集成平面光波导器件

浙江大学光电信息系1集成平面光波导器件

主讲教师：戴道锌

教授

Email:

dxdai@

Tel:

0571‐88206516‐215主页：/personnelCard/dxdai浙江大学光电信息系2提纲1.

课程组介绍；2.

课程简介；3.

集成平面光波导器件；浙江大学光电信息系31.

课程组介绍浙江大学光电信息系41.1.

教学组

戴道锌

Email:

dxdai@

地址:

东五教学楼光及电磁

波研究中心215房间时尧成Email:

yaocheng@地址:

东五教学楼光及电磁波研究中心113房间浙江大学光电信息系9More

information:

/dxdai/0.html浙江大学光电信息系10Publication

list浙江大学光电信息系15

15

集成光电子实验室>2000m2实验大楼（含500m2超净室）；>4000万元实验仪器设备；浙江大学光电信息系162.

课程简介浙江大学光电信息系17课程概况

2学分:

32学时理论；

秋学期共8周的课程安排；浙江大学光电信息系18教学目的与基本要求

系统、深入地开展“集成平面光波导器件”教学，使研究生对

平面光波导的理论基础、核心集成光波导器件机制原理有全

面深刻的理解；

掌握集成平面光波导器件的设计思路与方法。

鉴于集成光波导器件是当前研究热点，本课程还将结合该领

域的发展历程、最新进展,激发学生对创新研究的兴趣和热

忱，培养学生分析问题和逻辑思维能力，促进学生对学科发

展和学科方向的全局视野能力。浙江大学光电信息系191.2.3.4.5.6.7.8.9.10.11.12.13.14.15.16.主要内容及学时分配

导论：介绍课程内容、集成平面光波导器件的发展历史、现状以及展望；

平面光波导理论：模式求解与特性分析；

硅纳米线光波导；

新型耦合器件与原理I；

新型耦合器件与原理II；

阵列波导光栅器件与应用；

光学微腔原理；

光学微腔应用；

波导光栅及应用；

光子晶体波导及器件；

Plasmonic波导及器件；

文献阅读presentation；

可调谐型集成平面光波导器件及机理；

光波导调制器；

基于平面光波导器件的片上光系统与网络；

复习与答疑；浙江大学光电信息系20文献阅读‐Selected

Topics

Mode

MUXer

technology,

Graphene

on

waveguides,

On‐chip

optical

force,

Active

polymer

photonics

(e.g.,

Quantum

Dots),

Plasmonic

waveguides.

浙江大学光电信息系21教材与参考文献

教材

《微纳光子集成》

何赛灵，戴道锌.

科学出版社

参考书

《半导体导波光学器件理论及技术》，赵策洲，国防工业出版社。

Robert

G.

Hunsperger.

Integrated

Optics:

Theory

and

Technology

(Sixth

Edition),

ISBN

978‐0‐387‐89775‐2

(Online),

Springer

Link

2009.

《光集成器件》，小林功郎著，科学出版社，2002

《集成光学》，T.

塔米尔主编，科学出版社，1982浙江大学光电信息系22第1章.集成平面光波导器件导论浙江大学光电信息系23Motivation

for

integrated

photonics

Transmission

and

processing

of

signals

Laser

invented

in

1960s

stable

source

of

coherent

light；Free

space

light

transmission?

but

atmospheric

variations.

Signal

processing

various

components:

prisms,

lenses,

mirrors,

electro‐optic

modulators

and

detectors.1.

All

of

this

equipment

would

typically

occupy

a

laboratory

bench

tens

of

feet

on

a

side,

which

must

be

suspended

on

a

vibration‐proof

mount.2.

Such

a

system

is

tolerable

for

laboratory

experiments,

but

is

not

very

useful

in

practical

applications浙江大学光电信息系24Integrated

optics

/

photonics

Optical

integrated

circuits

(OIC’s)

or

Photonic

integrated

circuits

(PIC’s)

S.E.

Miller

in

1969

(/wiki/Stewart_E._Miller)The

integrated

optics

approach

to

signal

transmission

and

processing

offers

significant

advantages

in

both

performance

and

cost

when

compared

to

conventional

electrical

methods.

物美价廉浙江大学光电信息系25

Stewart

E.

MillerStewart

E.

Miller

(

09/01/1918

‐02/27/1990)

was

a

noted

American

pioneer

in

microwave

and

optical

communications.Miller

was

born

in

Milwaukee,

Wisconsin.

In

1941

he

receive

his

S.B.

and

S.M.

degrees

in

engineering

at

MIT.

