四探针一体机使用说明书

1、SZT-2A 四探针测试仪使用说明书一概述SZT-2A 型数字式四探针测试仪是运用四线法测量原理的多用途 综合测量装置，配上专用的四探针测试架，即可以测量片状，块状或 柱状半导体材料的径向和轴向电阻率， 测量扩散层的薄层电阻 （亦称 方块电阻）。四探针测试架有电动，手动，手持三种可以选配，另外 还配有四个夹子的四线输入插头用来作为测量线状或片状电阻的 中，低阻阻值。仪器由主机，测试架等部份组成，测试结果由液晶显示器显示， 同时，液晶显示器还显示测量类型（电阻率，方块电阻和电阻）以及 探头修正系数，主机由开关电源，DC/DC变换器，高灵敏度电压测量部份，高稳定度恒流源，和微电脑控制系统组成。由於

2、采用大规模集成电路，所 以仪器可靠性高，测量稳定性好。测试探头采用宝石导向轴套和高硬度钢针， 定位准确，游移率小， 使用寿命长。仪器适用於半导体材料厂，半导体器件厂，科研单位，高等院校对半 导体材料电阻性能的测试。本仪器工作条件为：温度： 23C 士 3C相 对 湿 度：50%70%工作室内应无强磁场干扰，不与高频设备共用电源。二，技术参数1， 测量范围5电阻率： 10 ?-10 5? -cm 方块电阻 10 ?-?10 5?/ 电阻 10 -? - 10 5 ?2 ，可测半导体材尺寸直径： 15-100mm长（或高）度：10?（4）最大分辨率:10卩V（ 5） 点阵液晶显示，过载显示。5，

3、恒流源：（1）电流输出：共分10卩A,100uA,1mA,10mA,100mz五挡可 通过按键选择，各挡均为定值不可调节，电阻率探头 修正系和扩散层方块电阻修正系数均由机内CPU运算后，直接显示修正后的结果。2)误差： 0.5%2 字6, 四探针测试头 ;(1) 探 针 间 距 :1mm(2) 探针机械游移率 : 1.0%(3) 探针材料： 碳化钨,0.5mm(4) 0-2Kg 可调 , 最大压力约 2Kg7, 电 源 ：交流 220V 10%功耗 35W本仪器可以选配电动测试架， 手动测试架， 手持探险头或四夹子电阻 测量输入线。1，电动测试架； 电动测试架是用步进电机驱动测试头升降， 只要

4、将被测工件放在测试 平台中心位置，按一次启动按钮，测试头自动下降，直到针头和被测 工件接触，探头将自动以慢速下降一段距离压紧探针使针与工件接触 良好并等待测量，稍候测量结束，探头上行并恢复到原来位置。所以 电动测试架的操作简便， 探针对被测工件所施压力恒定， 测量结果稳 定，建议优先选配。2，手动测试架 以其结构简单不用电源见长， 只要操作熟练， 测量精度和稳定性也很 好。3,手持式四探针测试头，使用灵活可以对任意形状的半导体材料进 行测试，而且脱离了测试架尺寸的限止，可以对大尺寸单晶硅柱的任 意部位进行单点或多点测试，但由於探针对被测材料的压力是由手感 控制的，因此，测量时必须将探头持稳压紧

5、，保证探针和被测工件接 触良好。4带夹四线测试头，是必配件，可以用四线法测量低阻值电阻。三，工作原理；1，测试原理；直流四探针法测试原理简介如下；(1)电阻率测量；当1, 2, 3, 4四根金属针排成一直线时体材料上时，在1, 4两根探针间通过电流I，则在2, 3探针间产生电位差V,材料电阻率p =CV ( ?-cm)(3-1)式中C为探针修正系数，由探针的间距决定。当试样电阻率分布均匀，试样尺寸满足半无穷大条件时2 二C= 1 1 1 1 (cm) S1 S 2 S S2 s2 s3(3-2)式中：S1, S2 S 分别为探针对1与2, 2与3, 3与4之间的距离，探头系数由制造厂对探针间距

