微观的机电一体化技术

1、“微观”的机电一体化技术微机电系统（MEMS） 班级：机电技术教育122班 姓名： 胡敏 学号： 微机电系统是微米大小的机械系统，其中也包括不同形状的三维平板印刷产生的系统。这些系统的大小一般在微米到毫米之间。在这个大小范围中日常的物理经验往往不适用。比如由于微机电系统的面积对体积比比一般日常生活中的机械系统要大得多，其表面现象如静电、润湿等比体积现象如惯性或热容量等要重要。它们一般是由类似于生产半导体的技术如表面微加工、体型微加工等技术制造的。其中包括更改的硅加工方法如压延、电镀、湿蚀刻、干蚀刻、电火花加工等等。微机电系统是指集微型传感器、执行器以及信号处理和控制电路、接口电路、通信和电源于

2、一体的微型机电系统，是一个独立的智能系统。主要由传感顺、作动器和微能源三大部分组成。微机电系统具有以下几个基本特点，微型化、智能化、多功能、高集成度。微机电系统。它是通过系统的微型化、集成化来探索具有新原理、新功能的元件和系统微机电系统。微机电系统涉及航空航天、信息通信、生物化学、医疗、自动控制、消费电子以及兵器等应用领域。微机电系统的制造工艺主要有集成电路工艺、微米/纳米制造工艺、小机械工艺和其他特种加工工种。微机电系统技术基础主要包括设计与仿真技术、材料与加工技术、封装与装配技术、测量与测试技术、集成与系统技术等。1.发展背景 微机电系统（Micro Electro Mechanical

3、Systems 简称MEMS） 是近年来发展迅速的高新科学技术, 是一种集成微电子和微机械、具有微观尺寸的静止或移动部件的装置。1959 年，美国物理学家R Feynmam 提出了制造微型机械的设想。 1962 年第一个硅微型压力传感器问世，其后微梁、微齿轮等微型机构又开发成功。20世纪70年代末期，斯坦福大学开发出硅微加工的气相色谱仪，随后人们又提出了制造微传感器、微处理器的构想。20 世纪80 年代初，Middelhoek著文预示微系统的出现和发展前景，对微系统的研究起着重要的推动作用。美国在1987 年举行的IEEE Micro-robots and Tele-operators 研讨会

4、的主题报告标题为small machines，large opportunities，首次提出了微机电系统（micro electro-mechanical system , MEMS）一词, 标志着微机电系统研究的开始。1988年, 美国加州大学伯克利分校研制出直径为60120m的硅微型静电电机， 引起了人们的极大关注。对微机电系统研究产生很大的鼓舞。 由此可见，美国有关微系统的研究是由微电子技术发展而来，故称之为MEMS，这也是目前广为使用的名称。在欧洲,，1989年在荷兰特文蒂( Twente) 以Micro Mechanics的名称首次召开有关微系统的研讨会。1990 年, 在柏林召开

5、的研讨会改称为MST (micro system-technology)，即微系统，这一称谓更强调系统的观点，即如何将多个微型化的传感器、执行器、处理电路等元部件集成为一个智能化的有机整体。欧洲在该领域的重要贡献是开发出扫描隧道951。关于微机电系统研究显微镜和原子力显微镜以及LIGA工艺。 在精密机械加工方面有传统优势的日本则称之为Micro-Machine即微机器。并于1988年正式建立微机械研究组织。到20 世纪末，MEMS技术已逐渐形成一门独立学科, 得到广泛的应用. 根据NEXU S2002 年市场调查结果，目前商业MEMS及其应用发展迅速，每年可销售1 亿多个MEMS产品，2000

6、 年MEMS的销售额更是达到300 亿美元，预计到2005 年达到680 亿美元。2002年5 月在San Jose 召开的MEMS传感器世界博览及研讨会提出了BioMEMS/BioSensor 的新观念，并探讨了MEMS在生物工程中的应用前景及所面临的挑战。2. MEMS的定义 作为最近十几年来新出现的一门技术，MEM对现代科技的影响，将超过晶体管的出现，堪称为跨时代的技术。MEMS技术是一种多学科交叉的前沿性领域，它几乎涉及到自然及工程科学的所有领域，如电子、机械、光学、物理学、化学、生物医学、材料科学、能源科学等。但是，目前关于MEMS尚无统一的定义。一般地说MEMS具有以下几个非约束性

