湿氧系统中英对照操作手册(基本操作)

1、操作手册目录Preface.序言 .IIITempress documentation set.文件设置.IIIUser Definition.用户定义.IVNotes, Cautions and Warnings.注意，小心，警告.VContents description.VIRevision History.VI1. Introduction.1-11.1General.1-11.2Operator area description.1-22. Safety.2-22.1Emergency Off (EMO).2-22.2Alarm Signals.2-22.2.1Buzzer / LE

2、D.2-22.2.2Touchscreen.2-22.2.3Light tower.2-32.2.4TSC Alarm menu.2-32.3Light tower signal description (optional).2-32.4Toxic Material.2-52.5Safety measures.2-53. Operator Instructions.2.5-13.1Load or Unload process wafers.3.1-13.1.1Load process wafers.3.1-13.1.2Unload wafers.3.1-13.2Selecting a new

3、process recipe.3.2-13.2.1Touchscreen.3.2-13.2.2TSC-2.3.2-33.3Start/Continue a new process recipe.3.3-13.3.1Touchscreen.3.3-13.3.2TSC-2.3.3-23.4Stop a running process recipe.3.4-13.4.1Touchscreen.3.4-13.4.2TSC-2.3.4-23.5Abort a running process recipe.3.5-13.5.1Touchscreen.3.5-13.5.2TSC-2.3.5-23.6Clea

4、r Alarms.3.6-13.6.1Required action.3.6-13.6.2Touchscreen.3.6-13.6.3TSC-2.3.6-2Preface序言This set of manuals explains how to operate a Horizontal Diffusion/LPCVD furnace. 这套手册是操作水平扩散炉 / LPCVD 的说明。Refer to the Touchscreen reference manual (M440.01) or the TSC-2 reference manual (M450.03) for a full des

5、cription of all operating screens.触摸屏参考手册 (M440.01) 和TSC-2参考手册是操作触摸屏的说明。工艺手册是工艺过程的信息。The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals (M300 series).参考手册 (M300 series).是描述 Tempress水平扩散炉的。Tempress documentation set 文件设置The complete Tempress documentation set incl

6、udes:全部的文件包括? Safety manual安全手册? Operator manual 操作手册? Reference manuals 参考手册1. Loadstation 装载区2. Furnace 炉子3. Gas cabinet 气柜4. Main Power cabinet 电源柜5. DPC6. DTC7. Touchscreen 触摸屏8. TSC-2 (+ optional SECS/GEM)? Vendor documentation卖主文件Delivery s on request:按要求交付? Desired vendor documentation? Sic a

7、nd Quartz drawings Sic和石英器件的图纸? RS422 protocol (DPC/DTC)User Definition 用户定义It is strongly recommended that all users first read this manual before starting any procedure. To produce an accessible manual suiting on various responsibilities, Tempress defines the following users:特别建议开始所有程序之前，先看这本手册。为不

8、同职责的人编写一本易懂的操作手册， Tempress定义了以下用户：Operator 操作人员The operator is handling the process from loading until unloading of the wafers. Therefore the operator needs to select a recipe, put the wafers on the boat, fill in Lot ID, Start the process, monitor the progress and unload wafers.操作人员的操作过程是从装载硅片到卸载硅片。

9、但是操作人员需要选择工艺菜单，装载硅片，填写产品批号，启动工艺和监控运行过程及卸载硅片Process engineer 工艺工程师The process engineer is a qualified chemical engineer, who is responsible for the process recipes and their results. The process engineer writes, tests and releases new process recipes.工艺工程师是有资格的化学工程师，他负责工艺菜单和结果，需要编写、测试和投放新的工艺菜单。Servic

10、e or Maintenance engineer 维修工程师The maintenance engineer is a qualified electrician or mechanic, who is responsible for a proper functioning system in accordance to its designated purpose. A Tempress qualified service engineer will perform the first installation.维修工程师是有资格的电工或技工，他要负责设备按设定的目的正常运行。Tempr

11、ess的维修工程师会完成初始的安装。Notes, Cautions and Warnings注意，小心，警告Notes, Cautions and Warnings appear throughout this manual, where extra attention is required to a particular (safety) item. Three levels can be distinguished:特别注意的地方会有特别提醒，注意，小心，警告要贯穿整个手册，并分为三个等级：NOTE注意Notes alert to pay attention to items or pr