6、进行测定后确定，并提供给用户。每个探头都有自已的系数。C 6.28 士 0.05,单位为 cm。(a) 块状或棒状样品体电阻率测量：由於块状或棒状样品外形尺寸远大於探针间距，符合半无穷大的边界条件，电阻率值可直接由(3-1 )式求出。(b) 薄片电阻率测量：薄片样品因为其厚度与探针间距相近，不符合半远穷大边界条件,测量时要附加样品的厚度，形状和测量位置的修正系数。其电阻率值可由下面公式得出p =CV G IW ) D ( d ) =p 0G(W ) D(d)(3-3 )SSSS式中p 0为块状体电阻率测量值(W)为样品厚度修正系数，可由附录1A或附录1B查得W样品厚度(卩m) ;S探针间距(m

7、r)D: ( d )为样品形状与测量位置的修正函数可由附录 S2查得。当园形硅片的厚度满足W 丄d (d)S 2Ln2 S 80010 uA附录1A 样品厚度修正系数G）样品厚度较薄： =0.0011 见表5W:样品厚度（卩m） : S:探针间距（mm）W/SW01234567890.000.000.001.001.002.003.004.004.005.006.0060.0110.007.008.009.009.010.011.012.012.013.0140.0220.014.015.016.017.017.018.019.019.020.0210.0330.022.022.023.024

8、.025.025.026.027.027.0280.0440.029.030.030.031.032.032.033.034.035.0350.0550.036.037.038.038.039.040.040.041.042.0430.0660.043.044.045.045.046.047.048.048.049.0500.0770.051.051.052.053.053.054.055.056.056.0570.0880.058.058.059.060.061.061.062.063.063.0640.0990.065.066.066.067.068.069.069.070.071.071

9、0.10100.072.073.074.074.075.076.077.077.078.0790.11110.079.080.081.082.082.083.084.084.085.0860.12120.087.087.088.089.089.090.091.092.092.0930.13130.094.095.095.096.097.097.098.099.100.1000.14140.101.102.102.103.104.105.105.106.107.1070.15150.108.109.110.110.111.112.113.113.114.1150.16160.115.116.11

10、7.118.118.119.120.120.121.1220.17170.123.123.124.125.126.126.127.128.128.1290.18180.130.131.131.132.133.133.134.135.136.1360.19190.137.138.139.139.140.141.141.142.143.1440.20200.144.145.145.146.147.148.149.149.150.1510.21210.151.152.153.154.154.155.156.157.157.1580.22220.159.159.160.161.162.162.163.

11、164.164.1650.23230.166.167.167.168.169.170.170.171.172.172W/SW01234567890.24240.173.174.175.175.176.177.177.178.197.1800.25250.180.181.182.183.183.184.185.185.186.1870.26260.188.188.189.190.190.191.192.193.193.1940.27270.195.195.19.197.198.199.199.200.201.2010.282803202.203.203.204.205.205.206.207.2

12、08.2080.29290.209.210.211.211.212.213.214.214.215.2160.30300.216.217.218.219.219.220.221.221.222.2230.31310.224.224.225.226.227.227.228.229.229.2300.32320.231.232.232.233.234.234.235.236.237.2370.33330.238.239.239.240.241.242.242.243.244.2450.34340.245.246.247.247.248.249.250.250.251.2520.35350.252.

13、253.254.255.255.256.257.257.258.2590.36360.260.260.261.262.263.263.264.265.265.2660.37370.267.268.268.269.270.270.271.272.273.2730.38380.274.275.275.276.277.278.278.279.280.2810.39390.281.282.283.283.284.285.286.286.287.2890.40400.288.289.290.291.291.292.293.293.294.2950.41410.296.296.297.298.298.29

14、9.300.301.301.3020.42420.303.303.304.305.306.306.307.308.308.3090.43430.310.311.311.312.313.314.314.315.316.3160.44440.317.318.319.319.320.321.321.323.323.3240.45450.324.325.326.326.327.328.329.329.330.3310.46460.331.332.333.333.334.335.336.336.337.3380.47470.338.339.340.341.341.342.343.343.344.3450

