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1、Flexible High-Output Nanogenerator Based on Lateral ZnO Nanowire Array 基于弹性Nanogenerator血库的横向氧化锌纳米线阵列Guang Zhu, Rusen Yang, Sihong Wang, and Zhong Lin Wang* 广朱、Rusen得来,杨泗洪县得来王建民,王建民、众林*School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245材料科学与工程学院,

2、佐治亚理工学院,亚特兰大,乔治亚州30332 - 0245ABSTRACT We report here a simple and effective approach, named scalable sweeping-printing-method, for fabricating flexible high-output nanogenerator (HONG) that can effectively harvesting mechanical energy for driving a small commercial electronic component. The techniqu

3、e consists of two main steps. In the first step, the vertically aligned ZnO nanowires (NWs) are transferred to a receiving substrate to form horizontally aligned arrays. Then, parallel stripe type of electrodes are deposited to connect all of the NWs together. Using a single layer of HONG structure,

4、 an open-circuit voltage of up to 2.03 V and a peak output power density of 11 mW/cm3 have been achieved. The generated electric energy was effectively stored by utilizing capacitors, and it was successfully used to light up a commercial light-emitting diode (LED), which is a landmark progress towar

5、d building self-powered devices by harvesting energy from the environment. This research opens up the path for practical applications of nanowire-based piezoelectric nanogeneragtors for self-powered nanosystems.摘要本文报告一个简单而有效的方法,可扩展的sweeping-printing-method命名,因为制作灵活 (香港)nanogenerator血库,能有效地收获机械能量来驱动小

6、型商业电子器件。该技术包括两个 主要的步骤。在第一步的氧化锌奈米线垂直对齐(NWs)转移到一个接收基体形成横向对齐的 数组。然后,平行条纹沉积类型的电极连接所有的新创建在一起。采用单层结构的香港,一个 开路电压2.03 V,输出功率密度峰值11 mW / cm3已经达成。所产生的电力能源有效利用电 容器存储,并成功用于照亮一个商业发光二极管,这是一个具有里程碑意义的进步对建立自我 动力的设备被收获能量从环境。该研究为实际应用nanowire-based路径的压电 nanogeneragtors nanosystems 为自我动力。KEYWORDS Nanogenerator, ZnO, nan

7、owire, light-emitting diode, self-powering 关键词Nanogenerator、氧化锌和纳米线、发光二极管、self-poweringEnergy harvesting is critical to achieve independent and sustainable operations of nanodevices, aiming at building self-powered nanosystems. 1-3 Taking the 能量收获是关键和可持续经营实现独立设备,以建设nanosystems自我动力。1 - 3以 forms of ir

8、regular air flow/vibration, ultrasonic waves, body movement, and hydraulic pressure, mechanical energy is ubiquitously available in our living environment. It covers a wide range of magnitude and frequency from cell contrac-tion to ocean waves. The mechanical-electric energy conver-sion has been dem

9、onstrated using piezoelectric cantilever working at its resonating mode. 4-7 However, the applicabil-ity and adaptability of the traditional cantilever based energy harvester is greatly impeded by the large unit size, large triggering force and specific high resonance frequency. Recently, a series o

10、f rationally designed nanogenerators (NGs) with piezoelectricnanowires(NWs)haveshowngreatpotentialtoscavengetinyandirregularmechanicalenergy. 8-15 However, insufficient electric output hinders their practical applications. We report here a simple and effective ap-proach, named scalable sweeping-prin

11、ting-method, for fab-ricating flexible high-output nanogenerator (HONG). An open-circuit voltage of up to 2.03 V and a peak output power density of11 mW/cm3 havebeen achieved. The generated electric energy was effectively stored by utilizing capacitors, and it was successfully used to light up a com

12、mercial light-emitting diode (LED), which is a landmark progress toward building self-powered devices by harvesting energy from the environment. Furthermore, by optimizing the density of the NWs on the substrate and with the use of multilayer integra-tion, a peak output power density of 0.44 mW/cm2

13、and volume density of 1.1 W/cm3 are predicted.形式的不规则的气流/振动、超音波、肢体动作、液压、机械能量可在我们的生存环境而传 播。它涵盖了广泛的程度和频率,从细胞contrac-tion海浪。电力能源的conver-sion已经被证 实使用压电悬臂梁的工作在其产生共鸣的模式。4 - 7然而,applicabil-ity和适应性,传统的基 础能源矿车悬臂大大阻碍大单位的大小、大型触发力和特定的高谐振频率。最近,一系列的 合理设计 nanogenerators(上天)(NWs)压电奈米线表现出极大的 potentialtoscavengetinyan

