非接触式台阶仪

Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHProductSummaryHigh-precisionnon-contactdepthmeasurementispossiblewithobservingthesurfaceofmeasuringpoint,byverysimpleoperation,withoutpersonalequations.

*Hisometisanon-contactdepthmeasuringmicroscopesystem.*Designedbasedonanopticaltypefocalpointdetectionsystem.*Adoptingprecisefocusindicator,it’spossibletomeasureheight,depth,steps,etc.withobservingthesurfaceofmeasuringpoint,bysimplycoincidingthehalvesofanindexgraticule(TargetMark).*Sincethereisnoconcernforphysicaldamagessuchasdistortion,blowornickstoa

specimenbecauseofnon-contactsystem,HisometisoptimumformeasuringelectroniccomponentssuchasICsorhigh-precisionprocessingparts.Page1PrincipleofmeasurementThismicroscopesystemoffersaprecisefocusindicatorconsistingofanindexgraticule(TargetMark)andabeamsplittingprismbuiltintoreflectingilluminationopticalsystemofmicroscope.Andithasbeendesignedbasedontheopticalprinciplethatatjustfocusstatus,ofwhichtheupperandlowerhalvescoincide,canbeobservedabovethefocusedimageofaspecimen,andthatwhendefocusedevenslightly,theindexlineissplitintotwolinesintheupperandlowerhalvesofthegraticule.

Page2Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHPrincipleofmeasurementPage3Non-ContactDepthMeasuringMicroscopeSystemDH2/IMH*UnderDefocusedcondition,horizontalcenterlineofTargetMarksplitsintotwolinesintheupperandlowerhalves.*UnderJustfocuscondition,theupperandlowerhalvesofTargetMarkcoincide.Humaneye’sabilitytodistinguish2pointsPage4Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHThischartandmathematicalformulamentionhowaccuratehumaneye’sabilitytodistinguish2pointsis.Humaneye’sabilitytodistinguish2linesPage5Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHThischartandmathematicalformulamentionhowaccuratehumaneye’sabilitytodistinguishdiscrepancybetween2linesis.Thechartandmathematicalformulashowthatdistinguishing2linesisapprox.3timessensitivethandistinguishing2points,becauseofhumaneye’sstructure.MethodofmeasurementPage6*AnexactfocalpointissecuredbyconfirmingthattheverticalindexlinesintheupperandlowerhalvesofTargetMarkcoincidewithstraightlinesexactly,ratherthanbymakingjudgementsastowhetherimageofaspecimensurfaceisblurredornot.*Sincethisisauniquesystemthatisneitheraffectedbythefocaldepthofobjectivelensesnordependentontheabilityofthehumaneyestodistinguishtwopoints,afocalpointcanbedeterminedveryaccuratelyascomparedwithotherfocusingsystems.*Thisfocusingsystemandthedigitalgaugeallownon-contact,highprecisionmeasurementsofstepheightsbetweensurfaces.

Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHPage7Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHUsingaspecimenhavingstepsonit,let’smeasuretheheightofdifferencebetweenH1pointandH2point.AtH1point,aftergettingjustfocusconditionbycoincidingupperandlowerTargetMark,thentravelastagehorizontallytoH2point,thencoincidelowerandupperTargetMarkagaintogetjustfocusconditionatH2point.Z-axisindicatorreadstheheightofH2point,whichmeansthedifferenceofheightbetweenH1&H2.ActualmeasurementActualmeasurementPage8Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHActually,Z-axisindicatorreadsthetraveledheightofmainbodyofmicroscopeitselffromH1pointtoH2.Therefore,resetthevalueofZ-axisindicatorzerowhengettingjustfocusconditionatH1point,thentravelingtoH2pointtogetjustfocusconditionagain.Z-axisindicatorreadsthevaluehowmuchitmovedvertically,whichmeansthedifferencebetweenH1&H2.FeaturesPage9Asafocalpointisdetectedunderthenon-contactopticalmethod,measurementscanbetakenwithoutbeingaffectedbyphysicaldamagestoaspecimensuchasdistortion,blowornicks,etc.Incaseofcontactsystem,sincethepointcontactedissaggedifaspecimenissoft,accuratemeasurementisdifficult.Incaseofnon-contactsystem(Union’sHISOMETseries),accuratemeasurementscanbetakenwithoutbeingaffectedbyphysicaldamagestoaspecimen.Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHFeaturesPage10Non-ContactDepthMeasuringMicroscopeSystemDH2/IMH*Astheoperationissosimplelikeamicroscope,thisisthemostsuitablemeasuringmicroscopesystemforvariouskindsofapplications.*Bothmeasuringfromhighplacetolowplace,andlowtohigharepossible.(Z-axisvalueofH1minustheoneofH2=heightordepthtobemeasured.)*Sincetheprecisefocusindicatorbasedonthe“split-target”methodhasbeenadopted,highly-accuratedepthmeasurementscanbetakensimplybycoincidingthetwohalvesofTargetMark.ApplicationsPage11StepsofleadframeNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofstepsbetweendiepadandouterlead.TheautomatictypeofDH2isadoptedastheJapaneseleadingleadframemanufacturers.ApplicationsPage12CurvatureofleadframeNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHCurvaturecanbeinspectedbymeasurementofseveralpoints.ApplicationsPage13ProjectionofheadontheVTRdrumNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage14Terminalstepsonmulti-layerPCboardNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofthicknessofelectrode.ApplicationsPage15DepthofmetalmoldNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofabrasionloss.ApplicationsPage16HeightofbumpNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage17HeightofbondingwireandsolderballNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage18ElectrongunNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofdepthofelectrongunforCRT.ApplicationsPage19DepthofrodlensandconnectorNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage20Thicknessofspacer(Clearancegapbetweenglasssubstrates.)Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage21ProbeHeight(CheckingthedegreeofWear&Tear)Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage22GrooveDepthofOpenningSectiononCanTopNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHWhenthegrooveistooshallow,itisverydifficulttoopenthecan.Whenitistoodeep,thecovercomesofftooeasily.

ApplicationsPage23HeightofStepsonWaferNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage24LeadFrameStepHeightNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage25StepHeight(BearingofMotor)Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage26ProtrusionHeight（Video

Head）Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage27ArmHeight(HDD)Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHApplicationsPage28MeasurementofagapinLiquidCrystalDisplayNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofdepthofminuteopeningAgapbetweenliquidcrystalglassplatesEnabletogetbestfocusthroughglassplateDepthofaholeDepthApplicationsPage29MeasurementofthicknessofwiringpatternsonPCBNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofetchingamount(depth)CopperwiringpatternDepthThicknessofcopperwiringpatternsPCBApplicationsPage30MeasurementofdepthoftrenchstructureNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementoffilmthicknessDepthTransparentfilmMetal,glass,plastic,etc.FilmthicknessApplicationsPage31ThicknessofsoldercreamNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHHeightofminutestructureSoldercreamBeaten-copperPCBThicknessHeightApplicationsPage32MeasurementofglassdefectNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofheightofCOB(ChipOnBoard)GlassDepthBondingwireChipSubstrateHeightApplicationsPage33MeasurementofdepthofpunchmarkNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofdegreeofevennessDepthPoint-APoint-BMeasuringhowdifferentbetweenPoint-A&Point-BApplicationsPage34MeasurementofplasticmoldedcomponentNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofdepthofscratchonmetalsurfaceThicknessDepthApplicationsPage35MeasurementofpartsofmicromachineNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHMeasurementofdepthofcorrosiononmetalsurfaceThicknessDepthApplicationsPage36MeasurementofheightofforeignbodyNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHHeightApplicationsPage28ExampleofIntegrationintoEquipment/SystemNon-ContactDepthMeasuringMicroscopeSystemDH2/IMHThedifferencebetweenLaserMeterandMeasuringMicroscopePage29WithDH2/IMH,itispossibletoobservemeasuringpointwhilemeasuring.Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHUltraHighMagnificationObjectivePLLWDM100XPage30StillHigherAccuracycanbeachievedbyuseofPLLWDM100X.*HighlymagnifiedimagefacilitatesjudgementofTargetMarkcoincedence,eliminatingthepossibilitiesofjudgementerrors.*Idealforobservationoffinematerials.Non-ContactDepthMeasuringMicroscopeSystemDH2/IMHSelectionofTargetMarkPage31Operatormaychoosebetweenthetwokindsoftargetmarksinaccordancewithreflectivenessoftheobject.ItisalsopossibletohaveanimagewithoutTarge