7、的特征：（1）尺寸在毫米到微米范围之内，区别于一般宏（Macro），即传统的、大于 1cm尺度的“机械”，但并非进入物理上的微观层次。（2）基于（但不限于）硅微加工（Micro fabrication）技术制造。（3）与微电子芯片类同，可大批量、低成本生产，使性能价格比比之传统机械制造技术，大幅度地提高。（4）MEMS 中的“机械”不限于狭义的机械力学中的机械，它代表一切具有能量转化、传输等功能的效应：包括力、热、声、光、磁，乃至化学、生物等。（5）MEMS 的目标是微“机械”与 IC 集成的微系统，即具有智能的微系统。用以上特征来衡量，用微电子技术（不限于）制造的微小机构、器件、部件和系统等

8、都属于MEMS范围，微机电系统不仅能够采集、处理与发送信息或指令，还能够按照所获取的信息自主地或根据外部的指令执行机械操作。微机械和微系统只说明 MEMS发展的不同层次，而有关的科学技术都可统称为 MEMS 技术。一般来说，微机械多指构造较简单能动作的微构造，它是构成微机电系统的要素技术。微机电系统（MEMS）则指集微型传感器、微型执行器、信号处理和控制电路、接口电路、通信系统以及电源于一体的微型机电系统。宏微观转换及其相互关系 对于微机电系统（MEMS），由于尺寸效应，现有宏观世界的一些控制方法不再有效。与特征尺寸L的高次方成比例的惯性力、电磁力( L3) 等的作用相对减小，而与尺寸的低次方

9、成比例的粘性力、弹性力( L2) 、表面张力( L1) 、静电力(L0) 等的作用相对增大。这也是微型系统常以静电力、表面张力作为驱动力的原因。随着尺寸的减小, 表面积(L2) 与体积(L3) 之比相对增大。因而热传导、化学反应等速度加快，表面间摩擦阻力显著增大。材料性能和摩擦现象受制作工艺的影响。 以上是“微小”操作所涉及的力。传统（宏观）的机电一体化系统的作业，是在同一工作空间完成的，而MEMS的操作过程则是宏观和微观空间的结合首先是大面积寻的操作，如介入诊疗机器人进入作业空间的过程，然后是在微观范围内完成精密操作。这需要整个操作过程能够实现宏微观的切换，完成类似“浏览”与“凝视”的操作切

10、换。 对于系统精度来说，在一个大系统下实现微米级运动，误差来源是多方面的，实现高精度存在许多困难。由于各子系统对精度的影响不同，问题采取一视同仁是不科学的，也是不经济的，对各子系统如何恰如其分地提出误差限度是有指导意义的。Mechanical and electrical integration (Mechatronics) is not a simple platter mechanical and electronic devices, but the combination of machine and electricity, complementary on the function

11、, in order to realize the best composition, increase the function of the system, improve the reliability and cost performance, save raw materials and reduce the cost. Mechatronics field involved mainly includes: the traditional mechanical design, microelectronics technology, the classical control th

12、eory, etc, also including the modern information processing technology, modern design method, software engineering, and modern control technology. With the development of modern technology, especially the progress of mechanical technology and microelectronics technology, meaning also in the continuo

13、us development of electromechanical integration, mechanical and electrical integration has been to the macro (mechatronics) and micro (mechatronics) development. This article emphatically from the Angle of system mechanical and electrical integration of the narrative micro, namely microelectromechan

14、ical system (MEMS). At present, information technology has on the path of multimedia, network and intelligent, microelectronics information processing has to system level chip integration development. No fall from the miniaturization and performance development, access to information (sensing) techn

15、ology and information technology, the so-called peripheral technology has become the bottleneck of the development are, their interface with the host also becomes the key to prevent processing speed. MEMS technology aims to integrate information acquisition, processing, and perform integration in to

16、gether, make it become the real information processing system, so it is significance to the revolution of information technology. For the traditional mechanics, the MEMS technology not only opened a new field of small size for the door, and truly achieve the beginning of the electromechanical integr

17、ation. So, MEMS is considered to be another revolution of microelectronics technology, science and technology of the 21st century, the mode of production and human life quality will have a profound impact. Summary of microelectromechanical system (MEMS) 1. The development background of MEMS (Micro c

18、ompany Mechanical Systems, or MEMS, high and new science and technology is developing rapidly in recent years, is a kind of integration of microelectronics and Micro machinery, has the Micro size of the device for static or moving parts. In 1959, American physicist R Feynmam puts forward the idea of

