TFTLCD的制程及未来发展趋势课件

TFTLCD的制程及未来发展趋势课件1

2TFTLCD的制程及未来发展趋势课件3TFT-LCD產品的基本構成元件基本構造背光板(BACKLIGHT)下偏光片(DOWNPOLARIZER)薄膜基板(TFTSUBSTRATE)液晶(LIQUIDCRYSTAL)彩色濾光片(COLORFILTER)上偏光片(UPPOLARIZER)TFT-LCD產品的基本構成元件基本構造4TFT-LCD構造剖面圖下偏光片薄膜(TFT)基板液晶電晶體彩色濾光片上偏光片線路TFT-LCD構造剖面圖下偏光片薄膜(TFT)基板液晶電晶5TFT-LCD的顯示原理(一)TFT-LCD的顯示原理(一)6TFT-LCD的顯示原理(二)~~彩色濾光片上偏光片下偏光片背光源TFT基板液晶層TFTTurnOFFTFTTurnON光源經液晶層扭轉90°

TFT-LCD的顯示原理(二)~~彩色濾光片上偏光片下7TFT-LCD的顯示原理(三)彩色濾光片上偏光片下偏光片光源TFT基板液晶TFT-LCD的顯示原理(三)彩色濾光片上偏光片下偏光8TFT-LCD的驅動原理紅藍綠黃白紫青DATADRIVERICSCANDRIVERICTFTRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBTFT-LCD的驅動原理紅藍綠黃白紫青DATADRIVE9TFTLCD的制程及未来发展趋势课件10TFT(Array)Thin-FilmTransistorLC(Cell)LiquidCrystalLCMModuleArray:電晶體(矩形陣列)TFT基板生成Cell:面板生成(Panel)Module:產品模組組裝製造流程概述(一)TFT(Array)LC(Cell)LCMArray:電晶體11製造流程概述(二)薄膜ThinFilm黃光PhotoColorFilterOK蝕刻Etch測試ArrayTest基板投入CELLTFTProcess製造流程概述(二)薄膜黃光ColorOK蝕刻測試基板投12TFT的製造流程概述(一)BOX5道光罩薄膜黃光蝕刻素玻璃TFT基板TFT的製造流程概述(一)BOX5道光罩薄膜黃光蝕刻素玻13鍍膜(sputter,cvd)上光阻(coater)光罩(reticle)顯影(developer)顯影液對準,曝光(stepper)蝕刻(etch)去光阻液stripper去光阻酸,氣體鍍下一層膜TFT的製造流程概述(二)鍍膜(sputter,cvd)上光阻(coater)光罩(r14上光阻(coating)鍍第一層膜空白玻璃酸,氣體光罩對準,曝光(stepping)顯影液顯影(developing)蝕刻(etching)TFT的循環製程圖解1上光阻(coating)鍍第一層膜空白玻璃酸,光罩對15顯影去光阻液去光阻(striping)鍍第二層膜上光阻對準,曝光光罩顯影液酸,氣體蝕刻TFT的循環製程圖解2顯影去光去光阻(striping)鍍第二層膜上光阻對16去光阻液光阻剝離鍍第三層膜,請依之前所示範的方法舉一反三,自行模擬想像TFT的循環製程圖解3去光光阻剝離鍍第三層膜,TFT的循環製程圖解317CELL的製造流程概述(一)TFT基板(TFTSubstrate)彩色濾光片(ColorFilter)CELL的製造流程概述(一)TFT基板(TFTSub18CELL的製造流程概述(二)PI塗佈PICoatingPI塗佈PICoating配向Rubbing配向RubbingSpacer灑佈SpacerSpray框膠SealantDispenser點銀膠AgDispenser對位Misalignment熱壓Hotpress切割裂片Scribe&Break液晶注入LCinjection封口Endsealing再配向Isotropic偏光片貼片PolarizerAttachment加壓脫泡AutoClaveCell測試CelltestTFTCFCELL的製造流程概述(二)PI塗佈PI塗佈配向配19TFTLCD的制程及未来发展趋势课件20穿透式TFTLCD側視圖PrintedcircuitboardPrismsheet偏光板TFT框膠TABDriverLSI擴散板Spacer分光片反射板側光偏光板畫素電極儲存電容液晶配向膜共通電極OvercoatColorfilterBlackmatrix玻璃基板穿透式TFTLCD側視圖PrintedPrism偏光板TF21螢光灯泡背光模組偏光板偏光板TFTArray液晶層ColorFilterTFT-LCD的剖面圖螢光灯泡背光模組偏光板偏光板TFTArray液晶層Colo22畫素結構圖何謂畫素(Pixel)?畫素結構圖何謂畫素(Pixel)?23610mm720mm顯示色彩學(一)畫素(PIXEL)★構成螢幕上所有顏色的單位主要以三元色為主(紅、綠、藍)★其中紅、綠、藍三色則稱為子畫素畫素子畫素彩色濾光片ColorFilter610mm720mm顯示色彩學(一)畫素(PIXEL24紅藍綠黃白紫青顯示色彩學(二)紅藍綠黃白紫青顯示色彩學(二)25不同畫素的組合及應用MosaicTriangleStrip適合AV動畫，小尺寸panel之設計。常用於Monitor，NB等大尺寸Panel。不同畫素的組合及應用MosaicTriangleStrip適206810121416189.4”8.4”7.8”6.5”12.1”11.3”10.4”15.0”14.1”13.3”12.1”10.4”14.1”15.0”DiagonalSizeofScreen(inch)PixelPitch(mm)8590951001051101201300.15140150160170115125(ppi)12.1”12.1”14.1”15.0”VGA(640x480)(921,600)SVGA(800x600)(1.44M)XGA(1024x768)(2.36M)SXGA+(1400x1050)(4.41M)UXGA(1600x1200)(5.76M)QXGA(2048x1536)(9.44M)15.0”17.0”13.3”畫素與尺寸規格06810121416189.4”8.27

