易普森真空炉故障报警信息及处理

Roughing

报警信息说明Pump ChecktheRoughingPumpStarterand TheoutputtostarttheroughingpumpwasFail粗泵故障机械泵故障)

theRoughingPumpAuxillaryContact检查粗泵起动器和关心触头

energized,buttheauxiliarycontactfromthemotorstarterfailedtoenergize.的关心触头没有接通。VacuumFail

Booster ChecktheVacuumBoosterStarterand TheoutputtostartthevacuumboosterwastheVacuumBoosterAuxiliaryContact energized,buttheauxiliarycontactfromthemotorstarterfailedtoenergize.真空增压泵故障〔罗茨泵故障〕ChamberOverpressure

检查真空增压泵起动器和关心触头。启动真空增压泵的输出接通，但是电机起动器的关心触头没有接通。ChecktheChamberTransducerfor Chamber pressure has exceeded properoperation. CheckChamber setpointfortheEvent.If16PSIGswitchOverpressureSwitch.

made, furnace is automaticallybackfilling

from炉腔过压 器是否正常工作检查炉腔过压开关。

炉腔压力超过大事的设置点。假设开关16PSIG，炉子不能自动回填。Holding

Pump ChecktheHoldingPumpStarterand TheoutputtostarttheholdingpumpwasFault泵故障〕

theHoldingPumpAuxiliaryContact检查前支泵起动器和关心触头。

energized,buttheauxiliarycontactfromthemotorstarterfailedtoenergize.器的关心触头没有接通。HeatFault ChecktheHeatEnabContactorand TheoutputtoenabletheheatcontactorwastheHeatAuxiliarycontact加热故障 起动器和加热关心触头

energized,buttheauxiliarycontactfromthemotorstarterfailedtoenergize.起动器的关心触头没有接通。TransducerRange Chamber

Transducer may

need Theoutputtoenabletheheatcontactorwasreplaced.replaced

energized,buttheauxiliarycontactfromthemotorstarterfailedtoenergize.

可能需要更换炉腔传感器 传感器模拟输入值超过限值DiffusionFail

Pump Check Diffusion Pump Contactor Theoutputtostartthediffusionpumpwasand the DiffusionPump Auxiliary energized,buttheauxiliarycontactfromContact thecontactorfailedtoenergizeortheTASopened.集中泵故障 检查集中泵起动器和关心触头。 启动集中泵的输出接通，但是接触器的关心触头没有接通或TAS翻开。Pump Water CheckthePumpWaterPressure

ThepumpwaterpressurehaddroppedPressureFail

Switch. CheckPumpWaterFlow

belowtheminimumlimitasdefinedbythepumpwaterpressure Switch.(没开内循环)

检查泵的水压开关和水流量。 泵的水压降到泵水压开关规定的最低限值以下。AirPressureFail. ChecktheAirPressureSwitch.CheckincomingAirPressure

Theair(pneumatic)pressurehasdroppedbelowtheminimumlimit,asdefinedbytheair(pneumatic)pressureswitch.0.4MPa〕

检查气压开关，检查入口气压。 气(气动)压力降到气(气动)压力开关规定的最低限值以下。Power

Supply CheckPowerSupplyWaterFlow The power supply waterpressure hasWaterPressureAlarm

andTemperature

droppedbelowtheminimumlimit,asdefinedbythepowersupplywater switch and individual temperatureactivatedswitches.循环水压力不正常〕

检查电源水流量和温度 电源的水压降到电源水压开关和各个VRT温度启动开关规定的最低限值以下。ChamberPressureFail

Water CheckChamberWaterPressureandTemperature

Thechamberwaterpressurehaddroppedbelowtheminimumlimit,asdefinedbythechamberwaterpressureswitchortheexternalchambertemperatureactivatedswitches.般是内循环水温过高〕

检查炉腔水压和温度 降到炉腔水压开关或炉腔外温度启动开关规定的最低限值以下。Heat

Exchanger ChecktheHeatExchangerWaterFlow TheheatexchangerwaterpressurehasWaterFlow

Switch. CheckincomingwatersupplytoHeatExchanger

droppedbelowtheminimumlimit,asdefinedbytheheatexchangerwaterflowandtemperatureswitches.热交换器水流量 交换器水流量的进水供给。

