集成光电子器件及设计 - 现状背景、基础理论、器件原理

浙江大学光电信息系集成光电子器件及设计浙江大学光电信息系2提纲1.

课程组介绍；2.

课程简介；3.

集成光电子学导论；浙江大学光电信息系31.

课程组介绍浙江大学光电信息系9Silicon

nanophotonic

integrated

devicesSpiral

lineArrayed

waveguide

grating

Human’s

hair

42μm

79.9μm

Our

AWGOptical

switcher,

VOARing‐based

modulator

Y‐branchSOI

nanowire

MZI‐coupled

microring

R~2

μm

2

μmSiN

waveguide

加热电极TMTESiO2SiTE/TMw1hcowgw2SiO2SiSiTM/TE

TM

TED.

Dai,

and

et

al,

Opt.

Express,

19:

18614

(2011).

Fei

Lou,

et

al.

Opt.

Lett.

37,

3372‐3374

(2012)

10基于非对称耦合系统的PBS

D.

Dai

et

al.

Laser

&

Photonics

Reviews

(2012)

Total

length:

<

10μmTESiO2SiTE/TMD.

Dai,

et

al.

Optics

Letters,

36(13),

2590‐2592

(2011).

Total

length:

~8μm

TMTotal

length:

~5μmTotal

length:

~20μm

光通信领域顶级会议OFC2013

Wang,

et

al.

OFC/NFOEC

2013.浙江大学光电信息系浙江大学光电信息系12办公室地址：紫金港东五楼

光及电磁波研究中心215Our

center紫金港东五楼

光及电磁波研究中心浙江大学光电信息系13

13

集成光电子实验室>2000m2实验大楼（含500m2超净室）；>4000万元实验仪器设备；浙江大学光电信息系142.

课程简介浙江大学光电信息系152.1

课程概况

2学分(1.5‐1):

24学时理论

+

16学时实验；

助教：于龙海

博士生；

夏学期共8周的课程安排；浙江大学光电信息系16教学目的与基本要求

对“集成光电子器件”的现状背景、基础理论、器件原理以及制

作工艺等有比较全面的了解；

对导波光学理论有较深的理解；

掌握代表性集成光电子器件工作原理、基本结构、设计思路及

应用；

结合国际上这一领域的最新进展，激发学生对该领域相关方向

的兴趣，培养学生分析问题的能力和思维方式。浙江大学光电信息系17主要内容及学时分配

概述

(1学时)

平面介质光波导和耦合模理论(2+4学时)

晶体在外场作用下的光学性质(2学时)

无源光子集成器件(6学时)

耦合器/功分器、MZI、AWG等(2学时)

电光器件、声光器件、热光开关/调制器、光隔离器/环形器(4学时)

有源集成光电子器件与系统集成

(3学时)

集成光电子器件的材料

(2学时)

集成光电子器件的制作工艺及测试

(3学时)

集成光电子器件的最新进展

(1学时)18

课程实验初步安排实验一：马赫曾德光调制器的BPM仿真5月21日下午1:30‐3:30，5月22日下午

1:30‐3:30，3:30‐5:30实验二：微环谐振腔的FDTD仿真5月28日下午1:30‐3:30，5月29日下午

1:30‐3:30，3:30‐5:30

实验三：Y分支功分器测试实验

5人/组

6月4日

下午1:30‐5:30

6月5日

上午8:30‐12:30

6月5日

下午1:30‐5:30

6月6日

上午8:30‐12:30

6月6日

下午1:30‐5:30

实验四：光波导器件制作流程（Video)

浙江大学光电信息系浙江大学光电信息系191.2.3.大型课程设计作业

一种高速光调制器的研究，要求：

通过文献阅读和调研，提出一种实现高速光调制机理与结构；

完成该器件的优化设计与分析；

提交论文报告。参考文献：

《微纳光子集成》

何赛灵，戴道锌.

科学出版社

《光波导模式理论》

马春生，刘式墉

吉林大学出版社

3人/组，自由组合，组内分工，提交答辩报告浙江大学光电信息系20教材与参考文献

教材

《集成光学》唐天同、王兆宏著，科学出版社，2005年8月(第一版)

参考书

《半导体导波光学器件理论及技术》，赵策洲，国防工业出版社。

Robert

G.