15、.48480.346.346.347.348.348.349.350.351.351.3520.49490.353.353.354.355.355.356.357.358.358.3590.50500.360.360.361.362.363.363.364.365.3653.68W/SW01234567890.51510.367.368.368.369.370.370.371372372.3730.52520.374.375.375.376.377.377.378.379.379.3800.53530.381.382.382.383.384.384.385.386.386.3870.54540

16、.388.389.389.390.391.391.392.393.393.3940.55550.395.396.396.397.398.398.399.400.400.401056560.402.402.403.404.405.405.406.407.407.4080.57570.409.409.410.411.411.412.413.414.414.4150.58580.416.416.417.418.418.419.420.420.421.4220.59590.422.423.424.425.425.426.427.427.428.4290.60600.429.430.431.431.43

17、2.433.433.434.435.4350.61610.436.437.437.438.439.439.440.441.442.4420.62620.443.444.444.445.446.446.447448.448.4490.63630.450.450.451.452.452.453.454454.455.4560.64640.456.457.458.458.459.460.460461.462.4620.65650.463.464.464.465.466.466.467468.468.4690.66660.470.470.471.472.472.473.474.474.475.4760

18、.67670.476.477.477.478.479.479.480.481.481.4820.68680.483.483.484.485.485.486.487.488.488.4890.69690.489.490.491.491.492.492.493.494.494.4950.70700.496.496.497.498.498.499.500.500.501.5010.71710.502.503.503.504.505.505.506.507.507.5080.72720.508.509.510.510.511.512.512.513.514.5140.73730.515.516.516

19、.517.517.518.519.519.520.5200.74740.521.522.522.523.524524.525.525.526.5270.75750.527.528.529.529.530.530.531.532.532.5330.76760.533.534.535.535.536.537.537.538.538.5390.77770.540.540.541.541.542.543.543.544.544.545W/SW01234567890.78780.546.546.547.547.548.549.549.550.550.5510.79790.552.552.553.553.

20、554.555.555.556.556.5570.80800.558.558.559.559.560.561.561.562.562.5630.81810.564.564.565.565.565.567.567.568.568.5690.82820.569.570.571.571.572.573.573.573.574.5750.83830.575.576.576.577.577.579.579.579.580.5800.84840.581.581.582.583.583.584.584.585.585.5860.85850.587.587.588.588.589590.590.591.591

21、.5920.86860.592.593.593.594.594.596.596.596.597.5970.87870.598.598.599.599.600.601.601.602.602.6030.88880.603.604.604.605.605.607.607.607.608.6080.89890.609.609.610.610.611.612.612.613.613.6140.90900.614.615.615.616.616.617.617.618.618.6190.91910.619.620.621.621.622.623.623.623.624.6240.92920.625.62

22、5.626.626.627.628.628.628.629.6290.93930.630.630631.631.632.633.633.634.634.6350.94940.635.636.636.637.637.638.638.639.639.6400.95950.640.641.641.642.642.643.643.644.644.6450.96960.645.646.646.647.647.648.648.649.649.6500.97970.650.651.651.652.652.653.653.654.654.6550.98980.655.656.656.657.657.658.6

23、58.658.658.6590.99990.660.660.661.661.662.663.663.663.664.6641.00 1000 .665附录1B样品厚度修正系数样品厚度较厚： =0.013.49见表W:样品厚度（口 m）: S:探针间距（mm）W/S0.000.010.020.030.040.050.060.070.080.090.000.00000.00720.01440.02160.02890.03610.04330.05050.05770.06490.100.07210.07940.08660.09380.10100.10820.11540.12260.12980.1371

24、0.200.14430.15150.15870.16590.17310.18030.18750.19480.20200.20920.300.21640.22360.23080.23800.24520.25240.25960.26680.27400.28120.400.28840.29560.30270.30990.31710.32420.33130.33850.34560.35260.500.35970.36680.37380.38080.38780.39480.40180.40870.41560.42240.600.42930.43610.44290.44960.45630.46300.46

25、960.47620.48270.48920.700.49570.50210.50850.51480.52100.52730.53340.53960.54560.55160.800.55760.56350.56940.57510.58090.58660.59220.59780.60330.60870.900.61410.61940.62470.62990.63510.64020.64520.65010.65510.65991.000.66470.66940.67410.67870.68330.68770.69220.69650.70090.70511.100.70930.71340.71750.