He

joined

Bell

Labs

to

work

on

microwave

radar,

and

became

technical

lead

for

the

B‐29's

X‐band

(3

cm)

radar

microwave

plumbing.

After

World

War

II,

he

was

instrumental

in

AT&T's

L‐3

coaxial

cable

carrier

systems,

then

transferred

to

the

Radio

Research

Department

where

he

made

advances

in

many

millimeter‐wave

components.In

the

early

1960s,

Miller

was

the

first

to

recognize

the

potential

of

optical

communications

and

as

director

of

Guided

Wave

Research,

initiated

a

program

to

investigate

a

variety

of

periodic

lens

systems.

As

optical

fiber

was

developed

in

the

late

1960s,

he

demonstrated

its

utility,

and

also

proposed

the

combining

multiple

optical

components

on

one

semiconductor

chip.

He

became

director

of

Lightwave

Research

in

1980,

retired

in

1983,

and

then

consulted

at

Bellcore

(now

Telcordia

Technologies)

analyzing

semiconductor

lasers.Miller

held

some

80

patents

and

was

a

member

of

the

National

Academy

of

Engineering,

a

Life

Fellow

of

the

IEEE,

and

a

Fellow

of

the

American

Association

for

the

Advancement

of

Science

and

the

Optical

Society

of

America.

He

received

the

Naval

Ordnance

Development

Award

in

1945,

the

1972

IEEE

Morris

N.

LiebmannMemorial

Award,

the

1975

IEEE

W.R.G.

Baker

Prize

(with

TingyeLi

and

E.A.J.

Marcatili),

the

Franklin

Institute's

1977

Stuart

Ballantine

Medal,

and

the

1989

John

Tyndall

Award

of

the

IEEE

Lasers

and

Electro‐Optics

Societyfor

distinguished

contributions

to

fiber

optics

technology.浙江大学光电信息系262013

Dr.

James

J.

Coleman

2012

John

E

Bowers2011

David

F.

Welch

2010

Dr.

C.

Randy

Giles

2009

Dr.

Joe

Charles

Campbell

2008

Robert

Tkach2007

Emmanuel

Desurvire2006

Dr.

Donald

Ray

Scifres2005

Roger

H.

Stolen

2004

Larry

A.

Coldren2003

Dr.

Andrew

R.

Chraplyvy2002

Neal

S.

Bergano2001

Tatsuo

Izawa

2000

Dr.

Stewart

D.

Personick1999

John

B.

MacChesney1998

Dr.

Kenichi

Iga1997

Prof.

Ivan

P.

Kaminow1996

Dr.

Kenneth

O.

Hill

1995

Dr.

TingyeLi1994

Dr.

Elias

Snitzer1993

Prof.

Yasuharu

Suematsu1992

Dr.

Donald

B.

Keck1991

Dr.

David

Neil

Payne1990

Thomas

G.

Giallorenzi1989

Stewart

Edward

Miller1988

Dr.

Michael

K

BarnoskiJohn

Tyndall

Award

1987

Robert

D.

Maurerwho

has

made

pioneering,

highly

significant,

or

continuing

technical

or

leadershipcontributions

to

fiber

optics

technology浙江大学光电信息系27Advantages

of

Integrated

OpticsMany

channels

multiplexed

Huge

capacity28Advantages

of

Photonics

(VS

electronics)

Immunity

from

electromagnetic

interference

(EMI)

Freedom

from

electrical

short

circuits

or

ground

loops

Safety

in

combustible

environment

Security

from

monitoring

Low‐loss

transmission

Large

bandwidth

(i.e.,

multiplexing

capability)

Small

size,

light

weight

Inexpensive,

composed

of

plentiful

materials

Major

disadvantage:

Difficult

to

use

for

electrical

power

transmission浙江大学光电信息系浙江大学光电信息系29PICs

capability

of

transmitting

fiberPICs

the

ability

to

generate

and

process

them

Advantages

Increased

bandwidthExpanded

frequency

(wavelength)

division

multiplexingLow-loss

couplers,

including

bus

access

typesExpanded

multi-path

switchingSmaller

size,

weight,

lower

power

consumption

Batch

fabrication

economy

Improved

reliability

Improved

optical

alignment,

immunity

to

vibrationMajor

disadvantage

High

cost

of

developing

new

fabrication

technologyIntegrationPhotonics浙江大学光电信息系30In

1970s,

what

happened?to

bring

integrated

optics

out

of

the

laboratory

and

into

the

realm

of

practicalapplication

Three

main

factors:

A.

