b第二章新型固态光电传感器

1、新型固态光电传感器新型固态光电传感器第第 二二 章章新型固态光电传感器新型固态光电传感器第一节第一节 普通光敏器件阵列普通光敏器件阵列 1 1、象限探测器、象限探测器 2 2、光敏管阵列、光敏管阵列第二节第二节 自扫描光电二极管阵列（自扫描光电二极管阵列（SSPDSSPD） 1 1、电荷储存工作原理、电荷储存工作原理 2 2、线阵、线阵SSPDSSPD器件器件 3 3、SSPDSSPD的主要特性参数的主要特性参数 4 4、SSPDSSPD器件的信号读出及放大器件的信号读出及放大第三节第三节 光电位置传感器（光电位置传感器（PSDPSD） 1 1、PSDPSD的工作原理和位置表达式的工作原理和位

2、置表达式 2 2、一维、一维PSDPSD及其等效电路及其等效电路 3 3、二维、二维PSDPSD及其等效电路及其等效电路习题习题 , 第一节第一节 普通光敏器件阵列普通光敏器件阵列材料：典型的光敏器件如光敏二极管、硅光电池和光敏电阻材料：典型的光敏器件如光敏二极管、硅光电池和光敏电阻将整块光敏器件敏感面分隔，背面仍为一个整体。将整块光敏器件敏感面分隔，背面仍为一个整体。应用：在二维坐标测量，可用于准直、定位、跟踪等方面。应用：在二维坐标测量，可用于准直、定位、跟踪等方面。新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel Senso

3、rsDepartment of Electronic Science and Engineering, Nanjing University pnIAIB ICIDxy器件的形成器件的形成新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University zxyIAIB ICIDxy新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel Se

4、nsorsDepartment of Electronic Science and Engineering, Nanjing University 坐标测量原理分析坐标测量原理分析1、直差测量、直差测量yxBCDA新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University VA-VCVB-VD-+直差电路直差电路yxBCDAVAVBVDVCIAIBICIDKK新型传感器原理及应用新型传感器原

5、理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 比例系数比例系数K与示值校准与示值校准传感器传感器放大器放大器指示器指示器xIVmm 2= 1字字/1mV 1=5mA/mmK 1K 2 = 10字字/mm为了获得为了获得0.1mm的显示精度（即的显示精度（即10字字/mm），有：），有：K = 10/ 1 2 K = 10/ 5 1K = 2新型传感器原理及应用新型传感器原理及应用Principles and

6、Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University (mm)(mA)(mV)比例系数比例系数K与示值校准与示值校准FFl1l2304050 60708090N30304050 60708090N新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing Universit

7、y 比例系数比例系数K与示值校准与示值校准l1l2xx1 x1 /l1=k1x2 x2 /l2 =k2x304050 6070809030304050 60708090FFNN新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 2、和差测量、和差测量yxBCDABCDAyx新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel

8、 SensorsDepartment of Electronic Science and Engineering, Nanjing University KK和差电路和差电路yxBCDAVAVBVCVDIAIBIDIC+VA+VDVB+VCVC+VDVA+VB(VA+VD)-(VB+VC)-+(VA+VB)-(VC+VD)新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 3、测量精

9、度与光强变化密切相关，分辨率和精度有限。、测量精度与光强变化密切相关，分辨率和精度有限。缺缺 点点2、测量范围、控制范围都不大；、测量范围、控制范围都不大； 1、死区，尤其对于小尺寸光班，影响更明显；、死区，尤其对于小尺寸光班，影响更明显；新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 引脚与外观结构引脚与外观结构新型传感器原理及应用新型传感器原理及应用Principles an

10、d Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 内部结构内部结构新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 应用方法应用方法txyN1x = N1tN2x = N2t新型传感器原理及应用新型传感器原理及应用Principles

11、 and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 信号读出简化电路信号读出简化电路VccRiABCVout新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光电位置传感器实例光电位置传感器实例新型传感器原理及应用新型传感器原理及

12、应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 第二节第二节 自扫描光电二极管阵列自扫描光电二极管阵列(SSPD)(SSPD)电荷存贮工作原理SSPD器件SSPD的主要特性参数新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorDepartment of Electronic Science and Engineering, Nanjing

