外文翻译空调排气热回收实验半导体车间热回收型洁净空调系统

中文4564字出处：第七届亚洲气溶胶会议论文集.2011附录英文文献翻译AnExperimentonEnergyReductionofanExhaustAirHeatRecoveryTypeOutdoorAirConditioningSystemforSemiconductorManufacturingCleanRoomsKyung-HoonYoo1,Gen-SooSong1,Hyung-TaeKim1,Seung-WooSon2andDug-JunPark31NanoscaleContaminationControlLaboratory,KoreaInstituteofIndustrialTechnology(KITECH),1271-18,Sa-1-dong,Ansan-si,426-171,Gyeonggi-do,SouthKorea2SunglimPSCo.,1301,NamseongPlaza,345-30,Gasan-dong,Geumcheon-gu,Seoul,153-8023ShinsungENGCo.,404-1,Baekhyeon-dong,Bundang-gu,Seongnam-si,463-420ABSTRACTInrecentsemiconductormanufacturingcleanrooms,theenergyconsumptionofanoutdoorairconditioningsystemrepresentsabout45%ofthetotalairconditioningloadrequiredtomaintainacleanroomenvironment.Meanwhile,thereisalargeamountofexhaustairfromacleanroom.Fromanenergyconservationpointofview,heatrecoveryfromtheexhaustairisthereforeusefulforreducingtheoutdoorairconditioningloadforacleanroom.Inthepresentwork,anenergy-efficientoutdoorairconditioningsystemwasproposedtoreducetheoutdoorairconditioningloadbyutilizinganairwashertorecoverheatfromtheexhaustair.Theproposedoutdoorairconditioningsystemconsistedmainlyofapre-heater,anairwasher,twostagecoolingcoils,areheatingcoil,ahumidifierandtwoheatrecoverycoolingcoilsinsertedintotheairwasherandconnectedtoawetscrubber.Itwasshownfromthelab-scaleexperimentwithoutdoorairflowof1,000m3/hthattheproposedsystemwasmoreenergy-efficientforthesummerandwinteroperationsthananoutdoorairconditioningsystemwithasimpleairwasher.KEYWORDS:SemiconductorManufacturingCleanRoom,OutdoorAirConditioningSystem,AirWasher,HeatRecovery,EnergyReduction.IntroductionForrecentsemiconductormanufacturingcleanrooms,theenergyconsumptionofanoutdoorairconditioning(hereafterOAC)systemrepresentsabout45%ofthetotalairconditioningloadrequiredtomaintainacleanroomenvironment[1,2].Inaddition,thereisalargequantityofexhaustairfromacleanroom,leadingtotheconsequentlargeamountofwasteheat.Fromanenergysavingpointofview,heatrecoveryfromtheexhaustairisthereforehelpfulforreducingtheoutdoorairconditioningloadforacleanroom.Recently,airwashershavebeensometimesusedinOACsystemsforsemiconductormanufacturingcleanroomstocontrolhumidityandsimultaneouslyremovesuspendeddustsandgaseouscontaminantssuchasNH3,SOx,NOxandorganicgasesinincomingoutdoorair,asshowninFigure1.Meanwhile,sincetheexhaustaircarrieschemicallytoxicgaseousmatter,awetscrubberhastobeusedtohandleitbeforeitisdischargedtotheatmosphere.Inthewetscrubbertheheattransferbetweentheexhaustairandthescrubbingwateralwaystakesplace.Thetransferredheatdeservesutilizingtoheatorcooltheincomingoutdoorair,whichneedstobecontactedindirectlywiththescrubbingwaterbecauseofprotectionfromcontamination.Figure1.Schematicdiagramoftheproposedenergyefficientoutdoorairconditioningsystemwithanairwasherofheatrecoveryfunction.SofaronlyafewstudiesregardingtheairwasherwiththeheatrecoveryfunctionforsemiconductorcleanroomshavebeenconductedbyFujisawaetal.