Ticer埋阻材料测试结果汇总

1、1会计学Ticer埋阻材料测试结果汇总埋阻材料测试结果汇总2014-12-18实验目的l测量Ticer埋阻材料方阻率稳定性。测试项目l方阻大小为0.5、1、5cm，测量埋阻材料在经过SES一遍/两遍后的阻值以及长/宽、经过棕化后的阻值以及长/宽、经过层压后阻值、经过热冲击后阻值。测试图形背景背景方阻率测试单个Unit测试图形5cm*5cm1cm*1cm0.5cm*0.5cm1829310411512613714方阻率测试Panel：因铜箔较小，舍弃两边各一列Unit，Unit编号如左图所示当前状态l4块方阻率测试板，两块进行了第一次SES，两块只进行了一次铜箔蚀刻留用。测 试了两块进行SES板

2、的阻值和电阻尺寸。测试设备l电阻值：日置HIOKI 3541电阻计l尺寸：三维测量仪实验结果实验结果编号电阻值（）尺寸（mm）方阻率（）panelUnit号0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmLWLWLWpanel1151.738 50.872 48.358 5.0693 4.9498 10.0761 9.9931 50.0622 49.9901 50.52 50.45 48.29 251.108 50.852 48.395 5.0432 4.9778 10.0506 9.9566 50.0698 49.9662 50.45 50.38 48.29 351.857

3、 50.977 48.087 5.0512 4.9958 10.0664 10.0007 50.0679 49.9672 51.29 50.64 47.99 452.703 51.682 47.960 5.0549 4.9748 10.0509 9.9802 50.0540 49.9836 51.87 51.32 47.89 552.023 51.925 48.485 5.0489 5.0119 10.0673 10.0032 50.0680 49.9782 51.64 51.59 48.40 653.163 51.646 48.250 5.0509 5.0524 10.0418 9.9777

4、 50.0506 50.0081 53.18 51.32 48.21 752.022 51.208 48.538 5.0692 4.9859 10.0634 10.0108 50.0594 49.9750 51.17 50.94 48.46 852.737 52.201 49.860 5.0594 4.9784 10.0333 9.9953 50.0656 49.9767 51.89 52.00 49.77 952.054 52.042 49.933 5.0247 4.9829 10.0418 9.9618 50.0612 49.9830 51.62 51.63 49.86 1051.702

5、52.831 49.517 5.0502 4.9759 10.0523 9.9793 50.0657 50.0012 50.94 52.45 49.45 1152.875 52.300 49.772 5.0509 4.9674 10.0613 9.9648 50.0727 49.9849 52.00 51.80 49.68 1252.576 52.465 49.843 5.0489 4.9654 10.0689 9.9687 50.0581 50.0065 51.71 51.94 49.79 1351.854 52.052 50.076 5.0430 4.9752 10.0530 9.9781

6、 50.0590 49.9985 51.16 51.66 50.02 1452.687 51.743 49.800 5.0509 4.9774 10.0467 9.9829 50.0636 49.9861 51.92 51.41 49.72 panel2151.318 51.492 48.452 5.0456 4.9799 10.0445 9.9748 50.0554 49.9870 50.65 51.13 48.39 252.047 57.094 48.221 5.0406 4.9802 10.0529 9.9768 50.0533 49.9811 51.42 56.66 48.15 351

7、.045 51.482 47.965 5.0403 4.9789 10.0449 9.9773 50.0509 49.9824 50.42 51.14 47.90 452.333 51.434 48.158 5.0407 4.9782 10.0509 9.9795 50.0525 49.9915 51.68 51.07 48.10 551.325 51.705 48.430 5.0471 4.9786 10.0520 9.9762 50.0529 49.9805 50.63 51.32 48.36 652.974 51.233 48.362 5.0421 4.9766 10.0469 9.97

