(工艺流程)TFT工艺流程、材料、设备、生产常用中英文标准名称

1、一TFT工艺流程中英文标准名称Array Process Flow阵列段工艺流程Input投料Unpacking拆包装Initial clean预备清洗Particle count尘埃粒子测试Gate栅电极层Clean before depo前清洗Gate ( Mo/AI alloy ) Film depo栅电极成膜RS meter电阻测量Macro Inspection宏观检查Clean before PR涂胶刖清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry(VCD)光刻胶低压干燥PR soft bake前烘Expose曝光Titler Expose/Edg

2、e Expose打标/边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Mic/Mac Inspection宏微观检查CD after develop显影后关键尺寸检查Total pitch长寸测量Gate Wet etch栅电极湿刻Contact angle接触角测量PR strip光刻胶剥离CD after etch刻蚀后关键尺寸测量A日刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Laser Repair激光修补Active 层Clean before depo成膜前清洗Active film depoActive成膜AOI自动光学检

3、查Macro Inspection宏观检查Thickness Measurement厚度测量Clean before PR涂胶刖清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Mic/Mac Inspection宏微观检查Active film Dry etch & AshingActive膜干刻与灰化Thickness Measurement厚度测量PR strip光刻胶剥离AEI刻蚀后自动光学检查Mic/Macro Insp

4、ection宏微观检查S/D源/漏电极 层Clean before depo成膜前清洗S/D Mo film depo源/漏电极成膜RS meter电阻测量MACRO Inspection宏观检查Clean before PR涂胶刖清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Edge expose边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查MIC/MAC Inspection宏微观检查CD after develop显影后关键尺寸检查Hard bake by oven

5、烘炉坚膜S/D Mo Wet etch源电极/漏电极湿刻n+ a-Si Dry etchn+高掺杂膜干刻PR strip光刻胶剥离Thickness Measurement厚度测量CD after etch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Clean before O/S test短路/开路测试前清洗Open/Short Test短路/开路测试Passivation 保护层Clean before depo前清洗Pass'n film depo保护膜成膜AOI自动光学检查MACRO Inspection宏观检查Thickne

6、ss Measurement厚度测量Clean before PR涂胶刖清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Edge expose边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Micro/Macro Inspection宏微观检查SinX Dry etch & ASHING氮化硅干刻与灰化PR strip光刻胶剥离AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查ITO ITO 层Clean before PR前清洗a-ITO

7、 film depoITO成膜RS meter电阻测试Anneal爆火Macro Inspection宏观检查Clean before PR涂月父刖清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Micro/Macro Inspection宏微观检查ITO film etchITO膜湿刻PR strip光刻胶剥离AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Final E/T 最 终电测Anneal爆火A

8、rray test阵列测试Array repair阵列修补TEG testTEG测试Sort分级Cell Process flow制盒段工艺流程CF Input彩膜投 料CF Initial Clean彩膜预备清洗CFAOI彩膜自动光学检查CF Sort彩膜分级PI配向膜Clean before PI配向膜涂布前清洗Pl Print配向膜涂布Pre-cure预固化PI Inspection配向膜检查PI Thickness配向膜厚度测量MMeasinu-rceumre nt固化PI rework配向膜返工ODFCF&TFT MatchingCF&TFT匹配Rubbing配向摩擦

9、Rubbing Inspection摩擦检查Loader & Un loader上料机/下料机Buffer缓冲器CST Buffer工装栏缓冲器Rotation/Cooling Unit旋转/冷却单兀Turn Align Unit旋转/对位单兀Turn Over Unit翻转单元After Rubbing Cleaner摩擦后清洗Spacer Spray衬垫球散布Spacer Counter衬垫球计数Spacer rework衬垫球返工Spacer Cure衬垫球附着固化Short Dispense导电胶涂布Sealant Dispense边框胶涂布Seal Inspection边框胶

10、检查LC Dispense液晶滴下Vacuum Assembly真空贴合UV Cure紫外线固化Mis-alignment check错位检查Seal Oven边框胶热固化Eye Inspection目视检查Cell gap Measurement盒厚测试Cutting 切割1/4(1/6)Sheet Cutting,1/4(1/6)切割Stick Cutting,切条Cell Cutting切粒Visual TestVisual测试ECPEdge Grind磨边Dipping clean浸泡式清洗Clean before Pol贴片前清洗Pol Attach贴片Pol Inspection贴