[3,4],Shiromaetal.[5]andYamamotoetal.[6].NoneoftheabovementionedpublicationsseemstohavebeendescribedsufficientlyindetailtoallowtheunderstandingoftheoverallenergyconsumptionandsavingperformanceoftheOACsystem.Theyfocusedonlyonheatrecoveryequipment,notontheOACsystemitself.Thereforetheeffectofairconditioningprocessconstraintssuchassupplyairconditionandthecombinationwithheating/coolingcoilsontheenergysavingperformanceofanenergy-efficientOACsystemdesignneedstobetakenintoaccount.Inthepresentwork,anenergy-efficientOACsystemwasproposedtoreducetheoutdoorairconditioningloadbyutilizingtheairwasherwithheatrecoveryfunctionbasedonthepreviousworkbyFujisawaetal.[3,4]andYamamotoetal.[6].TheproposedOACsystemconsistedmainlyofairfilters,apre-heater,anairwasher,twostagecoolingcoils,areheatingcoil,ahumidifier,andtwoheatrecoverycoolingcoilsinsertedintotheairwasherandconnectedtoawetscrubber,asshowninFigure2.Anexperimentwascarriedoutonthelab-scalewithanairflowof1000m3/hregardingenergyconsumptionandsavingoftheproposedenergy-efficientOACsystemcomparedwiththeOACsystemwithasimpleairwasher.ExperimentalMethodsFigure2.Schematicdiagramofthepresentexperimentalapparatusfortheenergy-efficientoutdoorairconditioningsystemwithheatrecoveryfunction.Figure2showstheschematicdiagramoftheoverallexperimentalapparatusfortheproposedenergy-efficientOACsystemtoevaluatetheenergyconsumptionandsavingperformance.TheexperimentalapparatusforthesimpleairwasherOACsystemwithnoheatrecoveryconsistedofacleanwindtunnel,aHEPAfilter,aconstanttemperatureandhumiditychamber,anairwasher,aneliminator,twostagecoolingcoils,areheatingelectricheater,ahumidifierandafan.Asfortheexperimentalapparatusfortheenergy-efficientOACsystemwithheatrecoveryfunctionawetscrubber,anintermediateheatexchanger,primaryandsecondarywaterpumps,twocooling/heatingcoilsintheairwasherandasmallcleanroomasshowninFigure3wereaddedtothatoftheabovementionedsimpleairwasherOACsystem.Table1showstheexperimentalconditionofthepresentenergy-efficientOACsystemwithheatrecoveryfunction.Theairwasherwasinstalledinthecleanwindtunnelwiththecrosssectionof0.330.33m2,andhad2modulescomprisedof4banksof48nozzles.Thepresentnozzleswithouterdiameterof1/8insprayedcitywaterwith0.7MPainbothofthecounter-andco-currentdirectionssimultaneously.Fortheenergy-efficientOACsystemacoolingcoilwasadditivelyinsertedinthemiddleofairwashermoduleinordertorecoverwasteheatthroughtheintermediateheatexchangerfromtheexhaustairinthewetscrubberanduseittoheatorcooltheincomingoutdoorair,asshowninFigure3.Asforthereheatingcoilandsteamhumidifieranelectricheaterandanelectrode-typesteamhumidifierwereusedrespectivelyinsteadofafossilfuelboilertounifythemeasurementintoelectricpower.Theelectricpowersensorswereinstalledtomeasuretheelectricpowerconsumption,asshowninFigure1and2.ALMEMOMA5990-2dataloggerandsensorswereinstalledtomeasuretemperatureandrelativehumidityinthewindtunnel.Thetemperatureandhumiditysensorwasinstalledattheeachoutletoftheconstanttemperatureandhumiditychamber,theairwasher,thecoolingcoil,thereheatingheaterandthehumidifiertoinvestigatetheairconditioningprocessandrecoveredheatoftheOACsystemonapsychrometricchart.Table1ExperimentalconditionofthepresentexhaustairheatrecoverytypeOACsystem.ResultsandDiscussionFigure4showstheexperimentalresultsofthepsychrometricprocessforthesimpleairwasherOACsystemandtheenergy-efficientOACsystemforthewinteroperationshowninTable1.BecausethetwoOACsystemshavethesameupstreamconditions,theconstanttemperatureandhumiditychambershowninFigure3createdtheinletconditionofairwasher,16.5oC,9%RH,asshowninFigure4.ItcanbeseeninFigure4thattheenergy-efficientOACsystemrecoveredspecificenthalpy3kJ/kgfromtheexhaustair.Thecorrespondingrecoveredheatis1.01kwfor1000m3/h.Figure4.Variationoftheairconditioningprocessonpsychrometricchartbyheatrecoveryforthewinteroperation.Figure5.Variationoftheairconditioningprocessonpsychrometricchartbyheatrecoveryforthesummeroperation.Figure5showstheexperimentalresultsofthepsychrometricprocessforthesimpleairwasherandtheenergy-efficientOACsystemsforthesummeroperationshowninTable1.ItcanbeseeninFigure5thattheenergy-efficientOACsystemrecovered15.5kJ/kgfromtheexhaustair,correspondingto5.18kWfor1000m3/h.Table2summarizestheexperimentalresultsofrecoveredheat,electricpowerconsumptionandsavingforthepresentOACsystemsforsemiconductorcleanroomswiththeoperationalconditionofTable1.Itcanbeseeninthetablethattherecoveredheatleadstotheelectricpowerreductionforthewinterandsummeroperations.Itisalsoobservedforthewinterandsummeroperationsthatalthoughtherecoveredheatforthesummeroperationismuchlargerthanthatforthewinteroperationthereducedelectricpowerforthesummercaseissmallerthanthatforthewintercase.InadditionthecorrespondingreducedpowerforthesummercaseissmallcomparedtotherecoveredheatmainlybecauseoftheCOPofchiller.Ontheotherhand,asforthemidtermoperationtherecoveredheatdoesnotmakereductionofelectricpowerbecausetheamountofheatrecoveredistoosmalltosurpasstheadditivepowerconsumptionduetoprimary/secondarypumpsandincreasedpressuredropofinsertedcoolingcoilsintheairwasherforheatrecoveryoperation.Table2SummaryofenergyconsumptionandheatrecoveryCONCLUSIONFollowingobservationsareobtainedfromthepresentexperimentalresultsontherecoveredheatandtheenergyconsumptionandsavingforthesimpleandenergy-efficientairwashertypeOACsystemsforsemiconductormanufacturingcleanrooms.(1)Theproposedenergy-efficientOACsystemrecoveredsomeofthewasteheatoftheexhaustairandsavedtheconsequentelectricpowerconsumptionforthewinterandsummeroperationscomparedwiththesimpleairwasherOACsystem.(2)Contrarytothewinteroperationthereducedpowerissmallerforthesummercasethantherecoveredheat,mainlybecauseoftheCOPofchiller.(3)Forthemidtermoperationtherecoveredheatwasnotabletosurpasstheadditivepowerconsumptionduetoheatrecoveryoperationandsavetheenergyconsumption.ACKNOWLEDGMENTThepresentworkwassupportedpartlybyGyeonggiInstituteofScienceandTechnologyPromotionandpartlybyKoreanSmallandMediumBusinessAdministration.REFERENCES[1]Hu,S.C.;Wu,J.S.;Chan,D.Y.L.;Hsu,R.T.C.;Lee,J.C.C.EnergyandBuildings2008,40,1765-1770.