干涉测距模块

Introduceaboutlasertracker’sperformanceevaluation（现有激光跟踪仪评定方法）Methodforhowtocalibratealasertracker’sangle&distance（激光跟踪仪测角和测距精度的校准方法）c（双轴激光跟踪仪校准装置）

4DesignplansforLasertrackercalibrationdevice（4种跟踪仪校准装置的设计方案）Contents内容1Lasertracker’sperformanceevaluationCalibratingIn-lab实验室校准Evaluatingin-site现场检查Evaluatingin-sitemeanstochecktheperformanceoflasertrackermeasuringapointinworkshopenvironment.检查跟踪仪在某种特定的使用环境下所能达到的综合测量能力（如空间坐标测量能力、空间测长测量能力）。Twopathstolasertracker’sperformanceevaluation(激光跟踪仪的两种评定方式)CalibratingIn-labmeanstochecktheperformanceoflasertracker’sangleindexesInterferometer,laserdistancemeter,retro-reflector,environmentsensoretc.inastandardenvironmentlaboratoryandverifytheirmaximumpermissionerror(MPE).检查的是集成在跟踪仪内部的双向测角编码器、激光干涉仪、激光测距仪、目标跟踪传感器及目标反射镜、环境传感器等关键部件的技术指标是否满足生产商提供的指标要求，即检查出设备的最佳测量能力。Lasertracker（linearslider）whosestandardmagnitudeisreferencelength;（激光干涉仪（直线导轨）--标准量是参考长度）Lineartargetarraywhosestandardmagnitudeisthedistancebetweentargetcentercoordinatesandthetargetitself.（直线目标阵列--标准量是目标中心点坐标和目标之间距离）1Lasertracker’scalibrationmethod现有激光跟踪仪校准方法CalibratingIn-lab

实验室校准CalibratingIn-site

现场校准Fixedlengthscalewhosestandardmagnitudeisreferencelength.（定长标尺--标准量是参考长度）Fixedtargetwhosestandardmagnitudeisspacecoordinates.（固定目标--标准量是空间坐标）LaserTracker’scommonlyusedcalibrationequipment激光跟踪仪常用的校准设备序号单位建立时间测量范围备注1中航304所(AVIC304Institute)1999水平轴36m俯仰轴2.1mhorizontalaxis36mpitchingaxis2.1m水平轴、俯仰轴独立Independenthorizontalaxisandpitchingaxis2中国计量院2010水平轴80m俯仰轴1.2m俯仰轴位于水平轴上pitchingaxisabovehorizontalaxis3成都飞机制造公司2011水平轴25m俯仰轴1.0m俯仰轴位于水平轴上4西安飞机制造公司2012水平轴25m仅有水平轴5航天计量测试技术所2013水平轴10m俯仰轴2.0m水平轴、俯仰轴独立Atpresentthedomesticmaincalibrationmethodoflasertrackerisdouble-axiscalibrationmethod:Horizontalaxisisusedtocalibratehorizontalangleoftracker,built-ininterferometerandrangefinder.Verticalaxisisusedtocalibratepitchangleoftracker.Unitswhichhavetheabilitytocarryoutcalibrating

In-labindomesticareshowninTable1.目前国内激光跟踪仪的校准方法基本上采用双轴校准法：水平轴--校准跟踪仪的水平角和内置干涉仪及测距仪垂直轴--校准跟踪仪的俯仰角。目前能够实现跟踪仪实验室校准的典型单位见表1。1Lasertracker’scalibrationmethod现有激光跟踪仪校准方法2

