阳极钛篮排布对铜厚均匀性的影响

1、2ME技幸艮告害文件做1禧傅送和禧做成善核.批准I EmailZPTIN作成李吉平2008/6/2抄送1禧傅送和禧做成善核.批准I EmailZPTIN作成李吉平2008/6/2抄送经理/副经理割亥| FAX批准禧核心 技彳桁内容描述钛篮撮布生寸导同厚均匀性影警言平估目不票 指檬夹膜短路幸艮康率0.05%幸艮告 摘要现状：3#PTIN 3月份因改善汽车板铜厚均匀性问题，有将阳檀两端高电位处各增加了一个钛篮，可 能导致高电位处厚偏厚，畲出现夹膜短路的冏题。技椭占顶厚均匀性控制。QDC燮化量:Q :夹膜短路幸艮康0.096%; Q1夹膜短路幸艮率0.05%D :不燮C :不燮、任意避取3#P-Ti

2、璐弱同缸，将探取抽取不同敷量圈亟E典不抽取圈亟E高霜位之莹寸比: ff估其ffiffi厚分W,WK方案如下：ff估熊ff估特黏板特黏置佩件ff估方式取敷方式敷撮分析金同厚度分怖不抽取陶橄缺E取一端高雷 位淇睛式金同厚尺寸16” X18”底会同H/HOZ光会同板16ASF,75Min;金同控制4条件 正常生走4条件光金同板-飙-g金同厚度梭 测鼬量每墟板正反面上中下部共63觥偏差,平值偏差,COV举寸比方案 。又 原理金同厚度分怖抽取1举邙易植 缺E取一端高 雷位淇睛式金同厚尺寸16” X18”底会同H/HOZ光会同板16ASF,75Min;金同控制条件 正常生走条件光金同板-飙-g金同厚度梭

3、测鼬量每墟板正反面上中下部共63觥偏差,平值偏差,COV举寸比金同厚度分怖抽取2耕嬲 缺E取一端高 雷位淇睛式金同厚尺寸16” X18”底会同H/HOZ光会同板16ASF,75Min; 金同控制条件 正常生走条件光金同板-飙-g金同厚度梭 测鼬量每墟板正反面上中下部共63觥偏差,平值偏差,COV举寸比ffiffi厚分怖淇斌期康如下箪位:um）: 分W:3634.934.134.333.333.33332.935.837.2 34.535.134.434.234.634.734.926.334.433.833.432.932.5323231.633.9top面35.4 31.631.931.53

4、0.931.23131.332.1bom隹D34.634.133.933.233.332.732.432.231.4std2.34534.6 31.330.630.3303029.930.330.3std2.655836.334.734.334.234.13432.731.433.7ave33.75,)33.731.530.430.230.329.729.329.729.5ave32.22536.33534.53433.433.232.332.733.2max41.534.4 30.83029.83030.329.629.130max38.737.336.334.43434.634.333.5

5、33.533.2min31.433.6 32.431.931.53130.430.630.330.8min26.340.639.537.939.538.939.438.538.741.5cov6.95%38.7 3736.336.136.235.93635.837.3cov8.24%黄色底纹数撮靠近板遇，左侧数撮靠近缸底部，右侧数撮靠近夹黠遇（未取陶檀板）39.43837.63736.6363534.436.438.736.635.835.335.335.135.535.838.736.33635.234.634.734.934.233.135.1top面35.831.430.830.232.

6、631.330.631.133.8bom隹D33.135.334.433.133.834.234.132.633std2.2334.931.83030.329.829.429.630.132.7std2.92135.434.733.43333.933.732.931.533.7ave33.35!)35.131.229.629.928.829.129.129.131.2ave31.465方案33.933.932.732.233.132.832.230.932.8max39.434.129.729.128.728.928.628.628.930.4max38.8及结果31.332.130.930.

7、73130.930.729.631.2min29.6343028.628.728.328.32828.529.4min2831.130.329.829.629.830.130.931.835cov6.68%38.8 33.233.429.929.129.530.329.731.5cov9.28%黄色底觐蒙靠近板逐，左侧数撮靠近缸底部,右侧数撮靠近夹黏逐（取1封陶槌板）26.426.627.525.925.926.626.726.528.326.726.226.626.927.327.427.828.533.127.126.726.526.326.326.226.226.327.2top面25.

8、725.325.525.725.826.22626.627.8bom隹D28.828.227.927.627.427.727.227.128.4std3.51326.726.225.926.2262626.126.728.2std2.1431.930.529.529.42928.628.127.627.7ave30.0828.227.327.226.926.726.72727.228.4ave28.3134.433.532.831.931.13029.328.730.5max38.729.428.427.827.927.727.827.927.830.9max3536.135.134.333.

9、533.532.831.629.732.8min25.931.129.329.228.528.328.628.428.432.4min25.338.737.235.935.835.935.334.533.235.1cov11.7%3532.832.631.63232.431.932.234.5cov8.53%黄色底欲数撮靠近板遽，左侧数撮靠近缸底部，右侧数撮靠近夹黏遽（取2封陶槌板）D:iknc毓色底ft蜻融 1J879.doc4条件面次MAXMIN偏差STDEVCOV! AVER靠遑AVER未取陶板TOP面41.531.410.12.356.95%33.7639.39BOM面38.726.3

10、12.42.668.24%32.2336.59取1S陶板TOP面39.429.69.82.236.68%33.3630.93BOM面38.82810.82.929.28%31.4731.71取2S陶板TOP面38.725.912.83.5111.7%30.0826.71BOM面3525.39.72.148.53%28.3127.83方案 及结 果未取|方案 及结 果未取|1橄板一-取1坐寸H橄板*取2坐寸n橄板三彳重4条件分同厚分怖波重力圈数撮分析：皇吉果会同厚敷撮分析结果可以看出：在相同会同缸相同雷流罩位畤内，未取陛檀板ffiffi厚均匀性 重交好，取2 s板金间均匀性最差；取1莹寸陛檀板导间均匀性重交未取陛檀生走板稍差，但导同 厚分怖檀差范圉最小。皇吉果考察1、#P-Tinffi缸就:E辰度一般比生座板的辰度都大，故生座板下端所分搪的陛雷流重交中上端 多，会同厚稍厚，缸遑高雷位匾域多容易毒致会同雕子供雁遏量，会同偏厚冏题，通遏）成 少陛，可降低整髓会同厚及靠近遑条位厚遏厚冏题。考察2、任意避取3#P-Ti碱缸，探取抽取不同敷量陛就篮典不抽取K低雷位之S比，其 估其分破同厚分怖，结果舄取1S陛生走板导同厚分布，导同厚分怖波重力范圉最小。在3#P-Tinffi缸抽取1 SK可以改善ffiffi厚分