GBT-AZO Targets 氧化铝锌靶材

GB/T20510—XXXX

ICS77.150.60

CCSH72

NationalStandardofthePeople’sRepublicofChina

GB/TXXXX—XXXX

ZincAluminumOxideTargets

(Pre-reviewDraft)

Issuedby××××-××

Implementedby××

StandardizationAdministration

StateAdministrationforMarketRegulation

Issue

GB/TXXXX—XXXX

PAGE\*Arabic

9

GB/TXXXX—XXXX

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2

Preface

ThisdocumentisdraftedasperGB/T1.1-2020Directivesforstandardization—Part1:Rulesforthestructureanddraftingofstandardizingdocuments.

ItisproposedbytheChinaNon-FerrousMetalsIndustryAssociation.

ItisfiledbytheNationalNon-FerrousMetalsStandardizationTechnicalCommittees(SAC/TC243).

ItisdraftedmainlybyXXXfromXXXCompany

ZincAluminumOxideTargets

1Scope

Thisdocumentstipulatesthetechnicalrequirements,testingmethods,rulesofinspection,logoandtags,packaging,transportation,storage,attachments,andorders.

Itisforthezincaluminumoxidetargets(abbreviatedtoAZOhereinafter)consistingofZnOandAl2O3undercertainratio,whichareappliedforsolarenergycoatingfilmandbuilding’senergysavingglasscoatingfilm

2ReferredStandardizedDocuments

ThecontentsofthefollowingdocumentsconstitutethenecessaryprovisionsofthisDocumentbystandardizedquotations,wherethequoteddocumentswithdatesareapplicableforthisDocumentwhilethelatestversionsofthosewithoutdates,includingalltherevisedlists,areapplicableforthisDocument.

GB/T8411.2Insulationmaterialsofporcelainandglass-Part2Testingmethods

GB/T8170Rulesofroundingofffornumericalvalues&expressionandjudgementoflimitingvalues

GB/T6394Determinationofestimatingtheaveragegrainsizeofmetal

GB/T6569Fineceramics(advancedceramics,advancedtechnicalceramics)-Testmethodforflexuralstrengthofmonolithicceramicsatroomtemperature

GB/T16535Fineceramics(advancedceramics,advancedtechnicalceramics).Testmethodforlinearthermalexpansionofmonolithicceramicsbypush-rodtechnique

SL499Standardtestmethodfordeterminingresidualstressesbythehole-drillingstraingagemethod

3Terms&Definitions

ThetermsandtheirdefinitionsasfollowsareappliedinthisDocument.

3.1Bulkdensity

Materials’weightpervolume.

3.2Relativedensity

Theratioofthebulkdensityandtheoreticaldensity

WhentheweightpercentageofAZOisZnO:Al2O3=98:2,thetheoreticaldensityofAZOforcalculationis5.57g/cm3.

WhentheweightpercentageofAZOisZnO:Al2O3=98.85:1.15,thetheoreticaldensityofAZOforcalculationis5.59g/cm3.

4Types

AZOtargetshavetwotypes,namelyplanertargetsandrotatabletargets.TherearetwonumbersaspertheratioofZnOandAl2O3,namelyAZO-1andAZO-2.

5TechnicalRequirements

5.1ChemicalComponent

5.1.1Composition

5.1.1.1TheweightpercentofAZO-1isZnO:Al2O3=98:2,andthetoleranceofAl2O3is±0.1.

5.1.1.2TheweightpercentofAZO-2isZnO:Al2O3=98.85:1.15,andthetoleranceofAl2O3is±0.05.

5.1.2Impurities

AZO’simpuritiesshouldbeuptothefollowingspecification.

Chart1AZO’sImpurities

ContentofImpurities≤（×10-4）%

Fe

Cu

Pb

Cd

Mn

Cr

Ni

Na

Si

Ca

20

10

20

10

5

10

10

20

100

20

5.1.3Others

BoththesupplierandthecustomershallnegotiateanddecideitwitheachotherwhenthereareotherspecialrequirementsforAZO’schemicalcomponent.

5.2PhysicalProperties

5.2.1Relativedensity:bothtypesofAZOtargetsshouldbeorover96%;uniformitytoleranceofthedensityshouldbe±0.2％.

5.2.2Resistivity:≤5×10-4Ω·cm.

5.2.4Rupturestrength:≥130MPa.

5.2.5Residualstress:<10MPa.

5.2.6Grainsizeshouldbebasicallyuniformwithaveragegrainsize≤20μm,andmaxgrainsize≤50μm.

5.2.7BoththesupplierandthecustomershallnegotiateanddecideitwhenthereareotherrequirementsforAZO‘sphysicalproperties.

5.3Physicalspecification

AZOhastwotypes,namelyplanertargetsandrotatabletargets.Boththesupplierandthecustomershallnegotiateanddecidethespecificationandtolerance.

5.4AppearanceQuality

5.4.1SurfaceroughnessofAZO≤1.0μm.

5.4.2AZOshouldbegreyish-greenorashblackwithuniformcolor.