8、51 50.0520 49.9930 52.29 50.87 48.30 752.744 52.097 48.624 5.0500 4.9797 10.0445 9.9764 50.0545 49.9899 52.01 51.74 48.56 851.567 50.020 48.942 5.0432 4.9772 10.0465 9.9752 50.0556 49.9863 50.89 49.67 48.87 950.430 50.629 48.835 5.0416 4.9787 10.0551 9.9770 50.0550 49.9800 49.80 50.24 48.76 1051.508

9、 50.765 48.675 5.0413 4.9734 10.0478 9.9759 50.0518 49.9786 50.81 50.40 48.60 1151.278 50.561 48.752 5.0439 4.9744 10.0485 9.9764 50.0559 49.9925 50.57 50.20 48.69 1250.871 50.837 48.980 5.0422 4.9755 10.0486 9.9763 50.0553 49.9851 50.20 50.47 48.91 1351.737 50.994 49.192 5.0434 4.9740 10.0485 9.977

10、7 50.0562 49.9956 51.03 50.63 49.13 1450.477 50.164 49.236 5.0469 4.9772 10.0435 9.9761 50.0553 49.9861 49.78 49.83 49.17 Note: 红字部分电阻值异常实验结果实验结果0.5、1、5cm方阻的方阻率平均值分别为51.20、51.25、48.78。从图中能看出0.5和1cm方阻率整体偏上限；5cm的方阻率偏下限，分布上呈现异常。61. The sheet resistances after SES are shown in the table. It is very clos

11、e to spec from the suppler.2. Other test items are on going.No.SupplierSpec. /Resistor size(Length Width)Sheet resistanceAverage /MAX /MIN /RStdev3stdev/Aver (Aver-Spec)/SpecSample size1TCR50.005%5mm 5mm51.19853.17949.7803.3990.7874.61%2.40%28210mm 10mm51.24656.66249.6656.9971.2657.41%2.49%28350mm 5

12、0mm48.77650.01547.8932.1220.6644.08%-2.45%282014-12-23编号SES后电阻值（）棕化后电阻值（）(棕化后-SES后)/SES后panelUnit号0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmpanel1151.73850.87248.35852.03951.0848.7850.58%0.41%0.88%251.10850.85248.39551.49851.11648.8820.76%0.52%1.01%351.85750.97748.08752.12151.18548.6720.51%0.41%1.22%452.7035

13、1.68247.9652.95651.96448.270.48%0.55%0.65%552.02351.92548.48552.34552.15548.7660.62%0.44%0.58%653.16351.64648.2553.4851.91548.5290.60%0.52%0.58%752.02251.20848.53852.4251.44448.8820.77%0.46%0.71%852.73752.20149.8653.00452.46350.2850.51%0.50%0.85%952.05452.04249.93352.32452.28950.5590.52%0.47%1.25%10

14、51.70252.83149.51752.08152.47449.8150.73%-0.68%0.60%1152.87552.349.77253.17552.59150.3310.57%0.56%1.12%1252.57652.46549.84352.86752.80750.3120.55%0.65%0.94%1351.85452.05250.07652.31452.30950.510.89%0.49%0.87%1452.68751.74349.853.01952.10250.4780.63%0.69%1.36%panel2151.31851.49248.45251.89151.92849.1

15、471.12%0.85%1.43%252.04757.09448.22152.3958.3349.0770.66%2.16%1.78%351.04551.48247.96551.31451.72248.2830.53%0.47%0.66%452.33351.43448.15852.59651.67748.4220.50%0.47%0.55%551.32551.70548.4351.59751.97248.6680.53%0.52%0.49%652.97451.23348.36253.27351.46748.7180.56%0.46%0.74%752.74452.09748.62453.0055

16、2.3749.9150.49%0.52%2.66%851.56750.0248.94252.15750.33449.5611.14%0.63%1.26%950.4350.62948.83550.66650.85849.2390.47%0.45%0.83%1051.50850.76548.67551.83551.04149.0950.63%0.54%0.86%1151.27850.56148.75251.55851.05549.0790.55%0.98%0.67%1250.87150.83748.9851.1951.06649.2270.63%0.45%0.50%1351.73750.99449