11、片检查Pol rework贴片返工Auto ClaveAuto Clave消泡LaserLaser Trimmer激光切线TrimmerTest测试Gross Test终检Repair修补Bin sorter分级OQC Test出货检查Store货栈Module Process Flow模块段工艺流程COGPad cleaning端子清洗IC BondingIC邦定Microscope Inspection镜检aui aanesive lest自粘动接光力学测检试查FOGACF AttachingACF粘贴FOG BondingFOG邦定Microscope Inspection镜检Peeli

12、ng strength test拉力测试ET testl电测1IC or FPC Repair修补UV glue sealing封胶FPC reinforcement补强UV glue curingUV胶固化Assembly 组装ET test2电测2anti-ultraviolet tape attaching遮光胶带粘贴protected tape attaching保护胶带粘贴Backlight assembly背光源组装Backlight soldering背光源焊接Touch panel assembly触摸屏组装Final ET test最终电测Rework返工Aging老化QC

13、testQC检验Code printing喷码Packing包装OQC Test出货检验Finished good shipment合格品出货CIM name集成控制系统名称CIM计算机集成制 造系统CIM System计算机集成制造系统Manufacturing Execution System(MES)制造执行系统（MES）Preventive Maintenance System(PMS)设备预防保养系统（PMS）Statistical Process Control(SPC)统计过程管理（SPC ）Equipment Automation Program(EAP)设备自动化（EAP）R

14、eport报表Engineering Data Analysis(EDA)工程数据分析（EDA）Finished Good Management System(FGMS)成品管理系统（FGMS）Product产品Glass玻璃基板Panel面板Process Flow工艺流程Operation操作EDC工程数据收集Equipment设备Chamber腔体Unit单体Sub Unit副单体Port端口OIC (Operator Interface Client)操作者界面EDB工程数据库FGMS成品管理系统Dispatcher派货Create建立Start下线Scrap报废Un scrap取消保

15、废Complete完成Ship出货Un ship取消出货Receive收料Track In入账Track Out出账Wait等待Hold滞留Release释放Rework返工Vehicle搬运车Robot机械手AGV (Automatic Guided Vehicle)自动搬运车MGV (Manual Guided Vehicle)人工搬运车Clean lifter净化电梯LIM (Linear Induction Motor) Carrier线性感应马达传送载具OHS (Overhead Handling System)天车搬送系统Stocker (clean depot)工装篮存放架Bat

16、tery电池Bay作业区Inter-bay作业区和作业区之间Intra-bay作业区之内Bumper减震缓冲器Charger充电器Controller控制器Conveyor传送带Crane吊车（在Stocker内）FFU (Fan Filter Unit)风扇过滤器Host主机I/O (Input / Output)输入/输出IR (Infra-Red)红外线IRIF(lnfra-Red Interface)红外接口Load上料Unload下料Magnetic tape磁条（AGV路径所使用的磁条）Retrieve检索RTM (Rotary Transfer Machine)旋转传送机构SCA

17、RA armAGV传送臂Reset重新设定Transportation传输Recipe工艺参数的组合Stock out将工装篮取出货栈Request要求，请求Transfer传送，运送Instruction命令，指令Select选择Cancel取消Operation作业，操作Support支援，支持Process工艺Start开始BatchLot批（指生产线的在制品或产品控制 单位）ID (Identity)识别码(如 Lot ID or Chip ID)Sheet片（Array区玻璃基版计数单位）Inspection检验Defect缺陷Hold滞留Release释放Equipment设备（简

18、称为EQP）Tool工具，机台WIP (Work In Process)在制品（工艺在制品）Maintenance维修保养Cassette工装篮（阵列段），卡匣（制盒段 及模块段）Empty空的Reserve预备Report报告Rework返工Log on登录，入系统Log off注销登录，离开系统Note批注Unpacking line拆包线Un packer拆包机Glass conveyor玻璃传送带Initial Cleaner预清洗Un loader卜料机Cassette Manual Guide Vehicle (MGV)工装篮人工搬运车Array CassetteArray工装篮O