5.4.3AZOshouldbeflat,cleanandsmoothonthesurfacewithoutcracks,fingerprints,foreignmattersorcontamination.

5.5Product’sInternalQuality

ThereshouldbenocracksintheAZOwithdiameterofporosity≤0.3mm,numberofporosityunitarea≤3/cm2.

6TestingMethods

6.1ChemicalComponentAnalysis

Itiscarriedoutbasedonthedecisionthatthesupplierandthecustomernegotiateitandmake.

6.2TestingMethodsforPhysicalProperties

6.2.1Testingmethodsforrelativedensity

ThebulkdensityiscarriedoutviaGB/T8411.2,andthentherelativedensityiscalculatedaccordingtothebulkdensityandtheoreticaldensity.

6.2.2Testingmethodsforresistivity

ItiscarriedoutviaGB/T8411.2.

6.2.3Testingmethodsforflexuralstrength

ItiscarriedoutviaAGB/T6569.

6.2.4Testingmethodsforresidualstresses

ItiscarriedoutviaSL499.

6.2Physicalspecification

ThephysicalspecificationofAZOisdeterminedbycorrespondingprecisionmeasuringdevices.

6.3AppearanceQuality

Itisinspectedvisuallyorbycorrespondingdevices.

6.4Product’sInternalQuality

Itistestedwithultrasonicequipmenttocheckoutdamages.

7InspectionRules

7.1Inspection&Acceptance

7.1.1AZOshouldbeinspectedbythesupplier’squalityantechnicalsupervisiondepartmenttoguaranteetheproductsareinlinewiththeDocumentororders.

7.1.2ThecostumershouldcheckouttheproductsreceivedaccordingtotheDocument.Thecostumershouldinformthesupplierin30daysuponthereceivingdateiftheinspectionresultisnotinlinewiththeDocumentortheorders(contracts).Boththetwopartiesshallnegotiateitwitheachotherandsolveit.Boththetwopartiesshalltakesamplestogetherwheneverthereisdisputeagainsttheinspectionresultsandthethirdauthoritypartyisinvolved.

7.2Batching

AZOinspectionsshouldbesentinbatcheswhichareconsistedofthesamemanufacturingprocessandthesamebatchofoxidepowder.

7.3InspectionItems

7.3.1ChemicalcomponentanalysisandappearancecheckshouldbecarriedoutforeachbatchofAZO.

7.3.2DensityandresistivityshouldbeinspectedforeachbatchofAZO.

7.3.3PhysicalspecificationandappearancequalityshouldbeinspectedforeachbatchofAZO.

7.3.4Theflexuralstrength,residualstresses,grainsizeofAZOareinspectedaspertherequirementsofthetypetest.Atypetestisconductedquarterlywhenitisinnormalproduction.

7.4Sampling&SamplesPreparationfortheThirdAuthorityParty

7.4.1Sampling&samplespreparationforthechemicalanalysis

Thewayhowtotakeandpreparesamplesisnegotiatedbythesupplierandthecustomer.

7.4.2Sampling&samplespreparationforthephysicalproperties

7.4.2.1Takingsamplesforbulkdensityinspection:firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastonepiece;secondly,take3-4samplesof20mm*20mmwithalinearcuttingmachine,cuttingsamplesisometrically;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofbulkdensity.

7.4.2.2Takingsamplesforresistivityinspection:firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastonepiece;secondly,take10rectanglesamplesof120mmlongwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofresistivity.

7.4.2.3Takingsamplesforlinearexpansivityinspection:firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastonepiece;secondly,take5rectanglesampleswiththesamesizebyalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationoflinearexpansivity.

7.4.2.4Takingsamplesforinternalqualityinspection:cleanthesamplesthataredonewiththedensityinspection,anddrythemwithtissuetoinspectifthereareanydamagesinsidetheproducts.

7.5DeterminationofInspectionResults

7.5.1ItiscarriedoutbyGB/T8170fortheroundingoffforvaluesoftheinspectionresultsandtodeterminethevaluesafterroundedoff.

7.5.2Thisproductisunqualifiediftheresultsofthechemicalcomponent,physicalproperties,internalqualityarenotinlinewiththeDocument.

7.5.3ThisproductisunqualifiedifthephysicalspecificationandappearancequalityarenotinlinewiththeDocument.

8Logo&Tags,Packaging,Transportation,Storage&Attachments

8.1Packaging

EachpieceofAZOshouldbevacuumedpackagedunderthecleancircumstanceandanti-vibrationshouldbeimplemented.

8.2Logo&Tags

EachpieceofAZOshouldshowthesupplier’sregisteredbrandlogoorcompany’slogo,productname,batchnumberandtagsofQualified.

8.3Transportation&Storage

AZOshouldbestoredinacoolanddryplace.Keepitfrombeingvibrated,humid,stackedandsecondarycontaminationduringtransportationandstorage.

8.4Others

Boththesupplierandthecostumershallnegotiatewitheachotherwhenthecustomermakessuchspecialrequestsaslogoandtags,packaging,transportationandstorageofAZO.

8.5Attachments

Attachments