12、ocedures of special importance.注意是提醒特别重要的项目或程序CAUTION小心Cautions alert for a potentially hazardous situation that may result in minor or moderate injuries.Cautions can also alert for potential equipment and/or product damage.小心是提醒有潜在的危险境况，会导致小的或中度的工伤。提醒有设备或产品的潜在损害。WARNING警告Warnings alert for conditio

13、ns that may result in permanent and/or lethal injuries.警告是提醒有永久或致命的伤害。Contents description 内容简介This manual is divided into the following sections and appendices: 手册分为下面几个部分和附录Section 1 Introduction 简介Provides an overview of the Tempress Systems Inc. Horizontal furnace.Tempress公司水平炉子的简介Section 2 Safe

14、ty安全Describes the safety components and functions. It describes all measures that are required to provide a safe way of working.描述安全组分和作用。它描述为提供一个安全工作的所有措施。Section 3 Operator Instructions 操作说明Describes all procedures that are required for the operator.描述为操作员需要的所有规程Revision History 版本的历史This manual i

15、s revision 1 of the Operator Manual and is intended to explain the required operator procedures. The function and screens it describes are based on the following software releases:说明操作程序的操作手册是第一个版本，其中功能和屏幕的描述是基于以下软件版本：? TSC 2 version 6.3 (17-02-2003)?For minor software and hardware changes, addendum

16、 to this manual will be available. For major changes, a new revision will be available. For information or other questions please contact Tempress Systems Inc.一些小的软件和硬件的变化会加在附录里。大的变化就会有一个新的版本。其他问题请联系厂家。1.Introduction 简介1.1 General 概要The horizontal furnaces of Tempress Systems Inc. are developed acco

17、rding to the European directives for Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC).The Tempress Diffusion system is a modular horizontal furnace designed to process (silicon) wafers as part of the manufacturing technology of semiconductor, optical, MEMS and solar devices.公司的水平炉子是

18、依照 Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC)的欧洲标准发展的。该公司的扩散炉是为半导体、光学、 MEMS 和太阳能器件中的硅片处理工艺设计的有标准组件的水平炉子。Figure 1-1 shows an example of a standard L-shape diffusion system with 4 process tubes shown without the partition of a cleanroom wall. It is a right-handed system, defined

19、 according to the position of the furnace relative to an operator. Usually the system contains more than 1 tube. Based on the number and size of tubes, the system is referredto as a 2, 3 or 4 stack.Figure 1-1 is an example of a 4-stack system, allowing up to 4 different processes at any time. The tu

20、bes are numbered from 1 to 4, with tube number 1 at the top and tube 4 at the bottom. All tubes operate fully independently.图 1-1是一个标准的 L型四管扩散炉，没有超净间的隔离墙。对于操作人员来说是右手操作。一般系统不止一个炉管，基于炉管的数量，系统分为2、 3或 4管炉。图 1-1是个四管炉，容许4个不同的工艺同时进行。四个管的编号是1在顶部， 4在底部，所有的管是完全独立的。Figure 1-1 Schematic view of a right-handed 4

21、-stack Diffusion System1.2 Operator area description 操作区介绍The operator area is limited to the loadstation only. Figure 1-2 shows the relevant items. The Loadstation part of a Tempress System should be placed in the cleanroom. The Furnace and Gas cabinet can optionally be placed in the greyroom.操作区只限

22、于装载区，如图1-2所示。装载区必须置于千级间，炉体和气柜置于万级间。Buzzer/LEDLight/Fan SwitchTouchscreenEMOFigure 1-2 LoadstationTo load wafers, several loader types can be implemented, including the (default) inline loader, the Amtech Atmoscan?, and the backmounted softlander. To prevent particles on the wafers during the loading

23、 process, a constant horizontal laminar flow is created from the loadstation into the cleanroom.装载硅片有几种装载类型，如联机式、Amtech Atmoscan? 和 backmounted softlander类型，在装片过程中为防止微粒落入硅片，千级间的装载区要开启水平的气流吹扫。The loadstation is powered by 220V and has an illuminated On/Off switch for the fans and the lights.The remot

24、e control cabinet in the loadstation contains TFT-Touchscreens, one for each tube. These supply the user interface for communication with the Digital System Controllers(Digital Process Controller, Digital Temperature Controller and Digital Motion Controller).装载区要有 220v的电源，以及风扇和灯的照明开关。装载区的远程控制箱包括每个管的