28CrGlassInputColorFilterOutputBlackMatrixRsub-pixelGsub-pixelBsub-pixelandthenITOPositiveresistCoating,Dosing,Developing,Post-baking,Etching,Stripping.RNegativeresistCoating,Dosing,Developing,Post-baking.GNegativeresistCoating,Dosing,Developing,Post-baking.BNegativeresistCoating,Dosing,Developing,Post-baking.CuttingFinalInspectionColorFilter的製造流程(二)CrGlassInputColorFilterOut29ColorFilter的ProfileColorFilter的Profile30

31TFTLCD的制程及未来发展趋势课件32TFTLCD的制程及未来发展趋势课件33TFTLCD的制程及未来发展趋势课件34TFTLCD的制程及未来发展趋势课件35TFTLCD的制程及未来发展趋势课件36TFTLCD的制程及未来发展趋势课件37TFTLCD的制程及未来发展趋势课件38LCDTVsPureTVsProductsmanufacturedbyTVbrandsandsoldthroughconventionalTVdistribution(consumer)channelMulti-FunctionMonitors(MFMs)OtherproductssoldasLCDTVsbyPCbrandsthroughconsumerchannel=MFM/CEOtherproductssoldasLCDTVsbyPCbrandsthroughITchannel=MFM/ITLCDMonitorsProductsmanufacturedbyPCbrandsandsoldthroughITdistributionchannelLCDTV的定義LCDTVsLCDTV的定義39●

AVEnjoymentAnytimeAnyplaceInthegym●

Free-StyleSettingtoMatchAnyAVViewingSituationInthekitchenInthecarBedroomTVPersonalTVAVEntertainmentEasytocarryLCDTV未來的應用(一)●AVEnjoymentAnytimeAnyplac40

InthelivingroomInthepersonal&diningroomInthebedroomLCDTV未來的應用(二)

