半导体词汇缩写表

1、半导体词汇缩写表A/DanalogtodigitalAAatomicabsorptionAASatomicabsorptionspectroscopyABCactivity-basedcostingABMactivity-basedmanagementACalternatingcurrent;activatedcarbonACFanisotropicconductivefilmACIafter-cleaninspectionACPanisotropicconductivepasteACTalternativecontroltechniques;actualcycletimeADCanalog-

2、to-digitalconverterADEadvanceddevelopmentenvironmentADIafter-developinspectionADTapplieddiagnostictechniqueADTSEMApply/DevelopTrackSpecificEquipmentModelAEatomicemission;acousticemission;absoluteellipsometryAECadvancedequipmentcontrollerAECSAdvancedEquipmentControlSystem;AutomatedEquipmentControlSys

3、temAEIafter-etchinspection;automatedequipmentinterfaceAEManalyticalelectronmicroscopyAESAugeremission/electronspectroscopyAFMatomicforcemicroscopyAFPabrasive-freepolishAgsilverA-GEMTFAdvancedGEMTaskForceAGVautomatedguidedvehicleAHFanhydroushydrogenfluorideAHUairhandlingunitAIRautomatedimageretrieval

4、AlaluminumALDatomiclayerdepositionALEatomiclayerepitaxy;applicationlogicelementALSadvancedlightsource;advancedlow-powerSchottkyAMCairbornemolecularcontaminationAMHSautomatedmaterialhandlingsystemAMTadvancedmanufacturingtechnologyAMUatomicmassunitANNartificialneuralnetworkANOVAanalysisofvarianceAOVai

5、r-operatedvalveAPadhesionpromoterAPAadvancedperformancealgorithmAPCadvancedprocesscontrolAPCDadd-onpollutioncontroldeviceAPCFIAdvancedProcessControlFrameworkInitiativeAPCVDatmosphericpressurechemicalvapordepositionAPECadvancedprocessequipmentcontrolAPIapplicationprogramminginterface;atmosphericpress

6、ureionizationAPMatmosphericpassivationmodule;acousticplatemodeAPRDLAdvancedProductsResearchandDevelopmentLaboratoryaPSMattenuatingphase-shiftmaskAQIACCESSqueryinterfaceAQLacceptablequalitylevelArargonARaspectratioARAMSAutomatedReliabilityARCantireflectivecoatingARDEaspectratio-dependentetchingARPAAd

7、vancedResearchProjectsAgency(seeDARPA)ARSangle-resolvedscatteringAsarsenicAS/RSautomatedstorageandretrievalsystemASAPAdvancedStepperApplicationProgramASICapplication-specificintegratedcircuitASOautomaticshutoffASPadvancedstripandpassivation;advancedstripprocessorASRautomatedsendreceiveATDFAdvancedTo

8、olDevelopmentFacilityATEautomatictestequipmentATGautomatictestgenerationATLASabbreviatedtestlanguageforallsystemsatmatmosphereATPadvancedtechnologyprogram;adenosinetriphosphate;acceptanceandtoolperformanceATRattenuatedtotalreflectanceAttattenuatedAugoldAVPadvancedverticalprocessorAVSadvancedvisualiz

9、ationsystemAWEasymptoticwaveformevaluationAWISPMabovewaferinsituparticlemonitoringAWSadvancedwetstationBbillion;boronBabariumBARCbottomantireflectivecoatingBASEBostonAreaSemiconductorEducation(Council)BAWbulkacousticwaveBCbiascontrastBDEVbehavior-leveldeviationBDSBrownianDynamicsSimulationBeberylliu

10、mBEOLbackendoflineBESOIbondedandetchbacksilicononinsulatorBFbrightfieldBFGSBroyden-Fletcher-Goldfarb-ShannooptimizationalgorithmBFLbufferedfield-effecttransistorlogicBGAballgridarrayBHTBrinellhardnesstestBibismuthBiCMOSbipolarcomplementarymetal-oxidesemiconductorBIFETbipolarfield-effecttransistorBIM

11、binaryintensitymaskBiMOSbipolarmetal-oxidesemiconductorBISTbuilt-inself-testBITbulkiontemperatureBITEbuilt-intestequipmentBMCbubblememorycontrollerBMDbulkmicrodefectBOEbufferedoxideetchantBORbottomofrangeBOSSBookofSEMIStandards;binaryobjectstoragesystemBOXburiedoxideBPRbeamprofilereflectometry;busin