25、触摸屏，它提供一个与数字控制系统交流的用户界面。2.Safety 安全This section contains a brief description of the safety features of a Tempress HorizontalDiffusion System for the operator.Operators must have a general knowledge of the technology involved in diffusion systems.They should understand safety practices outlined in th

26、is manual.The descriptions contained in this user manual are general in nature or generic. The actual furnace may differ in minor detail from the furnace described in this manual, because of customer specific requirements or modifications. Please refer to the Tempress Safety manual for a complete de

27、scription of available safety features.这一部分是为操作者有关扩散系统的安全装置作一简要说明。操作者必须了解扩散工艺的基本常识，才能理解本手册安全装置的要点。用户手册中描写的是一般性，实际上炉子和此有一些细微的差别，是因为客户的特殊需要或更改。安全装置的完整描述请参考安全手册。2.1 Emergency Off (EMO) 紧急关闭Emergency Off (EMO) buttons are located around the system at accessible locations according to EN 60204-1, especia

28、lly EN 418. Pressing an EMO button turns off all power to the system except to the fans on top of the furnace. This prevents fire hazard as a result of high heat concentration in the furnace cabinet. Also those parts that are connected to a UPS facility remain operational.按照 EN 60204-1, 尤其是 EN 418标准

29、，紧急关闭按钮在系统中易接近的位置。按下紧急关闭按钮将切断除炉子顶部风扇的其他电源，会防止由于炉子高温引起的火灾。其他连有不间断电源的部分会继续运行。Press the EMO button when a person is in danger, when there is a fire, a water leakor any other event that could be hazardous to life.当着火，漏水或其他危害到生命的突发事件，要按EMO 按钮2.2 Alarm Signals警报信号Alarms and alerts generated by tube contro

30、ls are presented in several ways:石英管引起的报警有下面几种形式：? Buzzer / LED蜂鸣器 / LED? Touch screen 触摸屏? Light tower 灯塔? TSC-IIVisible and audible alarm signals are generated by the DPC, DTC and the DMC. The visible signals will be presented with a LED, located below the buzzer position as shown in Figure1-2. Ea

31、ch tube process is represented by one LED and buzzer combination. DPC, DTC 和DMC 提供了可视听报警信号， 可视信号是由 LED 实现的，如图 1-2它位于蜂鸣器下方。每一个石英管都有一组对应的 LED 和蜂鸣器。The visible alarm signals will be presented on the touchscreen bottom line. Alarms on the Touchscreen are always in combination with an audible signal. Tou

32、ching the screen deactivates the audible signal.A new Alarm or alert will not activate the audible signal again before current alarm has been solved.可视报警信号是在触摸屏的底线，触摸屏上的报警信号是于可听信号相结合的，点击触摸屏可解除报警信号。当前的报警情况没有解决之前，新的报警情况不会激活可听报警。Figure 2-1 Default light tower configurationAlarms generated by the DPC, D

33、TC and DMC will be made visible by three colors. Each color of the light tower represents particular circumstances.DPC, DTC和DMC 提供了三种颜色的报警信号，每种颜色代表特别的情况。- Green represents safe, operational condition.绿色代表安全，运行环境- Yellow represents warnings and alerts黄色代表警告或警报- Red represents alarms红色代表报警See section

34、2.3 for a full description.2.3节会详细描述TSC 报警菜单Activating the alarm menu gives an overview of all active and passed alarms during theprocess. In case of an active alarm the“ Alarm ” button start flashing on and off.如果 “Alarm报”警按钮开始闪烁，激活报警菜单会显示工艺中过去和现在的报警情况。2.3 Light tower signal description (optional)灯

35、塔信号描述（可选）Two light towers, one on top of the loadstation in the cleanroom and one on top of the furnace in the greyroom, are installed for fast anticipation on the status of the (production) process. This section describes the function of each light and its relation to the tube status.两个灯塔，一个在千级间装载区

36、顶部，一个在万级间炉子顶部，这样安装是为了快速反映工艺状况。本部分描述每个灯的功能及对应的管子状况。Green绿Yellow黄Red红A light tower is (default) comprised of 3 lights: from top to bottom RED, YELLOW andGREEN. 灯塔是由红，黄，绿三个颜色组成：The green and red light can indicate 2 signals:绿和红灯显示两种信号：亮或不亮1) OFF2) ONThe yellow light can indicate 2 signals: 黄灯显示两种信号：不亮或