Hunsperger.

Integrated

Optics:

Theory

and

Technology

(Sixth

Edition),

ISBN

978‐0‐387‐89775‐2

(Online),

Springer

Link

2009.

《光集成器件》，小林功郎著，科学出版社，2002

《集成光学》，T.

塔米尔主编，科学出版社，1982浙江大学光电信息系21要求：上课、作业、实验报告、考试

上课：按时到教室，认真听讲，欢迎提问与质疑，及时复习。

作业：课堂布置，必须独立完成，及时上交，每次作业均有分数，

计入含有一定比例的平时成绩。

实验报告：包括相关课题的背景描述，实验原理，实验过程设计，

实验结果，结论与结果讨论等，是一份自己亲身参与的研究报告。

成绩按一定比例计入总成绩。

考试：闭卷，多种题型，避免死记硬背，要求掌握基本物理，能够

对知识融会贯通、灵活运用。浙江大学光电信息系223.

集成光电子学导论浙江大学光电信息系23Motivation

for

integrated

photonics

Transmission

and

processing

of

signals

Laser

invented

in

1960s

stable

source

of

coherent

light；Free

space

light

transmission?

but

atmospheric

variations.

Signal

processing

various

components:

prisms,

lenses,

mirrors,

electro‐optic

modulators

and

detectors.1.

All

of

this

equipment

would

typically

occupy

a

laboratory

bench

tens

of

feet

on

a

side,

which

must

be

suspended

on

a

vibration‐proof

mount.2.

Such

a

system

is

tolerable

for

laboratory

experiments,

but

is

not

very

useful

in

practical

applications浙江大学光电信息系24Integrated

optics

/

photonics

Optical

integrated

circuits

(OIC’s)

or

Photonic

integrated

circuits

(PIC’s)

S.E.

Miller

in

1969

(/wiki/Stewart_E._Miller)The

integrated

optics

approach

to

signal

transmission

and

processing

offers

significant

advantages

in

both

performance

and

cost

when

compared

to

conventional

electrical

methods.

物美价廉浙江大学光电信息系25

Stewart

E.

MillerStewart

E.

Miller

(

09/01/1918

‐02/27/1990)

was

a

noted

American

pioneer

in

microwave

and

optical

communications.Miller

was

born

in

Milwaukee,

Wisconsin.

In

1941

he

receive

his

S.B.

and

S.M.

degrees

in

engineering

at

MIT.

He

joined

Bell

Labs

to

work

on

microwave

radar,

and

became

technical

lead

for

the

B‐29's

X‐band

(3

cm)

radar

microwave

plumbing.

After

World

War

II,

he

was

instrumental

in

AT&T's

L‐3

coaxial

cable

carrier

systems,

then

transferred

to

the

Radio

Research

Department

where

he

made

advances

in

many

millimeter‐wave

components.In

the

early

1960s,

Miller

was

the

first

to

recognize

the

potential

of

optical

communications

and

as

director

of

Guided

Wave

Research,

initiated

a

program

to

investigate

a

variety

of

periodic

lens

systems.

As

optical

fiber

was

developed

in

the

late

1960s,

he

demonstrated

its

utility,

and

also

proposed

the

combining

multiple

optical

components

on

one

semiconductor

chip.

He

became

director

of

Lightwave

Research

in

1980,

retired

in

1983,

and

then

consulted

at

Bellcore

(now

Telcordia

Technologies)

analyzing

semiconductor

lasers.Miller

held

some

80

patents

and

was

a

member

of

the

National

Academy

of

Engineering,

a

Life

Fellow

of

the

IEEE,

and

a

Fellow

of

the

American

Association

for

the

Advancement

of

Science

and

the

Optical

Society

of

America.

He

received

the

Naval

Ordnance

Development

Award

in

1945,

the

1972

IEEE

Morris

N.

LiebmannMemorial

Award,

the

1975

IEEE

W.R.G.

Baker

Prize

(with

TingyeLi

and

E.A.J.