19、 manufacturing the micro mechanical. In 1962 the first silicon micro pressure sensor, followed by micro beam, such as micro gear micro organization and successful development. In the late 1970 s, Stanford university developed silicon micromachining and gas chromatograph, then people and puts forward

20、 some ideas of manufacturing micro sensor, microprocessor. In the early 1980 s, Middelhoek led indicate the emergence of micro system and prospects of the study of micro system plays an important role. The United States in 1987, IEEE Micro - robots and Tele - operators the theme of the conference re

21、port entitled small those, the large opportunities, first proposed the MEMS (Micro company - mechanical system, MEMS), marked the beginning of MEMS research. In 1988, the United States at the university of California, Berkeley, developed the diameter of 60 120 microns of silicon micro electrostatic

22、motor, has attracted great attention. Have a great encouragement for mems research. Thus, the studies of micro system is developed by the microelectronics technology, called MEMS, it is also the name of the most widely used at present. In Europe, and in the Netherlands in 1989, wens (Twente) to the

23、name of the Micro Mechanics for the first time held a seminar on the Micro system. Symposium in Berlin in 1990, renamed the MST (micro system technology), namely the micro system, more emphasis on the appellation systems point of view, namely how to multiple miniaturization of sensors, actuators, pr

24、ocessing circuit components such as intelligent integration as a organic whole. Europe in the field has developed a scanning tunneling is the important contribution of the 951. About mems research - microscope and atomic force microscopy and journalist on process. The traditional advantage in precis

25、ion machining of Japan is called the Micro - Machine Machine. And in 1988 formally established the micro mechanical research organization. By the end of the 20th century, MEMS technology has gradually formed an independent discipline, has been widely used. According to NEXU S2002 years market resear

26、ch results, the current commercial development is rapid, MEMS and its application products, annual sales of more than 100 million MEMS MEMS sales reached $2000 in 30 billion, is expected to reach $68 billion by 2005. In May 2002 at the San Jose MEMS sensors of the world expo and conference proposed

27、the new concept of BioMEMS/BioSensor, and discusses the MEMS applications in biological engineering prospect and the challenge. 2. As the definition of MEMS in recent decades a newly emerging technology, MEM influence on modern science and technology, will be more than the presence of the transistor

28、, is a cross in the age of technology. MEMS technology is a frontier field of multidisciplinary cross, it involves almost all areas of the natural and engineering science, such as electronics, machinery, optics, physics, chemistry, biology, medicine, materials science, energy science, etc. But, at p

29、resent about MEMS, there is no uniform definition. Generally MEMS has the following non-binding characteristics: (1) the size in the range of mm to microns, different from the general Macro (Macro), namely, traditional, greater than 1 cm scale machine, but not into the physics on the micro level.(2)

30、 based on (but not limited to) silicon micromachining and Micro fabrication technology. (3) and microelectronic chip similar, can be mass production, low cost, make the performance price ratio than the traditional mechanical manufacturing technology, greatly improved. (4) the machine are not limited

31、 to a narrow in MEMS mechanical mechanics of machinery, it represents all has the effect of energy conversion, transmission, and other functions, including force, heat, sound, light, magnetic, and chemical, biological, and so on. (5) MEMS micro goal is machine and IC integrated Microsystems, namely

32、the micro system with intelligence. Measured by the above characteristics, made of tiny microelectronic technology (not limited to) institutions, devices, components and systems are belong to the scope of MEMS, microelectromechanical system can not only send information acquisition, processing and o

33、r instructions, also can according to the acquired information independently or according to the instruction execution of external mechanical operation. Micro machine and micro system only shows the different levels of development of MEMS, and the science and technology can be referred to as MEMS te

34、chnology. More generally, the micro mechanical structure is relatively simple to action of micro structure, it is the elements of a mems technology. Microelectromechanical system (MEMS) is refers to the collection of miniature sensors, micro actuators, signal processing and control circuit, interfac

35、e circuit, communication system, and electricity comes from the integration of the micro mechanical and electrical systems. Macro - micro switch for micro-electro-mechanical systems (MEMS) and their mutual relations, due to size effect, macroscopic world some of the existing control method is no lon

36、ger valid. And features high time proportional to size L of inertia force, the action of electromagnetic force (L3), and other relatively reduced, and the size of the low time proportional to the viscous force, elastic force (L2), surface tension (L1), electrostatic force (L0) and so on the role of the relative increase. This is also the micro system often by electrostatic force, surface tension as a driving force