Low

loss

optical

fibers

and

connectors

(Demands),

B.

Reliable

CW

GaAlAs

and

GaInAsP

laser

diodes

(Sources),

C.

Photolithographic

microfabrication

techniques

capable

of

submicron

linewidths

(Feasibility)浙江大学光电信息系A.

Low‐loss

optical

fibers高锟，生于中国上海，光纤通讯、电机工程专家，华文媒体誉之为“光纤之父”、普世誉之为“光纤通讯之父”（Father

of

Fiber

Optic

Communications），曾任香港中文大学校长。2009年，与威拉德∙博伊尔和乔治∙埃尔伍德∙史密斯共享诺贝尔物理学奖。

31Kao,

C.K.,

"1012

bit/s

Optoelectronics

Technology",

IEE

Proceedings,

133(3):

230‐236,

June

1986.

浙江大学光电信息系

32K.C.

Kao’s

workKao,

K.C.

and

Hockham,

G.A.,

“Dielectric‐fibre

Surface

Waveguides

for

Optical

Frequencies”,

Proc.

IEE.

113(7):

1151‐1158,

July

1966.

Kao,

K.C.

and

Davies,

T.W.,

"Spectrophotometric

Studies

of

Ultra

Low

Loss

Optical

Glasses

‐

I:

Single

Beam

Method",

Journal

of

Scientific

Instruments

(Journal

of

Physics

E),

Series

2,

1:

1063‐1068,

1968.

举世公认高锟是提出用纤维材料传达光束讯号以建置通信的第一人。当时，大家已知道可用数字或模拟的方式传送讯息，已有人研究：透过气体或玻璃传送光，期望可达到高速传输，但无法克服严重衰减的问题。1965年，高锟对各种非导体纤维进行仔细的实验。按他分析，当光学讯号衰减率能低于20dB/km时，光纤通信便可行。他更进一步分析了吸收、散射、弯曲等因素，推论被包覆的石英基玻璃有可能满足衰减需求。这项关键研究结果，推动全球光纤通讯的研发工作。1966年，高锟发表了一篇题为《光频率介质纤维表面波导》的论文，开创性地提出光导纤维在通信上应用的基本原理，描述了长程及高信息量光通信所需绝缘性纤维的结构和材料特性。简单地说，只要解决好玻璃纯度和成分等问题，就能够利用玻璃制作光学纤维，从而高效传输信息。这一设想提出之后，有人称之为匪夷所思，也有人对此大加褒扬。但在争论中，高锟的设想逐步变成现实：利用石英玻璃制成的光纤应用越来越广泛，全世界掀起了一场光纤通信的革命。浙江大学光电信息系33衡特性等多个领域都作了成果都是使信号在无放大接纤，至1976年则达K.C.

Kao’s

work

高锟还开发了实现光纤通

讯所需的辅助性子系统：

据Kao’s理论，Corning

公司R.

D.

Maurer等人1970年首次

在单模纤维的构造、纤维

的强度和耐久性、纤维连

光器和耦合器以及扩散均

到1

dB/km的水平，为日后光纤通讯

技术的飞速发展奠定了理论基础。

大量的研究，而这些研究

80年代，光纤通信技术在发达国家得到了广泛推广应用。

的条件下，以高速长距离

通信的关键。34Low

loss

optical

fiber

connectors

PC

FC:

Ferrule

contactor

(钢制金属套筒)

；

PC:

Physical

contact,

RL~‐30dB;

SPC:

Super

PC,

RL~‐40dB;

UPC:

Ultra

PC,

RL~‐50dB;

APC:

Angled

PC,

RL~‐60dB;

PC:

蓝色；APC：绿色；/fiber‐optic‐tutorial‐termination.aspx

浙江大学光电信息系浙江大学光电信息系35the

most

common

fiber

optic

connectors

ST

(an

AT&T

Trademark)

is

the

most

popular

connector

for

multimode

networksFC/PC

has

been

one

of

the

most

popular

singlemode

connectors

for

many

years

SC

is

a

snap‐in

connector

that

is

widely

used

in

singlemodesystems

for

it's

excellent

performance

LC

is

a

new

connector

that

uses

a

1.25

mm

ferrule,

half

the

size

of

the

STMT‐RJ

is

a

duplex

connector

with

both

fibers

in

a

single

polymer

ferrule

Opti‐Jack

is

a

neat,

rugged

duplex

connector

Volition

is

a

slick,

inexpensive

duplex

connector

that

uses

no

ferrule

at

all

E2000/LX‐5

is

like

a

LC

but

with

a

shutter

over

the

end

of

the

fiber

MU

looks

a

miniature

SC

with

a

1.25

mm

ferrule.