Due-axisLasertrackercalibrationprinciple激光跟踪仪双轴校准原理Basicidea--Adjustrelativepositionbetweenthelasertrackerandrailinordertoseparateindividualerrorsofsystem.基本思路--调整激光跟踪仪与导轨的相对位置分离出系统的单项误差。Placedatoneendofthehorizontalguiderail放置在水平导轨一端Remaintracker'sazimuthandpitchangleunchanged，andcalibrateitsrangingerror.（跟踪仪的方位角和俯仰角保持不变，校准跟踪仪测距误差。）Remaintracker'spitchangleunchanged，andcalibrateitsazimuthanglemeasurementerror.（跟踪仪俯仰角保持不变时，校准跟踪仪方位角的测角误差。）Remaintracker'sazimuthunchanged，andcalibrateitspitchanglemeasurementerror.（跟踪仪方位角保持不变，校准跟踪仪俯仰角的测角误差。）Placedinfrontofthehorizontalguiderail放置在水平导轨前方Placedinfrontoftheverticleguiderail放置在垂直导轨前方BasicPrinciple--Placedtrackermirrorandinterferometermirroronthesameworkbench,whentheworkbenchismovedacertaindistance,displacementmeasuredbytheinterferometer-L0andcoordinatesoftwotargetpointsmeasuredbytracker--P1,P2canbeobtained.Thenthedistancebetweenthe2points(L)canbecalculatedbythefollowingformula:inwhichAmeansanglebetween2targetpoints.基本原理--跟踪仪的反射镜与干涉仪的反射镜放置在同一工作台上，当工作台移动一定距离后，得到干涉仪的位移量L0和跟踪仪的两点坐标P1、P2，它们之间的距离为L,其中A为两目标点之间的交角。2

Due-axisLasertrackercalibrationprinciple激光跟踪仪双轴校准原理Remaintracker'sazimuthandpitchangleunchanged当方位角和俯仰角不变时Ignoredanglemeasurementimpact,rangingerroroftrackeris

忽略测角误差影响，跟踪仪的测距误差Ignoredrangingandpitchimpact,azimuthmeasurementerroroftrackeris忽略测距和俯仰角的影响，跟踪仪的方位角测角误差Remainpitchangleunchanged，andchangeazimuth当俯仰角不变，方位角改变时Remainazimuthunchang-ed，andchangepitchangle.当方位角不变俯仰角改变时Ignoredrangingandazimuthimpact,pitchanglemeasurementerroroftrackeris忽略测距和方位角的影响，跟踪仪的俯仰角测角误差2

Due-axisLasertrackercalibrationprinciple激光跟踪仪双轴校准原理3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置(opratingstroke)＞10m工作行程(straightness)≤0.15mm直线度(uncertaintyofmeasurement)测量不确定度(2.0+0.5L)μm,k=2,(workingspeed)＞500mm/s运动速度(opratingstroke)＞2.0m工作行程(straightness)≤0.05mm直线度(uncertaintyofmeasurement)测量不确定度