12、essprocessreengineeringBPSGboronphosphosilicateglassBPTEOSBPSGfromaTEOSsourceBrbromineBSEbackscatteredelectrondetectionBTABbumpedtapeautomatedbondingBVbreakdownvoltageCcarbonCacalciumCACIMarchitectureCAACIMapplicationsarchitectureCABCompetitiveAnalysisBenchmarkingCADcomputer-aideddesignCADTcontrolap

13、plicationdevelopmenttoolCAEcomputer-aidedengineeringCAIcomputer-assistedinstructionCAMcomputer-aidedmanufacturingCAPScomputer-assistedproblemsolvingCARchemicallyamplifiedresistCARRIComputerizedAssessmentofRelativeRisklmpactsCASEcomputer-aidedsoftwareengineering;computer-aidedsystemsengineeringCATcom

14、puter-aidedtestingCAWConstructionAnalysisWorkgroupCAWCcryogenicaerosolwafercleaningCBGAceramicballgridarrayCBSchemicalbottlestorageareaCBTcomputer-basedtrainingCCchipcarrier;clustercontrollerCCCceramicchipcarrierCCDcharge-coupleddeviceCCSLcompatiblecurrent-sinkinglogicCCWcounterclockwiseCdcadmiumCDc

15、riticaldimensionCD/OLcriticaldimensionoverlayCDAcleandryairCDEchemicaldownstreametchCDEMCustomerDeliveryEnterpriseModelCDIcollector-diffusionisolationCDMCommonDeviceModelforSABCDOcontrolleddecomposition/oxidationCDRchemicaldistributionroomCDSchemicaldistributionsystemCeceriumCEcapillaryelectrophores

16、isCECcellevaluationchipCEEcontrolexecutionenvironmentCEMcontinuousemissionsmonitoringCER-DIPceramicdualin-linepackageCFAcomponentfailureanalysisCFCchlorofluorocarbonCFDcomputationalfluiddynamicsCFMcontamination-freemanufacturingCICcleanroominterfacechamberCIDcharge-injectiondeviceCIEcomputer-integra

17、tedengineeringCIMcomputer-integratedmanufacturingCIM-OSAcomputer-integratedmanufacturing-opensystemsarchitecture(ESPRITprogram)CIPContinuousImprovementProgramCISCenterforIntegratedSystemsCISCcomplexinstructionsetcomputerClchlorineCLCCceramicleadedchipcarrierCLICclosed-loopintensitycontrolCMconfigura

18、tionmanagement;cassettemoduleCMCcassettemodulecontrollerCMLcurrentmodelogicCMMcapabilitymaturitymodelCMOScomplementarymetal-oxidesemiconductorCMPchemicalmechanicalplanarizationCMRcommon-moderejectionratio;cancelmoverequestCNCcomputernumericalcontrol;condensationnucleuscounterCNTcarbonnanotubeCocobal

19、tCOBchip-on-boardCOCcostofconsumablesCODECcoder-decoderCOEDcomputer-optimizedexperimentaldesignCOGScostofgoodssoldCoOcostofownershipCORBAcommonobjectrequestbrokerarchitectureCOREcompositeobjectreferenceCOSScommonobjectservicesspecificationCOTcustomer-ownedtoolingCoVcoefficientofvarianceCpprocesscapa

20、bilityCPDconcurrentproductdevelopmentCPECommunicationsCPGAceramicpingridarrayCpkprocesscapabilityindexCQFPceramicquadflatpackCQNclosed-queuingnetworkCrchromiumCRCcyclicredundancycheckCRMCost/ResourceModelCscesiumCSACIMsystemsarchitectureCSEcontrolsystemsengineeringCSFcriticalsuccessfactorCSLcurrent-

21、steeringlogicCSMA/CDcarrier-senseCSPchip-scalepackageCSPEDconcurrentsemiconductorproductionandequipmentdevelopmentCSTCIMsystemstechnologyCSTRcontinuouslystirredtankreactorCSVcomma-separatedvariableCTCclustertoolcontrollerCTEcoefficientofthermalexpansionCTIcycletimeimprovementCTMCclustertoolmodularco