13、University 电子科学与工程系npSiO2Al栅极栅极漏极漏极源极源极DCiIp - ID光生电流光生电流Ip = Sp E电流电流ID(pA量级量级)新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 电荷储存原理定量分析电荷储存原理定量分析稳定后：结端电压接近稳定后：结端电压接近VcCd上的电荷为：上的电荷为： Q = CdVcCdDIp-IDRLVoVg =“H”Ip-

14、IDRLi(t)VCVD充电过程：充电过程：VRVc新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 电荷储存原理定量分析电荷储存原理定量分析Ip-IDRLi(t)VCCdDIp-IDRLVoVg =“L”VDVRVcVCd释放电荷：释放电荷：电压下降：电压下降：平均光生电流平均光生电流新型传感器原理及应用新型传感器原理及应用Principles and Applications

15、of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 电荷储存原理定量分析电荷储存原理定量分析Ip-IDRLi(t)VCVDVRVcVCdCdDIp-IDRLVoVg =“H”RL上的压降最大值：上的压降最大值： RL上的最大电流：上的最大电流：Cd上补充电荷上补充电荷= 释放的电荷释放的电荷新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Scienc

16、e and Engineering, Nanjing University Cd1RLVoT1VB1D1Vc数字移位寄存器数字移位寄存器Cd2CdNT2TNVB2VBND2DNSEOS感光部分感光部分多路开关多路开关新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University VB1Cd1RLVoT1D1Vc数字移位寄存器数字移位寄存器Cd2CdNT2TNVB2VBND2DNSEOS线阵线阵S

17、SPD工作波形工作波形SVB1VB2VB3VBNVo新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University u开关噪声：采样脉冲前后沿，开关噪声：采样脉冲前后沿， MOSFET形成微分状尖脉冲，形成微分状尖脉冲，并串入视频输出信号，产生开关噪声。并串入视频输出信号，产生开关噪声。tVoSSPD开关噪声开关噪声tVo一般开关噪声输出一般开关噪声输出Wire connected to GND

18、Wire removed from GND新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 开关噪声补偿电路基本方法开关噪声补偿电路基本方法开关噪声信号+ +VsVnVo = -(Vs-Vn)RsRsRfRbVsVn+-新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Elec

19、tronic Science and Engineering, Nanjing University Cd1T1VB1D1Cd2CdNT2TNVB2VBND2DN数字移位寄存器SEOS阵列补偿电路阵列补偿电路Cd1T1D1Cd2CdNT2TND2DN+-RLVoVcRsRsRfRbVsVn新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 阵列补偿电路阵列补偿电路Cd0T0VB1D0

20、Cd1T1VB2VBND1数字移位寄存器SEOS+-RsRsRfRbVsVnCd2T2D2.T1T2 TN-1TNDNCdN新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University n光电特性光电特性u曝光量曝光量H：辐照度和积分时间辐照度和积分时间Ts的乘积的乘积u线性工作区线性工作区:约三约三六个量级。六个量级。低光照受暗电流的影响。低光照受暗电流的影响。u饱和照度：饱和照度：Es =

21、 H s / TsminTsmin为允许的最小积分时为允许的最小积分时间间输出电荷输出电荷曝光量曝光量u饱和曝光量饱和曝光量:u饱和电荷：饱和电荷：Qmax=CdVc新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 暗电流占输出信号比例：暗电流占输出信号比例：温度每升高温度每升高7，暗电流约增加一倍。，暗电流约增加一倍。器件温度升高，最大允许的积分时间缩短。器件温度升高，最大允许的

22、积分时间缩短。降低工作温度，可延长积分时间。降低工作温度，可延长积分时间。暗电流与温度有关：暗电流与温度有关：IpIDn暗信号暗信号u积分暗电流积分暗电流新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 积分时间积分时间TS的影响的影响新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment

23、 of Electronic Science and Engineering, Nanjing University u开关噪声开关噪声u 有关因素：有关因素：1、时钟脉冲上升和下降时间、时钟脉冲上升和下降时间2、电路的布局、电路的布局3、器件的工艺、器件的工艺4、设计方案等、设计方案等1、好的驱动和放大电路，可使开关噪声幅度小于、好的驱动和放大电路，可使开关噪声幅度小于5饱和电平。饱和电平。2、周期性开关噪声，用积分电路、采样保持电路加以消除。、周期性开关噪声，用积分电路、采样保持电路加以消除。3、非周期性固定图形噪声，其典型值一般小于、非周期性固定图形噪声，其典型值一般小于 1饱和电平。饱