（2.0+0.5L)μm,k=2,(workingspeed)＞100mm/s运动速度Verticalaxis垂直轴Horizontalaxis水平轴Technicalparameters技术参数HorizontalXaxis:10mprecisionlinearguiderail,lengthmeasuringsystemVerticalYaxis:2mlinearguidesystem,lengthmeasuringsystem4environmentalcompensationsystem，dual-axismotioncontrollingsystem,Analysisingsoftwareplatform,etc.(水平X轴：10m精密直线导轨、长度测量系统垂直Y轴：2m直线导轨系统、长度测量系统四路环境补偿系统双轴运动控制系统分析处理软件应用平台等组成。)Regardlaserinterferometerasmeasurementstandardofthedistancebetweentwotargetpoints,placetrackermirrorandinterferometermirroronworkbench,whichismotor-drivenandmovealonglinearguiderail.Thedeviationbetweendistancethatinterferometermovedanddistancethattargetmovedcanreflectthemeasurementerror.(采用激光干涉仪作为两点之间距离的测量标准，干涉仪的反射镜和跟踪仪的反射镜放置在工作台上，工作台由电机驱动，沿直线导轨运动。工作台移动时干涉仪反射镜的移动距离与被测目标的移动距离的偏差值反映了被校系统的测量偏差。)Components系统构成Workingprocess工作过程3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置10mlongprecisionlinearguiderailwhichhascogbeltstructure,feature：fastmovementspeed,cansavetimeofcalibrating.Supportingmechanism--selectmarbleplatformwithhighrigidityandstabilityasareferencefeature：highflatnessandstraightnessaccuracy,large-areaworkbenchenvironmentalcompensationuints--4branchesoftemperature，1branchofairpressure，1branchofhumidityfeature:placedonhorizentalguiderail,closedtolightpath，canmeasureenvironmenttemperaturearoundlightpathwithhigheraccuracy.10m精密直线导轨---选用齿形带结构的直线运动导轨特点：运动速度快，可大大减少校准所用的时间。支撑机构---选择刚性好稳定性强的大理石平台作为基准特点：平面度和直线度精度高，工作平台面积大。环境补偿单元---4路温度、1路气压、1路湿度特点：放置在水平导轨上，与光路靠近，可更准确的获得测量光路所处环境的温度值。Horizontalaxis水平导轨3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置laserinterferometer激光干涉仪referenceplatform基准平台Interferometriccombination干涉组合interferometermirror干涉仪反射镜linearguiderail直线导轨airsensor空气传感器marbleplatform大理石平台movingplatform移动平台3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置2mlongverticallinearguiderailwhichisballscrewdrivenfeature:highloadandlong-termbearingcapacity,reliablelinearmotionandstability.basisplatform：solidmetalplatformofLevel00feature:nodistortion,canadjusttoparallelwiththehorizontalguiderail.Supportingmechanism：l=ltypemetalbackframefeature：solidstructure，Stablestructure,goodshockresistance,convenienttoadjustrailstraightness.2m垂直直线导轨----选用滚珠丝杆传动的直线导轨特点：具有高载荷和长时承载的能力，能够拥有可靠的直线运动、稳定性好。基础平台---00级稳固的金属平台特点：不易变形，可通过调整与水平导轨平行。支撑机构---I=I型金属背架，特点：结构稳定，抗震性好，便于导轨直线度调整。Verticalguiderail(竖直导轨)3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置ControllerwhichadoptsPLCascontrolcore,andisresponsibleformotioncontrolofentiresystemfeature:itcanimprovethesystem'sstabilityandcontrollingaccuracy,enhancesystem'santi-interferenceability.Motor:thehorizontalandverticalaxesarebothdrivenbyACservomotorfeatures:canbecontrolledbyhigh-speedpulseoutputofPLC,selecthigh-speedpulse+directioncontrolmode,canpinpointthelocationofthemechanicalmovementposition.Operation----touchscreenandkeyboardcontrolintwowaysfeatures:Touchscreencanprovideaclearman-machineinterface,keyboardcontrolcanmaketheoperationeasierandmoreconvenient控制器---采用PLC作为控制核心，负责整个系统的运动控制特点：可提高系统的稳定性和控制精度，增强系统的抗干扰性。电机---水平轴和垂直轴都采用AC伺服电机驱动特点：可由PLC的高速脉冲输出口控制，选用高速脉冲+方向的控制模式，可以精确定位机械运动位置。操作方式----触摸屏与键盘控制两种方式特点：触摸屏可提供清晰的人机操作界面，键盘控制可使操作更加简单方便。controller控制器3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置softwareplatform软件平台Interferencerangingmodule（干涉测距模块）ThismodulecanachieveInterferometerconfiguration,displayinterferencedata,andcontrolmeasurementmode.可以实现干涉仪的配置、干涉数据的显示、测量模式控制。Environmentalmonitoringmodule环境监控模块Thismodulecandisplay,collectandmanagelabenvironmentstateautomatically,supportreal-timemonitoringofquadtemperature,onebranchofpressureandonebranchofhumidity.可以自动采集显示、管理实验室环境状态，支持四路温度、一路气压、一路湿度的实时监控Dual-axislinearmotionguidescontrollingmodule双轴直线运动导轨控制模块Thismodulecancontrolmovementsofhorizontalandverticallinearmotionguidesinseveralpatterns,includingmanual,automatic,cyclingmovingmode,etc.可以对水平直线运动导轨和竖直直线运动导轨进行多种运动模式控制，包括手动、自动、循环等运动模式。datamanagingmodule数据管理模块Thismodulecanmanagedatameasuredbyinterferometer,includingdatanaming,storage,display,analysis,preservation,andotherfunctions,inaddition,analysisfunctionincludecalibrationresultsevaluation.可以对干涉仪测量是数据进行管理，包括数据的命名、存储、显示、分析保存等功能，其中分析功能中包括对被校设备校准结果的评价。3Due-axisLasertrackercalibrationdevice双轴激光跟踪仪校准装置Software--chart软件--结构图干涉测距模块Interferencerangingmodule环境监控模块Environmentalmonitoringmodule运动控制模块MotionControlModuletemperaturepressurehumidity温度气压湿度horizontal/verticalaxisdisplacement水平轴位移竖直轴位移datamanagingmodule数据管理模块interferometermeasurementdata干涉仪测量数据relationshipsofmodules各模块之间的关系Software--Measurementanddatamanagementmodule软件--测量及数据管理模块Software--Environmentalmonitoringmodule软件--环境监控模块Software--Due-axismotioncontrolmodule软件--双轴运动控制模块四、Trackercalibrationdevicedesignschemecomparison跟踪仪校准装置设计方案比较Program1Independentverticalaxis,horizontalaxisadoptthree-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.（竖轴独立，水平轴采用三光路干涉测量,水平轴采用大理石导轨，气浮式工作台。）Program2Verticalaxisabovehorizontalaxis,horizontalaxisadoptthree-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.竖轴位于水平轴上，水平轴采用三光路干涉测量，水平轴采用大理石导轨，气浮式工作台。Program3Independentverticalaxis,horizontalaxisadoptsingle-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.竖轴独立，水平轴采用单光路干涉测量，水平轴采用大理石导轨，气浮式工作台。Program4Independentverticalaxis,horizontalaxisadoptsingle-light-pathinterferometry,andmarbleguiderail,metalguiderail.竖轴独立，水平轴采用单光路干涉测量，水平轴采用大理石平台，金属导轨。Scheme1方案1lightpath光路Horizontalaxisadoptthree-light-pathsynchronousinterferometry,compensateAbbeerrorinrealtimetoachieve"coaxialsynclastic"measurement.水平轴采用三光路干涉同步测量，实时进行阿贝误差补偿，实现“同轴同向”测量。structure结构independenthorizontalaxisandverticalaxis.Horizontalaxisadoptmarbleguiderail,airfloatingworkbench.Verticallinearguiderailismechanicalaxis，whichisballscrewdriven..水平轴与竖轴分开，各自独立。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴，滚珠丝杆传动。