41大尺寸TFT-LCD的發展趨勢PanelSizeApplicationNBMonitorTVNBTVMonitor1.HighBrightness2.WeightReducing3.HighResolution4.PowerConsumptionSaving1.HighColorPurity2.WideViewAngle3.FasterResponseTime1.HighResolution2.HighColorSaturation3.HighContrastResolutionApplicationNBMonitorTV大尺寸TFT-LCD的發展趨勢PanelSizeAppli42TFT-LCD的願景-ReducedmaterialcostHigherthroughputequipmentsLargersubstratewithimprovedproductivityCostReductionStandardizationReplacingCRTProducts:Monitor,LCD-TV-Creatingnewapplicationarea:Game,Web-Pad,PDA,HHP,etc.MarketGrowthEvolutionofTechnologyHigherPerformanceCRTCompatibleCost:$10/inchVolume:100MunitsLowerCostProcessProductGlassPartsTFT-LCDBusinesswillexceedCRTin2005

TFT-LCD的願景-Reducedmaterial43演讲完毕，谢谢观看！演讲完毕，谢谢观看！44TFTLCD的制程及未来发展趋势课件45

46TFTLCD的制程及未来发展趋势课件47TFT-LCD產品的基本構成元件基本構造背光板(BACKLIGHT)下偏光片(DOWNPOLARIZER)薄膜基板(TFTSUBSTRATE)液晶(LIQUIDCRYSTAL)彩色濾光片(COLORFILTER)上偏光片(UPPOLARIZER)TFT-LCD產品的基本構成元件基本構造48TFT-LCD構造剖面圖下偏光片薄膜(TFT)基板液晶電晶體彩色濾光片上偏光片線路TFT-LCD構造剖面圖下偏光片薄膜(TFT)基板液晶電晶49TFT-LCD的顯示原理(一)TFT-LCD的顯示原理(一)50TFT-LCD的顯示原理(二)~~彩色濾光片上偏光片下偏光片背光源TFT基板液晶層TFTTurnOFFTFTTurnON光源經液晶層扭轉90°

TFT-LCD的顯示原理(二)~~彩色濾光片上偏光片下51TFT-LCD的顯示原理(三)彩色濾光片上偏光片下偏光片光源TFT基板液晶TFT-LCD的顯示原理(三)彩色濾光片上偏光片下偏光52TFT-LCD的驅動原理紅藍綠黃白紫青DATADRIVERICSCANDRIVERICTFTRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBRGBTFT-LCD的驅動原理紅藍綠黃白紫青DATADRIVE53TFTLCD的制程及未来发展趋势课件54TFT(Array)Thin-FilmTransistorLC(Cell)LiquidCrystalLCMModuleArray:電晶體(矩形陣列)TFT基板生成Cell:面板生成(Panel)Module:產品模組組裝製造流程概述(一)TFT(Array)LC(Cell)LCMArray:電晶體55製造流程概述(二)薄膜ThinFilm黃光PhotoColorFilterOK蝕刻Etch測試ArrayTest基板投入CELLTFTProcess製造流程概述(二)薄膜黃光ColorOK蝕刻測試基板投56TFT的製造流程概述(一)BOX5道光罩薄膜黃光蝕刻素玻璃TFT基板TFT的製造流程概述(一)BOX5道光罩薄膜黃光蝕刻素玻57鍍膜(sputter,cvd)上光阻(coater)光罩(reticle)顯影(developer)顯影液對準,曝光(stepper)蝕刻(etch)去光阻液stripper去光阻酸,氣體鍍下一層膜TFT的製造流程概述(二)鍍膜(sputter,cvd)上光阻(coater)光罩(r58上光阻(coating)鍍第一層膜空白玻璃酸,氣體光罩對準,曝光(stepping)顯影液顯影(developing)蝕刻(etching)TFT的循環製程圖解1上光阻(coating)鍍第一層膜空白玻璃酸,光罩對59顯影去光阻液去光阻(striping)鍍第二層膜上光阻對準,曝光光罩顯影液酸,氣體蝕刻TFT的循環製程圖解2顯影去光去光阻(striping)鍍第二層膜上光阻對60去光阻液光阻剝離鍍第三層膜,請依之前所示範的方法舉一反三,自行模擬想像TFT的循環製程圖解3去光光阻剝離鍍第三層膜,TFT的循環製程圖解361CELL的製造流程概述(一)TFT基板(TFTSubstrate)彩色濾光片(ColorFilter)CELL的製造流程概述(一)TFT基板(TFTSub62CELL的製造流程概述(二)PI塗佈PICoatingPI塗佈PICoating配向Rubbing配向RubbingSpacer灑佈SpacerSpray框膠SealantDispenser點銀膠AgDispenser對位Misalignment熱壓Hotpress切割裂片Scribe&Break液晶注入LCinjection封口Endsealing再配向Isotropic偏光片貼片PolarizerAttachment加壓脫泡AutoClaveCell測試CelltestTFTCFCELL的製造流程概述(二)PI塗佈PI塗佈配向配63TFTLCD的制程及未来发展趋势课件64穿透式TFTLCD側視圖PrintedcircuitboardPrismsheet偏光板TFT框膠TABDriverLSI擴散板Spacer分光片反射板側光偏光板畫素電極儲存電容液晶配向膜共通電極OvercoatColorfilterBlackmatrix玻璃基板穿透式TFTLCD側視圖PrintedPrism偏光板TF65螢光灯泡背光模組偏光板偏光板TFTArray液晶層ColorFilterTFT-LCD的剖面圖螢光灯泡背光模組偏光板偏光板TFTArray液晶層Colo66畫素結構圖何謂畫素(Pixel)?畫素結構圖何謂畫素(Pixel)?67610mm720mm顯示色彩學(一)畫素(PIXEL)★構成螢幕上所有顏色的單位主要以三元色為主(紅、綠、藍)★其中紅、綠、藍三色則稱為子畫素畫素子畫素彩色濾光片ColorFilter610mm720mm顯示色彩學(一)畫素(PIXEL68紅藍綠黃白紫青顯示色彩學(二)紅藍綠黃白紫青顯示色彩學(二)69不同畫素的組合及應用MosaicTriangleStrip適合AV動畫，小尺寸panel之設計。常用於Monitor，NB等大尺寸Panel。不同畫素的組合及應用MosaicTriangleStrip適7006810121416189.4”8.4”7.8”6.5”12.1”11.3”10.4”15.0”14.1”13.3”12.1”10.4”14.1”15.0”DiagonalSizeofScreen(inch)PixelPitch(mm)8590951001051101201300.15140150160170115125(ppi)12.1”12.1”14.1”15.0”VGA(640x480)(921,600)SVGA(800x600)(1.44M)XGA(1024x768)(2.36M)SXGA+(1400x1050)(4.41M)UXGA(1600x1200)(5.76M)QXGA(2048x1536)(9.44M)15.0”17.0”13.3”畫素與尺寸規格06810121416189.4”8.71