22、mmunicationsCucopperCUBcentralutilitybuildingCUBEScapacityutilizationbottleneckefficiencysystemCUIcommonuserinterfaceCUSUMcumulativesumCVcapacitance-to-voltageCVCMcollectedvolatilecondensablematerialsCVDchemicalvapordepositionCWcontinuouswaveCzCzochralskiprocessD/AdigitaltoanalogD/BdiebondingDACdigi

23、tal-to-analogconverterDASdirectabsorptionspectroscopyDASSLdifferentialalgebraicsystemsolverDBMSdatabasemanagementsystemDCdirectcurrentDCAdirectchipattachmentDCATSdouble-containedacidtransfersystemDCEdistributedcomputerenvironmentDCLdigitalcommandlanguage;displaycommunicationlogDCSdichlorosilaneDDLde

24、vicedescriptionlanguageDDMSdefectdatamanagementsystemDEDSdiscrete-eventdynamicsimulationDESdataencryptionstandard;displayequipmentstatusDFdarkfieldDFCdensifiedfluidcleanDFEdual-frequencyetchDFMdesignformanufacturingDFRdesignforreliabilityDFTdesignfortestDFYdesignforyieldDHFdilutehydrofluoricacidDIde

25、ionized;dielectricisolationDIBLdrain-inducedbarrierleakageDICdifferentialinterferencecontrastDILdualin-lineDIPdualin-linepackageDLBIdevice-levelburn-inDLOCdevelopedsourcelinesofcodeDLSdisplaylotstatusDLTdevice-leveltestDLTSdeep-leveltransientspectroscopyDMAdirectmemoryaccess;dynamicmechanicalanalysi

26、sDMHdisplaymessagehelpsDMLdatamanipulationlanguage;displaymessagelogDMMdigitalmultimeterDMOSdiffusedmetal-oxidesemiconductorDMRdisplaymoverequestsDOdynamicoptimizationDOAdead-onalignmentDOASdifferentialopticalabsorptionspectroscopyDOEdesignofexperimentsDOFdepthoffocusDOPdioctylphthalateDPAdestructiv

27、ephysicalanalysisDPMdigitalpanelmeterDPPdischarge-producedplasmaDPSRAMdual-portstaticrandomaccessmemoryDRAMdynamicrandomaccessmemoryDRAPACDesignRuleandProcessArchitectureCouncilDRCdesignrulecheckDREdestructionremovalefficiencyDRIFTSdiffusereflectanceinfraredFouriertransformspectroscopyDRTdefectrevie

28、wtoolDSAdisplaysystemactivity;dimensionallystableanodeDSCdifferentialscanningcalorimetryDSMCdirectsimulationMonteCarloDSQdownstreamquartzDSSdisplaystockerstatusDSWdirectstep-on-waferDTdynamictestDTAdifferentialthermalanalysisDTCdirectthermocouplecontrolDTLdiodetransistorlogicDTMdefecttestmonitor;del

29、aytimemultiplier;devicetestmodule;digitalterrainmapDTMPNdefecttestmonitorphasenumberDUTdeviceundertestDUVdeepultravioletDVdesignverificationDVERdesignruleverificationDVMdigitalvoltmeterDVSdisplayvehiclestatusDWGdomainworkgroupEAPSMembeddedattenuatedphase-shiftmaskEAROMelectricallyalterableread-onlym

30、emoryEASEequipmentandsoftwareemulatore-beamelectronbeamEBHTelectron-beamhigh-throughputlithographyEBICelectronbeam-inducedcurrentEBRedgebeadremovalECengineeringchange;equipmentcontrollerECAengineeringcapabilityassessmentECADelectroniccomputer-aideddesign;engineeringcomputer-aideddesignECAEelectronic

31、computer-aidedengineeringECLemittercoupledlogicECNengineeringchangenoticeECOengineeringchangeorderECQBelectrochemicalquartzcrystalbalanceECRelectroncyclotronresonanceEDAelectronicdesignautomationEDSenergy-dispersivespectroscopyEDUequipment-dependentuptimeEDXenergy-dispersiveX-rayEDXAenergy-dispersiv