index指标horizontalaxismeasurablerange(横轴可测范围):<80m,

MeasurementUncertainty（测量不确定度）:0.3+0.3LmmVerticleaxismeasurablerange（竖轴可测范围）:>2m

,MeasurementUncertainty（测量不确定度）:1+0.5LmmFeature特点Highprecision,simplestructure.（精度高，结构简单。）Theoveralleffectdiagram总体效果图Scheme1方案1Independentverticalaxis独立竖轴Scheme1方案1Horizontalaxisthree-light-path水平轴三光路Scheme1方案1Verticalaxissingle-light-path竖轴单光路Scheme1方案1Scheme2方案2Horizontalaxisadoptthree-light-pathsynchronousinterferometry,compensateAbbeerrorinrealtimetoachieve"coaxialsynclastic"measurement.水平轴采用三光路干涉同步测量，实时进行阿贝误差补偿，实现“同轴同向”测量。Verticalaxisisabovehorizontalaxis，biaxiallinkage.Horizontalaxisadoptmarbleguiderail,airfloatingworkbench.Verticallinearguiderailismechanicalaxis，whichisballscrewdriven..竖轴位于横轴上，双轴联动。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴，滚珠丝杆传动。horizontalaxismeasurablerange(横轴可测范围):<80m,

MeasurementUncertainty（测量不确定度）:0.3+0.3LmmVerticleaxismeasurablerange（竖轴可测范围）:1m

,MeasurementUncertainty（测量不确定度）:2+2Lmm(singlemarble4m)Horizontalaxishashighprecision,canprovidestandardlaserplane,whi