17、.19251.99251.22949.5910.49%0.46%0.81%1450.47750.16449.23650.72350.6449.7330.49%0.95%1.01%Aver0.63%0.57%0.96%Max1.14%2.16%2.66%Min0.47%-0.68%0.49%实验结果实验结果Note：3号棕化线实验结果实验结果棕化后电阻的平均改变率在1%以内，优于Ohmega 50方阻的9.71%和10.11改变量（数据来源“存放时间对电阻的影响”， micro-etching 分别为1.6m和2.0m ）。SES后棕化后0.5cm1cm5cm0.5cm1cm5cmPp1.050

18、.661.261.120.591.15Ppk0.550.330.640.130.140.84电阻值改变量(棕化后-SES后)/SES后0.5cm1cm5cmAver0.63%0.57%0.96%Max1.14%2.16%2.66%Min0.47%-0.68%0.49%TOC 50/TreatmentBatch 1Batch 2AvgAfter alkaline etching51.58 51.61 50.83 50.85 Brown oxide with 1.6um micro-etching54.57 54.58 57.75 57.81 Brown oxide with 2.0um micr

19、o-etching55.64 55.65 57.11 57.15 Changes in micro-etching 1.6m5.78%5.77%13.60% 13.69%9.71%Changes in micro-etching 2.0m7.87%7.84%12.34% 12.39% 10.11%Ticer 50/ 2014-12-23实验目的l测试Ticer埋阻材料抗ESD性能测试图形背景背景当前状态l4块ESD测试板，两块进行了SES，两块电镀后未DES，留用。测试了两块进行SES板的阻值和电阻尺寸。部分Unit在SES前因干膜粘附不牢，导致电阻两端的铜面在做SES时被渗蚀，这部分电阻舍去

20、，未进行测量。测量Set内第10行Unit内上部电阻，如有下部电阻被测量会特地标示出。测试板的Set（左图）图形和其内的Unit（上图）图形；其中Set内有20行11列个Unit，每个Unit有上下两个相同的电阻设计。A1A2A3A4B1B2B3B4C1C2C3C4D1D2D3D4E1E2E3E4F1F2F3F4G1G2G3G4测试板Panel及其内部各Set编号Panel 1 & 2 电阻长宽测量值电阻长宽测量值Panel 1Panel 2WidthLengthNote: 两行横坐标数值中上一行为电阻设计长度，下一行为电阻设计宽度。Panel 1 vs. 2 电阻实际尺寸与设计值差异

21、电阻实际尺寸与设计值差异Note:1. 两行横坐标数值中上一行为电阻设计长度，下一行为电阻设计宽度； 2. D-value为测量值与设计值的差值。1. 电阻宽度由DES决定，Panel 1蚀刻速度为2.8m/min，Panel 2为2.65m/min。从左上图可知，蚀刻后电阻的宽度与设计值之差Panel 1更小，波动也更小。一般的，蚀刻线速度越慢，蚀刻量越多，宽度越窄，即更接近设计值。左上图结果与这一结论相反，需要结合其他变量再分析。2. 电阻的长度由SES决定，Panel 1蚀刻速度为3.6m/min，Panel 2为4m/min。从左下图可知，蚀刻后电阻的长度与设计值之差Panel 1更小

22、，波动也更小。 3. 电阻制造尺寸补偿为宽度增加38m，长度减少50m。从左边的两张图能发现，不同宽度和长度设计对补偿量要求差异较大，在保持当前时刻量下可以依据左图进行差异化补偿。Panel 1 vs. 2 方阻率差异方阻率差异Note: 两行横坐标数值中上一行为电阻设计长度，下一行为电阻设计宽度。1. 方阻率随着设计电阻宽度的增加越接近标准值，相同的电阻宽度设计，长度越长方阻率越接近标准值。2. 按照电阻的面积排列（左下图），方阻率基本是随面积的增加而更接近标准值。LCSM电阻尺寸测量电阻尺寸测量A3-2A3-1Note: 两行横坐标数值中上一行为电阻设计长度，下一行为电阻设计宽度。LCSM

