test短路/开路测试前清洗Open/Short Test短路/开路测试Passiva

7、tion保护层Clean before depo成膜前清洗Pass'n film depo保护膜成膜AOI自动光学检查MACRO Inspection宏观检查Thickness Measurement厚度测量Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压枯燥PR soft bake前烘Expose曝光Edge expose边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Micro/Macro Inspection宏微观检查SinX Dry etch & ASHING氮化

8、硅干刻与灰化PR strip光刻胶剥离AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查ITOITO层Clean before PR成膜前清洗a-ITO film depoITO成膜RS meter电阻测试Anneal煨火Macro Inspection宏观检查Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压枯燥PR soft bake前烘Expose曝光Develop显影第5页共23页Q/S0001-2007PR hard bake坚膜ADI显影后自动光学检查Micro/Macro In

9、spection宏微观检查ITO film etchITO膜湿刻PR strip光刻胶剥离AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Final E/T最终电测Anneal煨火Array test阵列测试Array repair阵列修补TEG testTEG测试Sort分级Cell Process flow制盒段工艺流程CF Input彩膜投料CF Initial Clean彩膜预备清洗CF AOI彩膜自动光学检查CF Sort彩膜分级PI配向膜Clean before PI配向膜涂布前清洗PI Print配向膜涂布Pre-cure预固化PI Inspecti

10、on配向膜检查PI Thickness配向膜厚度测量MMasu固告nt固化PI rework配向膜返工ODFCF&TFT MatchingCF&TFT匹配Rubbing配向摩擦Rubbing Inspection摩擦检查Loader & Un loader上料机/下料机Buffer缓冲器CST Buffer工装栏缓冲器Rotation/Cooling Unit旋转/冷却单元Turn Align Unit旋转/对位单元Turn Over Unit翻转单元After Rubbing Cleaner摩擦后清洗Spacer Spray衬垫球散布Spacer Counter衬垫球

11、计数Spacer rework衬垫球返工Spacer Cure衬垫球附着固化Short Dispense导电胶涂布TIANMATFT工艺流程、材料、设备、生产常用中英文标准名称Q/S0001-2007第 6 页共 23 页Sealant Dispense边框胶涂布Seal Inspection边框胶检查LC Dispense液晶滴下Vacuum Assembly真空贴合UV Cure紫外线固化Mis-alignment check错位检查Seal Oven边框胶热固化Eye Inspection目视检查Cell gap Measurement盒厚测试Cutting 切割1/4(1/6)Shee

12、t Cutting,1/4(1/6)切割Stick Cutting,切条Cell Cutting切粒Visual TestVisual 测试ECPEdge Grind磨边Dipping clean浸泡式清洗Clean before Pol贴片前清洗Pol Attach贴片Pol Inspection贴片检查Pol rework贴片返工Auto ClaveAuto Clave消泡LaserLaser Trimmer激光切线TrimmerTest 测试Gross Test终检Repair修补Bin sorter分级OQC Test出货检查Store货栈TFT工艺流程、材料、设备、生产常用中英文标准

13、名称Q/S0001-2007第 7 页共 23 页Module Process Flow模块段工艺流程COGPad cleaning瑞子清洗IC BondingIC邦定Microscope Inspection镜检AdhesiAOtestp %FOGACF AttachingACF粘贴FOG BondingFOG邦定Microscope Inspection镜检Peeling strength test拉力测试ET test1电测1IC or FPC Repair修补UV glue sealing封胶FPC reinforcement补强UV glue curingUV胶固化Assembly组

14、装ET test2电测2anti-ultraviolet tape attaching遮光胶带粘贴protected tape attaching保护胶带粘贴Backlight assembly背光源组装Backlight soldering背光源焊接Touch panel assembly触摸屏组装Final ET test最终电测Rework返工Aging老化QC testQC佥验Code printing喷码Packing包装OQC Test出货检验Finished good shipment合格品出货CIM name集成限制系统名称CIM计算机集成制造 系统CIM System计算机集

15、成制造系统Manufacturing Execution System(MES)制造执行系统MESPreventive Maintenance System(PMS)设备预防保养系统PMSStatistical Process Control(SPC)统计过程治理SPQEquipment Automation Program(EAP)设备自动化EAPReport报表Q/S0001-2007第8页共23页Engineering Data Analysis(EDA)工程数据分析EDAFinished Good Management System(FGMS)成品治理系统FGMSProduct产品Gl