[2]Tsao,J.M.;Hu,S.C.;Chan,D.Y.L.;Hsu,R.T.C.;Lee,J.C.C.EnergyandBuildings2008,40,1387-1393.[3]Fujisawa,L.;Moriya,M.;Yosa,K.;Ikuta,M.;YamamotoH.;Nabeshima.Y.InProc.ofthe19thAnnualTechnicalMeetingonAirCleaningandContaminationControl;JapanAirCleaningAssociation:Tokyo,2001;pp166-168(inJapanese).[4]Fujisawa,S.;Moriya,M.;Yosa,K.;Nishiwaki,S.;YamamotoH.;Katsuki,T.;Nabeshima,Y.;Oda,H.InProc.ofthe20thAnnualTechnicalMeetingonAirCleaningandContaminationControl;JapanAirCleaningAssociation:Tokyo,2002;pp162-165(inJapanese).[5]Shiroma,S.;Tomita,H.;Yoshizaki,S.;Suzuki,K.InProc.ofthe20thAnnualTechnicalMeetingonAirCleaningandContaminationControl;JapanAirCleaningAssociation:Tokyo,2002;pp260-262(inJapanese).[6]YamamotoH.;Katsuki,T.;Fujisawa,S.;Yosa,K.;Nishiwaki,S.;Nabeshima,Y.;Oda,H.InProc.ofthe20thAnnualTechnicalMeetingonAirCleaningandContaminationControl;JapanAirCleaningAssociation:Tokyo,2003;pp151-154(inJapanese).译文空调排气热回收实验半导体车间热回收型洁净空调系统Kyung-HoonYoo1,Gen-SooSong1,Hyung-TaeKim1,Seung-WooSon2andDug-JunPark31NanoscaleContaminationControlLaboratory,KoreaInstituteofIndustrialTechnology(KITECH),1271-18,Sa-1-dong,Ansan-si,426-171,Gyeonggi-do,SouthKorea2SunglimPSCo.,1301,NamseongPlaza,345-30,Gasan-dong,Geumcheon-gu,Seoul,153-8023ShinsungENGCo.,404-1,Baekhyeon-dong,Bundang-gu,Seongnam-si,463-420摘要近年来半导体制造清洁房间，因为洁净空调系统中还有大量的排气从洁净室内排出，室外空调系统的能源消费占了大约45%的总空调负荷用来维持洁净室内的洁净等级要求。从节能的角度来看，从空调排气中进行热回收可以减少洁净室的空调负荷。目前，提出了一个有助于户外空调系统节能的方案既通过利用空气过滤器对空调排气进行热回收的方法来减少室外空调负荷。模拟的室外空调系统组成部分包括：预热器，一个空气净化器，两级冷却线圈、加热线圈，插入到空气净化器和一个湿式除尘器之间的加湿器和两排热回收冷却线圈。实验室模拟新风量1000m3/h，该实验结果显示该模拟系统的夏季和冬季的空调运行工况和只具有一个简单的空气净化器的室外空调系统相比要更加节能。关键词:半导体制造洁净室、室外空调系统,减少空气垫圈、热回收、能源。实验过程介绍近年来半导体制造清洁房间，因为洁净空调系统(以下OAC)中还有大量的排气从洁净室内排出，室外空调系统的能源消费占了大约45%的总空调负荷用来维持洁净室内的洁净等级要求。此外,还有大量的废气从洁净室空气,导致随之而来的大量的废热。从节能的角度来看,从空调排气中进行热回收有助于减少户外洁净室的空调负荷。近年来，空气垫圈已经在OAC系统中使用，用于半导体制造洁净室控制湿度,同时去除引入室内的新风中的悬浮粉尘和气态污染物如NH3、SOX、NOX和有机气体。与此同时,由于排气携带化学有毒气体物质,这些排气要经过湿式洗涤器的处理才能排放到大气中。在湿式洗涤器处理排气的过程中总会伴有排气与清洁用水之间的换热过程。这部分被转移的热量应该收集并加以利用来加热或冷却室外空气,同时需要考虑的是洗涤水对新风的间接污染问题。图1，热回收室外空调系统中空气净化器原理图到目前为止只有Fujisawa[3,4],Shiroma[5]和Yamamoto[6]等少数人研究有关半导体洁净室空调系统中空气洗涤器的热回收功能。以上提到的出版物似乎已经足够详细描述并有助于整体理解OAC系统能源消耗和其节能性。他们只关心热回收设备,而不是OAC系统本身。因此其效果受到空调处理过程的约束如送风状态和加热/冷却线圈的组合对OAC系统节能性的影响因此节能OAC系统的设计需要将以上因素考虑在内。在目前的工作,是基于Fujisawa[3,4]和Yamamoto[6]在曾经的工作中对节能OAC系统通过利用空气过滤器的回收功能以减少室外空调负荷这一课题的研究基础之上。提出OAC系统主要由空气过滤器空气预热器、空气过滤,两级冷却线圈、加热线圈,一个加湿器,和插入到空气净化器和一个湿式除尘器之间的加湿器和两排热回收冷却线圈,如图1所示。实验室模拟新风量1000m3/h，该实验结果显示该模拟系统的夏季和冬季的空调运行工况和只具有一个简单的空气净化器的室外空调系统相比要更加节能。试验方法图2，节能室外空调系统热回收功能实验装置的原理图图2显示了用来评估整个节能OAC系统能源消耗和其热回收性能的实验装置的原理图。简单的实验仪器无热回收空气垫圈OAC系统由一个干净的风洞,高效过滤器,恒温恒湿室,一个空气洗涤器,消除器,两级冷却线圈、加热电加热器、加湿器和一个风扇。至于实验装置的节能OAC系统在上述简单系统中加入了空气洗涤器OAC系统热具有回收功能的湿式洗涤器,一个中间换热器,主要和次要水泵、空气洗涤器中的两个冷却/加热线圈和一个小洁净室如图2所示。表1显示了实验条件的节能OAC系统热回收功能。空气洗涤器是安装在清洁风洞中的截面尺寸为0.33X0.33m2,由4排48个喷嘴分成两个模块组成。使用喷嘴外直径为1/8，对压力为0.