14、dirregularmechanicalenergy。然而,这个不足,不妨碍电力输出的实际 应用。这里我们报告一个简单而有效的ap-proach,名叫可扩展的sweeping-printing-method,灵 活nanogenerator fab-ricating血库(香港)。一个开路电压2.03 V,输出功率密度峰值11 mW / cm3已经达成。所产生的电力能源有效利用电容器存储,并成功用于照亮一个商业发光二极 管,这是一个具有里程碑意义的进步对建立自我动力的设备被收获能量从环境。此外,通过优 化的密度在基底,另外采用多层integra-tion,输出功率密度峰值0.44 mW /平方厘

15、米和体积密 度为1.1 W / cm3进行预测。* To whom correspondence should be addressed. E-mail: HYPERLINK mailto: .*通信所应处理。电子邮件:。t Authors with equal contribution作者以同样的贡献得来Received for review: 6/3/2010 收到评:6/3/2010Published on Web: 07/21/2010 在网上公布:07/21/2010The mechani

16、sm of converting mechanical energy by a single ZnO NW that is laterally bonded to a substrate has been discussed in details in our previous report. 13 Owing to much smaller diameter of the NW compared to the substrate thickness, outward bending of the substrate induces a uniaxial tensile strain in t

17、he NW. Because of the piezoelectric property of the ZnO NW, the stress results in a piezoelectric field along the length, which causes a transient charge flow in the external circuit. The Schottky contact at the bonded ends can regulate the charge flow. As a result, the bending and releasing of the

18、single-wire-NG gives rise to an alternat-ing flow of the charges in the external circuit. In this work, the power output has been scaled up with the integration of hundreds of thousands of horizontally aligned NWs, which was made by a scalable sweeping-printing-method that is simple, cost-effective,

19、 and highly efficient.机械能量转换的机制,由一个单一的氧化锌西北是粘结基体横向已经详细讨论了在我们先前 的报告。13因为较小的直径比基体厚度西北,拓展弯曲基底的单向拉伸应变诱发在西北方向 移动。由于压电特性的氧化锌NW应力导致压电场沿长度,使一个暂时的费用流的外部电路。 肖特基接触,保税结束,能调节电荷的流动。作为一个结果,弯曲和释放的single-wire-NG产生 一个alternat-ing流量的费用在外部电路。在这部作品中,输出功率已经扩大了于一体的成千 上万的横向对齐NWs,由一个可扩展的sweeping-printing-method,简单、高效,效率高。Th

20、e method consists of two main steps. In the first step, the vertically aligned NWs are transferred to a receiving substrate to form horizontally aligned arrays. The major components of the transfer setup are two stages (Figure 1a). Stage 1 has a flat surface that faces downward and holds the vertica

21、lly aligned NWs; stage 2 has a curved surface and holds the receiving substrate. Polydimethylsiloxane (PDMS) film on the surface of stage 2 is used as a cushion layer to support the receiving substrate and enhances the alignment of the transferred NWs. The radius of the curved surface of stage 2 equ

22、als the length of the rod supporting the stage, which is free to move in circular motion (Supporting Infor-mation Figure S1). In the second step, electrodes are depos-ited to connect all of the NWs together.该方法包括两个主要的步骤。在第一步,垂直地对齐NWs是转移到一个接收基体形成横向对 齐的数组。主要部件的安装两个阶段转移(图1)。阶段1有一个平面朝向下且具有垂直地对 齐NWs;舞台2有

23、一个曲面并持有接收板上。以聚二甲基硅氧烷(PDMS)的油膜将摩擦表面上 的第二阶段作为垫层支持接收基体和提高对准的转让NWs。曲面的半径相等的第二阶段杆 的长度支持阶段的产物,是自由移动圆心的运动(支持彻底图S1)。第二步,depos-ited电极连接 所有的新创建在一起。Vertically aligned ZnO NWs on Si substrates were syn-thesized using physical vapor deposition method. 16,17 The dense and uniform NWs have the length of50 pm, diam

24、eter of 200 nm,and growth direction along the c-axis垂直地对齐在硅衬底氧化锌便利是syn-thesized物理气相沉积方法使用。16、17密集的、有 统一的新创建的长度pm50,直径200海里,沿着c-axis增长方向 2010 American Chemical Society 3151 DOI: 10.1021/nl101973h I Nano Lett. 2010, 10, 3151 31552010美国化学学会3151 土井:/ nl101973h |纳米学报。年,10、3155 -FIGURE 1.Fabrication proce