19、DF CassetteODF工装篮Automated Material Handling System(AMHS)自动物料搬运系统Clean Stocker(STK)洁净工装篮存放架（STK）Overhead Handling System (OHS)天车搬送系统（OHS）Material Control System (MCS)物料控制系统（MCS）Clean Robot洁净机械手Loader/Un loader上/下料机Sorter分片机二- TFT材料中英文标准名称类型TypeMaterials name材料名称玻璃GlassGlass玻璃基板Color filter彩色滤光膜Bare

20、glass白玻璃基板LCD Panel液晶面板靶材TargetAINd/AI Target铝钞/铝靶材MoNb/Mo Target铜银/铝靶材ITO TargetITO靶材化学液体ChemicalAl EtchantAI蚀刻液ITO EtchantITO蚀刻液HNO3硝酸CH3COOH乙酸Developer显影液Stripper剥离液MEA单乙醇胺Photo Resist光亥明交Organic Photo Resist有机膜用光刻胶Thinner稀释剂NMPN-甲基-2-喉咯烷酮HF氢氟酸Acetone内酮IPA异丙醇Ethanol酒精辅助器材Sub materialPhoto Mask光罩A

21、PR PlateAPR版Rubbing Cloth摩擦绒布Adhesive Tape双面月父布Probe frame for array tester阵列电测架E/T Frame电测用探测架Cell ET Probe Unit屏电测用探测头Open/Short tester and prober开路、短路电测用探测头Teflon Tape特氟龙带Silicon rubber硅胶皮Wiper Tape无尘卷布高纯气体 High purity gasNF3三氟化氮SiH4硅烷SF6六氟化硫NH3氨气CI2氯气HCL氯化氢CHF3三氟甲烷PH3磷烷CF4四氟甲烷N2氮气02氧气H2氢气Ar氯气He氨

22、气液晶LCLC液晶材料胶膜FilmPolarizer偏光片Diffuser散光膜涂料DopePl聚酰亚胺树脂ResinSealant边框胶UV glueUV胶ACF各向异性导电膜Conductive Spacer导电衬垫球Spacer used in Sealant边框胶内衬垫球Spacer used in Cell ( White )盒内衬垫球（白）Spacer used in Cell ( Black )盒内衬垫球（黑）元器件PartsBack Light Unit背光源Integrated circuit/Driver IC集成电路/驱动ICPCB印刷电路板FPC柔性印刷线路板Modul

23、e Frame模块外框Touch Panel/Touch film触摸屏/触摸膜RCL阻容器件焊接材料SolderingFLUX助焊剂SOLDER CREAM焊锡/焊接剂material三TFT设备中英文标准名称English name中文名称PHOTO曝光Exposer曝光机Coater Developer陈列黄光制程清洗机-涂布机-显影机long size measuring and critical dimension measuring multiple equipment测长仪和线宽测量仪Titler& Edge Exposer打标机和边缘曝光复合机Edge Exposer边

24、缘曝光机AFM原子力显微镜FIB聚焦离子束系统FE-SEM场发射扫描电子显微镜UV MeterUV照度计EXCIMER UV准分子紫外清洗机Ionizer Bar除静电棒Fire Extinguisher灭火器Photo Ionizer软X射线静电消除器PVD&WET 溅射&湿式PVD(Multi-chamber type sputtering system)磁控溅射成膜机Particle counter尘埃粒子测量仪Ultrasonic Cleaner超声波清洗机Stripper脱膜机Contact Angle Analyzer接触角测量仪RS Meter(4point Pr

25、obe)四探针仪Cassette Cleaner工装篮清洗机Initial Cleaner预备清洗机Pre CVD cleaner成膜前清洗机HF Cleaner before S/DS/D成膜前带HF清洗机Liquid Particle Counter液体内尘埃粒子测量仪ccss中央化学品供应系统Anneal Oven退火炉Hard Bake Oven后烘炉Film Tester薄膜附着力测试仪Etchant Concentration Management System刻蚀液浓度管理系统DMS显影液浓度管理系统DRS显影液溶剂回收系统RMS剥离液浓度管理系统Wet Etcher湿亥U机4.