23、尺寸测量宽度上比线宽测量仪要宽，长度上要短，但是计算所得的方阻值结果相差不大，整体趋势相同。2015-1-7实验结果实验结果层压后电阻的改变量相比于棕化后少于0.3% 。编号SES后电阻值（）棕化后电阻值（）层压后电阻值（）(层压后-SES后)/SES后(层压后-棕化后)/棕化后panelUnit号0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmpanel1151.73850.87248.35852.03951.0848.78551.91251.23448.8590.34%0.71%1.04%-0.24%0.30%0.15%251.

24、10850.85248.39551.49851.11648.88251.39651.00348.8760.56%0.30%0.99%-0.20%-0.22%-0.01%351.85750.97748.08752.12151.18548.67251.95651.07948.6740.19%0.20%1.22%-0.32%-0.21%0.00%452.70351.68247.9652.95651.96448.2752.79951.84848.2870.18%0.32%0.68%-0.30%-0.22%0.04%552.02351.92548.48552.34552.15548.76652.2535

25、2.07648.8520.44%0.29%0.76%-0.18%-0.15%0.18%653.16351.64648.2553.4851.91548.52953.33151.86348.540.32%0.42%0.60%-0.28%-0.10%0.02%752.02251.20848.53852.4251.44448.88252.37951.49749.2480.69%0.56%1.46%-0.08%0.10%0.75%852.73752.20149.8653.00452.46350.28552.90352.62250.630.31%0.81%1.54%-0.19%0.30%0.69%952.

26、05452.04249.93352.32452.28950.55952.16652.20450.6350.22%0.31%1.41%-0.30%-0.16%0.15%1051.70252.83149.51752.08152.47449.81551.95352.40549.7780.49%-0.81%0.53%-0.25%-0.13%-0.07%1152.87552.349.77253.17552.59150.33153.27352.47550.570.75%0.33%1.60%0.18%-0.22%0.47%1252.57652.46549.84352.86752.80750.31252.71

27、252.80450.3260.26%0.65%0.97%-0.29%-0.01%0.03%1351.85452.05250.07652.31452.30950.5152.24452.24150.5260.75%0.36%0.90%-0.13%-0.13%0.03%1452.68751.74349.853.01952.10250.47852.94352.10250.8720.49%0.69%2.15%-0.14%0.00%0.78%panel2151.31851.49248.45251.89151.92849.14751.7351.89249.5070.80%0.78%2.18%-0.31%-0

28、.07%0.73%252.04757.09448.22152.3958.3349.07752.25260.14149.2910.39%5.34%2.22%-0.26%3.10%0.44%351.04551.48247.96551.31451.72248.28351.14351.62148.3120.19%0.27%0.72%-0.33%-0.20%0.06%452.33351.43448.15852.59651.67748.42252.49151.58648.3950.30%0.30%0.49%-0.20%-0.18%-0.06%551.32551.70548.4351.59751.97248

29、.66851.45551.85248.7010.25%0.28%0.56%-0.28%-0.23%0.07%652.97451.23348.36253.27351.46748.71853.20451.34948.7780.43%0.23%0.86%-0.13%-0.23%0.12%752.74452.09748.62453.00552.3749.91552.86253.08250.3840.22%1.89%3.62%-0.27%1.36%0.94%851.56750.0248.94252.15750.33449.56152.13650.34249.91.10%0.64%1.96%-0.04%0

30、.02%0.68%950.4350.62948.83550.66650.85849.23950.48750.75249.4860.11%0.24%1.33%-0.35%-0.21%0.50%1051.50850.76548.67551.83551.04149.09551.70551.18749.2120.38%0.83%1.10%-0.25%0.29%0.24%1151.27850.56148.75251.55851.05549.07951.4250.99949.0920.28%0.87%0.70%-0.27%-0.11%0.03%1250.87150.83748.9851.1951.0664