16、ass玻璃基板Panel面板Process Flow工艺流程Operation操作EDC工程数据收集Equipment设备Chamber腔体Unit单体Sub Unit副单体Port端口OIC (Operator Interface Client)操作者界向EDB工程数据库FGMS成品治理系统Dispatcher派货Create建立Start下线Scrap报废Un scrap取消保废Complete完成Ship出货Un ship取消出货Receive收料Track In入账Track Out出账Wait等待Hold滞留Release释放Rework返工Vehicle搬运车Robot机械手AGV

17、 (Automatic Guided Vehicle)自动搬运车MGV (Manual Guided Vehicle)人工搬运车Clean lifter净化电梯LIM (Linear Induction Motor) Carrier线性感应马达传送载具OHS (Overhead Handling System)天车搬送系统第9页共23页Q/S0001-2007Stocker (clean depot)工装篮存放架Battery电池Bay作业区Inter-bay作业区和作业区之间Intra-bay作业区之内Bumper减震缓冲器Charger充电器Controller限制器Conveyor传送带

18、Crane吊车在Stocker内FFU (Fan Filter Unit)风扇过滤器Host主机I/O (Input / Output)输入/输出IR (Infra-Red)红外线IRIF(Infra-Red Interface)红外接口Load上料Unload下料Magnetic tape磁条AGV路径所使用的磁条Retrieve检索RTM (Rotary Transfer Machine)旋转传送机构SCARA armAGV专送臂Reset重新设定Transportation传输Recipe工艺参数的组合Stock out将工装篮取出货栈Request要求,请求Transfer传送,运送I

19、nstruction命令,指令Select选择Cancel取消Operation作业,操作Support支援,支持Process工艺Start开始Batch批量Lot批指生产线的在制品或产品限制 单位ID (Identity)识别码(如 Lot ID or Chip ID)Q/S0001-2007第10页共23页Sheet片Array区玻璃基版计数单位Inspection检验Defect缺陷Hold滞留Release释放Equipment设备简称为EQPTool工具,机台WIP (Work In Process)在制品工艺在制品Maintenance维修保养Cassette工装篮阵列段,卡匣制

20、盒段及模 块段Empty空的Reserve预备Report报告Rework返工Log on登录,入系统Log off注销登录,离开系统Note批注Unpacking line拆包线Un packer拆包机Glass conveyor玻璃传送带Initial Cleaner预清洗Un loader下料机Cassette Manual Guide Vehicle (MGV)工装篮人工搬运车Array CassetteArray工装篮ODF CassetteODFX装篮Automated Material Handling System(AMHS)自动物料搬运系统Clean Stocker(STK)

21、洁净工装篮存放架STKOverhead Handling System (OHS)天车搬送系统OHSMaterial Control System (MCS)物料限制系统MCSClean Robot洁净机械手Loader/Un loader上/下料机Sorter分片机TIANMATFTQ/S0001-2007工艺流程、材料、设备、生产常用中英文标准名称第11页共23页二.TFT材料中英义标准名称母TypeMaterials name材料名称玻璃GlassGlass玻璃基板Color filter彩色滤光膜Bare glass白玻璃基板LCD Panel液晶面板靶材TargetAlNd/Al T

22、arget铝铉/铝靶材MoNb/Mo Target旬银/铝靶材ITO TargetITO靶材化学液体ChemicalAl EtchantAl蚀刻液ITO EtchantITO蚀刻液HNO3硝酸CH3COOH乙酸Developer显影液Stripper剥离液MEA单乙醇胺Photo Resist光刻胶Organic Photo Resist有机膜用光刻胶Thinner稀释剂NMPN-甲基-2-口比咯烷酮HF氢氟酸Acetone内酮IPA异内醇Ethanol酒精辅助器材Sub materialPhoto Mask光罩APR PlateAPR版Rubbing Cloth摩擦绒布Adhesive Ta

23、pe双面胶布Probe frame for array tester阵列电测架日T Frame电测用探测架Cell ET Probe Unit屏电测用探测头Open/Short tester and prober开路、短路电测用探测头Teflon Tape特氟龙带Silicon rubber硅胶皮Wiper Tape无尘卷布第12页共23页Q/S0001-2007局纯气体High purity gasNF3三氟化氮SiH4硅烷SF6/、飒化硫NH3氨气Cl2氯气HCL氯化氢CHF3三氟甲烷PH3磷烷CF4四氟甲烷N2氮气O2氧气H2氢气Ar氧气He氨气液晶LCLC液晶材料胶膜FilmPolar