24、和电平。 措施：措施：1、是随机的、非重复性的波动，一种不能通过信号处理去掉、是随机的、非重复性的波动，一种不能通过信号处理去掉的极限噪声。的极限噪声。2、典型幅值为、典型幅值为0.1饱和电平，对大多数应用场合影响不大。饱和电平，对大多数应用场合影响不大。u热噪声热噪声 新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University n动态范围动态范围定定 义：义：典典 型型 值：值：改改 善：

25、善： 改善结构：改善结构：输出饱和信号与暗场噪声信号之比值。输出饱和信号与暗场噪声信号之比值。为为500:1。每个二极管附加漏电很小的电容器，可使动态范每个二极管附加漏电很小的电容器，可使动态范围高达围高达10000:1。提供了附加的结电容，增强了电荷贮存能力，但提供了附加的结电容，增强了电荷贮存能力，但不增大光电敏感面积或严重增加暗电流。不增大光电敏感面积或严重增加暗电流。新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineerin

26、g, Nanjing University 光敏二极管阵列衬底微透镜阵列彩色滤光片SiO2新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University Complementary Metal-Oxide Semiconductor，互补性氧化金属半导体 光敏二极管阵列衬底SiO2彩色滤光片微透镜阵列新型传感器原理及应用新型传感器原理及应用Principles and Applications

27、of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University ROW 012345.mColumn 0 1 2 3 4 5 n新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 新型传感器原理及应用新型传感器原理及应用Principles and Applications of

28、 Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光谱响应光谱响应300 380 420 500 550 600 700 800 900 1000 1100 1200Wavelength(nm)Efficiency0

29、10 20 30 40 50 60 70 80 90 100新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 数据位的变换数据位的变换10bit的的CMOS输出变换为输出变换为8bit的的RAM数据数据直接取直接取29bit，高于此数的几位，高于此数的几位255，低于此数的为，低于此数的为0；0 1 2 3 4 5 6 7 8 976543210第三节第三节 光电位置传感器光电位置

30、传感器(PSD)(PSD)PSD的工作原理PSD及其等效电路PSD的应用知识新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorDepartment of Electronic Science and Engineering, Nanjing University 电子科学与工程系第三节第三节 光电位置传感器光电位置传感器(PSD)npiLLPSD的工作原理是基于横向光电效应新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment

31、 of Electronic Science and Engineering, Nanjing University LLxAI1I2I0新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University IpRshCjDn一维一维PSDRD 、 Cj决定动态响应速决定动态响应速度度RD 定位电阻定位电阻I1I2xARD12新型传感器原理及应用新型传感器原理及应用Principles and App

32、lications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 34n二维二维PSD两面分离型两面分离型12上下表面都是均匀上下表面都是均匀电阻层，并设电极电阻层，并设电极上表面电流上表面电流Ix、Ix，汇总，汇总后在下表面分解成电流后在下表面分解成电流 Iy、Iy电流分路少、灵敏度高，位电流分路少、灵敏度高，位置线性度和空间分辨率高置线性度和空间分辨率高新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel S

33、ensorsDepartment of Electronic Science and Engineering, Nanjing University IpRshCjDRD12RD34等效电路等效电路新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University n二维二维PSD表面分离型表面分离型Ur1234上表面是均匀电阻上表面是均匀电阻层。电极在同一面层。电极在同一面光电流在上表面分解成：光

34、电流在上表面分解成： Ix、Ix、Iy、Iy施加偏压容易，暗电施加偏压容易，暗电流小和响应速度快流小和响应速度快新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University IpCjDRsh13RD24等效电路等效电路新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic

35、Science and Engineering, Nanjing University 改进表面分离型改进表面分离型Ur1234改进了光敏面改进了光敏面和电极和电极暗电流小、响应快、暗电流小、响应快、边缘位置误差小，易边缘位置误差小，易于加反偏电压于加反偏电压新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University n光谱响应曲线光谱响应曲线0.70.60.50.40.30.20.10.0

