利用晶体生长软件FEMAG对蓝宝石晶体生长的仿真计算方法

CONFIDENTIAL

GeneralintroductionSapphireGrowthContent现在是1页\一共有33页\编辑于星期六CONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.FrançoisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.现在是2页\一共有33页\编辑于星期六CONFIDENTIALCzochralskiprocess现在是3页\一共有33页\编辑于星期六CONFIDENTIALDirectionalSolidificationSystem现在是4页\一共有33页\编辑于星期六CONFIDENTIALFloatingZoneProcess现在是5页\一共有33页\编辑于星期六CONFIDENTIALSapphireGrowthbyCZandkyropoulos现在是6页\一共有33页\编辑于星期六CONFIDENTIALSapphiregrowthbyHEM现在是7页\一共有33页\编辑于星期六CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent现在是8页\一共有33页\编辑于星期六CONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepoint现在是9页\一共有33页\编辑于星期六CONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…现在是10页\一共有33页\编辑于星期六CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditions现在是11页\一共有33页\编辑于星期六CONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

现在是12页\一共有33页\编辑于星期六CONFIDENTIALSapphireCrystalGrowthSimulation

现在是13页\一共有33页\编辑于星期六CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.现在是14页\一共有33页\编辑于星期六CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.现在是15页\一共有33页\编辑于星期六CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEM现在是16页\一共有33页\编辑于星期六CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal现在是17页\一共有33页\编辑于星期六CONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

system现在是18页\一共有33页\编辑于星期六CONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystem现在是19页\一共有33页\编辑于星期六CONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulation现在是20页\一共有33页\编辑于星期六FEMAGSoft©2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocess现在是21页\一共有33页\编辑于星期六FEMAGSoft©2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterface现在是22页\一共有33页\编辑于星期六FEMAGSoft©2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterface现在是23页\一共有33页\编辑于星期六FEMAGSoft©2012VelocityfieldResultusingcoarsemeshResultusingBLMmesh现在是24页\一共有33页\编辑于星期六CONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal现在是25页\一共有33页\编辑于星期六CONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometry现在是26页\一共有33页\编辑于星期六CONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnace现在是27页\一共有33页\编辑于星期六CONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvection现在是28页\一共有33页\编辑于星期六CONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimes现在是29页\一共有33页\编辑于星期六CONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa)FEMAG-HEMExample现在是30页\一共有33页\编辑于星期六CONFIDENTIALAnisotropicThermalStress(HEMSapphireC-axis)FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa)FEMAG-HEMExample现在是31页\一共有33页\编辑于星期六CONFIDEN