72CrGlassInputColorFilterOutputBlackMatrixRsub-pixelGsub-pixelBsub-pixelandthenITOPositiveresistCoating,Dosing,Developing,Post-baking,Etching,Stripping.RNegativeresistCoating,Dosing,Developing,Post-baking.GNegativeresistCoating,Dosing,Developing,Post-baking.BNegativeresistCoating,Dosing,Developing,Post-baking.CuttingFinalInspectionColorFilter的製造流程(二)CrGlassInputColorFilterOut73ColorFilter的ProfileColorFilter的Profile74

75TFTLCD的制程及未来发展趋势课件76TFTLCD的制程及未来发展趋势课件77TFTLCD的制程及未来发展趋势课件78TFTLCD的制程及未来发展趋势课件79TFTLCD的制程及未来发展趋势课件80TFTLCD的制程及未来发展趋势课件81TFTLCD的制程及未来发展趋势课件82LCDTVsPureTVsProductsmanufacturedbyTVbrandsandsoldthroughconventionalTVdistribution(consumer)channelMulti-FunctionMonitors(MFMs)OtherproductssoldasLCDTVsbyPCbrandsthroughconsumerchannel=MFM/CEOtherproductssoldasLCDTVsbyPCbrandsthroughITchannel=MFM/ITLCDMonitorsProductsmanufacturedbyPCbrandsandsoldthroughITdistributionchannelLCDTV的定義LCDTVsLCDTV的定義83●

AVEnjoymentAnytimeAnyplaceInthegym●

Free-StyleSettingtoMatchAnyAVViewingSituationInthekitchenInthecarBedroomTVPersonalTVAVEntertain