It's

more

popular

in

Japan.MT

is

a

12

fiber

connector

for

ribbon

cable.

It's

main

use

is

for

preterminated

cable

assemblies.

浙江大学光电信息系36

B.

Reliable

CW

GaAlAs

and

GaInAsP

laser

diodes

Basov

and

Javan

proposed

the

semiconductor

laser

diode

concept.

In

1962,

Robert

N.

Hall

demonstrated

the

first

laser

diode

device,

made

of

gallium

arsenide

and

emitted

at

850

nm

the

near‐infrared

band

of

the

spectrum.

Later,

in

1962,

Nick

Holonyak,

Jr.

demonstrated

the

first

semiconductor

laser

with

a

visible

emission.

This

first

semiconductor

laser

could

only

be

used

in

pulsed‐beam

operation,

and

when

cooled

to

liquid

nitrogen

temperatures

(77

K).

In

1970,

Zhores

Alferov,

in

the

USSR

(Union

of

Soviet

Socialist

Republics

),

and

Izuo

Hayashi

and

Morton

Panish

of

Bell

Telephone

Laboratories

also

independently

developed

room‐temperature,

continual‐operation

diode

lasers,

using

the

heterojunction

structure./wiki/Laser37Basov

and

Javan

proposed

the

semiconductor

laser

diode

concept.Nikolay

Gennadiyevich

Basov

(Russian;

12/14/1922‐07/01/2001)

was

a

Sovietphysicist

and

educator.

For

his

fundamental

work

in

the

field

of

quantum

electronics

that

led

to

the

development

of

laser

and

maser,

Basov

shared

the

1964

Nobel

Prize

in

Physics

with

Alexander

Prokhorov

and

Charles

Hard

Townes.Ali

Mortimer

Javan

(born

12/26/1926)

is

an

Iranian

American

physicist

and

inventorat

MIT.

His

main

contributions

to

science

have

been

in

the

fields

of

quantum

physicsand

spectroscopy.

He

co‐invented

the

gas

laser

in

1960,

with

William

R.

Bennett.

Ali

Javan

has

been

ranked

Number

12

on

the

list

of

the

Top

100

living

geniuses.浙江大

MicrowaveLaser:

Light

Amplification

by

Stimulated

Emission

of

Radiation;Maser:

学光电信息系

Amplification

by

Stimulated

Emission

of

Radiation浙江大学光电信息系38First

helium‐neon

laser,

1960.First

helium‐neon

laser.

Left

to

right:

US

physicist

Donald

R.

Herriott

(1928‐2007),

Iranian‐US

physicist

Ali

Mortimer

Javan

(born

1926)

and

US

physicist

William

R.

Bennett

(1930‐2008),

with

the

first

helium‐neon

laser.

/media/147086/enlarge浙江大学光电信息系39Heterojunction

structureHerbert

Kroemer

(born

08/25/1928),

a

professor

at

UC,

Santa

Barbara,

received

his

Ph.D.

in

theoretical

physics

in

1952

from

the

University

of

Göttingen,

Germany,

with

a

dissertation

on

hot

electron

effects

in

the

then‐new

transistor,

setting

the

stage

for

a

career

in

research

on

the

physics

of

semiconductor

devices.

In

2000,

the

Nobel

Prize

in

physics

was

awarded

jointly

to

Herbert

Kroemer

(UC

Santa

Barbara,

USA)

and

Zhores

I.

Alferov

(Ioffe

Institute,

Saint

Petersburg,

Russia)

for

"developing

semiconductor

heterostructures

used

in

high‐speed‐

and

opto‐electronics"

Zhores

Ivanovich

Alferov

(Russian,

Belarusian;

born

03/15/1930)

is

a

Sovietand

Russian

physicist

and

academic

who

contributed

significantly

to

the

creation

of

modern

heterostructure

physics

and

electronics.

浙江大学光电信息系40C.

Microfabrication

techniques

depositing

a

film,

patterning

the

film

with

the

desired

micro

features,

and

removing

(or

etching)

portions

of

the

film.For

memory

chip

fabrication:

~30

lithography

steps,

~10

oxidation

steps,

~20

etching

steps,

~10

doping

steps,

and

many

others.浙江大学光电信息系41Comparison

of

sizes

of

semiconductor

manufacturing

process

nodeswith

some

microscopic

objects

and

visible

light

wavelengths

Can

size

reduction

go

further?