25、ss and structure characterization of the HONG. (a) Experimental setup for transferring vertically grown ZnO NWs to a flexible substrate to make horizontally aligned ZnO NW arrays with crystallographic alignment. (b) SEM image of as-grown vertically aligned ZnO NWs by physical vapor method on Si subs

26、trate. (c) SEM image of the as-transferred horizontal ZnO NWs on a flexible substrate.图1。工艺过程及结构表征香港。(一)实验装置对转移垂直生长氧化锌NWs 一个灵活的基体 横向对齐使西北阵列氧化锌晶体排列。扫描电镜照片(b)的垂直对齐as-grown氧化锌NWs 物理气方法在硅基片上。扫描电镜照片(c)的水平上as-transferred氧化锌NWs柔性衬底材料。 (d) Process of fabricating Au electrodes on horizontal ZnO NW arrays, wh

27、ich includes photolithography, metallization, and lift-off. (e) SEM image of ZnO NW arrays bonded by Au electrodes. Inset: demonstration of an as-fabricated HONG. The arrowhead indicates the effective working area of the HONG(d)制作金电极过程中水平氧化锌西北数组,它包括光刻、金属化、发射。(e)的扫描电镜照片 所结合氧化锌西北金电极阵列。插图:一个as-fabricat

28、ed香港的示范。箭头表示香港的有效工 作区域。(Figure 1b, Supporting Information Figure S2). The same growth direction of NWs guarantees the alignment of the piezoelectric potentials in all of the NWs and a successful scaling up of the output, which will be elaborated later. A small piece of Si substrate with grown ZnO NW

29、s was mounted onto stage 1 (Figure 1a) and a piece of Kapton film with the thickness of 125 p m was attached to stage 2 (Figure 1a). The distance between the receiving substrate and NWs was precisely controlled to form a loose contact between the two. The receiving substrate then counterclockwise sw

30、ept across the vertical NWs arrays, which were detached from Si substrate and aligned on the receiving substrate along the direction of sweeping due to the applied shear force (Figure 1a). The as-transferred NWs are presented in Figure 2c with an estimated average density of 1.1 x 106 cm-2. The leng

31、th variation is probably due to the fact that not all of the NWs were broken off at the roots.(图1 b,支持信息图S2)。另外一样生长方向的校准,保证了压电电位在所有的便利,一个成功 的比例增加的输出,将阐述之后。一小块硅衬底与成长氧化锌便利上安装了第一阶段(图1 A) 和一块Kapton膜厚度的125pm是附属于第二阶段(图1)。之间的距离是接收基底,精确控制 的便利,形成一个松散的联系二者的区别。然后逆时针方向接收基质席卷垂直新创建数组,它 是与硅基片上接受基质和结盟的方向扫沿由于应用剪切力(图

32、1)。介绍了 as-transferred NWs 图2c估计平均密度为1.1X106 cm-2。长度变化可能是由于这样的事实:并不是所有的新创 建被折下来于萌芽之中。Next, the evenly spaced electrode pattern over the aligned NWs was first defined using photolithography and then其次,间隔均匀的电极排列模式by首次定义使用光刻和即可followed by sputtering 300 nm thick Au film (Figure 1d). After lifting off th

33、e photoresist, 600 rows of stripe-shaped Au electrodes with 10 pm spacing were fabricated on top of the horizontal NW arrays (Figure 1e). Au electrodes form Schottky contacts with the ZnO NWs, which are mandatory for a working NG. 8,18 Approximately 3.0 x 105 NWs in an effective working area of 1 cm

34、2, as pointed by an arrowhead in Figure 1d (inset), are in contact with electrodes at both ends. Finally, a PDMS packaging over the entire structure can further enhance mechanical robustness and protect the device from invasive chemicals.其次是溅射300海里厚金膜(图1 d)。起飞后光刻胶,600排stripe-shaped金电极间距10pm碳 纳米管基西北的

35、顶部水平阵列(图1 e)。金电极肖特基接触形式氧化锌便利,这是一个有工作 的NG强制性。8约3.0X105另外18有效工作区1平方厘米,指出一个箭头在图1 d(插图), 在接触电极的两端。最后,在整个结构(PDMS)包装能进一步增强鲁棒性和保护装置机械从侵 入性的化学物质。The working principle of the HONG is illustrated by the schematic diagrams in Figure 2a,b. NWs connected in parallel collectively contribute to the current output;

36、 NWs in different rows connected in serial constructively improve the voltage output. The same growth direction of all NWs and the sweeping printing method ensure that the crystal-lographic orientations of the horizontal NWs are aligned along the sweeping direction. Consequently, the polarity of 香港的

