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测量系统稳定性分析报告,,,,,,,,,,,,,,,,,,,,,

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量具名称：,,,XDL-B测厚仪,,,,量具编号：,,XH-JS-CHY-001,,,,量具类型：,,长度,,,测量周期：,,,

基准件名称:,,,校准片,,,,测量参数:,,Ni层厚度,,,,参数规格:,,9.1μm,,,,,,

日期,,10.08.02,10.08.02,10.08.02,10.08.03,10.08.03,10.08.03,10.08.04,10.08.04,10.08.04,10.08.05,10.08.05,10.08.05,10.08.06,10.08.06,10.08.06,10.08.07,10.08.07,10.08.07,10.08.08,10.08.08

时间,,10:00,10:05,10:10,10:15,10:20,10:25,10:30,10:35,10:40,10:45,10:50,10:55,11:00,11:05,11:10,11:15,11:20,11:25,11:30,11:35

编号,,1,2,3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20

测量值,1,9.140,9.380,9.360,8.940,9.330,9.450,8.940,9.590,9.620,9.450,9.790,9.280,9.280,9.280,9.004,9.655,8.401,8.559,8.509,8.971

,2,8.730,7.960,9.380,8.720,9.670,8.850,9.800,9.320,9.260,9.070,9.070,9.060,9.060,9.060,8.691,9.483,9.025,8.879,8.787,8.918

,3,8.870,9.250,8.780,9.850,9.330,9.710,8.650,9.450,8.950,8.690,9.110,9.350,9.350,9.350,9.178,9.508,9.450,8.752,8.852,8.422

,4,,,,,,,,,,,,,,,,,,,,

,5,,,,,,,,,,,,,,,,,,,,

平均值(X),,8.913,8.863,9.173,9.170,9.443,9.337,9.130,9.453,9.277,9.070,9.323,9.230,9.230,9.230,8.958,9.549,8.959,8.730,8.716,8.770

全距（R),,0.410,1.420,0.600,1.130,0.340,0.860,1.150,0.270,0.670,0.760,0.720,0.290,0.290,0.290,0.487,0.172,1.049,0.320,0.343,0.549

,,,,,,,,,,,,,,,,,,,,,,

,X,9.126,,UCLx=X+A2R,,9.744,,UCLr=D4R,,1.557,,A2,1.020,,D3,0,注：,"1）每次测量数据不少于三个。

2）每组测量数据数量应统一。",,,

,R,0.606,,LCLx=X-A2R,,8.508,,LCLr=D3R,,0.000,,,,,D4,2.57,,,,,

,,,,,,,,,,,,,,,,,,,,,,

X均值,,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126,9.126

UCLx,,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744,9.744

LCLx,,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508,8.508

R均值,,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606,0.606

UCLr,,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557,1.557

LCLr,,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000,0.000

由以上数据总得控制图,,,,,,,,,,,,,,,,,,,,,

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结果判定：,,所有X值

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