26、5G-Macro Review System4.5G宏观检查机4.5G-Mic/Mac Review System4.5G宏观、微观检查机RGA(Residual Gas Analyzer)残余气体分析仪PECVD化学气相沉积Hot N2 Transfer System热N2供应系统PECVD等离子增强化学气相淀积设备Special Gas Supply & Monitor System特种气体供应和监视管理系统Temperature Recorder温度记录仪Gas Scrubber for PECVDPECVD用尾气处理装置Full Automatic Spectroscopic

27、Ellipsometer for Flat Panel Display平板显示用全自动椭圆偏振光谱仪Clean Crane洁净室起重机设备Spectroscope Reflectometer平板显示用全自动分光反射光谱仪He Leak Detector氨气检漏仪DRY干亥IDry Pump for CVD化学气相沉积设备用真空泵Dry Pump for PVD物理气相沉积设备用真空泵EPD for Dry Etching干刻终点侦测器Dry pump for Dry Etching干刻机设备用真空泵Dry Etching/Ashing System干刻灰化一体机Profiler System段

28、差量测机Chiller for Dry Etching干刻机辅助设备冷却器Local Scrubber System for Dry Etching干刻用废气处理设备CELL 制盒Rubbing Line摩擦线Before PI cleanerPI前清洗机Cassette BF工装篮缓冲器PI PrinterPI涂布机Pre-Cure坝固化炉Main-Cure主固化炉Loader/Un loader上下料机APR cleanerAPR板清洗机Rubbing Inspection摩擦检查机After Rubbing Cleaner摩擦后清洗机ODF SystemODF相关设备Seal Dispe

29、nser边框胶涂布机Short Dispenser导电胶涂布机Seal De-bubbling machine边框胶脱泡机UV cure紫外线固化机Spacer Cure Oven衬垫球固化炉Cooling /Rotation Unit冷却/旋转装置Seal Cure Oven边框胶固化炉LC dispenser液晶滴下机LC de-bubbling液晶脱泡机Vacuum Assembly真空贴合系统Mis-align Checker对位检查机Visual Inspection目视检查机ODF Inline transfer and line control blockODF联线传输和软件控制

30、系统Loader(3port)上料机Un loader(3port)下料机Cassette Buffer卡匣缓冲器Turn Align Buffer旋转对位缓冲器Pairing/NG Buffer配对/不良制品缓冲器Spacer NG Buffer衬垫球散布不良制品缓冲器Turn Over Align翻转对位器UV Mask stockUV Mask存储柜Buffer after UV cure紫外线固化后缓冲器Cooling Buffer冷却缓冲器Spacer US Cleaner衬垫球超声波清洗机Spacer Remover(USC)衬垫球聚团去除装置（超声波清洗机）US Cleaner

31、after sealant dispensing边框胶涂布后超声波清洗机US Cleaner after short dispensing点胶后超声波清洗机Master PLC主PLCCIM PCCIM PCSeal Inspection边框涂布检查机Cell Gap Inspection盒厚检查机Dry Spacer Spray & Spacer count干攵布机衬垫球计数器Auto Clave偏光片贴附后加压消泡机Edge Grinder液晶面板磨边机LCD Panel cleaning and Polarizer attach system液晶面板清洗和偏光板贴附机系统Pane

32、l Cleaner面板清洗机（用于液晶面板清洗和偏 光板贴附机系统）Polarizer Attach Machine偏光板贴附机（用于液晶面板清洗和 偏光板贴附机系统）LCD Panel Polarizer Rework Machine液晶面板偏光片返工机Cell Cassette(3"-10.4")3"-10.4"Cell 卡匣Single head scriber单刀头切割机LCD glass in-line Scriber液晶面板在线切割机Multi head Scriber多刀头切割机MODULE模块COG bonding machine自动CO

33、G邦定机COG Semi-automatic Bonding Machine半自动COG邦定机Aging test system老化测试系统Signal generator for LCD InspectionLCD检查用信号发生器Auto Optical Inspection自动光学检测仪Air Particle Counter空气尘埃粒子测量仪Backlight tester背光源色度亮度测量仪Projector投影仪Microscope显微镜Ionizer blower离子风扇Surface resistance test kit (点检)表面电阻测量仪Charged Plate Mon