Moore’s

law

might

expire.

Photonics

will

replace

electronics?

Optical

interconnects浙江大学光电信息系42

In

1980sOptical

fibers

largely

replaced

metallic

wires

in

telecommunications,A

number

of

manufacturers

began

production

of

PICs

for

use

in

a

variety

of

applications浙江大学光电信息系43

In

1990sThe

incorporation

of

optical

fibers

into

telecommunications

and

data‐transmission

networks

has

been

extended

to

the

subscriber

loop

in

many

systems.

This

provides

an

enormous

bandwidth

for

multichannel

transmission

of

voice,

video

and

data

signals.

Access

to

worldwide

communications

and

data

banks

has

been

provided

by

computer

networks

such

as

the

Internet.

We

are

in

the

process

of

developing

what

some

have

called

the

“Information

superhighway.”

The

implementation

of

this

technology

has

provided

continuing

impetus

to

the

development

of

new

integrated

optic

devices

and

systems

into

the

beginning

years

of

the

21st

century.Another

technological

advance

that

has

encouraged

the

development

of

new

integrated

optic

devices

in

recent

years

is

the

availability

of

improved

fabrication

methods.

Microtechnology,

which

involves

dimensions

on

the

order

of

micrometers,

has

evolved

into

nanotechnology,

in

which

nanometer‐sized

features

are

routinely

produced.

This

new

area

of

nanophotonics,

which

includes

the

fabrication

of

photonic

crystals.浙江大学光电信息系44Material

for

PIC’s

Electronics

IC:

silicon,

…

For

PIC’s:

No

one

substrate

material

will

be

optimum

for

all

elements.

浙江大学光电信息系45Hybrid

Versus

Monolithic

Approach

Hybrid

‐

two

or

more

substrate

materials

are

somehow

bonded

together

to

optimize

performance

for

different

devices；

Advantage:

using

existing

technology,

piecing

together

devices

which

have

been

substantially

optimized

in

a

given

material

Disadvantage:

misalignment,

or

even

failure,

because

of

vibration

and

thermal

expansion.

Monolithic

‐

a

single

substrate

material

is

used

for

all

devices；

Advantage:

cheaper,

reliable.

浙江大学光电信息系46

III–V

and

II–VI

Ternary

SystemsFor

a

system:

light

emitter

+

waveguide

+

detector

The

energy

bandgap

of

the

material

can

be

changed

over

a

wide

range

by

altering

the

relative

concentrations

of

elements.

gallium

aluminum

arsenide,

Ga(1−x)AlxAs.

gallium

indium

arsenide

phosphide,

GaxIn(1−x)As(1−y)Py.浙江大学光电信息系47Silicon

is

cheaper

than

other

semiconductors浙江大学光电信息系48浙江大学光电信息系49

Silicon

photonicsA

new

technology

platform

to

enable

low

cost

and

high

performance

photonics

Low‐cost

because

of

the

CMOS‐compatible

fabrication

processes

(Photonic

devices

produced

within

standard

silicon

factory

and

with

standard

silicon

processing);

Low‐loss

waveguides;

Ultra‐high

index

contrast

enables

ultra‐sharp

bending,

ultrasmall

devices

size.

However,

for

active

devices

(lasers,

modulators,

photodetectors),

what

is

the

solution?

There

are

several

promising

approaches

for

these

issues.

50

Silicon

photonicsIn

the

last

few

years,

silicon

has

become

an

important

material

for

integrated

photonics

with

several

breakthroughs

in

the

field

of

high‐speed

optical

modulators,

integrated

germanium

detectors

and

even

light

sources.

High‐contrast

silicon

on

insulator

(SOI)

waveguides

allow

to

miniaturize

photonic

functions,

which

enables

larger‐scale

integration

for

photonics.

The

resulting

ultra‐compact

photonic

integrated

circuits

can

be

used

for

telecom,

datacom,

(bio)‐sensing,

and

biomedical

applications.

The

CMOS

compatible

processing

requirements

allow

the

reuse

of

the

huge

technology

base

for

submicron

mass‐fabrication.

浙江大学光电信息系http://www.imec.be/ScientificReport/SR2008/HTML/1224982.html浙江大学光电信息系51What

is

driving

silicon

photonics?

Data‐com,

super‐computing浙江大学光电信息系52Optical

communication

network

(scaling

down)

Short‐distanceThe

fiber

to

the

home

Long‐haul

(WDM

+

EDFA)New

services:

high‐sp