31、9.22751.06150.95449.2420.37%0.23%0.53%-0.25%-0.22%0.03%1351.73750.99449.19251.99251.22949.59151.951.19149.6890.32%0.39%1.01%-0.18%-0.07%0.20%1450.47750.16449.23650.72350.6449.73350.62950.8149.9170.30%1.29%1.38%-0.19%0.34%0.37%Aver0.41%0.67%1.23%-0.21%0.10%0.27%Max1.10%5.34%3.62%0.18%3.10%0.94%Min0.1

32、1%-0.81%0.49%-0.35%-0.23%-0.07%各道工序后电阻的该变量及每道工序中电阻的各道工序后电阻的该变量及每道工序中电阻的该变量该变量棕化对电阻的影响大于层压，SES后各工序累计的电阻改变量能控制在1%左右。方阻越大，电阻变化越明显。2015-1-8实验背景实验背景第一批2 Panel ESD测试板的方阻率随着电阻设计尺寸变化有着上述图表的线性特征。为了更全面描绘方阻率的变化趋势，增加了更大的电阻设计。该设计计划应用在剩余的一张未进行DES的ESD测试板上。目前试板正在制作中。关于这一现象，Ticer方面还未作出解释。测试图形设计测试图形设计工艺电阻完成宽度(um)长度/宽

33、度电阻长度(um)Layer X线宽(um)Du X电阻宽度(um)Du X电阻长度(um)Dux相对于Layer X电阻线左右位置Layer X电阻线与周围铜皮间距(um)DES+SES4002800438478750居中5560021200638678115080021600838878155010002200010381078195020002400020382078395040060080010002000增加的设计安置在Set板边空隙处，共增加5种电阻的宽度设计。2015-1-19测量结果测量结果Panel 1Resistor after IR-reflow(6 times, )Re

34、sistor change(compare to after lamination)Panel 2Resistor after solder float test(6 times, )Resistor change(compare to after lamination)0.5cm1cm5cm0.5cm1cm5cm51.70551.86649.449-0.05%-0.05%-0.12%51.73851.13348.653-0.34%-0.20%-0.42%52.23260.06849.199-0.04%-0.12%-0.19%51.21650.848.646-0.35%-0.40%-0.47%

35、51.12551.60448.248-0.04%-0.03%-0.13%51.94450.93848.515-0.02%-0.28%-0.33%52.45551.54648.328-0.07%-0.08%-0.14%52.69351.87648.245-0.20%0.05%-0.09%51.42751.80848.636-0.05%-0.08%-0.13%52.6152.18148.6540.68%0.20%-0.41%53.15651.29848.696-0.09%-0.10%-0.17%53.52452.34848.9420.36%0.94%0.83%52.83353.01750.3-0.

36、05%-0.12%-0.17%52.18851.65549.127-0.36%0.31%-0.25%52.1150.30249.842-0.05%-0.08%-0.12%53.06852.54450.630.31%-0.15%0.00%50.44550.71349.414-0.08%-0.08%-0.15%52.1251.99450.603-0.09%-0.40%-0.06%51.6851.15349.158-0.05%-0.07%-0.11%51.98452.78649.7530.06%0.73%-0.05%51.38250.94949.026-0.07%-0.10%-0.13%53.296

37、52.41950.6420.04%-0.11%0.14%51.03550.90449.155-0.05%-0.10%-0.18%52.57552.74350.243-0.26%-0.12%-0.16%51.84551.12449.582-0.11%-0.13%-0.22%52.45652.24250.9370.41%0.00%0.81%50.58650.74949.845-0.08%-0.12%-0.14%52.92151.98950.646-0.04%-0.22%-0.44%Avg.0.01%0.03%-0.06%Avg.-0.06%-0.09%-0.15%热冲击对电阻值得的影响很小，最大也