Marcatili),

the

Franklin

Institute's

1977

Stuart

Ballantine

Medal,

and

the

1989

John

Tyndall

Award

of

the

IEEE

Lasers

and

Electro‐Optics

Societyfor

distinguished

contributions

to

fiber

optics

technology.浙江大学光电信息系26Advantages

of

Integrated

OpticsMany

channels

multiplexed

Huge

capacity27Advantages

of

Photonics

(VS

electronics)

Immunity

from

electromagnetic

interference

(EMI)

Freedom

from

electrical

short

circuits

or

ground

loops

Safety

in

combustible

environment

Security

from

monitoring

Low‐loss

transmission

Large

bandwidth

(i.e.,

multiplexing

capability)

Small

size,

light

weight

Inexpensive,

composed

of

plentiful

materials

Major

disadvantage:

Difficult

to

use

for

electrical

power

transmission浙江大学光电信息系浙江大学光电信息系28PICs

capability

of

transmitting

fiberPICs

the

ability

to

generate

and

process

them

Advantages

Increased

bandwidthExpanded

frequency

(wavelength)

division

multiplexingLow-loss

couplers,

including

bus

access

typesExpanded

multi-path

switchingSmaller

size,

weight,

lower

power

consumption

Batch

fabrication

economy

Improved

reliability

Improved

optical

alignment,

immunity

to

vibrationMajor

disadvantage

High

cost

of

developing

new

fabrication

technologyIntegrationPhotonics浙江大学光电信息系29In

1970s,

what

happened?to

bring

integrated

optics

out

of

the

laboratory

and

into

the

realm

of

practicalapplication

Three

main

factors:

A.

Low

loss

optical

fibers

and

connectors

(Demands),

B.

Reliable

CW

GaAlAs

and

GaInAsP

laser

diodes

(Sources),

C.

Photolithographic

microfabrication

techniques

capable

of

submicron

linewidths

(Feasibility)浙江大学光电信息系A.

Low‐loss

optical

fibers高锟，生于中国上海，光纤通讯、电机工程专家，华文媒体誉之为“光纤之父”、普世誉之为“光纤通讯之父”（Father

of

Fiber

Optic

Communications），曾任香港中文大学校长。2009年，与威拉德∙博伊尔和乔治∙埃尔伍德∙史密斯共享诺贝尔物理学奖。

30Kao,

C.K.,

"1012

bit/s

Optoelectronics

Technology",

IEE

Proceedings,

133(3):

230‐236,

June

1986.

浙江大学光电信息系

31K.C.

Kao’s

workKao,

K.C.

and

Hockham,

G.A.,

“Dielectric‐fibre

Surface

Waveguides

for

Optical

Frequencies”,

Proc.

IEE.

113(7):

1151‐1158,

July

1966.

Kao,

K.C.

and

Davies,

T.W.,

"Spectrophotometric

Studies

of

Ultra

Low

Loss

Optical

Glasses

‐

I:

Single

Beam

Method",

Journal

of

Scientific

Instruments

(Journal

of

Physics

E),

Series

2,

1:

1063‐1068,

1968.

举世公认高锟是提出用纤维材料传达光束讯号以建置通信的第一人。当时，大家已知道可用数字或模拟的方式传送讯息，已有人研究：透过气体或玻璃传送光，期望可达到高速传输，但无法克服严重衰减的问题。1965年，高锟对各种非导体纤维进行仔细的实验。按他分析，当光学讯号衰减率能低于20dB/km时，光纤通信便可行。他更进一步分析了吸收、散射、弯曲等因素，推论被包覆的石英基玻璃有可能满足衰减需求。这项关键研究结果，推动全球光纤通讯的研发工作。1966年，高锟发表了一篇题为《光频率介质纤维表面波导》的论文，开创性地提出光导纤维在通信上应用的基本原理，描述了长程及高信息量光通信所需绝缘性纤维的结构和材料特性。简单地说，只要解决好玻璃纯度和成分等问题，就能够利用玻璃制作光学纤维，从而高效传输信息。这一设想提出之后，有人称之为匪夷所思，也有人对此大加褒扬。但在争论中，高锟的设想逐步变成现实：利用石英玻璃制成的光纤应用越来越广泛，全世界掀起了一场光纤通信的革命。浙江大学光电信息系32衡特性等多个领域都作了成果都是使信号在无放大接纤，至1976年则达K.C.

Kao’s

work

高锟还开发了实现光纤通

讯所需的辅助性子系统：

据Kao’s理论，Corning

公司R.

D.