34、itor平面带电测试仪Static electricity voltage testing静电电压测量仪TEST 测试ADI-AOI显影后检测AEI-AOI刻蚀后检测CF-AOI彩色滤光片检测Array Tester阵列电测机Open/Short tester and prober开路/短路检测和探针系统ARRAY O/S probe开路/短路探针系统TEG ProberTEG探针系统TEG TesterTEG测试系统Probe Unit for TEGTEG测试用探针系统Array repair激光修补系统Array Probe frame阵列电测架Visual test probe uni

35、t目测用探针系统ET Probe unit2英寸电测用探针系统Microscope显微镜（Panel ）Microscope and laser system带激光的显微镜Barcode Reader条形码阅读器Fixed 2D Code Reader2维读码器系统（固定类型）Portable 2D Code Reader2维读码器系统（可移动类型）Pl+Macro inspection systemPl+Macro检测系统Cell Gap Measure System盒厚测量系统Laser Trimmer激光切线系统Cell Laser Repair液晶盒激光修补系统Oscilloscope

36、示波器Manual probe手动探针系统Precision Parameter AnalyzerTFT参数分析仪Product Optical Quality Measurement System产品光学质量检测系统Optical Parameters Measurement System光学特性量测设备Circuit drawing/Orcad电路图编辑器P-spice Analog SimulationP-spice电路仿真器PCB ArtworkPCB线路图编辑器3D Mechanical Design Tool3D机械设计工具2D structure Design Tool2D结构设

37、计工具Pattern Generator测试图形发生器Resistance Attenuator电阻衰减器illuminance Colorimeter亮度色度计Spectrophotometer元度色度光谱仪Color Analyzer色彩分析仪R,L,C MeasurementR,L,C测试仪R&D研发ESD Gun(EMI/EMS)table静电枪台UV TEST chamber紫外线测试箱Seal dispenser边框胶涂布机three axis Measurement Stage三触量测平台Pre-tilt angle & cell gap measurement

38、system倾斜角盒厚量测仪LC resistivity meter液晶电阻率测量仪Oscilloscope(Analog)模拟示波器Thermo-hygrostat恒温恒湿柜Thermal Shock Chamber冷中击舱ESD Gun(EMI/EMS)静电枪Liquid crystal injection machine灌晶机Plasma cleaning machine等离子清洗机Simulation software of LCD Optical parametersLCD光学特性模拟软件Layout editor for mask版图设计软件CIM集成控制CIM System-.M

39、anufacturing Execution System(MES) -.Preventive Maintenance System(PMS) -.Statistical Process Control(SPC) -.Equipment Automation Program(EAP) -.Report System-.Engineering Data Analysis(EDA)-.Finished Goods Management System(FGMS)-.Engineering Data Base(EDB)计算机集成制造系统制造执行系统 机台预防保养系统-统计制程管制-设 备自动化-报表系

40、统工程数据分析- 产成品管理系统工程数据库Operator Interface Client(OIC)操作者界面FAB Monitoring Client(FMC)工厂监控系统Dispatcher(DSP)任务分配系统Fault Detection and Classification(FDC)缺陷检查和分类系统Alarm Management System(AMS)机台报警系统Real Time Analysis/Monitoring System(RTAMS)缺陷管理的实时监控/分析系统System Management System(SMS)系统管理系统AMHS物料搬运Unpacking

41、 line -.Un packer -.Glass conveyor -.InitialCleaner -.Un loader拆包线-拆包机玻璃传送带 预清洗-下料机Cassette Manual Guide Vehicle (MGV)工装篮人工引导车Array CassetteArray工装篮ODF CassetteODF工装篮Automated Material Handling System(AMHS)-.Clean Stocker(STK)-.Overhead Handling System (OHS)-.Material Control System (MCS)自动物料搬运系统 洁净

