利用晶体生长模拟软件FEMAG进行蓝宝石晶体生长模拟的方法[技术专攻]

1、Page 1 CONFIDENTIAL 晶体生长模拟FEMAG 蓝宝石生长模拟方法 FEMAGSoft S.A., Belgium A SPIN-OFF company from Universite catholique de Louvain Belgium Professor F. Dupret 专业课 Page 2 CONFIDENTIAL General introduction Sapphire Growth Content 专业课 Page 3 CONFIDENTIAL Introduction For more than 25 years, FEMAGSoft develops

2、simulation software dedicated to the research and development of optimal crystal growth processes. 1984 First research on Germanium growth in University of Louvain. Prof. Franois Dupret 1989 First research on Silicon growth in University of Louvain. 1992 First collaborations with major IC companies.

3、 Development of defect-free silicon wafer production. Today, more than 35 patents are referencing FEMAG Software 2003 FEMAGSoft S.A., spin-off from University of Louvain. 2006 Collaboratrion with major Solar companies. Development of low-cost and low-oxygen content processes. 2009Large investment fo

4、r a new software framework 2010 Release of Software application for Sapphire ingot production. 专业课 Page 4 CONFIDENTIAL Czochralski process 专业课 Page 5 CONFIDENTIAL Directional Solidification System 专业课 Page 6 CONFIDENTIAL Floating Zone Process 专业课 Page 7 CONFIDENTIAL Sapphire Growth by CZ and kyropou

5、los 专业课 Page 8 CONFIDENTIAL Sapphire growth by HEM 专业课 Page 9 CONFIDENTIAL What are FEMAG software? Process-dedicated simulation tools, adapted to your own processes and able to solve your problems. Global All the furnace components are considered. All the heat transfer mode are considered (radiatio

6、n transfer, heat conduction, melt and gas convection) Induction and ohmic heating Time Dependent 专业课 Page 10 CONFIDENTIAL Process-dedicated tools FEMAG-CZ: Czochralski FEMAG-FZ: Floating Zone FEMAG-VB: Vertical Bridgman FEMAG-CZ/OX : Czochralski for Sapphire FEMAG-KY: Kyropoulos FEMAG-DS: Directiona

7、l Solidification FEMAG-HEM: Heat Exchange Method Gain of time. Process mastering Accurate and right to the point 专业课 Page 11 CONFIDENTIAL Platform oriented FRAMEWORK : FEMAG3 RADIATIONCONVECTIONMESHGEOMETRYCONDUCTION FEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOS FEMAG3 NEW 2011 Very accurate : Finite El

8、ement and Spectral methods Very efficient : 3D simulations in less 1 day Very flexible : Very fast development of new demand 专业课 Page 12 CONFIDENTIAL Global simulations Czochralski Furnace for Silicon HEM Furnace for Sapphire No simplification of the process conditions 专业课 Page 13 CONFIDENTIAL Dynam

9、ic simulations A dynamic simulation tool Complete process simulation Dynamic effect of interface deformation Varying processing conditions 专业课 Page 14 CONFIDENTIAL Sapphire Crystal Growth Simulation 专业课 Page 15 CONFIDENTIAL Sapphire Simulation Objective The market of Sapphire is experiencing a very

10、fast growth rate and become very competitive Many companies invest in simulation software in order to reinforce their positions HEM, Czochralski and Kyropoulos process require optimization and a good understanding Strong need for efficient numerical tools. Radiation effects in the participating crys

11、tal and melt is a complex problem. 专业课 Page 16 CONFIDENTIAL Sapphire Simulation Objective Our goal is to provide accurate simulation tool, able to take all the process features into account and to optimize the growth process in terms of the resulting crystal quality. 专业课 Page 17 CONFIDENTIAL Sapphir

12、e Simulation Objective KYROPULOS CZOCHRALSKI HEM 专业课 Page 18 CONFIDENTIAL FEMAG-CZ/OX FEMAG-CZ/OX Software to simulate Sapphire Growth by CZ and Kyropoulos Specifications: -Temperature in the sapphire and in all furnace components by solving the global heat transfer in the furnace (radiation, conduc

13、tion , convection). -Flow velocity in the sapphire liquid phase. -Crystallization front shape -Ohmic and Induction Heating -Advanced radiation heat transfer in the sapphire -Gas convection -Anisotropic thermal stresses in the crystal 专业课 Page 19 CONFIDENTIAL Temperature in the Hot Zone FEMAG-CZ/OX C

14、Z process with Induction Heating system Induction Heating system 专业课 Page 20 CONFIDENTIAL Temperature in the crystal and in the melt FEMAG-CZ/OX CZ process with Induction Heating system 专业课 Page 21 CONFIDENTIAL Melt velocity amplitude FEMAG-CZ/OX CZ process with Induction Heating system The interfac

15、e shape and position is a result of the simulation 专业课 Page 22 FEMAGSoft 2012 Temperature field in the melt Stream function FEMAG-CZ/OX / CZ and KYROPOULOS process 专业课 Page 23 FEMAGSoft 2012 Melt meshes BLM (boundary layer mesh) Coarse mesh BLM mesh is very important to simulate the interface 专业课 Pa

16、ge 24 FEMAGSoft 2012 Local temperature field Result using coarse meshResult using BLM mesh BLM mesh enables a better prediction of the crystalisation interface 专业课 Page 25 FEMAGSoft 2012Velocity field Result using coarse mesh Result using BLM mesh 专业课 Page 26 CONFIDENTIAL FEMAG-HEM FEMAG-HEM Softwar

17、e to simulate Sapphire Growth by Heat Exchange Method Specifications: -Temperature in the sapphire and in all furnace components by solving the global heat transfer in the furnace (radiation, conduction , convection). -Flow velocity in the sapphire liquid phase. -Crystallization front shape -Advance

18、d radiation heat transfer in the sapphire -Gas convection -Anisotropic thermal stresses in the crystal 专业课 Page 27 CONFIDENTIAL FEMAG-HEM FEMAGSoft CAD tool to introduce the geometry 专业课 Page 28 CONFIDENTIAL FEMAG-HEM Global Temperature in the furnace 专业课 Page 29 CONFIDENTIAL FEMAG-HEM Melt convecti

19、on Detail of melt convection 专业课 Page 30 CONFIDENTIAL FEMAG-HEM Temperature distribution in the crystal and melt for different times Velocity amplitude distribution in the melt for different times 专业课 Page 31 CONFIDENTIAL Anisotropic Thermal Stress (HEM Sapphire A-axis) FEMAG-HEM quasi-steady simula

20、tion of the growth of a Sapphire crystal: 3D von Mises invariant isovalues (Pa) FEMAG-HEM Example 专业课 Page 32 CONFIDENTIAL Anisotropic Thermal Stress (HEM Sapphire C-axis) FEMAG-HEM quasi-steady simulation of the growth of a Sapphire crystal: 3D von Mises invariant isovalues (Pa) FEMAG-HEM Example 专业课 Page 33