Maurer等人1970年首次

在单模纤维的构造、纤维

的强度和耐久性、纤维连

光器和耦合器以及扩散均

到1

dB/km的水平，为日后光纤通讯

技术的飞速发展奠定了理论基础。

大量的研究，而这些研究

80年代，光纤通信技术在发达国家得到了广泛推广应用。

的条件下，以高速长距离

通信的关键。33Low

loss

optical

fiber

connectors

PC

FC:

Ferrule

contactor

(钢制金属套筒)

；

PC:

Physical

contact,

RL~‐30dB;

SPC:

Super

PC,

RL~‐40dB;

UPC:

Ultra

PC,

RL~‐50dB;

APC:

Angled

PC,

RL~‐60dB;

PC:

蓝色；APC：绿色；/fiber‐optic‐tutorial‐termination.aspx

浙江大学光电信息系浙江大学光电信息系34the

most

common

fiber

optic

connectors

ST

(an

AT&T

Trademark)

is

the

most

popular

connector

for

multimode

networksFC/PC

has

been

one

of

the

most

popular

singlemode

connectors

for

many

years

SC

is

a

snap‐in

connector

that

is

widely

used

in

singlemodesystems

for

it's

excellent

performance

LC

is

a

new

connector

that

uses

a

1.25

mm

ferrule,

half

the

size

of

the

STMT‐RJ

is

a

duplex

connector

with

both

fibers

in

a

single

polymer

ferrule

Opti‐Jack

is

a

neat,

rugged

duplex

connector

Volition

is

a

slick,

inexpensive

duplex

connector

that

uses

no

ferrule

at

all

E2000/LX‐5

is

like

a

LC

but

with

a

shutter

over

the

end

of

the

fiber

MU

looks

a

miniature

SC

with

a

1.25

mm

ferrule.

It's

more

popular

in

Japan.MT

is

a

12

fiber

connector

for

ribbon

cable.

It's

main

use

is

for

preterminated

cable

assemblies.

浙江大学光电信息系35

B.

Reliable

CW

GaAlAs

and

GaInAsP

laser

diodes

Basov

and

Javan

proposed

the

semiconductor

laser

diode

concept.

In

1962,

Robert

N.

Hall

demonstrated

the

first

laser

diode

device,

made

of

gallium

arsenide

and

emitted

at

850

nm

the

near‐infrared

band

of

the

spectrum.

Later,

in

1962,

Nick

Holonyak,

Jr.

demonstrated

the

first

semiconductor

laser

with

a

visible

emission.

This

first

semiconductor

laser

could

only

be

used

in

pulsed‐beam

operation,

and

when

cooled

to

liquid

nitrogen

temperatures

(77

K).

In

1970,

Zhores

Alferov,

in

the

USSR

(Union

of

Soviet

Socialist

Republics

),

and

Izuo

Hayashi

and

Morton

Panish

of

Bell

Telephone

Laboratories

also

independently

developed

room‐temperature,

continual‐operation

diode

lasers,

using

the

heterojunction

structure./wiki/LaserBasov

and

Javan

proposed

the

semiconductor

laser

diode

concept.Nikolay

Gennadiyevich

Basov

(Russian;

12/14/1922‐07/01/2001)

was

a

Sovietphysicist

and

educator.

For

his

fundamental

work

in

the

field

of

quantum

electronics

that

led

to

the

development

of

laser

and

maser,

Basov

shared

the

1964

Nobel

Prize

in

Physics

with

Alexander

Prokhorov

and

Charles

Hard

Townes.

浙江大学光电信息系Ali

Mortimer

Javan

(born

12/26/1926)

is

an

Iranian

American

physicist

and

inventorat

MIT.

His

main

contributions

to

science

have

been

in

the

fields

of

quantum

physicsand

spectroscopy.

He

co‐invented

the

gas

laser

in

1960,

with

William

R.

Bennett.

Ali

Javan

has

been

ranked

Number

12

on

the

list

of

the

Top

100

living

geniuses.

36浙江大学光电信息系37First

helium‐neon

laser,

1960.First

helium‐neon

laser.

Left

to

right:

US

physicist

Donald

R.

Herriott

(1928‐2007),

Iranian‐US

physicist

Ali

Mortimer

Javan

(born

1926)

and

US

physicist

William

R.