38、只有-0.15%，可以认为Ticer埋阻材料耐热冲击性能没有问题。Test condition：IR-reflow：peak240 +/-5、5-25sec, 6cycleSolder float test：288+/-5、10sec, 6cycle2015-1-19测量结果测量结果Note: 1.储存条件为PD会议室2.阻焊前处理线为5#长宽比为4的电阻设计在储存和阻焊前处理下稳定性要明显好与比值为2的设计。电阻设计宽度100m时，建议使用长宽比为4或更大的设计， 宽度100m时，长宽比对电阻稳定性的影响不大。DesignW(m)507575100100150150200200150L(m)

39、200150300200400300600400800300R()200100200100200100200100200100CodeConditionColumn No.234567891011Aafter SESR()200.7 121.7 213.3 120.9 209.2 114.1 207.9 109.6 204.9 114.8 Bstore 7 days after SESR()199.6 117.8 211.8 119.3 209.3 114.2 207.6 110.0 205.2 115.0 (B-A)/A%-0.53%-3.14% -0.72% -1.29% 0.06% 0.

40、06% -0.14% 0.34% 0.18% 0.12%Cafter SM per-treatmentR()194.1 110.6 211.7 115.4 210.2 113.8 208.1 110.3 205.7 114.1 (C-B)/B%-2.76%-6.15% -0.04% -3.30% 0.44% -0.32% 0.23%0.27% 0.21% -0.78%2015-1-27测量结果测量结果DesignW(m)50507575100100150150200200L(m)100200150300200400300600400800阻焊前处理后R（）106.32 200.30 119.6

41、8 214.40 121.17 208.33 114.54 207.62 110.00 203.79 电测试结果（）79.88 195.97 114.83 205.99 117.69 206.35 114.07 208.83 110.63 204.57 电测试结果-阻焊前处理后R-26.44 -4.34 -4.85 -8.41 -3.48 -1.98 -0.47 1.21 0.63 0.78 50/100的长宽设计收阻焊制作过程影响较大，其它设计影响在5%内。建议ESD测试舍去50/100设计方案的测试，其它设计使用电测试结果作为ESD测试的初始电阻值。2015-1-29Unit内电阻差异内电

42、阻差异R1R2set编号 unit编号设计电阻宽W（m）设计电阻长L（m）实测电阻值（）实测电阻宽W（m）实测电阻长L（m）实测L/W实测方阻率（）70000192100200R1106.2115.45 197.50 1.71 62.08 R2141.1115.74 195.58 1.69 83.50 70001127100400R1241.5115.45 390.63 3.38 71.37 R2208.3120.09 390.21 3.25 64.11 单个unit内两个电阻相差极大部分样品。电阻值为电测试结果，长宽测量值为褪去阻焊后LCSM测量结果。R1R2192127电阻经电阻经ESD冲

43、击后改变情况冲击后改变情况测试前测试后变化率SetWL设计号电压R1R2R1R2R1R2700005010010.5KV69.9471.5969.671.19-0.49%-0.56%700005020020.5KV197.9208.5164177.3-17.13%-14.96%700005020020.5KV229191.7184.3175.1-19.52%-8.66%700007515030.5KV144.5105.5107.1991.66-25.82%-13.12%700017530040.5KV210.4219.6172.7183.9-17.92%-16.26%7000110020050

44、.5KV130.3106.5109.43105.7-16.02%-0.75%7000110020050.5KV118.5133.9103.67110.1-12.51%-17.77%700005010010.8KV102.871.6473.3771.19-28.63%-0.63%700005010010.8KV109.8113.400FailFail700005020020.8KV207.3154.40152.7Fail-1.10%700007515030.8KV110.3119.297.4493.77-11.66%-21.33%700007515030.8KV112.2119.986.9195

45、.46-22.54%-20.38%700017530040.8KV211.2202.5181.7181.5-13.97%-10.37%7000110020050.8KV98.76117.598.93100.990.17%-14.05%700005010011.0KV68.7172.7300FailFail7000110020051.0KV98.76119.998.1494.82-0.63%-20.92%7000110040061.0KV220.1225.1208.1211.8-5.45%-5.91%7000015030071.0KV108.6116.6106.4100.36-2.03%-13.