24、izer偏光片Diffuser散光膜涂料DopePI聚酰亚胺树脂ResinSealant边框胶UV glueUV胶ACF各向异性导电膜Conductive Spacer导电衬垫球Spacer used in Sealant边框胶内衬垫球Spacer used in Cell(White )盒内衬垫球白Spacer used in Cell( Black )盒内衬垫球黑元器件PartsBack Light Unit背光源Integrated circuit/Driver IC集成电路/驱动ICPCB印刷电路板FPC柔性印刷线路板Module Frame模块外框Touch Panel/Touch

25、film触摸屏/触摸膜RCL阻容器件焊接材料SolderingFLUX助焊剂SOLDER CREAM焊锡/焊接剂materialTIANMATFTQ/S0001-2007工艺流程、材料、设备、生产常用中英文标准名称第13页共23页TFT设备中英文标准名称English name中文名称PHOTOExposer曝光机Coater Developer陈列黄光制程清洗机-涂布机-显影机long size measuring and critical dimension measuring multiple equipment测长仪和线宽测量仪Titler& Edge Exposer打标机和边

26、缘曝光复合机Edge Exposer边缘曝光机AFM原子力显微镜FIB聚焦离子束系统FE-SEM场发射扫描电子显微镜UV MeterUV照度计EXCIMER UV准分子紫外清洗机Ionizer Bar除静电棒Fire Extinguisher灭火器Photo Ionizer软X射线静电消除器PVD&WET溅射&湿式PVD(Multi-chamber type sputtering system)磁控溅射成膜机Particle counter尘埃粒子测量仪Ultrasonic Cleaner超声波清洗机Stripper脱膜机Contact Angle Analyzer接触角测量仪

27、RS Meter(4point Probe)四探针仪Cassette Cleaner工装篮清洗机Initial Cleaner预备清洗机Pre CVD cleaner成膜前清洗机HF Cleaner before S/DS/D成膜前带HF清洗机Liquid Particle Counter液体内尘埃粒子测量仪CCSS中央化学品供给系统Anneal Oven退火炉Hard Bake Oven后烘炉Film Tester薄膜附着力测试仪Etchant Concentration Management System刻蚀液浓度治理系统DMS显影液浓度治理系统DRS显影液溶剂回收系统RMS剥离液浓度治理

28、系统Wet Etcher湿刻机4.5G-Macro Review System4.5G宏观检查机4.5G-Mic/Mac Review System4.5G宏观、微观检查机RGA(Residual Gas Analyzer)剩余气体分析仪PECVD 化学气相沉Hot N2 Transfer System热N2供给系统PECVD等离子增强化学气相淀积设备Special Gas Supply & Monitor System特种气体供给和监视治理系统Q/S0001-2007第 14页共 23 页积Temperature Recorder温度记录仪Gas Scrubber for PECVD

29、PECVDi尾气处理装置Full Automatic Spectroscopic Ellipsometer for Flat Panel Display平板显示用全自动椭圆偏振光谱仪Clean Crane洁净室起重机设备Spectroscope Reflectometer平板显示用全自动分光反射光谱仪He Leak Detector氨气检漏仪DRY干刻Dry Pump for CVD化学气相沉积设备用真空泵Dry Pump for PVD物理气相沉积设备用真空泵EPD for Dry Etching干刻终点侦测器Dry pump for Dry Etching干刻机设备用真空泵Dry Etch

30、ing/Ashing System干刻灰化一体机Profiler SystemP段差量测机Chiller for Dry Etching干刻机辅助设备冷却器Local Scrubber System for Dry EtchingP干刻用废气处理设备CELL制盒Rubbing Line摩擦线Before PI cleanerPI前清洗机Cassette BF工装篮缓冲器PI PrinterPI涂布机Pre-Cure预固化炉Main-Cure主固化炉Loader/Un loader上下料机APR cleanerAPR板清洗机Rubbing Inspection摩擦检查机After Rubbing

31、 Cleaner摩擦后清洗机ODF SystemODF相关设备Seal Dispenser边框胶涂布机Short Dispenser导电胶涂布机Seal De-bubbling machine边框胶脱泡机UV curer紫外线固化机Spacer Cure Oven衬垫球固化炉Cooling /Rotation Unit；冷却/旋转装置Seal Cure Oven边框胶固化炉LC dispenser液晶滴下机LC de-bubbling液晶脱泡机Vacuum Assembly真空贴合系统Mis-align Checker对位检查机Visual Inspection目视检查机ODF Inline