42、堆料机（STK ）-天车搬送系统（OHS） 物料控制系统（MCS）Clean Robot洁净机械手Loader/Un loader上下料机Sorter分片机CIM Server 集 成控制系统服 务器MES DB ServerMES数据服务器MES APP ServerMES应用服务器EDA/EDB ServerEDA/EDB服务器FDC ServerFDC服务器PMS ServerPMS月艮务器YMS ServerYMS月艮务器File Server文件服务器Centralized Backup/Recovery Server中央备份服务器Development Server开发服务器Tes

43、ting Server测试服务器Storage/Disk Array磁盘阵列SAN Switch/Storage LinkSAN交换机Tape Library磁带库Switch网络交换机Router网络路由器Firewall网路防火墙Message Bus信息总线TIBCO RendezvousT旧CO消息集聚器Data Protector数据保护者Facility工程Exhaust Fan(FRP)排气风机（玻璃钢离心式）UPW system纯水超纯水设备Auto control system自动控制系统CDA system压缩空气系统Bulk gas supply system大宗气体供应

44、系统Exhaust Fan排气风机Fan Filter Unit送风过滤系统Gas and liquid leak detection system气体和液体测漏系统Diesel oil generator柴油发电机系统VOC scrubber有机物蒸气洗净机Plant Vacuum pump工厂真空系统cleaning vacuum pump清洁真空系统waste water monitor system废水检测系统vesda system空气烟感探测分析系统chiller冷水机组cooling tower冷却塔HVAC PUMP空调水泵heat energy supply system集中

45、供热系统LPG systemLPG站系统PCW systemPCW系统35KV transformer35KV变压器Telephone system电话系统CATV system有线电视系统broadcasting system广播系统fire alarm system火警系统WWT废水处理系统35KV switch device35KV开关装置Mv switchgears, cast coil transformers, unit substations, power scada中压变配电系统Security & CCTV system安保和闭路电视系统Fire fighting s

46、ystem消防系统Analysis room分析室Single head scriber单刀头切割机Contact Angle接触角测量仪Eyewash洗眼台Wet station带通风橱的中央实验台四-TFT生产常用中英文名称English name中文名称General 一般专有名词LCD (Liquid Crystal Display)液晶显不器Glass, substrate or glass substrate玻璃基版TFT(Thin Film Transistor)薄膜晶体管Panel面板Array阵列Cell液晶盒Module模块Monitor监视器Pixel像素Computer

47、电脑Notebook PC笔记本电脑（简称为NB）RGB (Red, Green, Blue)指红绿蓝三基色PM (Preventive Maintenance)预防保养Quality品质Standard标准（指作业标准或质量指针）Material材料Yield良率CIM(Computer Integration Manufacturing)计算机集成制造（指以计算机系 统整合制造流程）FA (Factory Automation)工厂自动化Exit出口PrecautionWarning警告Emergency紧急Alarm警报Clean Room洁净室Clean room洁净室HEPA (Hi

48、gh Efficient Particulate Air)高效能粒子空气过滤网Lilt e rC o n t amination污染Temperature (TEMP)温度Humidity湿度Pressure压力UPW (Ultra-Pure Water)超纯水DIW (De-lonized Water)去离子水IPA (Isopropyl Alcohol)异丙醇Sticky mat粘尘垫Cleanliness洁净度ESD (Electro-static Discharge)静电放电Laminar flow层流（流体力学名词）Turbulent flow扰流（流体力学名词）Alcohol酒精A

49、cetone内酮Particle微粒子Dust灰尘Gowning room换衣间Raised floor (grating floor)高架地板Air shower风淋室Prohibit禁止Clean suit(bunny suit, dust-free garment)无尘服Glove手套Hairnet网帽Hood头罩Mask口罩Clean shoes (dust-free shoes, boots)无尘鞋Factory Automation 工厂自动化Vehicle搬运车Robot机械手AGV (Automatic Guided Vehicle)自动搬运车MGV (Manual Guided Vehicle)人工搬运车Clean lifter净化电梯LIM (Linear Induction Motor) Carrier线性感应马达传送载具OHS (Overhead Handling System)天车搬送系统Stocker (clean depot)工装篮存放架Battery电池Bay作业区Inter-bay作业区和作业区之间Intra-bay作业区之内Bumpe