26、72150.72550.72940.73330.73710.74080.74451.200.74820.75180.75530.75890.76220.76660.76890.71220.77540.77861.300.78170.78480.78790.79080.79380.79670.79960.80240.80520.80791.400.81060.81320.81580.81840.82090.82340.82580.82820.83060.83291.500.83520.83750.83970.84190.84410.84620.84830.85030.85240.85441.60

27、0.85630.83820.86010.86200.86390.86570.86750.86920.87090.87261.700.87430.87600.87760.87920.88080.88230.88380.88530.88680.88831.800.88970.89110.89250.89390.89520.89650.89780.89910.90040.90161.900.90290.90410.90530.90640.90760.90870.90990.91100.91210.9131W/S0.000.010.020.030.040.050.060.070.080.092.000

28、.91420.91520.91620.91720.91820.91920.92020.92110.92210.92302.100.92390.92480.92570.92660.92740.92830.92910.92990.93070.93152.200.93230.93310.93380.93460.93530.93610.93680.93750.93820.93892.300.93960.94020.94090.94150.94220.94280.94350.94410.94470.94532.400.94590.94020.94700.94760.94820.94870.94930.9

29、4980.95030.95092.500.95140.95190.95240.95290.95340.95380.95430.95480.95530.95572.600.95620.95660.95710.95750.95790.95830.95880.95920.95960.96002.700.96040.96080.96120.96160.96190.96230.96270.96300.96340.96372.800.96410.96440.96480.96520.96550.96580.96610.96640.96670.96712.900.96740.96770.96800.96830

30、.96860.96890.96920.96940.96970.97003.000.97030.97050.97080.97110.97130.97160.97180.97210.97240.97263.100.97280.97310.97330.97360.97380.97400.97420.97450.97470.97493.200.97510.97530.97560.97580.97600.97620.97640.97660.97680.97703.300.97720.97740.97760.97780.97790.97810.97830.97850.97870.97883.400.979

31、00.97920.97940.97950.97970.97990.98000.98020.98030.9805如需所测值更精确，请查下表附录2样品形状和测量位置的修正系数 D (d )(1)圆形薄片直径d(mm)探针位置0mm1/4 d5 mm4 mm3 mm2 mm200.97880.96330.96330.95080.92630.8702230.98390.97190.96620.95380.92950.8739250.98630.97610.96770.95530.93120.8758270.98820.97940.96880.95650.93250.8773300.99040.9832

32、0.97020.95800.93420.8793320.99160.98520.97090.95880.93510.8804350.99290.98760.97180.95980.93620.8817380.99400.98940.97250.96060.93710.8829400.99460.99040.97290.96100.93770.8835420.99510.99130.97330.96140.93820.8841450.99570.99240.97380.96200.94880.8849500.99650.99380.97440.96270.94970.8859550.99710.

33、99190.97490.96330.94030.8868570.99730.99520.97510.96350.94060.8871600.99760.99570.97520.96380.94090.8875630.99780.99610.97550.96400.94120.8879650.99790.99630.97570.96410.94140.8881700.99820.99680.97600.96450.94180.8886750.99850.99720.97620.96480.94210.8891800.99860.99760.97640.96500.94240.8895900.99

34、890.99810.97680.96540.94290.8901距圆心位置距边缘位置(2)矩形薄片正方形矩形d/sa/d=1a/d=2a/d=3a/d 41.00.22040.22051.250.27510.27021.50.32630.32860.32861.750.37940.38030.38032.00.43010.42970.42972.50.51920.51940.51943.00.54220.59570.59580.59584.00.68700.71150.71150.71155.00.77440.78870.78880.78887.50.88460.89050.89050.890510.00.93120.93450.93450.934515.