37、闪烁1) OFF2) BLINKThe light tower is controlled by a tower signal PLC that receives its commands from the various controllers, among others DPC/DTC/DMC, Excess temperature controller, gas detection system alarm and the TSC Host control.灯塔是由 PLC信号塔控制，信号塔接收来自不同控制系统的命令，如DPC/DTC/DMC ，超温控制，气体检测系统和TSC主机控制。I

38、n case the EMO-switch is activated or a power failure occurs for more than 4 seconds, the power supply to the furnace will stop and also the light tower will be off.The tower signal PLC is programmed by Tempress Systems Inc. and is not adjustable by customers.如果紧急关闭启动或电源停止供电4秒以上，炉子电源将切断，灯塔也会关掉。信号塔 P

39、LC的程序是由 Tempress公司编写的，用户不能改动。For a functional description of the light tower signals see table 1:灯塔的功能描述如表 1Signal 信号Mode 模式Description 描述屏幕开运行没有警告和信息关没有运行黄灯闪烁N2压力开关没有氮气流动检测空气压力开关没有空气流动检测Torch温度 (750)Torch温度超过 750oCTorch 火焰中断没有火焰，H2阀门会关闭Torch H2/O2 比例H2/O2比超过安全值Torch 外壳Torch表面温度太高电源组温度传感器电源组温度太高源瓶温度

40、源瓶温度太高源瓶水平位置源的液面太低O2- 低氧气流速太低排放 (低/高)排放气流超出限制限度警报 (如果工艺菜单实际值超出限制中有程序 )等待操作 (如果工艺菜单需要持续操作中有程序 )工艺完成舟手动Servo 成手动模式维护模式维护模式被激活关没有警告或警报红灯开超温监测器激活管子过热泄漏检测检测到气或水泄漏关没有警告或警报没有危险Table 1 Light tower signal description2.4 Toxic Material 有毒材料The process engineer, responsible for all process related activities,

41、has to inform theoperator about the hazards of the process.工艺工程师要对全部及相关工艺过程负责，必须告知操作员工艺中存在的危险。2.5 Safety measures 安全措施Safety measures are indicated in the appropriate procedures安全措施会在适当的程序中指出。3.Operator Instructions 操作说明This document describes the various procedures required for an operator. The pro

42、cedures describe how to load and unload wafers, how to select a new process recipe, how to start/continue a process recipe, how to stop the timer of a running process recipe, how to modify Variable Commands when available and how to abort a running process recipe.这一文件向操作者描述了不同的程序：如何装卸硅片， 如何选择一个新的工艺菜

43、单，如何开始或继续工艺菜单，如何停止运行的工艺计时，如需要怎样修改可变参数，如何中断一个正在运行的工艺。3.1 Load or Unload process wafers装卸硅片Loading and unloading process wafers on the paddle is required before and after each process run. 每一个工艺过程运行之前和之后都要从桨上装卸硅片。装载硅片? Place the wafers on the wafer carriers, depending on the situation with (vacuum) tw

44、eezers or a wafer transfer system.用真空吸笔或硅片转移装置把硅片装入硅片承载器。? Pick-up wafer carriers with a pick-up fork or automated loading tool.? Place the wafer carriers around the center of flatzone as indicated on the loadstation.用叉子或自动装载工具提取硅片承载器放到装载区的中心位置。卸载硅片CAUTION小心Wafers and paddle are hot. 硅片和桨是热的。? Allow

45、 the wafers to cool down. 让硅片降温? Pick-up wafer carriers with a pick-up fork or automated loading tool. (Amtech Systems S300)? Remove the wafers from the wafer carriers, depending on the situation with (vacuum)tweezers or a wafer transfer system.用叉子或自动装载工具提取硅片承载器。然后用真空吸笔或硅片转移装置把硅片从硅片承载器中取出。3.2 Select

46、ing a new process recipe选一个新的工艺菜单A new process recipe needs to be selected so the new instructions can be executed. A newprocess recipe can only be selected if the current process recipe is in Step 0要执行新的指令需要选一个新的工艺菜单。只有当现在工艺菜单处在的Step 0才可以选择新的工艺菜单。触摸屏1) return to the Main Menu by pressing ESC until the following screen appears: