Ion milling introduction

1、Ion milling profile YH tan June.21th, 2016 22021/7/1 7 What is ion milling1 ion milling tool2 Key parts - grid3 Key parts - PBN4 Content 32021/7/1 7 Ion milling is a kind of dry etch , it drive elementary particles accelerated to strike the surface of substrate exposed , so the graph designed is scr

2、ibed on the surface of substrate masked , this is ion milling , it is a kind of physical etch . What is ion milling1 42021/7/1 7 Veeco company is an American company , it has developed some equipments , such as ion milling , DLC , FCVA and some inspection tool . As below I will share some experience

3、 on Veeco ion milling tool with everyone . ion milling tool sketch2 52021/7/1 7 Outline of tool configuration : tool comprise : section 1、showerhead section 2、RF system section 3、grid section 4、fixture system section 5、PBN section 6、pumping system ion milling tool sketch2 62021/7/1 7 ion milling too

4、l sketch2 This sketch is on Veeco ion milling tool . Its process chamber is a vacuum vessel . The first section is showerhead . Process gas argon flow into chamber through showerhead . The second section is RF system , include coil and generator 、match box etc. the coil is connected to RF generator

5、, so the space is high frequency electric field space.Plasma is ignited and argon ion is generated . The third section is grid . It has three poles made hole regularly . Grid accelerate argon ion and electron will be absorbed . 72021/7/1 7 ion milling tool sketch2 Here the space under grid is full o

6、f beam of argon ion accelerated , these elementary particles have gained enough energy , they will strike the surface of substrate exposed , the graph designed will be scribed on the surface of substrate masked . Next section is fixture . It fixes substrate and cools it down in process . It can also

7、 load and unload substrate . And the fixture can be tilted to any angle to improve etch efficiency . The last section is pumping system . It comprises turbo pump ,and dry pump and so on . It is connected to facility exhaust system finally . 82021/7/1 7 Key parts - grid3 Grid is a key parts . It has

8、three poles made holes regularly . The first pole is connected to positive power ; the second one is connected to negative power ; the third one is grounded . The space between the first and the second pole is a direct electric field space . The DC field may accelerate the argon ion , and at the sam

9、e time , the electron will be absorbed . In this space argon ion will gain energy enough to strike substrate to implement etch . Uniformity in order to improve etch uniformity the holes diameter on the poles is different , and diameter size is enlarged from center to margin of the pole, so stream of

10、 argon ion is uniform . 92021/7/1 7 Key parts - PBN4 PBN is another key parts . Its composition comprise PBN body , hot hollow cathode and plate . Hot hollow cathode is connected to positive power , glow discharge will be produced inside PBN when we start process at first. PBN body is a tube with hollow wall . When hot cathode glow discharge is produced in PBN , the body is very hot , and the cooling water flow through bodys hollow wall so that PBN body is cooled down . The plate with a center hole is