36、0 300 500 700 900 1100 1200波长（波长（nm）灵敏度（灵敏度（%）表面分离型表面分离型两面分离型两面分离型新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 改变I 层的厚度可以改变光谱响应特性曲线峰值及频谱宽度,当I 层的厚 度 设 计 在100200m,器件的光谱峰值响应及灵敏度等即可满足。Ur1234Ur1234I1I23xxyyxIxIxIyIyIy

37、IxIxIyn一维一维PSD转换电路转换电路新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University I1I2I2 - I1-+URKnPSD转换电路转换电路n 一维一维PSD新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Enginee

38、ring, Nanjing University 与象限探测器相比常见PSD器件参数I2 - I1-+KUR1234I4 - I3-+KnPSD转换电路转换电路n 二维二维PSD新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光电位置传感器光电位置传感器(PSD)新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel Se

39、nsorsDepartment of Electronic Science and Engineering, Nanjing University 新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 用用PSD可否同步检测多路光位置信号，为什么？可否同步检测多路光位置信号，为什么？我觉得不可以，我觉得不可以，psd检测到的是多路位置矢量的矢量和。检测到的是多路位置矢量的矢量和。讨论题

40、讨论题胶片胶片或或CCD摄影摄影镜头镜头新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 案例：自动调焦案例：自动调焦bLfx发光二极管发光二极管( (红外红外) )一维一维PSDI1I2新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science a

41、nd Engineering, Nanjing University ME：目的是测出：目的是测出L值，在通过自值，在通过自动控制电路动控制电路/反馈电路来自动调焦反馈电路来自动调焦图像清晰度的判决图像清晰度的判决1、图像高频成分多、图像高频成分多2、相邻像素的灰度差值大、相邻像素的灰度差值大1、图像高频成分少、图像高频成分少2、相邻像素的灰度差值小、相邻像素的灰度差值小新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering,

42、 Nanjing University 自动调焦的操作自动调焦的操作登山式自动调焦方式登山式自动调焦方式高频分量高频分量镜头位移镜头位移新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 一般来说，一般来说，由茂菲式滴由茂菲式滴管的小滴管管的小滴管滴落的每一滴落的每一滴为滴为115毫升，或者毫升，或者说每说每15滴液滴液滴总计为滴总计为1毫升。毫升。 新型传感器原理及应用新型传感器原

43、理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 1）光电导效应）光电导效应光敏器件光敏器件光敏电阻光敏电阻本征型光电导材料本征型光电导材料 掺杂型光

44、电导掺杂型光电导材料材料 新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 理想情况：理想情况：Ip= SgVE = gpVSg 光照灵敏度，光照灵敏度， gp 光电导光电导考虑暗电导考虑暗电导gdI= Ip + Id = gpV+ gdV Id 暗电流暗电流3）光照曲线）光照曲线2）光敏电阻）光敏电阻新型传感器原理及应用新型传感器原理及应用Principles and Appli

45、cations of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光敏二极管光敏二极管1） PN结光伏效应结光伏效应光生电流：光生电流：IpILIp = Sp E光生电子空穴对光生电子空穴对新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University IL = Ip - ID

46、q电子电荷数电子电荷数材料的量子效率材料的量子效率A受光面积受光面积h光子的能量光子的能量2）光生电流）光生电流IpIL光电灵敏度光电灵敏度Sp = qA / h IpID= Ip - I0(e qV / k T - 1)= Sp E -I0(e qV / k T - 1)ID = I0(e qV / k T - 1)新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光度量单位光度

47、量单位1坎德拉：光源在给定方向上，每一球面度立体角内发出坎德拉：光源在给定方向上，每一球面度立体角内发出0.00146瓦、波长瓦、波长555纳米的能通量时的发光强度。纳米的能通量时的发光强度。 =555nm0.00146瓦瓦1流明流明 = 1坎德拉坎德拉1球面度球面度 1坎德拉1度度1坎德拉1度度1流明 新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 1度度1尼特尼特= 1坎得拉

