硅片翘曲度测量实验报告

µm硅片编号测试次数统计项目BOW-BFWARP-BFBOW-3PWARP-3P110平均值-0.2284.942-1.1288.168标准偏差0.0560.1040.1480.182210平均值-0.0875.144-0.5957.063标准偏差0.0750.1760.2200.136310平均值-2.3869.098-2.8328.763标准偏差0.0710.3420.2150.061410平均值-1.1656.258-2.4717.954标准偏差0.0960.5760.2121.024510平均值-1.52710.104-1.02113.230标准偏差0.0720.2480.1970.230610平均值-1.6798.453-1.9207.483标准偏差0.0840.2490.2060.154710平均值-1.8268.405-4.6808.215标准偏差0.0770.2030.2120.119810平均值2.8998.5576.1359.834标准偏差0.0870.2340.2250.255910平均值-2.8719.790-5.80311.203标准偏差0.0500.1060.1010.1311010平均值-1.9788.076-3.5309.241标准偏差0.0730.0790.1200.0774#设备：4*4探头，机械手自动检测设备单位:µm硅片编号测试次数统计项目BOW-BFWARP-BFBOW-3PWARP-3P110平均值-0.2836.469-1.5557.725标准偏差0.1320.1700.2980.502210平均值-0.0945.721-0.8596.579标准偏差0.1460.1040.3060.410310平均值-2.6807.704-3.6968.080标准偏差0.1350.2370.3330.246410平均值-1.5459.989-3.47912.359标准偏差0.1510.2340.3440.373510平均值-1.8327.301-1.86912.291标准偏差0.1380.0810.3180.215610平均值-1.8587.304-2.4687.380标准偏差0.1370.3080.3160.223710平均值-2.0258.503-5.2837.334标准偏差0.1240.2400.2920.161810平均值2.9289.6585.97810.750标准偏差0.1630.3710.3450.301910平均值-3.1679.289-6.66111.687标准偏差0.1330.1470.3060.3221010平均值-2.2776.541-4.4427.923标准偏差0.1460.2170.3310.1045#设备：2*2mm探头；皮带传输自动检测设备单位：µm硅片编号测试次数统计项目BOW-BFWARP-BFBOW-3PWARP-3P110平均值-0.5014.596-1.8276.279标准偏差0.0930.1450.1480.153210平均值-0.4293.572-1.4095.444标准偏差0.0490.1420.0730.113310平均值-1.3866.112-1.5455.755标准偏差0.0410.0970.0820.089410平均值-0.0315.974-0.9378.390标准偏差0.0350.1360.0540.155510平均值-0.5407.8880.27110.622标准偏差0.0490.1490.1000.124610平均值-1.5596.316-1.9855.946标准偏差0.0540.0750.1100.142710平均值-1.7347.575-4.7637.602标准偏差0.0650.0660.1120.099810平均值2.6737.0695.5708.660标准偏差0.0630.1170.1450.154910平均值-1.7977.075-4.3778.996标准偏差0.0680.0860.1350.1501010平均值-0.9665.822-2.1756.656标准偏差0.0540.0930.1180.1566#设备：2*2mm探头；皮带传输自动检测设备单位：µm硅片编号测试次数统计项目BOW-BFWARP-BFBOW-3PWARP-3P110平均值0.2053.912-0.8518.877标准偏差0.1370.0900.2430.214210平均值0.3923.227-0.3517.968标准偏差0.1220.1370.1880.135310平均值-2.5497.025-3.35610.615标准偏差0.1710.2310.3000.283410平均值-1.3466.451-3.2469.709标准偏差0.2090.1940.3250.307510平均值-1.5846.484-1.35111.314标准偏差0.2150.2490.3320.313610平均值-1.3175.323-1.65910.498标准偏差0.1700.1980.2530.216710平均值-1.4737.123-4.71811.741标准偏差0.1670.2420.2920.262810平均值3.47910.1956.76513.098标准偏差0.1550.2580.2620.324910平均值-2.8357.985-6.33712.556标准偏差0.2220.2680.3730.3641010平均值-1.9256.788-4.02810.841标准偏差0.1720.1130.3100.1877#设备：2*2mm探头；皮带传输自动检测设备单位：µm硅片编号测试次数统计项目BOW-BFWARP-BFBOW-3PWARP-3P110平均值-0.3724.670-1.9966.449标准偏差0.0720.8600.1400.393210平均值-0.3924.137-1.6415.790标准偏差0.1000.4340.1470.535310平均值-1.3626.747-1.4956.996标准偏差0.0470.6670.0981.394410平均值0.0405.087-1.1176.720标准偏差0.0560.2820.0870.493510平均值-0.4718.4880.2689.818标准偏差0.0950.6100.1770.717610平均值-1.6156.185-2.1905.447标准偏差0.0430.0930.0590.113710平均值-1.6538.110-5.1327.463标准偏差0.0850.0920.1550.167810平均值3.0178.4965.97710.799标准偏差0.1490.2640.2390.467910平均值-1.7668.671-4.8588.963标准偏差0.0560.1910.0860.2601010平均值-0.7578.585-2.1769.413标准偏差0.0690.0820.0890.1998#设备：4*4mm探头；机械手自动检测设备单位：µm硅片编号测试次数统计项目BOW-BFWARP-BFBOW-3PWARP-3P110平均值0.1084.341-1.0136.209标准偏差0.0680.0930.1150.118210平均值0.7033.5690.2695.221标准偏差0.0540.0890.0860.122310平均值-0.5626.684-0.2696.924标准偏差0.0290.1070.0550.115410平均值0.9225.3480.5138.244标准偏差0.0690.0780.1020.091510平均值0.3498.2471.60911.197标准偏差0.0410.0720.0740.066610平均值-0.5315.449-0.4655.027标准偏差0.0700.0920.1470.099710平均值-0.6706.554-3.1796.735标准偏差0.0960.0790.1870.075810平均值3.8299.1677.28510.326标准偏差0.0680.1080.1530.135910平均值-0.9587.725-3.1089.372标准偏差0.0310.0770.0490.0581010平均值-1.0716.747-2.1527.999标准偏差0.0290.0700.0580.088（2）单个实验室的重复性、再现性评价数据BOWWARP结论：单个实验室的测试中a.同一硅片在同一基准平面下，在同一台设备中测量翘曲度在3μm至14μm范围10个硅片，标准偏差<1.4μm；b.使用不同尺寸、扫描间距不同的探头，对同一硅片在同一基准面下测量的翘曲度最大差值<6μm。c.同一硅片在同一基准平面下，在同一台设备中测量弯曲度在-7μm至7μm范围的10个硅片，标准偏差<1.2μm；d.使用不同尺寸、扫描间距不同的探头，对同一硅片在同一基准面下测量弯曲度的最大差值<6μm。e.单个实验的MSA监控显示选取10个硅片进行重复性再现性评价，翘曲度测试的重复性、再现性R&R为0.84%,评价结果合格。（3）多个试验室巡回测试结果14片硅片，在四个企业进行翘曲度的巡回测试：翘曲度数据单位：µm片号1234567891011121314A39.3339.6429.8340.5847.6516.2717.8917.105.737.118.7120.5221.7120.85B39.0638.8629.3744.2147.3015.5716.5015.195.058.2910.2318.8219.5718.77C40.4240.1830.9541.7645.6616.3517.8316.975.3711.008.4421.3922.4221.25D39.0338.6329.6541.3243.8414.7316.0815.274.939.557.4119.2920.2619.23平均值39.4639.3229.9541.9746.1115.7317.0716.135.278.998.7020.0120.9920.02标准偏差0.650.710.691.571.750.750.921.040.361.671.171.171.311.21最大差值1.391.321.573.631.980.781.391.910.693.891.792.582.852.4814片硅片，在三个企业进行弯曲度的巡回测试弯曲度数据单位：µm片号1234567891011121314A7.146.777.213.594.809.8610.769.681.203.222.699.3013.038.79B6.706.597.083.424.749.7610.529.511.183.072.569.3113.088.62C7.056.867.113.674.879.6710.489.751.093.252.719.3113.128.93平均值6.966.747.133.564.809.7610.599.641.153.182.659.3113.088.78标准偏差0.230.130.070.130.070.090.150.120.060.100.080.000.050.16最大差值0.4410.2640.1360.2540.1330.1850.2820.2360.11