37、工作原理,说明了在图2的原理图a、b。by并联输出电流集体贡献;另外不同的行连接 在串行积极增进电压输出。相同的增长方向和全面的便利的印刷方法确保crystal-lographic 水平方向的排列沿扫另外的方向。因此,极性的 2010 American Chemical Society 3152 DOI: 10.1021/nl101973h I Nano Lett. 2010, 10, 3151- 31552010美国化学学会3152 土井:/ nl101973h |学报。纳米、10、3155FIGURE 2. Working principle and output measurement

38、of the HONG. (a) Schematic diagramof HONGs structure without mechanical deformation, in which gold is used to form Schottky contacts with the ZnO NW arrays. (b) Demonstration of the output scaling-up when mechanicaldeformation is induced, where the “( signs indicate the polarity of the local piezoel

39、ectric p created in the NWs. (c) Open circuit voltage measurement of the HONG, (d) Short circuitcurrent measurement of the HONG. The measurement is performed at a strain of 0.1% and strainrate of 5% s-1 with the deformation frequency of 0.33 Hz. The insets are the enlarged view ofthe boxed area for

40、one cycle of deformation.图2。工作原理和输出测量的香港。(一)原理图,以及香港的结构没有机械变形,其中黄金用做 肖特基接触形式氧化锌西北的数组。(b)示范的输出机械变形诱导放大,那里的”(“迹象显示 的极性压电潜在创造了当地便利。(c)开断电压测量的香港。(d)短路电流测量的香港。根据 测量应变和应变率为5%,0.1% s-1频率与变形0.33赫兹。扩大的小图是观点的一个周期框区 域的变形。the induced piezopotential is also aligned, leading to a macroscopic potential contributed

41、 constructively by all of the NWs (Figure 2b).诱导piezopotential也是对齐,导致了宏观潜在的建设性的便利(图2 b)。To investigate the performance of the HONG, a linear motor was used to periodically deform the HONG in a cyclic stretching-releasing agitation (0.33 Hz). The open-circuit voltage (V oc) and the short-circuit curr

42、ent (Isc) were measured with caution to rule out possible artifacts. 19 At a strain of 0.1% and strain rate of 5% s-1, peak voltage and current reached up to 2.03 V and 107 nA, respectively. Assuming that all of the integrated NWs actively contribute to the output, the current generated by a single

43、NW is averaged to be 200 pA; and the voltage from each row is 3.3 mV in average. Considering the size of the working area of the nanogenerator (1 cm2) (Figure 1e, inset), a peak output power density of 0.22 pW/cm2 has been achieved, which is over 20-fold increase compared to our latest report based

44、on a more complex design. 14 For nanowires with the diameter of 200 nm, the power volume density is 11 mW/cm3, which is 12-22 times of that from PZT based cantilever energy harvester. 6,7 The durability test and further characterization were performed, which prove the stability and robustness of the

45、 HONGs (Supporting Information Figure S3). Voltage linear superposition test verified the proposed working principle of the HONGs (Supporting In-formation Figure S4).探讨香港的性能,从而建立了一个线性马达是用来定期变形的循环stretching-releasing风潮在 香港(0.33赫兹)。寄生偏置电压(Voc)和短路电流(Isc)测定了注意排除可能失真。19在紧张的 0.1%和应变率为5% s-1、峰值电压和电流达到2.03伏

46、特和107钠,分别。假设所有的综合 NWs积极促成输出,当前的产生是由一个单一的西北平均是200名乘客,电压由每一行是平 均3.3 mV。考虑工作区域的大小的nanogenerator(1平方厘米)(图1 e、插图),峰值功率密度的 0.22MW /平方厘米已经实现,超过增加了 20我们的最新报告相比,基于一个更复杂的设计。 14与直径的奈米线200海里,电源体积密度是11 mW / cm3这是12-22倍之压电悬臂梁的基 础能源的矿车。6、7个耐久性试验和进一步进行了表征,证明了稳定性和鲁棒性的HONGs(提 供的信息图S3)。电压线性叠加的验证工作原理的基础上提出HONGs(支持图(S4)

47、接受方)。Further scaling up the power output is expected to be technically feasible. If NWs can be uniformly and densely packed as a monolayer over the entire working area, and all can actively contribute to the output, the maximum power area density is expected to reach 22 pW/cm2. The power volume density is anticipated to be improved up to1.1 W/cm3. With 20 layers ofsuch NW arrays stacked together, the power area density would be boosted up to 0.44 mW/cm2. 进一步提高输出功率预计将技术上可

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