32、eX-rayanalysisEEDFelectronenergydistributionfunctionEELSelectronenergy-lossspectroscopyEEPROMelectricallyerasableprogrammableread-onlymemoryEFEMequipmentfront-endmoduleEFOCSevanescentfiber-opticchemicalsensorEFTIRemissionFouriertransforminfraredspectroscopyEFVexcessflowvalveEGEethyleneglycolethersEH

33、SextremelyhazardoussubstanceEIequipmentintegrationEIDEquipmentInterfaceDevelopmentEIPEquipmentlmprovementProgram;EquipmentlmprovementProjectEISelectrochemicalimpedancespectroscopyEKFextendedKalmanfilterELFextremelylowfrequencyEMenterprisemodel;electromagnetic;electromigrationEMAequipmentmaturityasse

34、ssmentEMCelectromagneticcapability;electromagneticcompatabilityEMFelectromagneticfieldEMGelectromigrationEMIelectromagneticinterferenceEMMAelectronmicroscopyandmicroanalysisEMPelectromagneticpulseEMRentermoverequestEMUelectromagneticunitEOSelectricaloverstressEOTendoftransfer;equivalentoxidethicknes

35、sEPextremepressure;electropolishEPLelectronprojectionlithographyEPRelectronparamagneticresonanceEPROMelectricallyprogrammableread-onlymemoryEPSSelectronicperformancesupportsystemEPTequipmentperformancetrackingEQUIPC/IequipmentcontrolandintegrationEQUIPRTCequipmentreal-timecontrolERAMequipmentreliabi

36、lityERMenterprisereferencemodelERNexternalrecurrentneuralnetworkERPextendedrangepyrometerERSeventreportingstandardERTemergencyresponsetimeESengineeringspecification;expertsystemESCelectrostaticchuckESCAelectronspectroscopyforchemicalanalysisESDelectrostaticdischargeESHenvironmentESMelectronicservice

37、manualETABExecutiveTechnicalAdvisoryBoardETQRExternalTotalQualityandReliabilityEUVextremeultravioleteVelectronvoltEWMAexponentiallyweightedmovingaverageFfluorineF/lfinalinspectionFAfailureanalysisFABfastatombombardmentFAMOSfloating-gateavalanche-injectionmetal-oxidesemiconductorFBGAfine-pitchballgri

38、darrayFCflipchipFCMfacilitiescostmodelFCSfactorycontrolsystemFDCfaultdetectionandclassificationFDEfrequencydomainexperimentsFDSOIfullydepletedsilicononinsulatorFeironFECfabricationevaluationchipFEMfiniteelementmodelFEOLfrontendoflineFESEMfieldemissionscanningelectronmicroscopyFETfield-effecttransist

39、orFFTfastFouriertransformFFUfilterfanunitFIfilterabilityindex;factoryintegrationFIBfocusedionbeamFIDflameionizationdetectorFIFOfirst-inFIMSfront-openinginterfacemechanicalstandardFLfuzzylogicFLOPCfloatingpointoperationsneededpercycleFLOTOXfloatinggatetunneloxideFLRTfactorylayout/relayouttoolFMforeig

40、nmaterialFMEAfailuremodeandeffectsanalysisFMMCfactorymaterialmovementcomponentFMVPFrameworkMemberValidationProjectFNNfeed-forwardneuralnetworkFOCSfiber-opticchemicalsensorFOSBfrontopeningshippingboxFOUPfrontopeningunifiedpodFOVfieldofviewFOXfieldoxideFPflashpointFPDfocalplanedeviation;flatpaneldispl

41、ayFPGAfield-programmablegatearrayFPLAfield-programmablelogicarrayFPLFfield-programmablelogicfamilyFPLSfield-programmablelogicswitchFPMSFactoryPerformanceModelingSoftwareFPROMfield-programmableread-onlymemoryFRACASFailureReportingFRAMEFailureRateAnalysisandModelingFRMBfastrampminibatchFSGfusedsilicag

42、lassFSMfinitestatemachineFTfinaltest;FouriertransformFTAfaulttreeanalysisFTABFocusTechnicalAdvisoryBoardFTIRFouriertransforminfraredFWfullwaveFWHMfull-widthhalf-maximumFZfloatzoneGagalliumGACgranularactivatedcarbonGCgaschromatography;gravimetriccalibratorGCCgenericcellcontrollerGCDgaschromatographyd