Bennett

(1930‐2008),

with

the

first

helium‐neon

laser.

/media/147086/enlarge浙江大学光电信息系38Heterojunction

structureHerbert

Kroemer

(born

08/25/1928),

a

professor

at

UC,

Santa

Barbara,

received

his

Ph.D.

in

theoretical

physics

in

1952

from

the

University

of

Göttingen,

Germany,

with

a

dissertation

on

hot

electron

effects

in

the

then‐new

transistor,

setting

the

stage

for

a

career

in

research

on

the

physics

of

semiconductor

devices.

In

2000,

the

Nobel

Prize

in

physics

was

awarded

jointly

to

Herbert

Kroemer

(UC

Santa

Barbara,

USA)

and

Zhores

I.

Alferov

(Ioffe

Institute,

Saint

Petersburg,

Russia)

for

"developing

semiconductor

heterostructures

used

in

high‐speed‐

and

opto‐electronics"

Zhores

Ivanovich

Alferov

(Russian,

Belarusian;

born

03/15/1930)

is

a

Sovietand

Russian

physicist

and

academic

who

contributed

significantly

to

the

creation

of

modern

heterostructure

physics

and

electronics.

浙江大学光电信息系39C.

Microfabrication

techniques

depositing

a

film,

patterning

the

film

with

the

desired

micro

features,

and

removing

(or

etching)

portions

of

the

film.For

memory

chip

fabrication:

~30

lithography

steps,

~10

oxidation

steps,

~20

etching

steps,

~10

doping

steps,

and

many

others.浙江大学光电信息系40Comparison

of

sizes

of

semiconductor

manufacturing

process

nodeswith

some

microscopic

objects

and

visible

light

wavelengths

Can

size

reduction

go

further?

Moore’s

law

might

expire.

Photonics

will

replace

electronics?

Optical

interconnects浙江大学光电信息系41

In

1980sOptical

fibers

largely

replaced

metallic

wires

in

telecommunications,A

number

of

manufacturers

began

production

of

PICs

for

use

in

a

variety

of

applications浙江大学光电信息系42

In

1990sThe

incorporation

of

optical

fibers

into

telecommunications

and

data‐transmission

networks

has

been

extended

to

the

subscriber

loop

in

many

systems.

This

provides

an

enormous

bandwidth

for

multichannel

transmission

of

voice,

video

and

data

signals.

Access

to

worldwide

communications

and

data

banks

has

been

provided

by

computer

networks

such

as

the

Internet.

We

are

in

the

process

of

developing

what

some

have

called

the

“Information

superhighway.”

The

implementation

of

this

technology

has

provided

continuing

impetus

to

the

development

of

new

integrated

optic

devices

and

systems

into

the

beginning

years

of

the

21st

century.Another

technological

advance

that

has

encouraged

the

development

of

new

integrated

optic

devices

in

recent

years

is

the

availability

of

improved

fabrication

methods.

Microtechnology,

which

involves

dimensions

on

the

order

of

micrometers,

has

evolved

into

nanotechnology,

in

which

nanometer‐sized

features

are

routinely

produced.

This

new

area

of

nanophotonics,

which

includes

the

fabrication

of

photonic

crystals.浙江大学光电信息系43Material

for

PIC’s

Electronics

IC:

silicon,

…

For

PIC’s:

No

one

substrate

material

will

be

optimum

for

all

elements.

浙江大学光电信息系44Hybrid

Versus

Monolithic

Approach

Hybrid

‐

two

or

more

substrate

materials

are

somehow

bonded

together

to

optimize

performance

for

different

devices；

Advantage:

using

existing

technology,

piecing

together

devices

which

have

been

substantially

optimized

in

a

given

material

Disadvantage:

misalignment,

or

even

failure,

because

of

vibration

and

thermal

expansion.

Monolithic

‐

a

single

substrate

material

is

used

for

all

devices；

Advantage:

cheaper,

reliable.

浙江大学光电信息系45

III–V

and

II–VI

Ternary

SystemsFor

a

system:

light

emitter

+

waveguide

+

detector

The

energy

bandgap

of

the

material

can

be

changed

over

a

wide

range

by

altering

the

relative

concentrations

of

elements.

gallium

aluminum

arsenide,

Ga(1−x)AlxAs.