32、transfer and line control blockODF联线传输和软件限制系统Loader(3port)上料机Un loader(3port)下料机Cassette Buffer卡匣缓冲器Turn Align Buffer旋转对位缓冲器Pairing/NG Buffer配对/不良制品缓冲器Spacer NG Buffer衬垫球散布不良制品缓冲器Turn Over Align翻转对位器TIANMAQ/S0001-2007第 15页共 23 页UV Mask stockUV Mask存储柜Buffer after UV cureP紫外线固化后缓冲器Cooling Buffer冷却缓冲器

33、Spacer US Cleaner衬垫球超声波清洗机Spacer Remover(USC)衬垫球聚团去除装置超声波清洗机US Cleaner after sealant dispensingP边框胶涂布后超声波清洗机US Cleaner after short dispensing点胶后超声波清洗机Master PLC主PLCCIM PCCIM PCSeal Inspection边框涂布检查机Cell Gap Inspection盒厚检查机Dry Spacer Spray & Spacer count干式散布机衬垫球计数器Auto Clave偏光片贴附后加压消泡机Edge Grinde

34、r液晶面板磨边机LCD Panel cleaning and Polarizer attach system液晶面板清洗和偏光板贴附机系统Panel Cleaner面板清洗机用于液晶面板清洗和偏 光板贴附机系统Polarizer Attach Machine偏光板贴附机用于液晶面板清洗和 偏光板贴附机系统LCD Panel Polarizer Rework Machine液晶面板偏光片返工机Cell Cassette(3"-10.4")3"-10.4"Cell 卡匣Single head scriber单刀头切割机LCD glass in-line Sc

35、riber液晶面板在线切割机Multi head Scriber多刀头切割机MODULE模块COG bonding machine自动COG定机COG Semi-automatic Bonding Machine半自动COGO定机Aging test system老化测试系统Signal generator for LCD InspectionPLCD检查用信号发生器Auto Optical Inspection自动光学检测仪Air Particle Counterr空气尘埃粒子测量仪Backlight tester背光源色度亮度测量仪Projector投影仪Microscope显微镜Ioni

36、zer blower离子风扇Surface resistance test kit.点检)外表电阻测量仪Charged Plate Monitor平卸带电测试仪Static electricity voltage testing静电电压测量仪TEST测试ADI-AOI显影后检测AEI-AOI刻蚀后检测CF-AOI彩色滤光片检测Array Tester阵列电测机Open/Short tester and prober开路/短路检测和探针系统ARRAY O/S probe开路/短路探针系统TEG ProberTEG探针系统M TFT工艺流程、材料、设备、生产常用中英文标准名称Q/S0001-200

37、7第 16页共 23 页TEG TesterTEG测试系统Probe Unit for TEGPTEG测试用探针系统Array repair激光修补系统Array Probe frame阵列电测架Visual test probe unit目测用探针系统ET Probe unit2英寸电测用探针系统Microscope显微镜(Panel )Microscope and laser system带激光的显微镜Barcode Reader条形码阅读器Fixed 2D Code Reader2维读码器系统固定类型Portable 2D Code Reader2维读码器系统可移动类型PI+Macro

38、inspection systemPI+Macro检测系统Cell Gap Measure System盒厚测量系统Laser Trimmer激光切线系统Cell Laser Repair液晶盒激光修补系统Oscilloscope示波器Manual probe手动探针系统Precision Parameter AnalyzerTFT参数分析仪R&D研发Product Optical Quality Measurement System产品光学质量检测系统Optical Parameters Measurement System光学特性量测设备Circuit drawing/Orcadr

39、电路图编辑器P-spice Analog SimulationP-spice电路仿真器PCB ArtworkPCB线路图编辑器3D Mechanical Design Tool3D机械设计工具2D structure Design ToolP2D结构设计工具Pattern Generator测试图形发生器Resistance Attenuator电阻衰减器川uminance Colorimeter亮度色度计Spectrophotometer亮度色度光谱仪Color Analyzer色彩分析仪R,L,C MeasurementR,L,C测试仪ESD Gun(EMI/EMS)table静电枪台UV

40、 TEST chamber紫外线测试箱Seal dispenser边框胶涂布机three axis Measurement Stage三轴量测平台Pre-tilt angle & cell gap measurement system倾斜角盒厚量测仪LC resistivity meterP液晶电阻率测量仪Oscilloscope(Analog)模拟示波器Thermo-hygrostat恒温恒湿柜Thermal Shock Chamber冷热冲击舱ESD Gun(EMI/EMS)静电枪Liquid crystal injection machine灌晶机Plasma cleaning