48、坎得拉/1平方米平方米新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光亮度光亮度(luminance) 表征发光体（光源）特征，单位表征发光体（光源）特征，单位cd/m2 or nit （坎得拉（坎得拉/平方米或者尼特）平方米或者尼特） 。1平平方方米米1尼特尼特1流明 =555nm1坎德拉1勒克司勒克司 = 1流明流明/1平方米平方米1坎德拉1度度1流明 1平方米平方米1勒克

49、司勒克司新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光照度光照度(illuminance) 表征被照物光特征，单位表征被照物光特征，单位lm/m2 or lux（流明（流明/平方米或者勒克司）。平方米或者勒克司）。3）光敏二极管）光敏二极管pnIp新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsD

50、epartment of Electronic Science and Engineering, Nanjing University RLRs3）等效电路）等效电路RsDRshRLCiIpILID新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University E 增大VI4）伏安特性分析）伏安特性分析a) 零偏置应用零偏置应用IscIpIpUo = - IpRfVRb) 反向偏置应用反向偏置应

51、用IpUo = VF + IpRf 0.7 + IpRf新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University PSD 与象限探测器相比，其特点是：与象限探测器相比，其特点是： 1）它对光斑的形状无严格要求，即输出信号与光的聚焦无关，只与光的能量中心位置有）它对光斑的形状无严格要求，即输出信号与光的聚焦无关，只与光的能量中心位置有关。关。2）消除了死区，可连续测量光斑位置，位置分辨率高，

52、一维）消除了死区，可连续测量光斑位置，位置分辨率高，一维 PSD可达可达0.2m；3）可同时检测位置和光强：总电流与入射光强有关，各电极输出电流之和等于总电流，）可同时检测位置和光强：总电流与入射光强有关，各电极输出电流之和等于总电流，所以从总电流可求得相应的入射光强。所以从总电流可求得相应的入射光强。4）光电位置传感器被广泛地应用于激光束对准、位移和振动测量、平面度检测、二维坐）光电位置传感器被广泛地应用于激光束对准、位移和振动测量、平面度检测、二维坐标检测系统等。标检测系统等。新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel

53、SensorsDepartment of Electronic Science and Engineering, Nanjing University 平均光生电流与平均光照度平均光生电流与平均光照度t0TS + t0tE(t)新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University u横向光电效应是指当P-N结或金属-半导体结的一面被非均匀辐照时，在平行于结的方向出现电势差的现象。u设N

54、区高浓度掺杂，电导率很大，基底欧姆接触，形成等电势层，P区电阻率均匀，若不计漏电流，描述横向光电效应的理论方程是(Lucovsky方程)：Js二极管的反向饱和电流密度,结电势差,c单位面积p-n结电容,k玻尔兹曼常数,T绝对温度, q 电子电荷数r p区方块电阻, r =p/Wp, p p区电阻率，Wp p区非耗尽层厚度,f（x,y,t）单位时间单位面积被分离的光生电子空穴对。新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineeri

55、ng, Nanjing University npixy新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 输出电流的稳态解：输出电流的稳态解：I1x/L=0.10.30.50.70.50.51t人眼光谱灵敏度人眼光谱灵敏度400 450 500 550 600 650 700 7501.00.80.60.40.20.0波长（波长（nm）相对灵敏度（相对灵敏度（%）新型传感器原理及应

56、用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 光谱响应光谱响应光谱的直观解释光谱的直观解释硅材料的光谱灵敏度硅材料的光谱灵敏度1.00.80.60.40.20.0新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanj

57、ing University 光的能量中心位置光的能量中心位置PPPExyxyxy新型传感器原理及应用新型传感器原理及应用Principles and Applications of Novel SensorsDepartment of Electronic Science and Engineering, Nanjing University 设型号为设型号为S1880S1880的改进表面分离型的改进表面分离型PSDPSD的电极间距为的电极间距为12mm12mm，四电极，四电极IxIx、IxIx、IyIy、IyIy的电流输出分别为：的电流输出分别为：0.4mA0.4mA、0.6mA0.6mA、0.2mA0.2mA、0.5mA0.5mA，试计算光点的能量中心相对于器件中心的位置。，试计算光点的能量中心相对于器件中心的位置。 以表面分离型以表面分离型PSD有效灵敏区中心有效灵