爱德华scrubber高处置量

ATLASProductrangeoverviewATLASrangeCombustionabatementcombinedwithwetscrubbingstagesSuitableforEtchapplicationsLowCoO,userfriendlysolutionExcellentreliabilityonharshestprocessesPFCgasabatementcapability2ATLASConstructionATLASLayoutAllutilityconnectionsattopAllelectricshousedinfront-accessiblesectionTouch-sensitivecolourscreenInletpipeworkdesignavoidspowder&liquidtrappingHydro-cyclone:self-cleaningwaterfilteringdeviceEasilyaccessibleheatexchangerandwaterpumpsUseofCPVCcomponents,largediametersminimiseriskofblockageEverythinghousedinasinglecabinetIntegraldrip-trayCPVCisaFM-approvedflame-retardantplastic4GaspathWaterUntreatedprocessgasCombustionby-productsDetoxifiedgasFuel+Air5ATLASCombustionsectionInletsL-shapedpipeworkAvoidblockagebysolid/liquidby-productsUpto6inletsTMSoptionavailableInlettemperaturecontrolAvoidby-productscondensation7CombustionsectionInitialgastreatment:combustionOxidationofdepositiongasesSiH4+O2SiO2+2H2OReductionofcleangases(NF3,F2)2F2+CH4+O24HF+CO2Anti-clogginginletheadInwardfiredcombustorPorousceramicconstructionExcellentcorrosionresistanceProvenpowderhandlingSafe(leak-proof,coldouterwall)8ATLASInletsPneumaticactuatorsSpringsInletHeadSelfCleaningMechanismInletnozzleCombustor150mm150mm10Combustor:InwardfiredcombustionFuelgas+AirProcessgasFlame-less,lowtemperaturecombustion800oC11Benefits1:UniformtemperatureFlame-lesscombustionCombustionatthewallHeatradiationtothecenterLowtemperature~800oCLowNOxemissions(<10ppm)UniformTemperatureNohotspot,NocoldspotCombustorlengthof300mm=Longresidencetimeinahotenvironmentat800°CHighDRE800oC12Benefit2:Powderhandling-NoblockagesConstantflowofgas(Fuel+Air)acrossceramiclinerpreventpowderdeposition.Burnerstaysclean–Noblockages800oC13Benefit3:NocorrosionOnlyceramicmaterialincontactwithhotgasesNocorrosionGreatersafetyGreateruptime800oCCeramicgasketPorousCeramiclinerCeramicpad14Benefit4:SafetyOuterwallofburneriscold(~40oC)Safetotouch,noburninjuryO-ringsareusedincoldareaonlyNometalpartincontactwithhotgasVitoncanresistHFandHClbelow200oCBurnerisleak-proof,Burnerstayleak-proofNoriskofhotgasleakage800oC15ATLASWetscrubbingsectionWetscrubbingsectionC-PVCconstructionFlameretardantplasticCorrosion-resistantHighefficiencyscrubbingperformanceWatersolubleby-products(HF,HCl…etc.)Insolubleparticles(SiO2)17WetscrubbingsectionCyclonicde-mistingPackedTowerWatertankHeatexchangerCyclonicwaterfilteringWaterpumpsQuenchWeir18Wetstage–CoolingsectionQuenchsectionWeir–section800oC50oC19Wetstage–DraintankandpackedtowerDraintank–CPVCconstructionLargediameterCounter-currentpackedtower(CPVCconstruction)20DraintankC-PVCconstructionTurbulentwaterflowCirculationrate:1volumepermin.NosedimentationofpowdersControlbyleveldetectorsFilterplatetopreventdraincloggingEasyaccessforquickservicing21ControlsPLCcontrolColortouchscreendisplayEaseofserviceHistorylogEthernetcommunicationCompatiblewithallCMSsystemsPumpinterfaceToolinterface22TwolevelsofControlMasterPLCwithcolourtouchscreendisplayRequestsFMStostartflame.PLCcanindependentlyisolategassupplyFlameManagementSystem(FMS)LegalrequirementtocomplywithUSfirecodes.FMSassemblyisapprovedbyFMHardwiredinterlock.

23ATLASsafetyinterlocksHEADTEMP.>180°CGASTEMP.>1150oCQUENCHTEMP.>80oCDRAINLEVELHIGHFUEL/AIRPRESS.>+3”wgFUEL/AIRTEMP.>150°CN2pressure<3bar(nostartallowedinthiscondition)INLETPRESSURE>2”wgSYSTEMWARNINGoutputattentionrequiredSYSTEMALARMimmediatesystemshutdownFLAMEDETECTORQUENCHWATERFlow<4.5slmO2pressure>12psi(TPUandKronisversionsonly)FUELPRESSURE.<7.5mbarWATERLEAKDETECTOR(insidecabinet)DRAINTANKTEMP.>60°CCOMBUSTORPRESSURECabinetextractionpressure+0.4”wgINLETTEMPERATURE>170°CWEIRTEMP.>80oCCOMBUSTORWALLTEMP.>70oCPACKEDTOWERWATERFlow<8slmWATERPRESSURE<2bargauge24ATLASinstalledbaseSince1994Inward-firedcombustorinstalledbaseATLASusetheInward-firedcombustiontechnologyExpertisegainedwiththeTPUrangeUsedinsemiconductorfabssince1994Over3000systemsinstalledworldwideMajorusersandOEMIntel,IBM,Ti,MicronUMC,PSC,Winbond,AUO,CMOElpida,TTi,NEC,Hitachi,SonyTECH,HNSST,Infineon,AtmelSMICNovellus,ASM,AMAT,TEL,Kokusai,Jusung26ATLAS–over400systemstodateUMCi