46、93%700005010011.2KV77.7471.300FailFail700005010011.2KV106.574.7400FailFail700005010011.2KV77.67107.400FailFail7000110020051.2KV140.4123.1112.799.9-19.73%-18.85%7000110040061.2KV213.1209.5188206.9-11.78%-1.24%7000015030071.2KV106100.296.0295.04-9.42%-5.15%7000015060081.2KV216220.1200.2204.8-7.31%-6.9

47、5%7000110040061.5KV189.3197.4179.90-4.97%Fail7000015030071.5KV114.6112.798.0296.85-14.47%-14.06%7000015060081.5KV210.7196.2197.7177.5-6.17%-9.53%7000020040091.5KV108.2100.998.66100.8-8.82%-0.10%7000015060081.8KV213.6202191.9183.8-10.16%-9.01%7000020040091.8KV107.2117.10101.7Fail-13.15%7000020040091.

48、8KV108.2100.988.6790.85-18.05%-9.96%7000020040092.0KV117.3101.2105.399.33-10.23%-1.85%70000200800102.0KV198.4219.6188.75209.1-4.86%-4.78%7000020040092.2KV113.4102.199.5395.32-12.23%-6.64%70000200800102.2KV210.2203.9194.9194.8-7.28%-4.46%70000200800102.5KV212.8194.80193.1Fail-0.87%经过ESD冲击后，电阻值会有一定得减少

49、，但是减少量与ESD的电压无关。当ESD电压高到一定程度后会使电阻失效（断路）。电阻经电阻经ESD冲击后改变情况冲击后改变情况ESD后电阻失效未进行ESDESD后电阻未失效1-10-9-R11-10-10-R11-9-10-R22015-2-2SES后电阻值制程后电阻值制程能力能力50/100150/300100/20075/150200/40050/200150/600100/40075/300200/800数据来源：SES后2panel中部分set的第10行R1电阻值。L/W=2时，上下限为90和110；L/W=4时，上下限为180和220。SES后方阻率制后方阻率制程能力程能力50/10

50、0150/300100/20075/150200/40050/200150/600100/40075/300200/800数据来源：SES后2panel中部分set的第10行R1电阻值及其尺寸。方阻率上下限为47.5和52.5。电测试所得电阻电测试所得电阻值制程能力值制程能力50/100150/300100/20075/150200/40050/200150/600100/40075/300200/800数据来源：所测set为之前SES后测量电阻和尺寸的取样set，测量了整个set内的电阻。L/W=2时，上下限为90和110；L/W=4时，上下限为180和220。电测试所得电阻电测试所得电阻值

51、单个值单个unit内电内电阻差异制程能力阻差异制程能力50/100150/300100/20075/150200/40050/200150/600100/40075/300200/800数据来源：所测set为之前SES后测量电阻和尺寸的取样set，测量了整个set内的电阻。计算unit内电阻差异（R2-R1）/R1）。上下限为-20%和20%。电测试所得电阻值电测试所得电阻值panel内分布内分布Panel 1数据来源：所测set为之前SES后测量电阻和尺寸的取样set，测量了整个set内的电阻。电测试所得电阻值电测试所得电阻值panel内分布内分布Panel 2数据来源：所测set为之前SES后测量电阻和尺寸的取样set，测量了整个set内的电阻。2015-2-3测试结果测试结果结论：1. 17的设计均不能通过0.5KV的试验，随着电阻面积的增加，ESD耐受电压也上升。2. 未能通过0.5KV电压测试的设计按照电阻面积从低到高排序，能看到其0.5KV电压下电阻的失效率