温度启动开关规定的最低限值以下。DoorAlarm ChecktheDoorClosedLimitSwitch Thechamberdoorlimitswitchinputhasde-energizedwhileprocesscycleison,indicatingthatdoormightbeopen.门报警炉门没关好)

检查门关闭限位开关。 位开关输入接通，但工艺循环翻开，显示门可能翻开。GasBlowerFail ChecktheGasBlowerStarterandGas TheoutputtostartthegasblowerwasBlowerAuxiliary

energized,buttheauxiliarycontactfromthemotorstarterfailedtoenergize or the temperature activatedswitchinthegas bloweropened.鼓风机故障 检查鼓风机起动器和关心触头。 启动鼓风机的输出接通，但是电机起动启动开关翻开。Cooling Pressure Check Chamber Transducer or 5“ Thechamberpressureislessthan5HgLow冷却压力低

switchsetting. whilethegasbloweroutputisenergized.“检查炉腔传感器或开关设置 炉腔压力低于但鼓风机输出接通。E-StopNotClosed没有按复位键BatteryLow电池低ForcesOn力气翻开

ResetE-Stop按复位键ChangeBatteryonPLCprocessor.PLC处理器电池RemoveallPLCforces.PLC力气

TheemergencystoppushbuttonhasbeenpressedandheldopenThe programmable controller”s batterylevelislow.PLCCPU电量低Therearecurrentlyforcesenabledwithintheladderlogicprogram.梯级规律程序内现在启用了力气。ColdLeaktestFail

LeaksexistinthefurnaceorLeaktest The leaktest has failed to pass Parameterscannotbeachieved completingthenumberattemptsselected

数

合格。Diffusion

Pump CheckDiffusionPump

The diffusion pump temperature hasHi-Temp(NotApplicable)

temperaturethermocouple

exceededthemaximum limit as indicated by thermocoupleplacedonthepump.集中泵高温(不适用)

检查集中泵热电偶 的热电偶显示集中泵温度超过最高限值。DiffusionLowTemp

Pump CheckDiffusionPumptemperaturethermocouple

Thediffusionpumptemperatureisbelowtheminimum(NotApplicable)集中泵低温(不适用)Chamber

limitasindicatedbythethermocoupleplacedonthepump.检查集中泵热电偶 装的热电偶显示集中泵温度超过最低限值。Check Chamber Overtemperature ThefurnaceovertemperaturecontrollerhasOvertemp

thermocouple. Check

indicatedthatitssetpointwasexceededasOvertemperatureinstrumentlimits.

determinedthermocouple

by the overtemperature炉腔过热 热电偶检查过热仪表限值。

电偶确定的设置点。Preventive Maint Perform system maintenance and ThehourmeterofoneofthedevicesAlarm RESETtheHourCounter monitoredhasexceeded its setpoint. maintenanceneedstobeperformedonthatdevice.预防性维护报警,重设维护日期〕

进展系统维护，复位计时器

性维护。Preventive Maint Perform system maintenance and ThehourmeterofoneofthedeviceshadOffsetAlarm预防性维护偏移报警

RESETtheHourCounter进展系统维护，复位计时器

exceededitssetpointplustheoffset.Preventivemaintenanceneedstobeperformedonthatdeviceassoonaspossible.性维护。ExcessHold ChangeExcessHoldGlobalValue. Excess hold global value has beenCheckalarmstoseewhyfurnaceisinHOLD.过量保持 出炉子处于保持的缘由。

exceeded.已经超过过量保持全局值。GsoakSetup

WKTC SelectWorkTC”sforaGuaranteedSoakEvent.

NoworkthermocoupleswererequiredforEvent10保证吸取工作热电偶设置

10不需要工作热电偶RoughingJammed.

Valve ChecktheRoughingValveSolenoid RoughingValvejammedandtheRoughingValveClosedLimitSwitch粗泵堵塞 阀门螺线管和粗泵阀门关闭限位开关WKTC Minimum ChangeTotalNumberofWKTC”s

粗泵堵塞??ThenumberofgoodworkthermcouplesAlarm工作热电偶最低报警

orMinimumWKTC”sallowedglobalvalues.全局值

(notopen-circuited)hasdroppedbelowtheminimumspecifiedinthatrecipe(不是开路)已经降到配方规定的最低值。PumpdownTimeAlarm

Max ChangePumpdownTimeGlobalValue. Checkleaks

Thefurnacefailedtopu