付俊兴-开题报告

1、微结构耦合薄膜的制备及摩擦学微结构耦合薄膜的制备及摩擦学特性研究特性研究姓 名： 付俊兴指导老师： 周飞教授日 期： 2011.12.8一、选题依据一、选题依据角度尺寸形貌方向高温熔融精度低曲面应用有限高清洁度和工艺技术要求环境污染稳定性差Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD Jiong-Shiun H/Vacuum(2007)二、国内外研究现状二、国内外研究现状图1 不同气源比对DLC膜硬度和弹性模量影响图2 不同

2、气源比对DLC膜表面粗糙度影响图3 不同掺杂DLC膜抗磨损能力Characteristics and tribological properties in waterof Si-DLC coatings Xingyang Wu,Ma/Diamond and Related Materials/2007图4 不同掺杂DLC膜摩擦系数图5 四种表面镀覆DLC的微结构(a)垂直;(b)平行;(c)微坑(d)凸起Micro-texture at the coated tool face for high performance cutting Toshiyuki Obikawa et al. / In

3、ternational Journal of Machine Tools & Manufacture (2011)图6 面积比对摩擦系数的影响Improved Tribological Behavior of DLC Films Under WaterLubrication by Surface TexturingQi Ding et al. / Tribol Lett (2011)图7 磨损率随面积比变化关系图Tribological behavior of patterned PVD TiN coatings on M2 steel H.Y. Ma et al. / Tribol

4、Lett (2004)图8 掩膜板设计简图Patterned PVD TiN spot coatings on M2 steel Tribological behaviors under different sliding M. Hua et al. / WEAR (2006)图9 对磨销磨损率随滑移速度关系图10 对磨盘磨损率随滑移速度关系三、课题研究方案三、课题研究方案1 1、研究目标与内容、研究目标与内容本研究致力于： 1.确定薄膜制备的最优工艺参数及各参数对薄膜特性的影响。 2.揭示不同薄膜种类、沉积参数和试验环境下摩擦副摩擦磨损特性。 3.优化微结构耦合薄膜制备工艺。 4.探索微结构

5、耦合薄膜的水润滑磨损机制。2 2、具体方案、具体方案基材准备基材准备薄膜制备薄膜制备摩擦实验摩擦实验拉拉曼曼光光谱谱实实验验摩擦摩擦表面表面光学光学显微显微镜镜X射射线线能能谱谱薄薄膜膜厚厚度度测测试试环境环境载荷载荷速度速度摩擦摩擦表面表面扫面扫面电镜电镜分析分析摩擦摩擦表面表面三维三维形貌形貌分析分析实验结果处理实验结果处理论文论文写作写作磨屑磨屑拉曼拉曼及光及光电子电子能谱能谱掩膜板制备掩膜板制备种类种类气源气源偏压偏压膜厚膜厚试样前处理试样前处理薄膜制备与性能表征薄膜制备与性能表征耐腐蚀耐腐蚀试验试验表表面面粗粗糙糙度度测测试试摩擦摩擦表面表面光学光学显微显微镜镜薄薄膜膜物物相相分分析

6、析薄薄膜膜硬硬度度测测试试阻抗分析阻抗分析极化分析极化分析摩擦摩擦表面表面扫面扫面电镜电镜分析分析摩擦摩擦表面表面三维三维形貌形貌分析分析试验结果后处理试验结果后处理TaNTa-DLCCr-DLC摩擦摩擦试验试验抛光抛光清洗清洗膜膜面面结结合合力力测测试试四、研究基础四、研究基础1.已具备的实验条件： 样片抛光机、超声波清洗机、金相显微镜、摩擦磨损试验机、磁控溅射镀膜设备等。 教研室往届工作下已经优化的织构参数和DLC、TiN等制备参数经验。2.实验存在的困难： 磁控溅射镀膜工艺参数的选定，通过阅读文献和实践优化改进。 相关微结构耦合薄膜制备和摩擦实验研究数据较少，实验结果参考存在一定困难，需

7、要在实验过程中主动探索和总结经验。2012.2前：基材准备、掩膜板设计制作2012.2-8：薄膜制备与参数探索、相关检测实验（膜厚、纳米 硬度、三维形貌、SEM 、XRD、EDS等）2012.5-8：水润滑实验、相关检测实验（纳米硬度、三维形 貌、SEM 、XRD、EDS等）2012.9-10：实验总结，数据处理。2012.11-12：完善实验数据，书写论文五、研究计划与进度五、研究计划与进度六、参考文献六、参考文献1 温诗铸,黄平.摩擦学原理(第3版)M.北京:清华大学出版社, 2008.2 Ma Yuping,Chen Ming,Xiang Daohui.FABRICATION OF DL

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14、s on their wear performanceJ. Diamond & Related Materials,2010.16 C. Chouquet,J. Gavillet,C. Ducros. Effect of DLC surface texturing on friction and wear during lubricated slidingJ. Materials Chemistry and Physics,2010.17 王晓楠,周 飞,彭约钧等.微坑型表面微结构对钛合金水润滑摩擦学特性的影响J. 中国科技论文在线,2011.18 Hing-Yin MA,DONG G

15、uangneng,LI Jian. Wet and Dry Tribological Behaviors of Circular Islandic Protrusion Patterns on M2 Steel Discs under Spinning ConditionJ. Journal of Wuhan University of Technology-Mater,2008.19 Guang neng Dong, M.Hua,Jian Li. Tribological behaviors of spot-textured TiN coatings on M2 high-speed steel under boundary lubricated conditionsJ. Materials,2007.20 H.Y.Tam, M.Hua, H.Y.Ma. Patterned PVD TiN spot coatings on M2 steel: Tribological behaviors under different sliding speedsJ.WEAR,2006.21 M.Hua, H.Y.Ma,C.K.Mok. Tribological