43、istillationGCMSgaschromatographymassspectroscopyGDPPgasdriveplasmapinchGDSgraphicaldesignsystem;graphicaldesignsoftwareGegermaniumGEMGenericEquipmentModelGEMVSGEMverificationsystemGESgenericequipmentsimulatorGFCgasfiltercorrelationGFCIgroundfaultcircuitinterrupterGIDLgate-induceddrainleakageGILDgasi

44、mmersionlaserdopingGLCgasliquidchromatographyGOIgateoxideintegrityGPIBgeneral-purposeinterfacebusGSCEgassourcecontrolequipmentGTSGEMTestSystemHhydrogenHAPhazardousairpollutantHARIhighaspectratioinspectionHASThighlyacceleratedstresstestingHAZCOMHazardCommunicationStandardHBhorizontalBridgemancrystalH

45、CIhotcarrierinjectionHCMhollowcathodemagnetronHCMOShigh-densityCMOSHCShot-carriersuppressedHDhighdensityHDLhardwaredescriptionlanguageHDPhigh-densityplasmaHDPEhigh-densitypolyethyleneHeheliumHEMhigh-efficiencymatchingHEPAhigh-efficiencyparticulateairHfhafniumHFhydrofluoricacidHgmercuryHIBSheavyionba

46、ckscatteringspectrometryHiPOxhigh-pressureoxygenHLFhorizontallaminarflowHMDShexamethyldisilizaneHMIShazardousmaterialsinventorystatementHMMPhazardousmaterialsmanagementplanHMOShigh-performanceMOS;high-densityMOSHOMERhazardousorganicmassemissionrateHOPGhighlyorientedpyroliticgraphiteHPhighpurityHPEMH

47、ybridPlasmaEquipmentModelHPIhighpressureisolationHPLhigh-performancelogicHPLChigh-performanceliquidchromatographyHPMhazardousproductionmaterials;high-puritymetalHPVhigh-pressureventHRAhumanreliabilityanalysisHRRhighramprateHRTEMhigh-resolutiontransmissionelectronmicroscopyHSQhydrogensilsesquioxaneHT

48、Ohigh-temperatureoxidationHTRBhigh-temperaturereversebiasHUPWhotultrapurewaterHVACheatingIiodineI/Oinput/outputI2LintegratedinjectorlogicI300Ilnternational300mmlnitiativeICintegratedcircuit;lnvestmentCouncil;ionchromatographyICAPinductivelycoupledargon-plasmaspectrometryICMSintegratedcircuitmeasurem

49、entsystemICPinductivelycoupledplasmaICP-AESinductivelycoupledplasmaatomicemissionspectroscopyICP-MSinductivelycoupledplasmamassspectrometryICTidealcycletimeIDDQdirectdrainquiescentcurrentIDEALinitiatingIDLinterfacedefinitionlanguageIDLHimmediatelydangeroustolifeorhealthIDSinteractivediagnosticsystem

50、IEAionenergyanalysisIECinfusedemittercouplingIEDFionenergydistributionfunctionIERNinternal-externalrecurrentneuralnetworkIFinterfaceIGFETinsulated-gatefield-effecttransistorILBinnerleadbondILDinterleveldielectric;interlayerdielectricILSintracavitylaserspectroscopyIMintegratedmodel;integratedmetrolog

51、yIMDintermetaldielectricIMMAionmicrophobemassanalysisIMSionmobilityspectroscopyInindiumINCAMSindividualcassettemanufacturingsystemIPAisopropylalcoholIPLionprojectionlithographyIPTidealprocesstimeIriridiumIRinfraredIRASinfraredreflection-absorptionspectroscopyIRISimagingofradicalsinteractingwithsurfa

52、cesIRNinternalrecurrentneuralnetworkIRONMANImprovingReliabilityofNewMachinesatNightIRTC-1interconnectreliabilitytestchip-1ISinformationsystems;interfacespecifications;integratedsystemsISCIndustrySteeringCouncilISEMinspection/reviewspecificequipmentmodelISMinductorsupermagnetronISMTInternationalSEMATECHISPMinsituparticlemonitorISRinsiturinseISSionscatteringspectroscopyITRIInterconnectionTechnologyITRSInte