利用晶体生长软件FEMAG对蓝宝石晶体生长的仿真计算方法

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GeneralintroductionSapphireGrowthContent目前一页\总数三十三页\编于二十三点CONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.FrançoisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.目前二页\总数三十三页\编于二十三点CONFIDENTIALCzochralskiprocess目前三页\总数三十三页\编于二十三点CONFIDENTIALDirectionalSolidificationSystem目前四页\总数三十三页\编于二十三点CONFIDENTIALFloatingZoneProcess目前五页\总数三十三页\编于二十三点CONFIDENTIALSapphireGrowthbyCZandkyropoulos目前六页\总数三十三页\编于二十三点CONFIDENTIALSapphiregrowthbyHEM目前七页\总数三十三页\编于二十三点CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent目前八页\总数三十三页\编于二十三点CONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepoint目前九页\总数三十三页\编于二十三点CONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…目前十页\总数三十三页\编于二十三点CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditions目前十一页\总数三十三页\编于二十三点CONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

目前十二页\总数三十三页\编于二十三点CONFIDENTIALSapphireCrystalGrowthSimulation

目前十三页\总数三十三页\编于二十三点CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.目前十四页\总数三十三页\编于二十三点CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.目前十五页\总数三十三页\编于二十三点CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEM目前十六页\总数三十三页\编于二十三点CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal目前十七页\总数三十三页\编于二十三点CONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

system目前十八页\总数三十三页\编于二十三点CONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystem目前十九页\总数三十三页\编于二十三点CONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulation目前二十页\总数三十三页\编于二十三点FEMAGSoft©2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocess目前二十一页\总数三十三页\编于二十三点FEMAGSoft©2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterface目前二十二页\总数三十三页\编于二十三点FEMAGSoft©2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterface目前二十三页\总数三十三页\编于二十三点FEMAGSoft©2012VelocityfieldResultusingcoarsemeshResultusingBLMmesh目前二十四页\总数三十三页\编于二十三点CONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal目前二十五页\总数三十三页\编于二十三点CONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometry目前二十六页\总数三十三页\编于二十三点CONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnace目前二十七页\总数三十三页\编于二十三点CONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvection目前二十八页\总数三十三页\编于二十三点CONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimes目前二十九页\总数三十三页\编于二十三点CONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa)FEMAG-HEMExample目前三十页\总数三十三页\编于二十三点CONFIDENTIALAnisotropicThermalStress(HEMSapphireC-axis)FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa)FEMAG-HEMExample目前三十一页\总数三十三页\编于二十三点CONFIDENTI