41、machine等离子清洗机Simulation software of LCD Optical parametersLCD光学特性模拟软件TIANMATFT工艺流程、材料、设备、生产常用中英文标准名称Q/S0001-2007第 17页共 23 页Layout editor for mask幅员设计软件CIM集成限制CIM System-.Manufacturing Execution System(MES)-.Preventive Maintenance System(PMS)-.Statistical Process Control(SPC)-.Equipment Automation Pr

42、ogram(EAP)-.Report System-.Engineering Data Analysis(EDA)-.Finished Goods Management System(FGMS)-.Engineering Data Base(EDB)计算机集成制造系统- .制造执行系统- .机台预防保养系统- .统计制程管制- .设备自动化- .报表系统- .工程数据分析- .产成品治理系统- .工程数据库Operator Interface Client(OIC)操作者界向FAB Monitoring Client(FMC)工厂监控系统Dispatcher(DSP)任务分配系统Fault D

43、etection and Classification(FDC)缺陷检查和分类系统Alarm Management System(AMS)机台报警系统Real Time Analysis/Monitoring System(RTAMS)缺陷治理的实时监控/分析系统System Management System(SMS)系统治理系统AMHS物料搬运Unpacking line -.Un packer -.Glass conveyor -.Initial Cleaner -.Un loader拆包线- .拆包机- .玻璃传送带- .预清洗- .下料机Cassette Manual Guide V

44、ehicle (MGV)工装篮人工引导车Array CassetteArray工装篮ODF CassetteODF工装篮Automated Material Handling System(AMHS)-.Clean Stocker(STK)-.Overhead Handling System (OHS)-.Material Control System (MCS)自动物料搬运系统- .洁净堆料机STK- .天车搬送系统OHS- .物料限制系统MCSClean Robot洁净机械手Loader/Un loaderr上下料机Sorter分片机CIM Server 集成限制系 统效劳器MES DB

45、ServerMES数据效劳器MES APP ServerMES应用效劳器EDA/EDB ServerEDA/EDB效劳器FDC ServerFDC效劳器PMS ServerPMS效劳器YMS ServerYMS效劳器File Server文件效劳器Centralized Backup/Recovery Server中央备份效劳器Development Server开发效劳器Testing Server测试效劳器Storage/Disk Array磁盘阵列SAN Switch/Storage LinkSAN交换机Tape Library磁带库Switch网络交换机Router网络路由器TIANM

46、ATFT工艺流程、材料、设备、生产常用中英文标准名称Q/S0001-2007第 18页共 23页Firewall网路防火墙Message BusP信息总线TIBCO RendezvousT旧CO消息集聚器Data Protector数据保护者Facility工程Exhaust Fan(FRP)排气风机玻璃钢离心式UPW system纯水超纯水设备Auto control system自动限制系统CDA system压缩空气系统Bulk gas supply system大宗气体供给系统Exhaust Fan排气风机Fan Filter Unit送风过滤系统Gas and liquid leak

47、 detection system气体和液体测漏系统Diesel oil generator柴油发电机系统VOC scrubber有机物蒸气洗净机Plant Vacuum pump工厂真空系统cleaning vacuum pump清洁真空系统waste water monitor system废水检测系统vesda system空气烟感探测分析系统chiller冷水机组cooling tower冷却塔HVAC PUMP空调水泵heat energy supply system集中供热系统LPG systemLPG站系统PCW systemPCW(统35KV transformer35KV变压

48、器Telephone system 系统CATV systemP有线电视系统broadcasting system播送系统fire alarm systemP火警系统WWT废水处理系统35KV switch device35KV开关装置Mv switchgears, cast coil transformers, unit substations, power scada中压变配电系统Security & CCTV system安保和闭路电视系统Fire fighting system消防系统Analysis room 分析室Single head scriber单刀头切割机Conta

49、ct Angle接触角测量仪Eyewash洗眼台Wet station带通风橱的中央实验台TIANMATFTQ/S0001-2007工艺流程、材料、设备、生产常用中英文标准名称第19页共23页四.TFT生产常用中英文名称English name中文名称General一般专有名词LCD (Liquid Crystal Display)液晶显示器Glass, substrate or glass substrate玻璃基版TFT(Thin Film Transistor)薄膜晶体管Panel面板Array阵列Cell液晶盒Module模块Monitor监视器Pixel像素Computer电脑Notebook PC笔记本电脑简称为 NBRGB (Red, Green, Blue)指红绿蓝三基色PM (Preventive Maintenance)预防保养Quality品质Standard标准指作业标准或质量指针Material材料Yield良率CIM(Computer Integration Manufacturing)计算机集成制造指以